Silicon as a Mechanical Material, K.E. Petersen, 1982. |
Microminiature refrigeration, W.A. Little, 1984. |
Frequency Response Of Polycrystalline Silicon Microbridges, R.T. Howe and R.S. Muller, 1985. |
Pressure Dependence Of Resonant Diaphragm Pressure Sensors, J.G. Smits, H.A.C. Tilmans and T.S.J. Lammerink, 1985. |
A Piezoelectric Micropump Based On Micromachining Of Silicon, H.T.G. van Lintel, F.C.M. van de Pol and S. Bouwstra, 1989. |
Study On Microengines: Miniaturizing Stirling Engines For Actuators, N. Nakajima, K. Ogawa and I. Fujimasa, 1989. |
Cryocoolers, Part 1: Fundamentals, by Graham Walker, 1983 Plenum Press, New York, pp. 185-236, especially pp. 212-220. |
A Linear Model of a Free-Piston Vuilleumier Machine Compared to Experimental Results of a Prototype, S. Schulz and B. Thomas, 27th Intersociety Energy Conversion Conference Proceeding, IECEC 1992, San Diego, CA, Aug. 3-7, 1992, vol. 5, pp. 5.75-5.80. |