Patent Grant
7652815
1. Field of the Invention
This invention relates generally to high quality short period bulk domain inversion structures (gratings), and more particularly to high quality short period bulk domain inversion structures (gratings) that are fabricated in substrate materials such as MgO doped congruent lithium niobate using electric field poling.
2. Description of the Related Art
Quasi phase matching (QPM) is an efficient way to achieve nonlinear optical interactions. The approach was first proposed by Bloembergen et al. (U.S. Pat. No. 3,384,433), using a domain inversion grating structure to achieve QPM. Such a domain grating structure can be usefully realized in an optically transparent ferroelectric material, such as lithium niobate (LiNbO3), lithium tantalate (LiTaO3) and potassium titanyl phosphate compounds (KTP). There are many different ways to achieve inverted domain structures in these materials.
A periodic poled material structure can be grown directly within the material by modifying a parameter during the growth process, such as temperature, or a dopant concentration. Ming et al. (“The growth striation and ferroelectric domain structures in Czochralski grown LiNbO3 single crystals,” Journal of materials Science, v11, p. 1663, 1982.) used variation of temperature, growth rate and solute concentration during Czochralski growth to create a periodic structure in Lithium Niobate. Laser heated pedestal growth is disclosed in U.S. Pat. No. 5,171,400 by Magel et al. from Stanford University. This method can produce gratings with periods as short as 6 μm and 4 μm, but it is difficult to grow long lengths and curvature of the domains limits the lateral dimensions and efficiency.
Impurity doping or material removal in some ferroelectric materials (such as lithium niobate and KTP) can result in domain inversion. In lithium niobate, periodic domain inversion gratings can be achieved through high temperature processes such as titanium indiffusion, lithium outdiffusion (in air, or enhanced with surface layers of SiO2 and MgO) or proton exchange. A mechanism for the domain inversion was proposed by one of the present inventors, based on space charge field of impurity gradients (Huang et al. “A discussion on domain inversion in LiNbO3”, Appl. Phys. Lett. v65. p. 1763, 1994). Byer et al. at Stanford University (U.S. Pat. No. 5,036,220) demonstrated a waveguide frequency converter wherein the domain structure was created using titanium indiffusion in lithium niobate.
Due to the typically shallow impurity diffusion depths, the inverted domains are also typically shallow and generally triangular or semicircular in depth in lithium niobate.
A high voltage may be used to generate domain inversion at room temperature. Papuchon (U.S. Pat. No. 4,236,785) demonstrated patterned electric field in-plane poling on lithium niobate to achieve waveguide quasi-phasematched nonlinear interactions. Short period domain inversion in Z-cut congruent lithium niobate (CLN) was first demonstrated by Yamada at Sony in 1992 (U.S. Pat. No. 5,193,023) but the described process suffered from limitations in the material thickness and high instances of destructive electrical breakdown. Since this first report many different techniques of applying the electric field have been demonstrated, generally enabling electric field induced domain inversion to be achieved at or near to room temperature, in contrast to the methods of impurity diffusion. Approaches include the use of patterned metal electrodes, patterned insulators with liquid electrodes (e.g., U.S. Pat. No. 5,800,767 and U.S. Pat. No. 5,519,802) and corona discharge (Harada et al. “Bulk periodically poled MgO:LiNbO3 by corona discharge method”, Appl. Phys. Lett V 69, #18, p2629, 1996, Fuji Photo Film Co Ltd). The common feature of all of these approaches is the creation of a localized electric field modulation (or patterned electric field) on one face of the substrate.
Bombardment with a high energy electron beam can be used to induce bulk domain inversion in congruent lithium niobate at room temperature as demonstrated by Yamada at Sony (Yamada et al. “Fabrication of periodically reversed domain structure for SHG in LiNbO3 by direct electron beam lithography at room temperature,” Elect. Lett. Vol 27 p. 828, 1991), without the use of an applied voltage. Ito et al. also performed electron beam writing of domain gratings in lithium niobate (Ito et al., “Fabrication of periodic domain grating in LiNbO3 by electron beam writing for application of nonlinear optical processes” Elect. Lett. Vol 27 p. 1221, 1991). The high energy electrons incident on the substrate penetrate the surface and are trapped inside the substrate. These localized trapped electrons in the material result in localized high electric field that causes domain inversion. Earlier work by Keys et al. (“Fabrication of domain reversed gratings for SHG in lithium niobate by electron beam bombardment”, Electronics Letters, V26, #3 p 188, 1990) used a mask to pattern the bombardment of a high energy electron beam on congruent lithium niobate and, combined with an elevated temperature and a small applied voltage, provided patterned domain inversion.
In essence, all the methods described above are electric field poling. The orientation of the internal dipole moment is reversed under the influence of the local and global electric field. In direct growth, and impurity diffusion approaches the electric field is generated from a temperature gradient, or a dopant gradient. With electron beam bombardment the electric field is created by the trapped electrons injected into the substrate from a high energy beam.
