Number | Name | Date | Kind |
---|---|---|---|
2856497 | Rudenberg | Oct 1958 | |
4190757 | Turpin et al. | Feb 1980 | |
4434197 | Petriello et al. | Feb 1984 | |
4559429 | Holcombe | Dec 1985 | |
4721738 | Ellis et al. | Jan 1988 | |
4751358 | Durand | Jun 1988 | |
4775560 | Katsura et al. | Oct 1988 |
Entry |
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Circelli et al., "Characterization of Reactively Sputtered TiN Films", Solid State Technology, Feb. 1988, pp. 75-78. |
Schrieber et al., "Advanced Microwavable Packaging", Report Four of Advanced Packaging Technologies 1987. |