Micro organic opto-electronic device configured for high current density

Abstract

The invention relates to a Micro Organic Opto-Electronic device emitting a light impulse having a time response below 10 ns, in response to an electrical impulse having a pulse duration time below 100 ns,

Description

CROSS REFERENCE TO RELATED APPLICATIONS

The present application claims priority from European Patent Application 17306292.8 filed on Sep. 28, 2017, the disclosure of which is hereby incorporated herein by reference.

FIELD OF THE INVENTION

The invention is in the field of micro-electronic and opto-electronic.

The invention presents a fast micro Organic electronic/opto-electronic device configured for high density current.

In particular, these devices can have a time response below 10 ns, in response to an electrical pulse having a duration time below 100 ns, advantageously below 10 ns.

In one embodiment shown on the drawings, the invention relates precisely to a micro Organic Opto-electronic device emitting a light impulse in response to an electrical impulse.

STATE OF THE ART

Conventional (or inorganic) electronics use semiconductor crystals that require complex and expensive manufacturing processes, colossal infrastructure (clean room) with dangerous and even lethal chemicals (As) and very high temperatures, with a relatively long manufacturing time (a few months).

In contrast to the inorganic semiconductor technology, organic electronics, the newest branch (Nobel Prize in Chemistry 2000, Alan J. Heeger, Alan MacDiarmid, Hideki Shirakawa), mainly uses plastics (polymeric or small organic compounds molecules). With relatively simple, fast (more environmentally friendly), economical production processes and almost unlimited availability of raw material, organic semiconductors are emerging as the key materials in low cost electronic. They find their applications in components such as organic light-emitting diodes (OLEDs), organic photovoltaic (PV) cells, organic transistors (OFETs), memories or sensors.

This electronics industry has developed unprecedented in recent years with the mature and commercialization of the first components. They are found as display devices on televisions and mobile phones or as lighting and signaling device.

Although the main applications of organic opto-electronics are now limited to lighting, display and photovoltaic cells, they could apply to the field of optical transmissions with Li-Fi, backplanes or optical telecommunications, if sufficiently fast components (fast organic opto-electronics) can be developed and can operate efficiently in an impulse operating regime.

The general context of the discussed applications is the field of electrical excitation in the range of ultra-short pulses of the order of nanoseconds and possibly high current density of organic opto-electronic components and more particularly of organic light-emitting diodes of micrometric size (micro OLED). OLED miniaturization is an important parameter of the speed/band pass of the component. Such short times require a small response time, a large bandwidth and an impedance matching an excitation circuit so that the electrical energy contained in the pulse is effectively transmitted to the organic opto-electronic component and not reflected.

As shown in the following bibliographic table, the state of the art does not offer organic opto-electronic devices obtaining for ultra-short pulses of the order of nanoseconds and high current density, a response time efficient in an impulse operating regime.

	Article number
	[1]: Phys	[2]: Appl. Phys/	[3]: Jpn. J. Appl.		[5]: J. Appl.
	Rev. B. 84,	Lett/, 106, 9,	Phys. 44 3659	[4]: Phys/Review	Phys. 91, 4,
	11, (2011)	(2015)	(2005)	B, 79, 7, (2009)	(2002)
Date	2011	2015	2005	2000	2002
Authors /	Karl	Adachi	Nakanotani	Forest	Heeger
Team	LEO/DRESDE
Current	800 A/cm2	2.8 kA/cm2	1163 A/cm2	40 A/cm2	10 A/cm2
Density
Electroluminescence			18 E6Cd/m2		0.26 E6Cd/cm2
Pulse	50 ns	5 μs	5 μs	700 ns	1 μs
duration
Rise time	10 ns	23 ns	0.5n or 4 ns		9 ns

Thus, there is a need to improve the prior art to bridge the gap between current state-of-the-art OLEDs and discussed applications, to offer devices with the high-speed and high-current density characteristics required.

This implies to identify and optimize the dominant parameters/elements behavior inherent to the structure and to the manufacturing process that limit the time response of micro Organic Opto-electronic devices.

Presentation of the Invention

Micro Organic Opto-Electronic Device

The invention is aimed at achieving the conditions for producing fast opto-electronic components, by optimizing the geometry and structure, in order to achieve a fast and high voltage pulse excitation of a micro Organic Opto-electronic device to reach high current densities while avoiding the device failure (as high-speed/ultra-short pulsed excitation with low repetition rates prevents thermal failure resulting from high-current density).

For this purpose, the subject of the invention is a micro Organic Opto-Electronic device according to claim 1.

Advantageously, but optionally, the micro Organic Opto-Electronic device according to the invention may further comprise at least one of the following characteristics:

• • the gaps having a size so that an effective dielectric permittivity of the Organic Opto-Electronic device equal to the dielectric permittivity of the electrical wire delivering the electrical impulse;
  • the first planar electrode, the second planar electrode, and the ground plane are structured to integrate an excitation or a characterization circuit, including at least a resistance, a capacitance and/or an inductance, which are disposed in series and/or parallel;
  • the first planar electrode extends between two ground planes on the same side of the substrate, at equal distance of the two ground planes, and is separated from the two ground planes with some gaps without conductive material, wherein the transversal dimension T of the first planar electrode and the transversal dimension G of the gap between said first planar electrode and each of the two ground planes are such that the effective dielectric permittivity ε_r effective defined by: 1+(ϵ_r−1)/2*β(γ₂)β(γ₁) is equal to ε_r0 the dielectric permittivity of the electrical wire; where:ε_r is the dielectric permittivity of the dielectric substrate, γ₁, γ₂ and γ₃ are geometrical parameters,

${\gamma }_3=\surd \left(1-{\gamma }_1^2\right);$ ${\gamma }_1=T/\left(T+2G\right);$ $\gamma 2=\frac{\sinh \left(\pi \frac{T}{4h}\right)}{\sinh \left(\pi \frac{T+2G}{4h}\right)};$ $\beta 1\left(\gamma \right)=\frac{\pi }{\ln \left(2\frac{1+\sqrt{{\gamma }_3}}{1-\sqrt{{\gamma }_3}}\right)}$ defining β(γ) for γ₁ and γ₂ in the interval 0<γ<1/√{square root over ((2))};

$\beta 2\left(\gamma \right)=\frac{\ln \left(2\frac{1+\sqrt{\gamma }}{1-\sqrt{\gamma }}\right)}{\pi }$ defining β(γ) for γ₁ and γ₂ in the interval 1/√{square root over ((2))}<γ<1; h being the thickness of the dielectric substrate;

