Mixing apparatus

Information

  • Patent Grant
  • 6632011
  • Patent Number
    6,632,011
  • Date Filed
    Friday, June 23, 2000
    24 years ago
  • Date Issued
    Tuesday, October 14, 2003
    21 years ago
Abstract
A mixing apparatus 1 comprising a chamber 12 with at least one inlet 16 allowing entry of a solute and a liquid solvent, at least one outlet 52 allowing exit of a solution of said solute and solution, and at least a separator 22 having at least one generally upwardly facing surface 40 and one generally downwardly facing surface 38a, wherein said surfaces define a passageway 50 allowing the solution of the solute and the solvent to pass through and out of the chamber 12, and wherein undissolved solute is descendable along the generally upwardly facing surface 40a.
Description




This invention relates to an electroplating apparatus and, in particular, such an electroplating apparatus which comprises means for facilitating mixing and dissolution of a solute in a solvent, and minimising the amount of undissolved solutes to be carried away from a mixing chamber, e.g. into a chamber of the apparatus where electroplating takes place.




Prior electroplating apparatus is known. An example of prior electroplating apparatus consists of two housings wherein a respective chamber is located therein. A first chamber is for dissolving solutes in a solvent to form an electrolyte solution. The solution is then delivered to a second chamber in which electroplating occurs.




One problem associated with this conventional type of apparatus is that undissolved solute in the first chamber may be delivered, together with the electrolyte solution, to the second chamber. This not only contaminates the second chamber with undissolved solute, which will affect the electroplating process, it is also uneconomical as additional solute is needed to compensate the undissolved solute which is unused for the intended purpose in the second chamber.




Another problem associated with a conventional type of apparatus is that a simple stirring mechanism in the shape of a turbine arranged in a lower portion of the first chamber is often used. This design has a disadvantage in that an undesirably rough current is produced during the dissolution of the solute. Undissolved solute may undesirably be brought to an upper portion of the first chamber by the rough current and carried away from the first chamber.




The present invention seeks to provide an improved mixing apparatus as well as an improved electroplating apparatus which mitigates the disadvantages of the prior art apparatus while affording additional operating advantages.




According to a first aspect of the present invention, there is provided an apparatus useful for mixing comprising a chamber with at least one inlet allowing entry of a solute and a liquid solvent, at least one outlet allowing exit of a solution of the solute and solvent, and at least a separator having at least one generally upwardly facing surface and one generally downward facing surface, wherein the at least one generally upwardly facing surface and the at least one generally downwardly facing surface form at least part of a passageway allowing said solution to pass through and out of the chamber, and wherein undissolved solute is descendable along the generally upwardly facing surface.




Preferably, the separator may include a plurality of separating members.




Advantageously, each of the separating members may comprise a plate member.




Suitably, each plate member may provide a generally upwardly facing surface and a generally downwardly facing surface.




Preferably, the plate members may be disposed side by side with each other.




Advantageously, the upwardly facing surface and downwardly facing surface may be substantially parallel to each other.




Suitably, the upwardly facing surface and the downwardly facing surface may be slanted at substantially 55-65° from a horizontal axis of the chamber.




Preferably, the upwardly facing surface and the downwardly facing surface may be slanted at substantially 60° from the horizontal axis of the chamber.




Advantageously, the mixing apparatus may further comprise a device for agitating the solvent with the solute in said chamber.




Suitably, the mixing apparatus may further comprise a device for detecting concentration of the solution, wherein the detecting device may be located below the separator.




Preferably, the mixing apparatus may further comprise at least one device for allowing the solute to reach a lower portion of the chamber before being mixed with and dissolved in the solvent.




According to a second aspect of the present invention, there is provided an apparatus as described above, wherein said apparatus is part of an electroplating apparatus.




According to a third aspect of the present invention, there is provided an apparatus as described above, wherein said apparatus is liquidly connected to a least one plating cell.











An embodiment of the present invention is now described, by way of example only, with reference to the following drawings in which:





FIG. 1

is a schematic diagram showing a cross section of an electroplating apparatus according to the present invention;





FIG. 2

is a perspective view of a mixing chamber of the electroplating apparatus shown in

FIG. 1

;





FIG. 3

is a perspective view of the mixing chamber shown in

FIG. 2

with the housing removed;





FIG. 4

is a schematic diagram showing a cross section of a lower portion of the mixing chamber shown in

FIG. 2

;





FIG. 5

is a bottom view of a suction tube as shown in

FIG. 3

;





FIG. 6

is a bottom view of a sprinkler tube as shown in

FIG. 3

;





FIG. 7



a


is a perspective view showing a portion of a vortex destroyer;





FIG. 7



b


is a top view of a portion of the vortex destroyer shown in

FIG. 7



a;







FIG. 8

is a perspective view showing a portion of a separator of the mixing chamber shown in

FIG. 2

;





FIG. 9



a


is a cross sectional view of a portion of the separator shown in

FIG. 2

;





FIG. 9



b


is a cross sectional view of a portion of a separator having a different construction as compared to

FIG. 9



a.