Early work in electric field poling for QPM applications concentrated largely on congruent lithium niobate since this is by far the most widely available nonlinear optical material and also one of the most versatile, with a transparency range from about 400 nanometers (nm) to 5 microns (μm) in wavelength. However, as applications have come to be developed for the visible spectrum, the large numbers of defects in the congruent crystal structure, together with trace impurities incorporated during the growth process, give rise to a property called photorefractivity. The photorefractive effect is caused by the directional drift of photo-excited charges generated by absorption of visible and ultraviolet (UV) light within the material, which creates a space-charge electric field. The space-charge electric field leads, via the electro-optic effect, to a refractive index change which distorts the optical beam passing through the crystal. In order to be used in applications using or generating visible light, congruent lithium niobate needs to be doped with about 5% MgO, as shown by Bryan et al. (“Increased optical damage resistance in Lithium Niobate,” Appl. Phys. Leff. V44. p 84, 1984) to overcome the effects of structural defects and eliminate the photorefractive effect.
However the MgO dopant in MgO:CLN brings an even bigger challenge in realizing periodic domain structures. Many groups of researchers around the world have been working on electric field poling of MgO:CLN. For example, corona poling was attempted by Fuji (Harada et al “Bulk periodically poled MgO—LiNbO3 by corona discharge method” Appl. Phys. Lett. V69 p 2629); the use of elevated temperatures was attempted by Mitsubishi Cable (U.S. Pat. No. 6,565,648), and Matsushita (Mizuuchi et al. “Electric field poling in Mg doped LiNbO3”, Jnl Appl Phys, V96, #11, 2004, Mizuuchi et al “Efficient second harmonic generation of 340 nm light in a 1.4 μm periodically poled bulk MgO:LiNbO3”, Jpn J Appl Phys V42, p 90-91, 2003); ultra-violet light and laser light energy assisted poling has been attempted by several other groups (Muller et at “Influence of ultraviolet illumination on the poling characteristics of lithium niobate crystals” Apl Phys Lett V83 #9 p 1824 2003, Valdivia et al “Nano scale surface domain formation on the +Z face of lithium niobate by pulsed ultraviolet laser illumination,” Appl Phys Lett V86 2005, Fujimura et al. “Fabrication of domain inverted gratings in MgO:LiNbO3 by applying voltage under ultraviolet irradiation through photomask at room temperature”, Elect Lett V39 #9 p 719 2003, Dierolf et al “Direct write method for domain inversion patterns in liNbO3”, Apl Phys Lett V84 #20 p 3987 2004). However, short-period-domain-grating structures have not been achieved at room temperature in a reliable and repeatable manner.
Part of the difficulty in poling MgO:CLN is the observation that there is current flow through the substrate other than the poling displacement current during the poling process. This current flow results in preferential growth of domains which are formed early in the poling process and disrupts the domain seeding uniformity and therefore the uniformity of the final grating pattern.
It is also found that the domain wall boundary in Mg doped CLN seems to be aligned less rigidly along the crystal axis than in the undoped CLN material. Since the inverted domain structure does not strictly follow the crystal structure, it is fundamentally challenging for the inverted domain to propagate through the entire thickness of the substrate while maintaining the lateral dimensions of the masking pattern applied on one surface of the substrate.
Accordingly, there is a need to provide an improved domain inverted grating device with high efficiency and high resistance to photorefractive effects and a fabrication method able to control the domain growth through the bulk of the crystal for short period domain inversion gratings for applications in high power visible light generation.
Accordingly, an object of the present invention is to provide a domain grating device, and its associated fabrication methods, that has controlled domain growth through the bulk of a crystal substrate for uniform short period domain inversion gratings.
Another object of the present invention is to provide a domain grating device fabrication method, using the generation of mobile charges in a crystal substrate to improve the seeding of inverted domains and to guide the growth of the domains through the bulk of the crystal substrate for improved poling quality.
Another object of the present invention is to provide an improved domain grating device that results in high efficiency bulk domain grating devices for applications in generating high power visible laser light. This is achieved in a domain grating device that has a crystal substrate with first and second opposing surfaces. The substrate has an inverted domain grating structure that extends through the entire substrate. An inverted domain average duty cycle at the first surface is greater than 50% and less than 100%, and an inverted domain average duty cycle at the second surface is less than 50% and greater than 0% ensuring a region of 50% duty cycle within the substrate.
In another embodiment of the present invention, a method is provided for creating an improved domain grating device. A crystal substrate is provided with first and second opposing surfaces. Optical illumination is used to generate mobile charges and patterned current flows. An inverted domain grating structure is formed that extends through the entire substrate. An inverted domain average duty cycle at the first surface is greater than 50% and less than 100%, and an inverted domain average duty cycle at the second surface is less than 50% an greater than 0%.
a and 7b illustrate the effect of domain inversion mask misalignment on poling for one embodiment of the present invention.
c and 7d illustrate the effect of 3-dimensional tapering on the shape of the inverted domain.
In one embodiment of the present invention, an improved domain inversion structure is provided that has optimized efficiency, reliable fabrication and ease of characterization. This improved domain inversion structure is the result of a new high voltage electric field poling based fabrication process which involves the generation of mobile charges within the substrate that is to be poled, accompanied by the application of a patterned high voltage electric field. This combination results in a patterned current flow through the substrate and creates a patterned domain inversion structure within the substrate. Various combinations of charge generation and voltage application can be used to tailor the size and shape of the domain inverted regions.