• • the first planar electrode/or the second planar electrode is the ground plane;
  • the ground plane is on one side of the substrate, and the first planar electrode and the second planar electrode are tracks on the other side of the substrate and are electrically linked to the ground plane with vias;
  • the geometry of the first planar electrode and of the ground plane in regard to the geometry of the second planar electrode create an impedance of the device equal to 50 ohms or 75 ohms;
  • the first planar electrode and/or the second planar electrode presents a conductive and transparent layer, or a metallic layer,
  • the metallic layer being configured for letting the light pass through or for waveguiding of light;
  • the first planar electrode is the cathode made of ITO (indium tin oxide), and the second planar electrode is the anode and is made with a metallic layer;
  • the second planar electrode is the cathode and is made of ITO, and the first planar electrode is the anode and is made with a metallic layer;
  • the dielectric substrate is Glass, silicon, silicon oxide, silicon oxide on silicon, polymers or flexible substrate;
  • the Organic Opto-Electronic device is an OLED or an Organic photodiode;
  • the device comprises superposed on the dielectric substrate the first planar electrode with a first extremity; the second planar electrode, with another extremity covering partially said first extremity and said organic layer stack with a part, defining an active area of the Micro Organic Opto-Electronic device; wherein the position and the geometry of the first extremity is configured so that the first extremity delimits a hollow zone without conductive material, with an arch surrounding the hollow zone, the arch having two arms and a branch connecting the two arms, the active area been limited by the transversal dimension of the said branch and the transversal dimension of the part of the other extremity;
  • the micro Organic Opto-Electronic device being modeled with a resistance Rs in series with a diode D which is in series with a resistance R_D, or by a resistance Rs in series with a dynamic resistance R_D′, at least one junction capacitance in parallel with the diode D and the resistance R_D, or in parallel with the dynamic resistance R_D′, for modelling the active area;
  • the hollow zone is configured to:
    • minimize the junction capacitance by reducing the surface of the active area;
    • minimize the serial resistance Rs of the first planar electrode; and
    • cope with a margin of error of the lateral positioning and the longitudinal positioning of the part of the other extremity of the second planar electrode in regard to the first extremity of the first electrode;
  • the first planar electrode and/or the second planar electrode presents a transparent and conductive layer;
  • the branch connecting the two arms comprises one or several photonic elements;
  • the photonic element is chosen among the list: a waveguide, a grating, a Distributed Feedback mirror, a laser cavity, a laser cavity made of distributed feedback mirrors, a photonic crystal, a laser cavity made of a defect in a photonic crystal.

Such micro Organic Opto-Electronic device allows improving the electrical time constant by:

• • the effective speed propagation of the pulse in the electrodes is such as there is no rupture with the rest of an excitation circuit.

Advantageously, but optionally, the micro Organic Opto-Electronic device according to the invention may further comprise at least one of the following characteristics:

• • the length L of the branch is greater than or equal to the margin error of lateral positioning of the extremity, the longitudinal dimension of the hollow zone is greater than or equal to the margin error of the longitudinal positioning of the extremity;
  • the width of the branch is between 2 μm and 20 mm; the longitudinal dimension of the hollow zone is between 2 μm and 20 mm; the width of the part of extremity is between 1 μm and 10 mm, the width of the said branch is between 1 μm and 10 mm, and the width of the arms are between 1 μm and 1 mm;
  • the junction capacitance of the active area is less than 200 pF, preferably less than 20 pF and more preferably less than 1 pF;
  • the equivalent resistivity of the active area is less than 500 Ohms, preferably less than 50 Ohms, and more preferably less than 1 Ohm;
  • the first planar electrode and/or the second planar electrode presents a transparent and conductive layer;
  • the part of the first extremity is rectilinear, and is perpendicular to the branch;
  • the hollow zone present rounded inner corners;
  • the first planar electrode and/or the second planar electrode presents a conductive and transparent oxide layer or a metallic layer, configured for letting the light pass through or for waveguiding of light;
  • the first planar electrode comprises a metallization layer on the area of the first extremity except on the active area;
  • the first planar electrode is the cathode formed in an ITO (indium Tin Oxide) layer, and the second planar electrode is the anode and presents a metallic layer;
  • the organic layer stack is an M-mtDATA type material;
  • the thickness of the organic layer stack is between 50 nm, more preferably and 200 nm;
  • the active area has a maximum dimension less than 500×500 μm², preferably less than 200×200 μm², more preferably less than 100 μm² and even more preferably less than 20 μm².

Such micro Organic Opto-Electronic device allows improving the electrical time constant by:

• • the reduction of parasitic capacitances. That is typically achieved by reduction of the active surface area of the OLED;
  • the minimization of serial resistance Rs (and the dynamic resistance R_D).

Consequently, it advantageously allo conceiving low cost and fast time-to-market/simpler Opto-Electronic device.

Micro Organic Electronic Device which does not Emit Some Light

In another embodiment not shown on drawings, the invention can concern only a micro organic electronic device which cannot emit some light.

Thus, a subject of the invention is also a micro Organic electronic device, comprising a substrate, and superposed on the substrate:

• • a first planar electrode with a first extremity;
  • an organic layer stack at least partially covering the first extremity;
  • a second planar electrode with an extremity covering partially said organic layer stack and said first extremity with a part, defining an active area of the Organic Electronic device;
  • wherein the position and the geometry of the first extremity is configured so that the first extremity comprises a hollow zone without conductive material and an arch surrounding the hollow zone, the arch having two arms and a branch connecting the two arms, the active area been limited by the width of the said branch and the width of the part of the extremity, the hollow zone allowing:
  • minimizing the junction capacitance of the active area by reducing the active area,
  • minimizing the resistance series Rs of the first planar electrode, and
  • coping with the imprecision of the lateral positioning and the longitudinal positioning of the extremities of the two electrodes.

Advantageously, but optionally, the micro Organic electronic device according to the invention may further comprise at least one of the following characteristics:

• • the Organic Electronic device is configured to have a time response below 10 ns, in response to an electrical impulse having a pulse duration time below 100 ns, so as to allow a current density in the active area superior to 3 kA/cm2, preferentially 4 or 5 kA/cm2;
  • the branch connecting the two arms may contain frequency selective optical element like distributed feedback structures (DFB), Bragg gratings, photonic crystals, micro laser cavities or other photonic elements.

A subject of the invention is also a Micro Organic Electronic device having a time response below 10 ns, in response to electrical impulse having a pulse duration time below 100 ns, comprising a dielectric substrate which supports:

• • at least one ground plane;
  • a first planar electrode;
  • an organic layer stack partially covering said first planar electrode;
  • a second planar electrode with at least a part covering said organic layer stack and first planar electrode;
  • defining an active area of the Micro Organic Electronic device;
  • some electrical wires for the voltage supply connected to the first planar electrode and to the second planar electrode;

wherein the first planar electrode, the second planar electrode and the ground plane are separated by gaps without conductive material so as to adapt the speed of the propagation of the electrical pulse in the device for limiting the reflections due to the passage of the electrical impulse between electrical wire and the planar electrode.

