Mar. 1989 IEEE-"Normally Close Microvalve And Micropump Fabricated On A Silicon Wafer", pp. 29-34, Masayoshi Esashi et al. |
Mar. 1989 IEEE-"Fluid Flow In Micron And Submicron Size Channels", pp. 25-28, John Harley et al. |
Apr. 1990 IEEE-"An Electrohydrodynamic Micropump", pp. 99-104, Axel Richter et al. |
Apr. 1990 IEEE-"Preliminary Investigation Of Micropumping Based On Electrical Control Of Interfacial Tension", pp. 105-110, Hirofumi Matsumoto et al. |
Apr. 1990 IEEE-"Prototype Micro-Valve Actuator", pp. 40-41, John D. Busch et al. |
Apr. 1990 IEEE-"A Micro Chemical Analyzing System Integrated On A Silicon Wafer", pp. 89-94, Shigeru Nakagawa et al. |
Apr. 1990 IEEE-"Micromachined Silicon Microvalve", pp. 95-98, T. Ohnstein et al. |
Sep. 1991 IEEE-"A Piezo-Electric Pump Driven by a Flexural Progressive Wave", pp. 283-288, Shun-ichi Miyazaki et al. |