In one embodiment, as illustrated in
In frequency conversion applications utilizing a first order QPM grating the optimum efficiency is achieved with a 50/50 duty cycle between the two anti-parallel domain orientations. The importance of the domain duty cycle can be seen in
When the poling process is controlled by computer based on the amount of charge that has been transferred onto the substrate (a measure of the amount of domain inversion that has occurred), if there are a number of defects in the lithographically patterned poling mask that cause a number of domains to merge together, the charge involved in causing the merging will result in less domain inversion in the remaining pattern, potentially resulting in a lower than desired duty cycle overall. Since in undoped congruent lithium niobate the inverted domain is generally uniform in dimension throughout the bulk of the substrate, a domain grating that is either over or under duty cycle at the surface as a result of one of the above parameters will not provide optimum conversion efficiency.
In one embodiment of the present invention, a tapered domain grating device is provided where an ideal first order QPM 50/50 duty cycle is realized inside the substrate for efficient nonlinear interactions as shown schematically in
When the device of
Highly efficient domain gratings can be achieved utilizing this device structure. For example, an effective nonlinear coefficient of greater than 16 picometers/volt (pm/V) has been achieved for blue frequency doubling with a grating period of 4.45 μm.
In one embodiment of the present invention, fabrication methods are provided that involve the generation of mobile charges within the substrate that is to be poled, accompanied by the application of a patterned high voltage electric field. This combination results in a patterned current flow through the substrate and creates a patterned domain inversion structure within the substrate. Various combinations of charge generation, voltage application and patterning mask can be used to tailor the size and shape of the domain inverted regions.
One basic approach of the invention is shown in
the patterned insulating layer may also provide a modulation of the electric field strength within the substrate. The mobile charges which are generated in the bulk of the substrate by the spatially uniform illumination, and which form the photocurrent in response to the applied electric field, are constrained to flow through the patterned mask apertures, creating a large current density at the apertures which provides a strong effect in lowering the coercive field (here the coercive field is macroscopically defined as the applied voltage that induces polarization reversal in the substrate, divided by the thickness of the substrate) and enabling the controlled seeding of patterned domain inversion. The present inventors have observed that the effective coercive field of the substrate is generally decreased as the magnitude of the photocurrent is increased, for instance by increasing the intensity of the illumination, or by altering the spectrum of the illumination.
Here, transversely spatially uniform light illumination means that the incident illumination is substantially uniform in intensity and spectrum across the transverse dimensions of the illuminated portion of the substrate surface, which is generally equivalent to the poling area. This uniformity is highly desirable in order to achieve a uniform spatial domain inversion pattern over the entire poling area. It should be noted that the illumination will not be uniform in the direction of the light propagation in the bulk of the material since absorption will decrease the intensity and change the spectral mix of the illumination as the light propagates into the material. The transverse uniformity of the domain inversion pattern should be maintained as long as the properties of the bulk substrate are uniform over the transverse dimensions of the illuminated region. The phrase “uniform illumination” should be taken to refer to illumination which is substantially uniform over the transverse dimensions of the illuminated region. It should also be noted that the spatially uniform light illumination does not have to be spatially uniform at all times. That is, the time averaged intensity and/or spectral content over a time period considerably shorter than the total illumination time should be substantially uniform, but the instantaneous intensity may vary across the illumination area. The requirement for illumination uniformity is based on a requirement for substantially uniform mobile charge generation across the illuminated region so that the electric field poling process is initiated at substantially the same point in time across the entire aperture, and is able to proceed at substantially the same rate over the illuminated area. It is well understood in the art that random domain size variations occur as a result of random delay times for the initiation of domain inversion after the application of the poling voltage such that even a uniform grating is understood to have some small variation in domain feature size and duty cycle along and across the extents of the grating area. In the presence of a material non-uniformity, such as a dopant concentration non-uniformity, the illumination uniformity can be tailored to result in uniform mobile charge generation in the substrate. That is, the illumination intensity can be varied transversely across the substrate such that even in the presence of the dopant concentration non-uniformity, the mobile charge generation remains substantially uniform and the resulting domain inversion pattern is also substantially uniform. The applied electric field should also preferably be substantially uniformly applied across the illuminated area in order to provide substantially uniform domain inversion (i.e., there should be no significant monotonic field variation across the transverse dimension of the substrate), although localized modulation of the electric field is desired for optimum poling. In the case of the material non-uniformity described above, the strength of the applied electric field could be varied across the transverse dimensions of the poling area instead of the illumination uniformity, in order to counteract the material uniformity. Alternatively, both the electric field and the illumination may vary across the poling area in such a way that their combination produces a uniform poling pattern, with or without the presence of a material non-uniformity.
The distributed nature of the photo-charges within the material and the patterned photo-current flow effectively define the domain inversion pattern throughout the bulk of the substrate, leading to very high aspect ratio domain inversion features and very high quality short period domain inversion gratings. The current masking windows in the patterned electrode on one of the surfaces of the substrate, and the higher conductivity of the seeded domain walls growing in the bulk of the substrate enable a patterned current flow through the bulk of the substrate due to the photo-excited charges. These “patterned” moving charges can be envisioned as a virtual electrode in the bulk of the substrate.