Advantageously, but optionally, the micro Organic electronic device according to the invention may further comprise at least one of the following characteristics: the first planar electrode, the second planar electrode and the ground plane are structured to integrate an excitation and characterization circuit, such as resistance, capacity and/or inductance.

All the features described pages 3-9 of the micro Organic Opto-electronic device can be applied to the micro Organic electronic device.

BRIEF DESCRIPTION OF THE DRAWINGS

Other features, objects and advantages of the present invention will appear on reading the following detailed description, with regard to the accompanying figures, given as non-limiting examples and in which:

FIG. 1a shows an equivalent electrical diagram of a μ-OLED according to the state of the art;

FIG. 1b shows schematically a response to an impulse of the said equivalent electrical diagram;

FIGS. 2a and 2b show schematically an active area of a μ-OLED according to the state of the art;

FIG. 3a shows schematically values of capacitance of an active area given a thickness of the said active area according to the state of the art;

FIG. 3b shows schematically values of capacitance of an active area given a thickness of the said active area according to invention;

FIGS. 4, 5 a to 5d show schematically the positioning of electrodes of an OLED according to the state of the art;

FIGS. 6a, 7a, 7b show schematically the positioning of electrodes of a μ-OLED according to the invention;

FIGS. 6b, 6c, 6d and 6e show schematically details of electrodes of a μ-OLED according to the invention;

FIGS. 8a, 8b show schematically the positioning of electrodes of a μ-OLED according to the state of the art;

FIGS. 9a, 9b show schematically the hollow zone of an electrode of a μ-OLED according to the invention;

FIG. 10a shows an equivalent electrical diagram of a μ-OLED according to the invention;

FIG. 10b shows schematically an intensity, volt and value of a dynamic resistance for different polarization points according to the state of the art;

FIGS. 11a, 11b show schematically a vertical section view of respectively a planar geometry and a biplanar geometry of electrodes of a μ-OLED according to the invention;

FIGS. 12a, 12b show schematically a perspective view of respectively a planar geometry and a biplanar geometry of electrodes of a μ-OLED according to the invention;

FIG. 13 shows schematically top views structures of coplanar electrodes of a μg-OLED according to the invention.

FIG. 14 shows schematically top views structures of planar electrodes of a μ-OLED according to the invention;

FIG. 15 shows a sample comprising 4μ-OLED according to the invention;

FIGS. 16a, 16b and 16c show respectively the excitation, current density, and luminance time responses of a μ-OLED according to the invention for pulses of 2.5 ns, 5 ns, 7.5 ns and 10 ns; and

FIGS. 17a and 17b show schematically a top view and a vertical section view of a μ-OLED comprising photonic elements according to the invention.

DETAILED DESCRIPTION OF AT LEAST ONE EMBODIMENT OF THE INVENTION

With reference to FIG. 1a, there is shown schematically an equivalent electrical schema for modeling a micro Organic Opto-Electronic device (μ-OLED). The μ-OLED equivalent circuit is modeled with:

• • a serial resistance R_S taking into account the electrodes geometry;
  • a dynamic resistance R_D′ (or an ideal diode D in series with a resistance R_D); and
  • a capacitance C in parallel, and possibly, with another capacitance C_R. The capacitance C is the junction capacitance, while C_R models the parasitic capacitance resulting from the fabrication process.V_mes is the voltage across the resistance R_mes, and V_E is the excitation voltage.

The current I flowing through R_mes is the sum of I_D, I_C, and I_CR, which are the currents flowing through the diode D and R_D, the junction capacitor C, and the fabrication process capacitor C_R, respectively.

The currents I_C and I_CR appear during the transient regime then vanish after the decay time τ (95% decay after 3τ).

Therefore, the relevant current flowing through the μ-OLED must be measured once the steady state is established after three times the time response (3τ). In other words, the capacitances are charged first which produces the peak current followed by a decay in current that allow the current through the active part of the μ-OLED to flows progressively.

If the pulse transversal dimension is too short and ends before the capacitance current vanishes, the current flowing through the organic diode remains negligible and the latter hardly lights-up. Therefore, there is a minimum pulse duration for a μ-OLED to operate efficiently with significant light emission because of the transient regime described above. In order to be able to excite an OLED with an ultra-short pulse and to reduce the transient regime duration, the time response ti of the OLED has to be minimized.

Simulation results of this equivalent model in the presence of a pulse excitation are shown in FIG. 1b.

For a pulse excitation with amplitude A, the voltage across R_mes exhibits a sharp rise reaching a current peak followed by an exponential decay to a steady state current value.

The peak of current is the result of an I_C+I_CR current flowing through the capacitors and short-circuiting the diode. The current Id actually passing through the light emitting zone increases as the current charging the capacitors is switched off (load saturation).

The electrical time constant, which characterizes the “duration” of the transient regime, is typically the result of a product T_e=R_eq×C_eq.

A more detailed expression is:

$T_{e^{\prime }}=\frac{C}{\frac{1}{R_d}+\frac{1}{\mathrm{Rs}+\mathrm{Rmes}}}$ with Ceq=C+C_R and

$R_{\mathrm{eq}}=\frac{1}{\frac{1}{R_d}+\frac{1}{\mathrm{Rs}+\mathrm{Rmes}}}.$

The time constant T_e′ corresponding to the speed of charge of the capacitors is therefore limited by R_S, R_D, C, C_R (and R_mes when there is one). The electrical time constant is thus accessible by the geometry and structure of the μ-OLED.

By optimizing the geometry and structure, mainly from the electrical and physical point of view to reduce R_D, R_S, C and C_R when it exists. It is therefore a question of optimizing the component including its electrodes, so that the very short electrical pulses are effectively applied to the organic hetero-structure without reflection and with a minimized Joule effect so that the energy contained in each pulse contributes effectively to the emission of a light pulse.

Thus, the following sections are addressed to optimize the μ-OLED and improve the electrical time constant by:

1. The reduction of capacitances C (and C_R when it exists) are reduced. That is typically achieved by reduction of the active surface area of the OLED.

2. The minimization of serial resistance R_S (and the resistance RD or R_D′) (reduction of the resistive effect related to the geometry of the electrodes).

3. The effective speed propagation of the pulse in the electrode, such as it does not show rupture with the rest of an excitation circuit.

1. Capacitance Issue

Organic materials are closer to dielectrics than semiconductors. Thus, when these materials are positioned between two electrodes, they constitute a capacitor.

FIGS. 2a and 2b illustrates different geometries of overlapping of organic semiconductors 22, an anode 21 and a cathode 23, defining an active area 24.

The anode 21 and cathode 23 may contain preferentially ITO or aluminum.