FIG. 10



a


shows a test tube in which a solute is dissolved in a solvent contained therein; and





FIG. 10



b


shows another test tube in a tilted position in which a solute is dissolved in a solvent contained therein;











An embodiment of an electroplating apparatus


1


according to the present invention is shown in FIG.


1


. The electroplating apparatus


1


can generally be divided into two zones, namely a high concentration zone


44


in which a mixing chamber


12


is located, and a low concentration zone


42


in which a plating sump


26


and a plating cell


28


are located. Above the mixing chamber


12


is provided a feeder


2


driven by a DC motor


6


which is in turn powered by a power supply


8


. The feeder


2


is generally in the form of a chamber with a narrower lower portion within which a further filter


4


(not shown) is comprised. Solute (e.g. solid CuO powder) contained in the housing of the feeder


2


is filtered through the filter


4


before being transported to an outlet


46


of the feeder


2


via a screw feeder


10


.




The mixing chamber


12


is generally rectangular, as shown in

FIGS. 1 and 2

. While the mixing chamber


12


as shown is generally in the shape of a rectangular tank, a different configuration of the mixing chamber


12


may be used. An elongate tube


16


with an inlet


15


having an enlarged opening is arranged on one side of the mixing chamber


12


. The mixing chamber


12


further comprises a separator


22


and a vortex destroyer


48


. The elongate tube


16


is substantially parallel to the vertical axis of the mixing chamber


12


while the separator


22


and the vortex destroyer


48


are arranged horizontally across the mixing chamber


12


. As can be seen, the mixing chamber


12


generally comprises the separator


22


located in an upper portion, the vortex destroyer


48


in a middle portion and a mixing mechanism


20


in a lower portion thereof. The mixing mechanism


20


of the mixing chamber


12


will be described in more detail.




Still referring to

FIG. 1

, the plating sump


26


is generally in the form of a tank defining a cavity therein. The plating sump


26


is of a relatively large size as compared to the mixing chamber


12


. The actual capacities of the mixing chamber


22


and the plating sump


26


are approximately 200 l and 1200 l respectively, although different sizes may also be used. A channel member or pipe


24


leading from an outlet


52


attached to the upper portion of the mixing chamber


12


is connected to the plating sump


26


. A further channel member or pipe


25


leading from an outlet


53


of the plating sump


26


is connected to the mixing chamber


12


.




The plating cell unit


28


connected to the plating sump


26


by pipes


54


comprises a cathode


30


and an anode


32


where electroplating takes place.




As described. the electroplating apparatus


1


can generally be divided in two zones, the high concentration zone


44


and the low concentration zone


42


. In use, solute contained in the feeder


2


is transported by the screw feeder


10


to the outlet


46


via the filter


4


. The filter


4


is used to allow only finer particles of the solute to leave the outlet


46


and enter the elongate tube


16


extending below the vortex destroyer


46


to the lower portion of the mixing chamber


12


. Electrolyte solution with a lower solute concentration from the plating sump


26


can be channelled to enter the inlet


15


of the elongated tube


16


via the pipe


25


, which also serves to flush any solute dispensed from the feeder


2


which sticks to the walls of the inlet


15


down to the tube


16


. Once the solute enters the tube


16


and reaches the lower portion thereof, the solute starts to come into contact with the solvent contained in the mixing chamber


12


. The solute begins to dissolve in the solvent and an electrolyte solution is formed therefrom. The mixing and dissolution of the solute with and in the solvent is explained in more detail as follows.




Referring to

FIGS. 1

to


6


, the mixing mechanism


20


is arranged in the lower portion of the mixing chamber


12


and is driven by a pump


18


. The mixing mechanism


20


facilities the dissolution of the solute by agitating the solvent contained at the lower portion of the mixing chamber


12


. The pumping of the solution via the pump


18


also facilitates the dissolution of the solute. The mixing mechanism


20


comprises three suction tubes


68




a,




68




b


and


68




c


arranged below a sprinkler tube


70


. The suction tubes


68




a,




68




b,




68




c


and the sprinkler tube


70


are secured on holders


76




a,




76




b,




76




c,




78


respectively. The sprinkler tube


70


has two rows of small openings


74


on its underside, as shown in

FIG. 6

, while each of the suction tubes


68




a,




68




b,




68




c


has one row of openings


76


arranged on their underside, as shown in FIG.