Controlling the combination of applied voltage, illumination intensity, illumination wavelength(s), illumination time, photocurrent/charge and poling charge, enables control to be exercised over the size and shape of the resulting domain inverted features. It has been shown by the present inventors that with the appropriate illumination and voltage parameters (as described in the following preferred embodiments) it is possible to create a substantially uniform short period (<4 micron) domain inversion grating in even 1 millimeter (mm) thick MgO:CLN substrates. The domain inverted features can propagate through the entire thickness of the substrate and can be observed by HF (hydro-fluoric acid) etching on both the front and back faces of the substrate. Thus, domains with aspect ratios of greater than 250:1 can be fabricated substantially uniformly over large areas limited only by the uniformity of the optical illumination, electric field application, and the uniformity of the substrate material itself.
Highly efficient frequency conversion devices can be fabricated using the new fabrication process described here. For example an effective nonlinear coefficient of greater than approximately 16 picometer/volt (pm/V) has been achieved for blue frequency doubling with a grating period of 4.45 μm.
In one embodiment of the present invention, the combination of patterned electric field and uniform illumination minimizes merging and provides improved uniformity and repeatability of domain inversion as compared to a patterned electric field alone. In addition, the peak high voltage that must be applied in conjunction with the uniform illumination is significantly lower that that required for uniform domain seeding at short periods without illumination, which substantially eliminates the possibility of destructive electrical breakdown of the substrate during poling. This is especially important when considering scaling the electric field poling process to full wafer areas, and enables a far more robust process for high yield, high volume manufacturing than that of the application of a high voltage alone.
It has also been determined by the present inventors that the illuminated poling process of the present invention is more resistant to the deleterious effects of thermally induced domain inversion defects. These thermally induced domain inversion defects, often called “heat defects”, result from the lithographic processing of Z-cut lithium niobate wafers. The heating and cooling cycles during the lithography process lead to the buildup of pyroelectrically generated charges on the wafer surface, which can lead to the spontaneous domain inversion of small defect-seeded regions. Thus, a wafer that was uni-domain at the start of the lithographic process may end up with a large number of small, isolated domain inverted regions within it by the end of the process. During the electric field poling process these domains cause merging of the desired pattern and tend to grow to the detriment of the desired domain pattern, leading to reduced domain inversion pattern quality. The present illuminated poling invention has been found to resist the effects of these heat defects and to suppress the tendency for the formation of large merged regions around each defect site during the poling process. Thus the desired domain inversion pattern can still be uniformly seeded and grown with good pattern quality, even when the poled area is increased to allow for wafer scale processing for high volume manufacturing.
It should be noted that others have attempted to use the formation of such “heat defects” as a method of seeding the domain inversion process in MgO:CLN to create uniform domain inversion gratings (Nakamura et al., “Periodic poling of magnesium oxide doped lithium niobate”, Jnl. Appl, Phys, Vol 91, No 7, 2002, p 4528-34). However, the random nature of the “heat defect” locations makes this method impractical for short period gratings. and with the application of a high voltage pulse alone, the preferential expansion of the “heat defects” during the poling pulse causes significant merging and loss of quality in the domain grating.
The size and shape of the inverted domain feature can be controlled by setting appropriate values for the illumination and voltage applied to the substrate. In particular it has been found that varying the illumination spectrum can be used to control the degree of penetration of the inverted domain into and through the substrate for given set of poling parameters. With the appropriate illumination spectrum, which contains some optical power at wavelengths below about 320 nm, it is possible to terminate the domains before the illuminated face (the unpatterned face) of the substrate. If the wavelengths of light below about 320 nm are removed from the illumination spectrum, using an absorption filter for example, full penetration of the domains through the substrate can be readily achieved. Even with these wavelengths removed from the spectrum, it is still possible to terminate the domains within the bulk of the substrate by decreasing the illumination time and/or the illumination intensity compared to the values used to produce a fully penetrated domain inversion pattern.
In another embodiment of the present invention, domain inversion of 0.5 mm thick ˜5% MgO doped congruent lithium niobate is achieved using a patterned metal electrode on one face and a transparent planar electrode on the other face, combined with UV/visible illumination through the transparent electrode. Referring again to
With regard to the photolithographically patterned mask used to define the domain inversion pattern, it has been found by the present inventors that a long line feature is not suitable for poling of short grating periods due to the fact that domain structure tends to follow the hexagonal crystal structure of the substrate, where one of the sides of the hexagon is oriented along the y-axis of the crystal in LiNbO3. When the line feature in the poling mask is defined at an angle with respect to the y-axis, the resulting poled domain generally either displays a jagged edge or expands outwards from the mask feature to form an elongated hexagonal domain, as illustrated in
The domain expands sideways away from the patterned mask feature 705 until the edges of the domain 706 are aligned with the crystal y-axis 704. Thus, the width of the domain is no longer defined by the width of the photolithographically defined mask, but is defined by the effective width 702 of the lithographic feature perpendicular to the y-axis. Hence, the greater the angle 703 of the feature with respect to the y-axis, the greater the width the poled domain becomes before the sides of the domain are parallel to the y-axis.
For optimal poling quality of fine pitch gratings the poling mask should be aligned so that each grating bar, defined by a mask feature 705, is exactly parallel to the y-axis. However, there are a number of difficulties involved in this alignment. Firstly, there is typically a tolerance of ±0.25 to ±0.5 degrees in the angular accuracy of the orientation flat provided by the wafer manufacturer. Secondly, the beveling process applied to the edges of the wafer to remove edge chips and prevent wafer breakage during processing often leads to a slight curvature of the orientation flat, further reducing the effective accuracy. Thirdly, some angular error will be introduced when the poling mask is physically aligned to the orientation flat due to the resolution of the mask aligner and the finite length of the orientation flat at the edge of the wafer.