For aμ-OLED with organic semiconductors of mean relative dielectric constant ε_r≈3.5 and surface area S=L×W, the junction capacitance is: C=ε_r*ε₀*(S/e) wherein L and W are the longitudinal dimensions and transversal dimensions, where e is the thickness of the stacks of various materials that constitute the organic hetero-structure between the anode and the anode.

The said equation shows that the capacitance increases with the active surface.

A typical junction capacitance value is about 20-40 nF/cm².

FIG. 3a shows the curves of capacitance value in picoFarand (pF) of the active area of square 32 and circular μ-OLED 31 as a function of the side (L or W). Thus, as illustrated, the capacitance increased linearly with the value of the side (L or W).

The thickness e of a typical μ-OLED is preferentially between about 80 nm and 100 nm.

The state of the art is to reduce the thickness of the organic hetero-structure to compensate for the low mobility of the charges of organic semiconductors.

On the contrary, increasing the thickness makes it possible to minimize the capacitance as shown in FIG. 3b, wherein it illustrates the evolution of the capacitance as a function of the thickness of the organic hetero-structure for an active surface of 100 μm×100 μm (ref.34) and for 12 μm×100 μm (ref.32).

Moreover, to optimize the time constant, we can make thicker organic hetero-structures using the material m-MtDATA (4,4′,4″-Tris[(3-methylphenyl) phenylamino] triphenylamine) which exhibits much greater mobility than other semiconductors organic.

Thus, optimized capacitance can be obtained preferentially for a thickness between about 125 nm and 180 nm, which allows a reduction of a factor of about 2.25 compared to the standard μ-OLED.

As seen previously with the equation of the junction capacitance, it is possible to precisely controlling the latter by limiting the zone of superposition of the cathode and the anode (active area), as the capacitance increases with the active surface.

It is therefore possible to reduce the active area S of a μ-OLED by reducing the size of one of the electrodes to a transversal dimension L, and superimposing the two electrodes with a distance W. The active surface is then S=W×L.

The delimitation of the active surface area of the μ-OLED can be carried out in two ways different (present in the literature):

• • By photolithography: this method introduces a parasitic capacitance which does not bring benefits to the reduction of the active surface.
  • By delimitation by the superposition of the electrodes (ref. 42, 44): the principle is illustrated in FIG. 4. On a substrate 41, the cathode 42 is structured before depositing the organic layers 43 in vacuum, and after the anode 44. The deposition of an aluminum layer in a strip thin film is made possible by evaporation through a masking mask (hollow mask).

To successfully delimit μ-OLED by superposition for obtaining the active area 45, the precision of the positioning of the cache mask is crucial. This positioning must be done during evaporation under vacuum by a precision mechanical system. In practice, it is difficult to conceive the alignment of masks with masks better than +/−0.5 mm and the smallest holes can hardly be less than 100 μm. In addition, conical projection effects during evaporation may lead to a widening of the pattern of a factor of 2. In the area of μ-OLED display, the resolution of hollow-mask allows realizing pixels of a typical size of 300 μm.

It should be noted that the structuring steps are only possible before the filing of the organic layers because they are fragile and sensitive to any chemical contact. It is therefore easier to micro-nano structure the anode than the cathode. The latter can only be delimited “grossly” by evaporation through a hollow mask.

The cone of projections through this mask introduces uncertainties on the transversal dimension and lateral positioning ΔL and longitudinal ΔW of the cathode as illustrated in FIGS. 5a, 5b, 5c and 5d.

For rectangular geometries, the surfaces defined by the dimensions of the electrodes (51, 53) are in practice subjected to positioning problems and uncertainties that have a significant impact on the active area 54 according to the sign of the positioning error:

• • the active surface 54 is defined by the transversal dimension L of the narrowest electrode (51, 53), and the covering W of the anode 51 and of the cathode 53. Where positioning is with a longitudinal uncertainty+ΔW the active area 54 increases to S=(W+ΔW)×L (FIG. 5a);
  • if the positioning uncertainty is negative (−ΔW) the active area is null (FIG. 5c);
  • when positioning results in transversal positioning uncertainty ΔL the active area 54 increases: S=W×(L−ΔL) (FIG. 5b); and
  • if the transversal positioning uncertainty ΔL>L then the active area is null (FIG. 5d).

FIG. 6 illustrates an embodiment of a μ-OLED 60 that allows achieving smaller dimensions and reducing the influence of errors of positioning.

The μ-OLED 60 comprises a substrate and superposed on the substrate 61, 131:

• • a first planar electrode 62, preferentially a cathode, with a first extremity 65c;
  • organic layers stack 67 comprising at least one layer of electroluminescent material, at least partially covering the first extremity, wherein the thickness of the organic layers stack is between 50 nm, more preferably and 200 nm;
  • a second planar electrode 63, preferentially an anode, with another extremity 63a (as illustrated in FIG. 6c) covering partially said first extremity 65c and said organic layer stack 67 with a part, defining an active area 64 of the micro-OLED 60.

The first planar electrode 62 and/or the second planar electrode 63 presents a transparent and conductive layer, preferentially with a conductive and transparent oxide layer or a metallic layer, configured for letting the light pass through or for waveguiding of light. Preferentially, the cathode presents an ITO (indium Tin Oxide) layer, and the anode and presents a metallic layer.

At least one electrode, preferentially the cathode 62 is pre-structured with a hollowed area 66 to reduce the active area 64.

For that purpose, as illustrated in FIGS. 6b and 6c, the position and the geometry of the first extremity 65c is configured so that the first extremity 65c delimits a hollow zone 66 without conductive material, with an arch 65 surrounding the hollow zone 66, the arch 65 having two arms 65a and a branch 65b connecting the two arms 65a, the active area 64 been limited by the transversal dimension Wb of the said branch 65b and the transversal dimension W of the part of the other extremity of the anode 63 (as illustrated in FIG. 6e).

So, the cathode 62 is hollowed out in the area superimposed with the anode 63. The part of the other extremity 63 is rectilinear, and is perpendicular to the branch 65b.

The transversal dimension Wb of the branch 65b is between 2 μm and 20 mm; the longitudinal dimension Lh of the hollow zone 66 is between 2 μm and 20 mm; the transversal dimension of the part of extremity is between 1 μm and 10 mm, the transversal dimension Wb of the said branch 65b is between 1 μm and 10 mm, and the transversal dimension La of the arms 65a are between 1 μm and 1 mm.

FIGS. 7a and 7b illustrate another embodiment of a μ-OLED 70. A hollow zone 75 allows limiting one side of an active area 74 of transversal dimension W and longitudinal dimension L, whatever the longitudinal positioning error ΔW>0 (FIG. 7a). To take account of the lateral positioning error ΔL, the hollow zone 75 is expanded to L+ΔL1 ΔL2 (FIG. 7b).