5


. The openings


76


on the suction tubes


68




a,




68




b,




68




c


are larger than the openings


74


on the sprinkler tube


70


. The mixing mechanism


20


further comprises two panels


80


in the form of a pair of wings pivotably secured on opposite sides of the mixing chamber


12


, as shown in

FIGS. 3 and 4

. In use, when the mixing chamber


12


is filled with solvent and is in operation, the pump


18


continues to pump solvent contained in the mixing chamber


12


by drawing out the solvent via the openings


76


of the suction tubes


68




a,




68




b,




68




c


and reintroducing the solvent into the mixing chamber


12


by ejecting it via the openings


74


of the sprinkler tube


70


. As such, downward flowing currents are generated just below the holder


84


, as indicated by the arrows “C” in FIG.


4


. The downward currents “C” induce upward flowing currents, as indicated by the arrows “F”, on the peripheral within the mixing chamber


12


which push the panels


80


to move from a lower position “L” to an upper position “U”. A stopper


86


in the form of an inverted “V” is located right above the holder


84


of the sprinkler tube


70


. The stopper


86


can be adjusted so that its legs are spread wider, which stops the panels


80


from moving further above the upper position “U”. Alternatively, additional components may be added to the lower edges of the panels


80


, so that such components abut against the stopper


86


when the panels are in the upper position “U”.




Once the mixing apparatus


64


is in operation, the panels


80


swing upwards and maintain their upper position “U” supported by the constant upward flowing currents generated by the outputting of recirculated solvent from the sprinkler tube


68


. The maintaining of the upper position of the panels


80


creates an enclosed area within the lower portion of the mixing chamber


12


where dissolution and mixing of the solute with the solvent occurs. Although the enclosed area is not perfectly water tight and thus still allows solvent to move from the lower portion of the mixing chamber


12


to the middle and upper portions of the mixing chamber


12


, the rough current generated by the suction of the suction tubes


68


and the sprinkler tube


70


is substantially confined to the lower portion of the mixing chamber


12


.




A sensor


14


is connected to a spectrophotometer (not shown) which constantly monitors the concentration of the solute in the solution contained in the mixing chamber


12


. A tube


13


is connected to the sensor


14


which allows the flow of a small amount of solution from the mixing chamber


12


to the sensor


14


. When the concentration of the solute in the mixing chamber


12


drops to a level below the value selected by a user, the DC motor


6


is initiated so that more solute is delivered to the mixing chamber


12


via the tube


16


. Once the sensor


14


senses that the concentration of the solute reaches a pre-selected level, the DC motor


6


ceases to operate and delivery of fresh solute from the feeder


2


to the tube


16


is stopped.




Another sensor


36


is connected to the plating sump


26


which senses the concentration of the solute in the solution contained therein. When the concentration drops below a certain level selected by a user, valves


37


are caused to open and the solution contained in the plating sump


26


is in turn allowed to flow to the mixing chamber


12


via the channel


25


. As the mixing chamber


12


is constantly kept full of the solution, the flowing of additional solution to the mixing chamber


12


causes the mixing chamber


12


to overflow. Overflowed solution is channelled from the outlet


52


to the plating sump


26


via the pipe


24


. Since the plating sump


26


has a lower concentration of the solute, replacement of some of the solution contained therein with fresh solution containing a higher solute concentration will increase the overall concentration of the solute in the solution contained in the plating sump


26


. Once the sensor


36


senses that the concentration of the solute in the plating sump


25


reaches above the pre-selected level, the valves


37


will shut down and flowing of solution from the plating sump


26


to the mixing chamber


12


is stopped.




The mixing apparatus further comprises a cooling mechanism having a pipe


90


carrying coolant therethrough. As shown in

FIGS. 2 and 3

, the coolant pipe


90


is arranged adjacent to a surface of the mixing chamber and is extended from the upper portion to the lower portion of the mixing chamber


12


. During the dissolution of solute in the solvent, much heat is generated. Relatively cold water (at around 9° C.) is introduced into the tube and such water emerges from the mixing chamber


12


at a temperature of around 13° C. The cooling mechanism regulates the temperature of the solution contained in the mixing chamber


12


.