It can be seen from the domain expansion argument above that, for a given period of grating 712 in
Thus, for a robust production domain inversion process we can define a maximum line length in the poling mask, such that the achievable angular alignment accuracy does not cause the domain grating pattern to merge. For example, if the alignment accuracy is ±0.5 degrees and the grating period is 4 μm, the maximum feature length that can be allowed is L=2 μm/sin(0.5 degrees)=˜230 μm. In this case, a number of line features are patterned on the mask separated by a small distance to make up the full width of the desired poling region.
It is found that the domain shape resulting from the above described poling mask design and the poling process is trapezoidal, and is generally tapered in three dimensions, due to domain termination inside the bulk of the substrate. Besides the effective duty cycle change as described above, the tapering shortens the domain length (poled line length) along the y-axis on the back, illuminated face compared to the front, patterned face. This is not generally favorable for the nonlinear optical frequency conversion interaction, as a reduction in the length of the poled line decreases the effective overlap between the optical beams and the domain inversion grating. Therefore, the poling parameters are preferably tailored to minimize the shortening of the domain length as it propagates through the thickness of the crystal.
c shows a typical inverted domain 720. In general, the domain shape on the front, or patterned surface 722 of the substrate is similar to the shape of the poling mask, although generally somewhat expanded from the size of the mask opening due to the fringe effect at the edges of the electrodes and domain expansion under the photolithographically defined mask. On the back face of the crystal 726 (the illuminated and unpatterned face) the domain shape is generally more hexagonal in nature with points at the + and −y-axis ends of each poling line. The width 723 of the inverted domain 720 on the front surface 722 of the substrate is wider than the width 724 or 725 of the inverted domain on the back surface 726. This illustrates the domain taper in the x-direction with depth through the substrate, which is used in the present invention to obtain an optimal 50-50 duty cycle grating structure within the substrate. The inverted domain width on the bottom face is also generally tapered from larger on one end 724 to smaller on the other end 725. The larger end of the domain is generally oriented towards the −y axis of the crystalline substrate. Additionally, the length of the domain line is generally longer on the front face 722 than the length on the back face 726, illustrating that the domain feature also tapers in the y-direction with depth through the substrate.
The shortening of the domain line length on the back face of the substrate means that there is a reduction of the domain length in the bulk of the substrate. This effectively decreases the overlap of the inverted domain and the optical mode fields and results in a reduced efficiency for the device. To maintain maximum device performance, optimization of the length of the domain on the back face and the taper of the width of the domain on the back face can be performed by adjusting the poling parameters such as UV dose, UV spectrum electrical pulse waveform and combinations of these parameters. For example, a higher voltage spike pulse early in the poling process can increase the domain seeding and growth on the ends of the domain feature, which can more uniformly define the width of the domain at both ends. The length of the spike pulse can be optimized to reduce the domain, length reduction by optimizing the growth of the seed domain along the entire length of the domain grating bar feature. These modifications can be performed independently or together with the optimization of the duty cycle as described in the embodiments above. Preferably, the length of the poling line may be shortened by no more than about 0.5 um through the thickness of the substrate (i.e., the length of a domain at the front face should be within about 0.5 um of the length of the domain on the back face. The width of the domain on the bottom face towards the +y end of the domain may be smaller than the width at the −y end of the domain by no more than about 0.5 um, and preferable by even less than this. Practically, a domain width variation of between about 0.25 um and about 0.5 um from end to end of the domain on the back face of the substrate appears achievable.
In the case of the patterned metal mask (poling mask) used in this embodiment of the invention, the mask features can effectively be broken into grating bars (poling bars) of the desired length simply by depositing and patterning an insulating layer on the surface of the substrate before the deposition and patterning of the metal mask layer. The patterned insulating layer should consist of a series of lines disposed substantially perpendicular to the desired grating bars, and spaced apart by the desired bar length. The metal layer may then be deposited over the top of the insulator and then patterned to provide the grating bars. Where the patterned insulator is interposed between the metal layer and the substrate, the required voltage to achieve domain inversion will be increased, effectively preventing domain inversion from occurring, and hence breaking the patterned metal poling mask into a number of bars of the desired length. In other embodiments of this invention, described in greater detail below, a patterned insulating layer may be used to provide the poling mask. In this case, the poling bars are defined simply by the length of the openings in the photomask that are transferred into the insulating mask and no extra processing is required.
To improve the angular alignment accuracy it is possible to provide domain inverted alignment features which more precisely define the crystal y-axis direction. An initial poling pattern consisting of a few narrow bars parallel to the y-axis is aligned to the wafer orientation flat. The pattern is then poled into the crystal and the domains allowed to expand out from the mask pattern so that their edges are parallel to the y-axis. The poling mask may then be removed and the crystal surface etched in HF to reveal the poled features. Preferably, only the area immediately surrounding the poled features is exposed to the HF to avoid possible damage of the surface still to be poled. A second poling mask consisting of the desired grating pattern is then aligned using the poled features to define the crystal y-axis, thus achieving improved accuracy between the grating lines and the crystal axis. This two step process allows longer individual lines to be poled than are generally possible with single step alignment to the wafer orientation flat.