Thus, the longitudinal dimension L of the branch 76 is greater than or equal to the margin error of lateral positioning ΔL of the extremity of the second electrode, the longitudinal dimension of the hollow zone is greater than or equal to the margin error of the longitudinal positioning ΔW of the extremity of the first electrode.

The geometry adopted for the anode (an arch having two arms and a branch connecting the two arms) and the positioning of the cathode allows reducing the active surface and therefore the capacitance of the μ-OLED, while minimizing the effect of increase of the contact resistance because the charges can move from one end to the other of the branch of the arch. Indeed, the contact resistance is reduced by a factor of at least two for identical electrodes transversal dimensions compared to conventional geometry, such as the one illustrated in FIGS. 8a and 8b. Electrodes 82, 83 have a crossing geometry, known in the state of the art.

FIGS. 8a and 8b show the effect of positioning uncertainties. Thus, in this conventional geometry, the margin error of the longitudinal positioning ΔW of the extremity of a first electrode 82, and the margin error of lateral positioning ΔL of an extremity of a second electrode 83 induced great difference of the value of the active area 84. The active area 84 in FIG. 8a being greatly superior compared to the active area 84 in FIG. 8b. Thus, such configuration does not allow controlling the active area with precision. Therefore, it does not allow controlling the capacitance of the μ-OLED.

In reference to FIGS. 9a and 9b, an anode 91 includes a hollow zone 92a/92b at an extremity. The hollow zone 92a/92b has an arch geometry that can be optimized by removing all right angles in order to optimize the current lines and the passage of loads in the electrodes.

Thus, the arch can have a semicircular, elliptical, basket-handle, or right geometry.

Preferentially, an active area has a maximum dimension of less than 500×500 micrometers squared, preferably less than 200×200 micrometers squared, more preferably less than 100 micrometers squared and even more preferably less than 20 micrometers squared, with a capacitance value less or equal than about 200 pF, preferably less than 20 pF, preferably less than 1 pF, and more preferably less than 0.4 pF.

The equivalent resistivity of the active area is less than 500 Ohms, preferably less than 50 Ohms, and more preferably less than 1 Ohm.

2. Resistance Issue:

There are two types of resistance models:

• • dynamic resistance; and
  • serial resistance.

The reduction of the active surface, therefore of dimensions W and L of the electrodes, can lead to an increase in the series resistance R_S due to the geometry of the electrodes in addition to the reduction of the desired capacitance.

Therefore, to reduce the time constant of the organic opto-electronic component, it is essential to also reduce the serial resistance which results from the geometry of the anode and the cathode.

Moreover, if an electrode includes ITO material, as ITO is less conductive than metals (ITO conductivity is 5.95 10⁵ S/m versus 3.53 10⁷ S/m for aluminum), the series resistance of such electrode is higher to those of the inorganic opto-electronic components.

In the example of an ITO anode of transversal dimension W, longitudinal dimension I_ito, thickness t_C and resistivity ρ_ito, and an aluminum cathode of longitudinal dimension I_al Transversal dimension L and thickness t_a.

The total series resistance is: R_S=R_S-cathode+R_S-anode, sum of the anode-induced series resistance; R_S-anode=ρ_ITO*I_ito/W_tc, and that induced by the cathode is: R_S-cathode=ρ_Al*I_Al/L_ta.

It is clear that the reduction of the surface area of the μ-OLED (S=W×L) leads to an increase in the series resistance whose main contribution is the ITO anode.

Typical series resistance values obtained without metallization of at least one electrode are in the range 40-100 Ohm, for track longitudinal dimensions of 1 cm and transversal dimensions W=2 mm.

This resistance is favorably reduced by a factor of 2900 if an electrode comprising ITO is metallized by aluminum at locations other than the active area which must remain transparent, i.e. less or equal than about a few ohms or even a few fractions of ohm.

FIG. 10a shows an equivalent electrical model of a μ-OLED, corresponding to FIG. 1a, wherein the diode is replaced by a dynamic resistance R_D′, a resistance which depends on the polarization point.

In reference to FIG. 10b, we can see the Intensity-Voltage, between points A and B, characteristic of a dynamic resistance value (inverse of the slope) for different polarization points.

The function having the Intensity (A) in abscissa and the Voltage (V) in ordinates, has the shape of the inverse of a log normal function. So, it shows that the resistance value of R_D′, starts to diminish when reaching a given voltage.

To reduce the dynamic resistance R_D′, it is therefore important to work with an operating point with the highest possible voltage.

The power line is dimensioned for a characteristic impedance of 500 at the target frequency of 1 GHz (the same principle is applicable to other target frequencies beyond 1 GHz for example). So, to ensure continuity of impedance with the excitation source and its connectivity, one should obtain the dynamic resistance as near as possible of 50 Ohm. The voltages must therefore be higher than in the normal operation of a μ-OLED. To reach these high voltages, it is important to ensure that the effective propagation speed of the pulse in the electrode does not break with other parts of the excitation circuit. Indeed, breaking or changing propagation speeds from one element to another causes reflection. Thus, minimizing these reflections allows the energy contained in the pulse to be delivered to the active part of the μ-OLED.

3. Pulse Reflections Issue

The propagation speed Vφ of a wave in a cable is of the order of 180,000 to 200,000 km/s, i.e., considering c, the constant for the speed of light in vacuum: c/0.7<Vφ<c/1.5.

The propagation speed VT is also written as a function of the material and more particularly as a function of the dielectric constant εr of the latter: Vφ=c/√εr. In a coaxial cable (type RG 58C/U) the speed is v=200,000 km/s and can also be expressed as a function of the linear capacitance (C˜100 pF/m) and the linear inductance (L˜250 nH): Vφ=√(L/C).

The effective propagation speed of a wave in an electrode of coplanar geometry (or ribbon, when the electrodes and ground planes are on the same face of the substrate) depends on the dimensions of this electrode and in particular on the transversal dimension W or L of the track, the thickness of the substrate and the dielectric constant of the latter.

It a priori has a speed different from the speed of propagation in the cable. When a pulse passes from a cable to the electrode of a component, any variation in propagation speed seen by the wave produces a reflection. A part of the wave is indeed reflected because of the break in the spread velocity (or phase velocity in the case of a pulse) between the power cable coming from the generator and the component. This has the effect of reducing the part of the pulse actually delivered to the active part of the component.

The reflections of the pulses can lead to a widening of the pulses, to a dissipation of energy elsewhere than in the organic hetero-structure. These Reflections limit the propagation speed.

One of the most obvious examples relates to the modulation rate when a pulse train is subjected to a μ-OLED which is limited to a period longer than the pulse widening.

