Claims
- 1. A sensor assembly for measuring the condition of a fluid, the sensor assembly comprising:
a substrate having a microchannel formed therein, the microchannel having walls through which the fluid can flow; at least one sensor proximate to the microchannel; and means for measuring the temperature of the at least one sensor.
- 2. The sensor assembly of claim 1 wherein the at least one sensor is adjacent the microchannel.
- 3. The sensor assembly of claim 2 wherein the substrate has a cavity formed therein adjacent the microchannel.
- 4. The sensor assembly of claim 1 further comprising arms configured to suspend the at least one sensor in the microchannel.
- 5. The sensor assembly of claim 4 wherein the substrate has a cavity formed therein adjacent the microchannel.
- 6. The sensor assembly of claim 1 wherein the at least one sensor comprises a single polysilicon thin-film resistor.
- 7. The sensor assembly of claim 1 wherein the at least one sensor comprises a temperature-sensing element and a heating element separate from the temperature-sensing element.
- 8. The sensor assembly of claim 1 wherein the at least one sensor comprises a plurality of temperature-sensing elements and at least one heater, the plurality of temperature-sensing elements disposed on one side of the heater downstream of the fluid flow and on the other side of the heater upstream of the fluid flow.
- 9. The sensor assembly of claim 1 wherein the at least one sensor comprises a plurality of sensors.
- 10. The sensor assembly of claim 1 wherein the at least one sensor has a serpentine shape.
- 11. The sensor assembly of claim 1 wherein the temperature of the at least one sensor being an indicator of the flow rate of the fluid through the microchannel.
- 12. The sensor assembly of claim 11 wherein the at least one sensor is adjacent the microchannel.
- 13. The sensor assembly of claim 12 wherein the substrate has a cavity formed therein adjacent the microchannel.
- 14. The sensor assembly of claim 11 wherein the at least one sensor is suspended in the microchannel.
- 15. The sensor assembly of claim 14 wherein the substrate has a cavity formed therein adjacent the microchannel.
- 16. The sensor assembly of claim 1 wherein the temperature of the at least one sensor being an indicator of gas bubbles or particulate substances in the fluid.
- 17. The sensor assembly of claim 16 wherein the at least one sensor is adjacent the microchannel.
- 18. The sensor assembly of claim 17 wherein the substrate has a cavity formed therein adjacent the microchannel.
- 19. The sensor assembly of claim 16 wherein the at least one sensor is suspended in the microchannel.
- 20. The sensor assembly of claim 19 wherein the substrate has a cavity formed therein adjacent the microchannel.
- 21. A method comprising:
flowing fluid through a microchannel on a substrate; sensing a temperature of the flowing fluid; and using the sensed temperature to obtain an indicator of the condition of the fluid.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] The present application claims the benefit of U.S. Provisional Application Patent No. 60/168,261.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH
[0002] The U.S. Government may have certain rights in this invention pursuant to Grant No. AFOSR 49620-96-1-0376 sponsored by the Microsystems Technology Office of Defense Advanced Research Projects Agency and the Air Force Office of Scientific Research.
Provisional Applications (1)
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Number |
Date |
Country |
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60168261 |
Nov 1999 |
US |