During the lithography process, there are many thermal processes such as resist baking. It is preferable to control the thermal ramp rates of the substrate/wafer during these baking processes, and also preferable to provide some form of discharge path for pyrolectrically generated charges. MgO:CLN is very prone to the generation of “heat defects,” regions of domain inversion created as a result of pyroelectric charge accumulation on the wafer surface during heating and cooling cycles. In general the “heat defect” domain inversion sites are problematical for the fabrication of high quality short period domain inversion gratings since they tend to lead to merges between adjacent domains and defects, reducing the quality of the grating and the efficiency of any QPM optical frequency conversion process using the grating.
Despite the observation that the illuminated electric field poling process of the present invention is significantly more tolerant of, or resistant to, the deleterious effects of “heat defects” than the prior art electric field poling process, it is still preferable to minimize the number of defects that are formed in order to maximize the quality of the final domain inversion grating.
In the poling process, the electrical contact to each line 602 of the patterned metal electrode may be made by a probe contact 610, as illustrated in
A typical experimental setup for the poling process described above is shown in
The light output from the light source 804, which may be coupled via a light-pipe 803, is arranged to provide sufficient illumination intensity and uniformity across the electrical contact area on the back face of the substrate (e.g., as defined by the transparent electrode 605). Typical intensities of ˜10 watts per square centimeter (W/cm2) at the output of the light-pipe (broadband, all wavelengths from a high pressure mercury bulb) may be used. A beam shaping/expanding system 802 (e.g., a lens system) can be used to increase the illumination beam diameter and/or uniformity on the substrate. Typically about 0.5 W/cm2 of total light intensity is incident at the surface the substrate. Higher and lower intensities may be used with appropriate adjustments in illumination time and applied voltage to achieve domain inversion.
A typical sequence of voltage and UV light poling is shown in
The observed current flow 903 is now composed of two components: 1) the photocurrent 904 due to the charges generated by the illumination, and 2) the poling current 905, displacement current due to the domain inversion. Typically the photocurrent remains substantially constant after its initial growth period, whereas the poling current 905 typically increases to a maximum and then decreases again as the poling is completed. Thus, the poling process can be controlled by monitoring the current flow and terminating the applied voltage 901 when either the current 903 or THE transferred charge reaches some predetermined value (which is also dependent on the magnitude of the photo-current).
After poling, the insulating layer 607 over the metal electrode is stripped off and the metal electrode is etched off. The substrate is then etched in hydro-fluoric acid to reveal the poled pattern. As noted above, it has been found that in general the inverted domains resulting from the above described process are tapered, with a wider line width on the patterned electrode face 603, and a narrower width on the face 610 with the transparent uniform electrode. The width on the patterned face and the depth into the substrate both generally increase with increasing voltage, increasing illumination intensity and increasing illumination time.
It has been observed with some combinations of illumination spectrum, illumination dose (i.e., light intensity×time) and applied voltage, that the inverted domains are terminated inside the bulk of the crystal and do not generally reach the uniformly illuminated face. As noted above, it has been found that the inclusion of short wavelength UV radiation around or below the band gap (˜320 nm in MgO:CLN) in the illumination spectrum has the effect of terminating the domains in the bulk of the crystal.
In general, it can be desirable that the domains penetrate completely through the substrate for optimum device performance and for ease of device characterization, so it is preferable to filter the illumination to remove the shortest wavelengths. A dichroic or absorptive filter may be used to provide selectivity in the wavelengths that are removed.
After etching of the front and back faces of the crystal to reveal the domain inversion patterns, the quality of the domain inversion grating device can be estimated using by measuring the width of the inverted domain and the width of un-inverted domain to obtain the duty cycle on the front and back faces, observing the density of any merged or missing pattern sections, and computing the effective nonlinear optical coefficient through the depth of the substrate based on these measured values, as shown in the example of
After poling, different portions of the crystal have opposite domain orientations. There is a resulting crystal discontinuity at the boundary between the opposite polarity domains. At this boundary, a refractive index pattern can be observed using transmission illumination and crossed polarizers, or a Nomarski microscope. This refractive index pattern may be the result of uncompensated charges at the boundary, causing a refractive index change via the electro-optic effect, or from stress at the boundary via the elasto-optic effect. This refractive index pattern becomes less pronounced after the sample is exposed to UV or short wavelength visible illumination, thermal annealing or simply left at room temperature for some extended period of time.
In order to effectively use the periodically poled (domain inverted) frequency conversion device for the generation of visible light, the discontinuity of the crystal at the domain wall boundary needs to be addressed carefully. The boundary and the associated refractive index change can act as an extra scattering source, increasing the optical loss in the device. In addition, new phenomena such as green induced IR absorption (GRIIRA) and Blue induced IR absorption (BLIIRA) are associated with this boundary structure and the defects introduced by the domain boundary.