Such reflections are well known for electromagnetic waves in the range of optical frequencies (150-250 THz). Thus, at the interface between two materials with index n₁=c/v₁ and n₂=c/v₂, or v₁ and v₂ are the propagation velocities of the wave in media 1 and 2 respectively, the reflection coefficient formulates as:

$r=\frac{n1-n2}{n1+n2}=\frac{v2-v1}{v1+v2}.$

In the frequency range 100 MHz-10 GHz, the geometries of the electrodes have an influence on the effective propagation velocity and thus create an effective relative dielectric constant εr. There is therefore a way of acting on the geometry to modify the speed of propagation in the electrode. The propagation constant is

$\beta =\frac{\omega }{V\phi }=\frac{\omega }{C}\sqrt{{\varepsilon }_r}.$

Two types of geometries can be distinguished, allowing the relative effective dielectric permittivity to be modulated:

• • Planar geometry wherein an electrode 122a and ground 121a planes are on the same face of a dielectric substrate 123, as illustrated in FIG. 11a.
  • Biplanar geometry wherein an electrode 122b is placed on one side of a substrate 123 and a ground plane 121b on the opposite side of the said dielectric substrate 123, as illustrated in FIG. 11b.

The said dielectric substrate 123 contained glass, silicon, silicon oxide, polymers or flexible substrate.

FIG. 12a shows the vertical sectional view of a planar geometry.

Planar electrodes are composed of a central electrode 122a (preferentially an anode) placed equidistantly between two tracks of masses 121a, all arranged in the same plane above a dielectric (preferentially containing glass or silicon) support 123.

h and εr represent respectively the thickness and the relative dielectric permittivity of the dielectric substrate. T and t represent respectively the transversal dimension and thickness of the anode. G is the distance between the anode 122a and ground planes 121a (cathode in some configurations).

These ground planes 121a are present on either side of the anode 122a and are connected to each other either by the external circuit or by the geometry of the electrodes.

For a given dielectric, the characteristic impedance of planar electrodes to produce fast opto-electronic components is given mainly as we will see by the form factor defined by the ratio γ₁,

$\gamma 1=\frac{T}{T+2G}.$

The following parameters are also defined:

$\gamma 2=\frac{\sinh \left(\pi \frac{T}{4h}\right)}{\sinh \left(\pi \frac{T+2G}{4h}\right)}.$

• • The intermediate functions ρ₁ (γ) and β₂ (γ) defining β (γ) on different intervals are used:

$\beta 1\left(\gamma \right)=\frac{\pi }{\ln \left(2\frac{1+\sqrt{{\gamma }_3}}{1-\sqrt{{\gamma }_3}}\right)}$ with γ₃=√{square root over ((1−γ²))};

• • used for values of γ1 or γ2 in the range 0<γ<1/√(2).

$\beta 2\left(\gamma \right)=\frac{\ln \left(2\frac{1+\sqrt{\gamma }}{1-\sqrt{\gamma }}\right)}{\pi }$ defined for 1/√(2)<γ<1.The effective relative permittivity is then given by:

$ϵr\mathrm{effective}=1+\frac{r-1}{2}\beta \left(\gamma 2\right)\beta \left(\gamma 1\right),$ with β=β1 or β2.

Thus, the condition for obtaining the same effective relative dielectric permittivity for the electrodes as for the cables, results in:

εr effective=ε_r=1.5.

So, we obtained a relation between T, G and the ratio T/(T+2G). To reduce or cancel these reflections, it is therefore possible to modify the geometry of the μ-OLED and in particular the ratio T/(T+2G).

Considering a glass substrate (ε_r=7.75) of thickness H=1000 μm, and tin oxides and indium (ITO) electrodes with a conductivity σ=5.95e⁵ of 100 nm thickness.

Given a predefined Transversal dimension T value, we calculate Gap G value such ac ε_{r effective}=1 to obtain the following table of dimensions:

T	G	T/(T + 2G)
100	μm	30	μm	0.625
200	μm	60	μm	0.625
500	μm	146	μm	0.631
1	mm	267	μm	0.651
2	mm	433	μm	0.697
3	mm	548	μm	0.732
4	mm	640	μm	0.757
5	mm	720	μm	0.776
10	mm	1027	μm	0.829

In reference to FIG. 13, different coplanar electrode structures are illustrated.

An initial dielectric substrate 131, can be a glass sample covered with a conductive layer 131b, for example with ITO (FIG. 13a). Electrodes are structured by removing the conductive layer by at least two parallel continuous lines 132 of transversal dimension G. This allows creating central electrodes of transversal dimension T separated by a distance G from two ground planes (FIG. 13b). This dimensioning makes it possible to ensure continuity of propagation with the excitation source and its connection (the same principle applies to other target frequencies above 1 GHz, for example).

Indeed, the gaps G is dimensioned to adapt the speed of propagation of the electrical pulse in the device for limiting the reflections due to the passage of the electrical impulse between electrical wire and the planar electrode.

Moreover, the gaps G have a size so that an effective dielectric permittivity of the Organic Opto-Electronic device equal to the dielectric permittivity of the electrical wire delivering the electrical impulse (plus or minus 10%).

The electrodes can be arranged according to the configurations of FIG. 13c to allow current measurement by separating the anode (A) and the cathode contact (K) by removing the conducting layer between the electrodes.

The electrode A of the FIGS. 13 and 14 corresponds to the electrode 62, 71, 171 of all the FIGS. 6, 7, and 17.

The electrode K of the FIGS. 13 and 14 corresponds to the electrode 63, 73 of all the FIGS. 6, 7, and 17.

The cathode and the anode can obviously be reversed in these figures.

Moreover, as seen previously, by adding a hollow zone 133 (FIG. 13d), it is possible to limit the effects of positional uncertainties on the size of the active surface and thus on the capacitance.

FIGS. 13e to 13h show a structure wherein the cathode K and ground plane are coincident. In this configuration, the conductive layer between the cathode (K) and the ground planes is not removed.

Passive resistances 134a (FIG. 13f) can be created by not completely removing the conductive layer between the ground planes and the cathode (K) or anode (A). Inductors and capacitors 134b can also be engraved on the device in parallel or in series (FIG. 13g) bb being in electrical continuity with the cathode (K) or anode (A).

A complete structure with a metallized anode A allowing a reduction of the series resistance is shown in FIG. 13h.

The structures allowing measurements can integrate passive components 134c at the cathode K (FIG. 13i) or the anode A (FIG. 13j).

The structures finalized with an organic layer 135 and a metallization of the cathode K arm 136 (FIG. 13k) can also integrate an anode A metallization (FIG. 13I).

FIG. 12b illustrates another embodiment of electrodes geometry. The said figure shows the vertical sectional view of a bi-planar electrode 122b.

The electrode 122b is placed on one side of a substrate 123 and a ground plane 121b on the opposite side of the said substrate 123.

h and εr respectively represent the thickness and the relative dielectric permittivity of substrate. T and t respectively represent the transversal dimension and thickness of the conductor track.