The plating sump


26


requires a regulated supply of solution dissolved with a desired level of solute suitable for supplying to the plating cell


28


for electroplating. When the concentration of the plating sump


26


drops below a desired level, fresh supply of solution with a higher concentration of dissolved solute is delivered to the plating sump


26


via the outlet


52


and the channel member


24


for subsequent replenishment of the solution in the plating cell


28


. The substantially larger containing capacity of the plating sump


26


relative to the mixing chamber


12


allows a more effective management of the constant concentration of the solute in the solution in the plating cell


28


. This is because a large supply of higher concentration of solute in the solution is ready to meet the need of the plating cell


28


.




Before the solution contained in the mixing chamber


12


is transported to the plating sump


26


, it passes through the vortex destroyer


48


and the separator


22


. The passage of solution through the vortex destroyer


48


and the separator


22


is explained in more detail as follows.




In order to regulate the passage of the solution across the separator


22


so as to minimise the amount of undissolved solute to be carried away from the mixing chamber


12


, the vortex destroyer


48


is introduced below the separator


22


, as shown in FIG.


1


. Referring to

FIGS. 7



a


and


7




b,


the vortex destroyer


48


is in the form of multiple layers of mesh-like (“#”) structures


56


. There are three layers of the mesh-like structures


56


in the present embodiment, although a different number of layer can be used depending on a number of factors including the dimensions of the mixing chamber and the vortex destroying effect desired. Each layer of the mesh-like structure


56


has a plurality of upstanding wall members


58


arranged substantially parallel to each other. The thickness of each wall


58


is 2 mm, the distance between adjacent walls


58


is 13 mm, and the height of each wall


58


is 10 mm, although a different dimension of the walls


58


may be used. The layers of the mesh-like structure


56


are arranged and stacked on top of each other so that each layer is slightly off centre in relation to the layers located above and below. This arrangement enhances the vortex destroying effect upon the current generated by the mixing mechanism


20


at the lower portion of the mixing chamber


12


.




Referring to

FIG. 8

, the separator


22


is generally comprised of a plurality of dividing boards or plates


34


in the form of walls defining a plurality of channels


50


. In particular, each channel


50


is defined by the surrounding dividing boards


34


. The dividing boards


34


are preferably constructed so that opposing surfaces


38




a,




40




a


defined by adjacent dividing boards


34


are substantially and preferably parallel to each other and slanted at approximately at 55-65° (φ) from the horizontal axis of the mixing chamber


12


. The surfaces


38




a,




40




a


are preferably smooth, although such may be planar or undulated. The construction of the dividing boards


34


and functions of the surfaces


38




a,




40




a


defined thereby will be explained in more detail below.




It is found that as solute (e.g. copper oxide, CuO


(s)


) is dissolved in and mixed with a solvent (e.g. H


2


SO


4


), bubbles of oxygen gas are formed during the dissolution and mixing process. Because of the lower relative density of the gas bubbles, the gas bubbles rise naturally to the upper surface of the solution in a container, i.e. the mixing chamber


12


. On the other hand, because of the higher relative density of the dissolving solute, the solute particles tend to sink to the lower portion of the mixing chamber


12


. However, during this process, some of the undissolved solute particles may be carried upwards by the ascending bubbles towards the upper portion of the mixing chamber


12


as shown in

FIG. 9



b.


This not only prevents the complete and efficient dissolution of the solute particles preferably taking place in the lower portion of the mixing chamber


12


where the mixing mechanism


20


is located, undissolved solute particles may undesirably be transported to the plating sump


26


via the outlet


52


and the channel member


24


, and eventually the plating cell


28


via channel members


54


.




To mitigate the above problem, the separator


22


as described above is designed to minimize the undissolved solute particles from reaching the plating sump


26


. The following experiments were carried out and the results thereof are illustrated.




Experiments 1, 2 & 3 (as shown in FIGS.


10




a


&


10




b


respectively)




Objective




To estimate the effect of inclined angle on the time of dissolution of a solute in a solvent.




Test Conditions





















Experiment 3






Conditions




Experiment 1




Experiment 2




(repeated 3 times)











Volume of




100 ml




100 ml




100 ml






solvent






(solution)






Container used




100 ml test tube




100 ml test tube




100 ml test tube






Temperature




room temperature




room temperature




room temperature






Solute used




copper (II) oxide




copper (II)




copper (II) oxide








dioxide






Solvent used




sulphuric acid




sulphuric acid




sulphuric acid














Procedures




Copper (II) oxide (in powder form) is added to the sulphuric acid contained (with stirring) in test tube.