In one embodiment of the present invention, to alleviate the effects of the boundary defect structure on the visible light generation process, a high temperature annealing process is used. A discharging closed loop is formed by placing the domain inverted sample between two semi-conductive silicon wafers which are electrically connected to dissipate pyroelectric charges. The sample stack is then placed into a high temperature oven or furnace, typically in an ambient air atmosphere, although alternative oxidizing and reducing atmospheres of, for instance, oxygen and argon respectively may be preferred for some applications. The temperature of the furnace is raised slowly from room temperature up to typically between 500 C and 600 C in about 5 hours. The samples are left at this temperature for a relatively long period, typically around 48 hours, before being cooled down to room temperature. Preferably, the cooling is performed at a rate of a few degrees centigrade per minute, preferably as low as 0.5 C/min. The electrically shorted high temperature annealing process significantly improves the performance of the visible frequency conversion device, especially for short wavelengths in the blue spectrum, by reducing the boundary defect density, uncompensated bonds and charges and stresses at the domain boundaries. For short period frequency conversion devices for visible applications care must be taken not to significantly reduce the material (i.e., to use an atmosphere containing at least some oxygen). It is also necessary to maintain the annealing temperature below the threshold which causes domain boundary motion and domain merging. In MgO:CLN, this domain boundary motion is typically observed in short period domain inversion structures at temperatures in excess of about 650 C, indicating that annealing temperatures are preferably below this value.
As noted above, the exposure of the domain inverted sample to UV and visible radiation appears to reduce the magnitude of the refractive index change at the domain wall boundary. Therefore, it may be advantageous to illuminate the domain inverted sample with UV and or visible light during the high temperature annealing process. In this instance, transparent conducting material is preferably used for the discharging loop (e.g., Indium Tin Oxide (ITO) coated quartz) to enable simultaneous illumination and pyroelectric charge dissipation.
In another embodiment of the present invention, the domain inverted device is partially coated with a conductive layer. Preferably this layer provides a conductive path linking the front and back opposing surfaces of the domain inverted device. The conducting layer may be deposited before or after annealing and dicing of the domain inverted device. If the layer is deposited before dicing, the conductive path may be completed after dicing by for instance painting the side face of the device with conductive silver paint which spills slightly over onto the front and back faces. The conducting layer enables the dissipation of thermally excited charges (pyroelectricity), and also enables the dissipation of photocharges that drift to the edge of the substrate, where they are no longer trapped. Thus, the conductive path over parts of at least three faces of the domain inverted device offers the prospect of decreasing the beam distortion and performance limiting effects of any residual photorefractivity still present in the domain inverted device.
In one embodiment of the present invention, the domain structure, fabricated in MgO:CLN by using a single applied voltage combined with illumination, as described above, generally has a significant taper from front (patterned electrode face) to back (uniform illumination and electrode face) surfaces. The domain features on the uniform illumination/electrode (back) face are generally very narrow. Thus, the optimum conversion efficiency region, e.g., the section of the substrate where the effective nonlinear optical coefficient of the poled structure is greater than some defined level (e.g. 90% of the peak value), is relatively narrow due to the string domain taper. This is illustrated in
In another embodiment of the present invention, the taper of the domain is controlled in order to increase the dimension of the domain on the back face while maintaining good domain quality on the front face and increasing the size of the optimum conversion efficiency region. This can be achieved by applying a voltage pulse or series of pulses to the crystal after the illumination is removed.
The substrate can be prepared as shown in
The experimental setup of
The light output from the light source is arranged to provide sufficient illumination intensity and uniformity across the electrical contact area. Typical intensities of ˜10 W/cm2 (broadband, such as all wavelengths from a high pressure mercury bulb, for example) at the output of the light pipe are used. As previously described, a beam shaping/expanding system can be used to increase the illumination beam diameter and/or uniformity on the substrate. Typically, about 0.5 W/cm2 of total light intensity is incident at the surface the substrate. Higher and lower intensities may be used with the appropriate adjustments in illumination time and applied voltage to achieve domain inversion.
A typical sequence of voltage and UV light poling is shown in
The function of this illuminated voltage pulse (i.e., the combination of voltage 1001 and illumination pulse 1010) is to seed or initiate the domain inversion, so the illumination is terminated before the poling is complete. This termination can be based on an empirically determined time or a charge flow monitored by the computer, at which point the light source shutter is closed and the illumination is blocked. Typical values for this first pulse are a duration of ˜0.5 to 1 sec, and a charge flow of 0.02 to 0.12 milllcoulombs per square centimeter (mC/cm2) at a voltage of ˜2000V (4000V/mm) and an illumination intensity of ˜0.5 W/cm2.
Once the initiation of the domain inversion in the illuminated voltage pulse is performed, the illumination light is shut off and, using the optical monitor 807 for sequencing control, the computer applies a second voltage pulse (post-illumination voltage pulse) 1002. Preferably, this post-illumination voltage pulse is higher in magnitude than that used during the illuminated voltage pulse, since there are no photo-excited charges being generated to decrease the coercive field of the material. Typically a voltage of around 3000-4000V (6000-8000V/mm) may be applied post illumination. During this post-illumination voltage pulse, the poling current 1021 typically increases to a well defined peak 1022, and then decreases to a plateau value 1023. The decrease of the poling current is related to the completion of the domain inversion. If the voltage is removed while the current is at the peak, the poling pattern will typically be under duty cycle and some domain features will be incomplete. If the voltage is maintained until the poling current has decreased to its plateau value the domain pattern will typically be complete, with a duty cycle on the front (patterned) face of the substrate that is dependent on the parameters of the illumination and illumination voltage pulse. Maintaining the voltage for a significant length of time after the current has decreased to its plateau value typically leads to over duty cycle domains and a larger number of merges within the domain inversion pattern. The post-illumination voltage pulse may be controlled using the computer control program based on either the charge flow 1030 within the circuit or the value and gradient of the poling current 1021 or on a combination of both. Thus, poling may be terminated when a particular charge has been transferred, when the current has fallen to a particular value, when the rate of decrease of the current reaches a certain value or any combination of these (and other) parameters.
