Number | Name | Date | Kind |
---|---|---|---|
3620875 | Guglielmo et al. | Nov 1971 | A |
4626642 | Wang et al. | Dec 1986 | A |
5217768 | Walters et al. | Jun 1993 | A |
5254824 | Chamberlain et al. | Oct 1993 | A |
5338611 | Lause et al. | Aug 1994 | A |
5391430 | Fabish et al. | Feb 1995 | A |
5439528 | Miller | Aug 1995 | A |
5603795 | Paulauskas et al. | Feb 1997 | A |
5804801 | Lauf et al. | Sep 1998 | A |
5858303 | Schiffmann et al. | Jan 1999 | A |
5879756 | Fathi et al. | Mar 1999 | A |
6103812 | Wei et al. | Aug 2000 | A |
6312548 | Fathi et al. | Nov 2001 | B1 |
6343166 | Hellman et al. | Jan 2002 | B1 |
6344272 | Oldenburg et al. | Feb 2002 | B1 |
6348679 | Ryan et al. | Feb 2002 | B1 |
6350792 | Smetana et al. | Feb 2002 | B1 |
6368994 | Sklyarevich | Apr 2002 | B1 |
20020024170 | Takeshima et al. | Feb 2002 | A1 |
Entry |
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Budraa, N, Batmatz M., Mai, J., Pike, T. and Jackson, H., “Hermetic Wafer Bonding by Use of Microwave Heating”, for NASA's Jet Propulsion Laboratory, Pasadena, California, 2 pages, May 2001. |