Results






















Experiment 3







Experiment 1




Experiment 2




(average values)



























Copper oxide added




1.6 gm




7 gm




7 gm






Position of the




vertical




vertical




inclined at 60°






test tube






from the









horizontal axis






Height of clear




90 mm




90 mm




50 mm






from the surface






of the solution






Time for copper




10 minutes




10 minutes




5 minutes






oxide particles to






clear (dissolve)














Observations




Gas bubbles


62


were observed rising while copper oxide particles


60


descended by gravity as shown in

FIG. 10



a.


The rising gas bubbles appeared to slow down the descending of the copper oxide particles. It was also observed from the Experiment 3 that the gas bubbles


62


rose along an upper surface


38




b


of the test tube while the descending copper (II) oxide particles


60


moved along a lower surface


40




b


of the test tube, as shown in

FIG. 10



b.






Conclusions




By looking at the results from the above three experiments, it is concluded that the descending and dissolution of copper oxide


60


is slowed down by the rising gas bubbles, if the test tube is positioned substantially upright (as in Experiments 1 and 2). It was also found that when two oppositely facing surfaces (i.e.


38




a


&


40




a,




38




b


&


40




b


) tilted at an angle to the vertical are provided, the descending and dissolving of the solute


60


as well as the rising of the gas bubbles


62


are facilitated. It was specifically found that an approximately 60° inclination of the test tube relative to the horizontal axis (as shown in

FIG. 10



b


) provides optimal results for dissolving a solute in a solvent, although an inclination of from 55° to 65° relative to the horizontal axis will provide satisfactory results.




Based on this conclusion, the separator


22


is designed with a plurality of channels


50


for passing of the rising gas bubbles as well as descending and dissolving of the solute particles. In particular, the upwardly facing lower surface


40




a


provides a platform for the solute particles to descend during dissolution while the downwardly facing upper surface


38




a


allows the gas bubbles to rise along. This minimises the upward moving of the solute particles which may be transported to the plating sump


26


.



Claims
  • 1. A mixing apparatus comprising:a mixing chamber with at least one inlet allowing entry of a solute and a liquid solvent, and at least one outlet located at an upper portion of said mixing chamber allowing exit of a solution of said solute and solvent; a mixing mechanism located at a lower portion of said mixing chamber for mixing said solute with said solvent; a separator located substantially between said mixing chamber and said outlet; said separator having at least one generally upwardly facing surface and at least one generally downward facing surface, each said surface being oriented at an incline; said upwardly facing surface being so located and so designed such that gas bubbles produced when said mixing mechanism is operated are channeled by said upwardly facing surface in a direction generally away from said mixing mechanism; and said downward facing surface being so located and so designed such that undissolved solute is directed by said downward facing surface to an area generally proximal said lower portion of said mixing chamber.
  • 2. An apparatus according to claim 1 wherein said separator includes a plurality of separating members.
  • 3. An apparatus according to claim 2 wherein each of said separating members comprises a plate member.
  • 4. An apparatus according to claim 3 wherein each said plate member provides a generally upwardly facing surface and a generally downwardly facing surface, each said surface oriented at an incline.
  • 5. An apparatus according to claim 4 wherein said plate members are disposed side by side with each other.
  • 6. An apparatus according to claim 3 wherein said plate members are disposed side by side with each other.
  • 7. An apparatus according to claim 1 wherein said upwardly facing surface and said downwardly facing surface are substantially parallel to each other.
  • 8. An apparatus according to claim 1 wherein said upwardly facing surface and said downwardly facing surface are slanted at substantially 55-65 degrees from a horizontal axis of said chamber.
  • 9. An apparatus according to claim 1 wherein said upwardly facing surface and said downwardly facing surface are slanted at substantially 60 degrees from a horizontal axis of said chamber.
  • 10. An apparatus according to claim 1 wherein said mixing mechanism comprises a device for agitating said solvent with said solute in said mixing chamber.
  • 11. An apparatus according to claim 1 further comprising a detecting device for detecting a concentration of said solution, wherein said detecting device is located below said separator.
  • 12. An apparatus according to claim 1 further comprising a device for allowing said solute to reach a lower portion of said chamber before being mixed with and dissolved in said solvent.
  • 13. An apparatus according to claim 1 further including at least one plating cell liquidly connected to said apparatus.
  • 14. An apparatus according to claim 1 wherein said upwardly facing surface and said downwardly facing surface define a passageway allowing said solution to pass through and out of said chamber via said outlet.
  • 15. An apparatus according to claim 1 in combination with an electroplating apparatus for providing said solution thereto.
  • 16. An apparatus according to claim 1 further including a vortex destroyer located between said mixing mechanism and said separator.
Priority Claims (1)
Number Date Country Kind
00105420 Mar 2000 CN
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