At a given frequency, the bi-planar electrode is characterized essentially by the form factor W/H. For example, with AN: ε_r=11.9 (Silicon), σ=3.53 10⁷ (Aluminum) Z_c=50Ω, f 1 GHz, H=500 μm, we obtain W=0.803×H=401.6 μm.

In reference to FIG. 14, different biplanar electrode structures are illustrated.

An initial support 141, can contain a silicon sample 141b covered, for example, with ITO (FIG. 14a).

Electrodes are structured in the form of a line 142 (FIG. 14b) dimensioned to reduce the reflection at the interface between the excitation source and its connector.

A cathode K and an anode A are created by separation of the line 142 (FIG. 14c).

A hollow area 143 can be integrated in the anode A (FIG. 14d).

A ground plane on the underside of the support 141 is not illustrated, but the contact with the latter is by vias 144 which may be connections through the substrate 141 (FIG. 14e).

It is possible to add measurement resistances 145 between the cathode K and the ground plane (FIG. 14f), or other passive components 145 at the cathode K (FIG. 14g), or the anode A (FIG. 14h).

Measurement probe is possible by adding contact pads 146 connected to the ground by vias (FIG. 14i), possibly with a measurement resistance 145 between the cathode k and the ground plane (FIG. 14j).

The deposition of the organic layer 148 and the metallization of the cathode K to produce the cathode finger 149 is illustrated in FIG. 14k or FIG. 14l. Metallization of ITO anodes and cathodes may be necessary to reduce the series resistance.

The following table illustrates the different geometries allowing the reduction of the impulsions:

	Co-planar electrodes	Bi-planar electrodes
Substrate	h	T	G	Z	h	t	T	Z
Glass εr = 7,75	1100 μm	1000 μm	550 μm	50.0 Ω	1100 μm	100 nm	1325 μm	50.0 Ω
						(Au)
	1100 μm	500 μm	175 μm	50.2 Ω
	1100 μm	100 μm	31 μm	50.2 Ω
	900 μm	100 μm	31 μm	50.2 Ω
Silicon	275 μm	250 μm	125 μm	49.9 Ω	275 μm	100 nm	219 μm	50.0 Ω
εr = 11,9						(Au)
	275 μm	50 μm	195 μm	50.0 Ω
	525 μm	500 μm	247 μm	50.0 Ω	525 μm	100 nm	418 μm	50.0 Ω
						(Au)
	725 μm	500 μm	267 μm	50.0 Ω	725 μm	100 nm	577 μm	50.0 Ω
						(Au)
	725 μm	1000 μm	437 μm	50.0 Ω
Germanium	500 μm	1000 μm	525 μm	50.0 Ω	500 μm	100 nm	286 μm	50.0 Ω
εr = 16						(Au)
GaN	500 μm	1000 μm	130 μm	50.0 Ω	500 μm	100 nm	822 μm
εr = 5,35						(Au)
Soft	500 μm	1000 μm	118 μm	50.0 Ω
substrate	500 μm	500 μm	69 μm	50.0 Ω
(PET)
εr = 5
plexiglass	500 μm	242 μm	20 μm	50.0 Ω
εr = 3,5

FIG. 15 shows a sample comprising 4μ-OLED: samples 1 and 3 are in current-measurement configuration (corresponding to FIG. 13,k), samples 2 and 4 are configured in cathode mode connected to the ground plane (corresponding to FIG. 13.h). The glass substrate contains a ITO layer.

The caption in this figure is as follows, A: Anode, K: Cathode, E: Hollow area, S: Active area, D: Metallized cathode fingers, M: ground plane, R_m integrated measuring resistance.

Such configuration allows obtaining:

• • electrical response times less or equal than about 0.4 ns-1.8 ns; and
  • optical response times less or equal than about 5 ns.

FIG. 16 show electrical and optical time responses of a μ-OLED optimized to reduce parasitic reflections, including an arch geometry, a limitation of the active area to allow a minimization of the capacitance, such as the one shown in FIG. 15.

The electrical and optical time responses are for pulses of 2.5 ns (first column), 5 ns (2nd column), 7.5 ns (3rd column) and 10 ns (4th column).

For each pulse duration, the excitation amplitudes are equal to 10, 20, 40, 60, 80, 100 and 120 volts.

FIG. 16a shows the excitation voltage subject to the μ-OLED, FIG. 16b shows the current density (electrical responses of the μ-OLED), FIG. 16c shows the luminance (UA) (optical responses of the μ-OLED).

The characterization setup consists of a high-speed high-voltage excitation electronic circuit driving the μ-OLED, and a high-speed light collection setup. The excitation circuit also includes a matching resistance equal to 50 ohms to protect the pulse generator, and a serial resistance RMES=50 ohms dedicated to the measurement of the instantaneous current I. Devices are driven by a fast pulse generator (AVTech AVL-2A-B) which produces electrical pulses with a transversal dimension varying from 3 ns to 100 ns, 10 Hz repetition rate and an amplitude up to 160V. The excitation pulses have a rise time of 2 ns. The light collection setup includes a confocal microscope for the observation and the detection is performed via an avalanche photodiode (Thorlabs, APD130A). All signals are acquired with a high-speed oscilloscope (Tektronix, TDS7254).

The measurements in FIG. 16 show that:

• • The response time decreases with the decrease of the active surface of the μ-OLED.
  • The response time decreases with the decrease of the various resistances:
    • C=10 pF-20 pF following the samples for a thickness of 100 nm and one Active surface of 100 μm×100 μm,
    • R_D˜120 W-340 W.
    • R_S˜60-100 W (no metallization).
  • With electrodes optimized to reduce reflections incorporating basket handles, it is possible to achieve current densities of 4000 A/cm².

Thus, the optimized geometry and structure of a μ-OLED as illustrated in FIG. 15, allow obtaining a time response (electrical and optical) below 10 ns, in response to an electrical impulse having a pulse duration time below 100 ns, so as to allow a current density in the active area superior to 3 kA/cm2, preferentially 4 or 5 kA/cm2.

FIGS. 17a and 17b illustrate a μ-OLED 170 with an electrode 171 and an electrode 173.

The branch 171b connecting the two arms 171a can contain one or several photonic elements 174a, 174b.

The photonic elements 174a, 174b can be a waveguide, a grating. Distributed Feedback mirror, a laser cavity, a laser cavity made of distributed feedback mirrors, a photonic crystal, a laser cavity made of a defect in a photonic crystal.

Those photonic elements 174a, 174b allows modifying the emission features, so that we can design μ-OLED 170 with particular optical features.

