Claims
- 1. A manifold for mixing chemistries, said manifold comprising:a manifold interior chamber; a premixing portion of said manifold interior chamber; a plurality of inlets coupled with said premixing portion of said manifold interior chamber, said inlets each adapted to be coupled with a chemistry line, said premixing portion being disposed to premix chemistries; a mixing element within said chamber; an agitator coupled with said mixing element and adapted to agitate said mixing element so as to further mix said premixed chemistries; and an outlet coupled with a wafer polishing platen.
- 2. The manifold as in claim 1 wherein said mixing element comprises a generally cork screw shape.
- 3. The manifold as in claim 1 wherein said agitator is a translation device that is adapted to linearly translate said mixing element so as to further mix said premixed chemistries.
- 4. The manifold as in claim 1 wherein said agitator comprises a rotation device that is adapted to rotate said mixing element so as to further mix said premixed chemistries.
- 5. The manifold as in claim 1 wherein said agitator comprises a vibration device that is adapted to vibrate said mixing element so as to further mix said premixed chemistries.
- 6. The manifold as in claim 1 further comprising a chemistry tube coupled between said outlet and said platen for delivering said mixed chemistries to said platen.
- 7. An apparatus for mixing chemistries, said apparatus comprising:a plurality of lines, wherein each of said lines is adapted to be coupled with a chemistry source; a mixing manifold comprising a premixing portion, an outlet, and a plurality of inlets, each of said lines coupled with one of said inlets; a mixing element operable within said manifold between said premixing portion and said outlet and being positioned such that chemistries introduced into said manifold at said inlets are premixed at said premixed portion and then pass said mixing element prior to reaching said outlet; an agitator coupled with said mixing element and adapted to agitate said mixing element so as to further mix said premixed chemistries; and a pressure source operable to facilitate mixing of said chemistries in said mixing manifold.
- 8. The apparatus as in claim 7 wherein said mixing element is a mixing element having a generally cork screw shape.
- 9. The apparatus as in claim 7 further comprising a line coupled with said outlet and adapted to be coupled with a wafer polishing platen.
- 10. A method of mixing chemistries, said method comprising:providing a manifold comprising an interior chamber having a premixing portion, and a plurality of inlets coupled with said premixing portion of said interior chamber, each of said inlets adapted to be coupled with a chemistry line; introducing said chemistries into said premixing portion of said interior chamber so as to premix said chemistries; agitating a mixing element operable within said interior chamber so as to further mix said premixed chemistries; providing a pressure source, said pressure source operable to facilitate mixing of said chemistries in said interior chamber; and providing an outlet operable for coupling said interior chamber to a wafer polishing platen.
- 11. The method as in claim 10 wherein said agitating a mixing element comprises agitating a generally cork screw shape mixing element.
- 12. The method as in claim 10 wherein said agitating a mixing element comprises agitating a translation device that is adapted to linearly translate said mixing element so as to mix said premixed chemistries.
- 13. The method as in claim 10 wherein said agitating a mixing element comprises utilizing a rotation device that is adapted to rotate said mixing element so as to mix said premixed chemistries.
- 14. The method as in claim 10 wherein said agitating a mixing element comprises utilizing a vibration device that is adapted to vibrate said mixing element so as to mix said premixed chemistries.
- 15. The method as in claim 10 and further comprising coupling said outlet to said wafer polishing platen.
- 16. The method as in claim 10 wherein said interior chamber is substantially longer horizontally than it is vertically to promote premixing of said chemistries.
- 17. The method as in claim 10 wherein said mixing element operable within said interior chamber is not operable within said premixing portion of said interior chamber.
Parent Case Info
This application claims the benefit of U.S. Provisional Patent Application No. 60/280,180, entitled “Mixing Manifold for Multiple Inlet Chemistry Fluids”, filed on Mar. 30, 2001.
This application is related to the following pending U.S. Patent Applications, the complete disclosures of which are incorporated herein by reference:
U.S. patent application Ser. No. 09/808,790, entitled “Cluster Tool Systems and Methods for Processing Wafers,” filed on Mar. 15, 2001;
U.S. patent application Ser. No. 09/808,749, entitled “Cluster Tool Systems and Methods for In Fab Wafer Processing,” filed on Mar. 15, 2001;
U.S. Provisional Application No. 60/202,495 entitled “Methods to Eliminate Waviness While Grinding As-Cut Semiconductor Substrate Wafer,” filed on May 5, 2000; and
U.S. patent application Ser. No. 09/808,748, entitled “Cluster Tool Systems and Methods to Eliminate Wafer Waviness During Grindin”, filed on Mar. 15, 2001.
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