Cited Prior Art

• [1]: D. Kasemann, R. Bruckner, H. Fröb, and K. Leo, «Organic light-emitting diodes under high currents explored by transient electroluminescence on the nanosecond scale», Phys. Rev. B, vol. 84, no 11, p. 115208, 2011.
• [2]: K. Hayashi, H. Nakanotani, M. Inoue, K. Yoshida, O. Mikhnenko, T.-Q. Nguyen, and C. Adachi, «Suppression of roll-off characteristics of organic light-emitting diodes by narrowing current injection/transport area to 50 nm», Applied Physics Letters, vol. 106, no 9, p. 93301, march 2015.
• [3] H. Nakanotani, et al “Injection and transport of high current density over 1000 A/cm² in organic light emitting diodes under pulse excitation”, Jpn. J. Appl. Phys. 44 3659 (2005)
• [4]: N. C. Giebink et S. R. Forrest, «Temporal response of optically pumped organic semiconductor lasers and its implication for reaching threshold under electrical excitation», Physical Review B, vol. 79, no 7, February. 2009.
• [5] A. J. Heeger, “Fast pulsed electroluminescence from polymer light-emitting diodes”, J. Appl. Phys. Vol. 91, No 4, 2002.

Claims

1. A Micro Organic Opto-Electronic device emitting a light impulse in response to an electrical impulse, comprising a dielectric substrate which supports: at least one ground plane formed on the dielectric substrate;a first planar electrode formed on the dielectric substrate;an organic layer stack partially covering the first planar electrode;a second planar electrode with at least a part covering the organic layer stack and the first planar electrode, defining an active area of the Micro Organic Opto-Electronic device;electrical wires for voltage supply being connected to the first planar electrode and to the second planar electrode;wherein the first planar electrode, the second planar electrode and the ground plane are separated by gaps without conductive material, wherein the gaps are sized so as to adapt a speed of propagation of the electrical impulse in the Micro Organic Opto-Electronic device for limiting reflections due to passage of the electrical impulse between the electrical wires and the first and second planar electrodes,wherein the gaps are sized so that an effective dielectric permittivity of the Micro Organic Opto-Electronic device equals a dielectric permittivity of the electrical wires delivering the electrical impulse.

2. The Micro Organic Opto-Electronic device according to claim 1, wherein the first planar electrode, the second planar electrode and the ground plane are structured to integrate an excitation or a characterization circuit, including at least one of a resistance, a capacitance or an inductance, which are disposed in series, in parallel, or both.

3. The Micro Organic Opto-Electronic device according to claim 1, wherein: the dielectric substrate supports at least two ground planes;the first planar electrode extends between the two ground planes on a same side of the dielectric substrate, at equal distance of the two ground planes, and is separated from the two ground planes by the gaps;a transversal dimension T of the first planar electrode and a transversal dimension G of the gaps between the first planar electrode and each of the two ground planes are such that the effective dielectric permittivity of the Micro Organic Opto-Electronic device defined by: 1+(ϵr−1)/2*β(γ2)β(γ1) is equal to a dielectric permittivity of the electrical wires εr0;wherein:εr is a dielectric permittivity of the dielectric substrate, γ1, γ2, and γ3 are geometrical parameters,

4. The Micro Organic Opto-Electronic device according to claim 1, wherein one of the first planar electrode or the second planar electrode is the ground plane.

5. The Micro Organic Opto-Electronic device according to claim 1, wherein: the ground plane is positioned on a first side of the substrate, andthe first planar electrode and the second planar electrode are tracks positioned on a second, opposing side of the substrate and are electrically linked to the ground plane with vias.

6. The Micro Organic Opto-Electronic device according to claim 1, wherein a geometry and dimensions of: the first planar electrode, the ground plane and the second planar electrode, are configured to create an impedance of the Micro Organic Opto-Electronic device equal to 50 ohms or 75 ohms.

7. The Micro Organic Opto-Electronic device according to claim 1, wherein at least one of the first planar electrode or the second planar electrode presents a conductive and transparent layer, or a metallic layer, the metallic layer being configured for letting light pass through or for waveguiding of the light.

8. The Micro Organic Opto-Electronic device according to claim 7, wherein the first planar electrode is a cathode made of ITO (indium tin oxide), and the second planar electrode is an anode and presents a metallic layer.

9. The Micro Organic Opto-Electronic device according to claim 7, wherein the second planar electrode is a cathode and is made of ITO, and the first planar electrode is an anode and presents a metallic layer.

10. The Micro Organic Opto-Electronic device according to claim 1, wherein the dielectric substrate is one of: glass, silicon, silicon oxide, silicon oxide on silicon, polymers or a flexible substrate.

11. The Micro Organic Opto-Electronic device according to claim 1, wherein the Micro Organic Opto-Electronic device is an OLED (Organic light emitting diode) or an Organic photodiode.

12. The Micro Organic Opto-Electronic device according to claim 1, wherein the Micro Organic Opto-Electronic device comprises superposed on the dielectric substrate: the first planar electrode with a first extremity; andthe second planar electrode, with a second extremity covering partially the first extremity and the organic layer stack with a part, defining the active area of the Micro Organic Opto-Electronic device;wherein a position and geometry of the first extremity is configured so that the first extremity delimits a hollow zone without conductive material, with an arch surrounding the hollow zone,wherein the arch has two arms and a branch connecting the two arms, andwherein the active area is limited by a transversal dimension of the branch and a transversal dimension of the part of the second extremity.

13. The Micro Organic Opto-Electronic device according to claim 12, wherein the hollow zone is configured to cope with a margin of error of a lateral positioning and a longitudinal positioning of the part of the second extremity of the second planar electrode relative to the first extremity of the first electrode.

14. The Micro Organic Opto-Electronic device according to claim 12, wherein electrical characteristics of the Micro Organic Opto-Electronic device are modeled with: a resistance RS;a dynamic resistance RD′; andat least one junction capacitance in parallel with the dynamic resistance RD for modelling the active area;wherein the hollow zone is configured to minimize the junction capacitance by reducing a surface of the active area.

15. The Micro Organic Opto-Electronic device according to claim 1, wherein at least one of the first planar electrode or the second planar electrode presents a transparent and conductive layer.

16. The Micro Organic Opto-Electronic device according to claim 12, wherein the branch connecting the two arms comprises one or more photonic elements.

17. The Micro Organic Opto-Electronic device according to claim 16, wherein the one or more photonic elements are chosen from the group consisting of: a waveguide, a grating, a Distributed Feedback mirror, a laser cavity, a laser cavity made of distributed feedback mirrors, a photonic crystal, and a laser cavity made of a defect in a photonic crystal.

18. The Micro Organic Opto-Electronic device according to claim 13, wherein electrical characteristics of the Micro Organic Opto-Electronic device are modeled with: a resistance Rs;a dynamic resistance RD′; andat least one junction capacitance in parallel with the dynamic resistance RD for modelling the active area;wherein the hollow zone is configured to minimize the junction capacitance by reducing a surface of the active area.