After electric field poling, the insulating layer 607 over the metal electrode is stripped off and the metal electrode is etched off. The substrate may then be etched in HF to reveal the poled pattern. The inverted domains are generally observed on the back face 610 of the substrate. Tailoring of the dose of illumination, the voltage applied when the illumination is applied, the post-illumination voltage and pulse duration, etc, can be used to adjust the duty cycle of the domain grating and the taper angle of the domain from the front surface to the back surface.
After etching of the front and back faces of the substrate to reveal the domain inversion patterns, the quality of the domain inversion grating device can be estimated using
Optimization of the domain grating quality, duty cycle and taper does not have to be limited to the simple sequence of one illuminated voltage pulse followed by a second higher voltage pulse. Any sequence of illuminated and un-illuminated voltage pulses may be used in any order to provide the required poling charge to realize the desired domain inversion pattern in the substrate independent of the presence of any photo-current due to the illumination.
Voltage pulses can be simultaneous with illumination pulses, voltage pulses can precede or follow illumination pulses, voltage pulses can be longer or shorter than illumination pulses. Time delays may be applied between the termination of one illumination or voltage pulse and the application of the next. In addition, different illumination spectra (light wavelengths) may be used in different illumination pulses with any combination of different applied voltages.
The metal electrode may also be patterned on the −z face, depending on the type of substrate. In general, adjustments of the pulse parameters (such as the direction of the applied illumination, and the magnitude and sequence of the illumination and applied voltages) compared to those used for a +z face patterned crystal will be required to achieve optimal domain inversion patterns.
Because different wavelengths are absorbed in the material at different depths, it is possible to use a time-varying illumination wavelength to produce a variation with time in the depth at which charges are generated within the substrate. In particular, a rotating circular filter where different cut off wavelengths are coated along the circular path may be used to change the illumination wavelength with time during the voltage pulse. A suitable profile of illumination wavelength versus time and, therefore, of charge generation depth, will help guide the domain growth through the bulk of the substrate from the patterned face to the un-patterned face.
Alternatively, a series of fixed wavelength filters may be stepped across the illumination beam in turn to alter the wavelength spectrum incident on the substrate. Preferably, the time taken to introduce or remove the filter from the beam should be short in comparison to the total illumination time so that the transition of the edge of the filter across the beam does not affect the illumination uniformity significantly.
In another embodiment of the present invention, a dielectric current mask with a liquid contact electrode is used, as shown in
Electrical contact to the crystal surface during the poling process may be made using a conductive liquid 1103, such as a solution of lithium chloride in de-ionized water, to form liquid electrodes. The conductive liquid 1103 is preferably applied to the front, patterned face 1105 first and may be confined to the desired contact area using an o-ring and a quartz cover plate or a simple tape cut-out (not shown) as described above. Restricting the contact area of the liquid is preferable in order to ensure the uniformity of the poling process. UV/visible illumination 1104 is incident from the back, unpatterned face 1106 of the substrate. The dimensions of the poling area where the liquid contact is made should preferably match or be less than the dimensions of the area that can be uniformly illuminated by the available light source. If the contact is applied over regions that are not uniformly illuminated, the resulting domain inversion pattern will generally be non-uniform. It should be noted that the electrical contact areas on the front and back faces of the substrate do not have to be the same size. For instance, if electrical contact is made to the entire front face of the substrate at once, the poling area may be defined to a smaller area by confining the liquid electrode on the back face, and preferably the illuminated area, to a small subset of the substrate surface (e.g., using a UV-opaque dicing tape to confine the liquid conductor and cover the remaining portions of the back face of the substrate). Electrical contact between an external circuit and the liquid conductor on the front face of the substrate may be made by placing the substrate front-face-down onto a metal contact plate. Connection to the liquid electrode on the back face of the substrate may be made with one or more probe wires, positioned to allow uniform distribution of voltage and current to the poling area while not obstructing the illumination of the substrate.
It is important to ensure that good electrical contact is made to the substrate surface by the liquid conductor. This may be achieved by adding a small amount of a surfactant to the liquid to reduce the surface tension, allowing it to more readily wet the small features in the photoresist pattern on the front face. Alternatively, the photoresist pattern may be overcoated with a conductor (e.g., by sputtering a metal or carbon conductive layer), so that electrical contact is maintained from the top of the mask down to the substrate surface without the need for the liquid conductor to completely fill each feature in the pattern.
The experimental setup of
The light output from the light source 804 coupled through light pipe 803 and beam shaping/expanding system 802 is arranged to provide sufficient illumination intensity and uniformity across the electrical contact area. Typical broadband intensities of ˜10 W/cm2 at the output of the light pipe may be used as described above. Typically, about 0.5 W/cm2 of total light intensity is incident at the surface the substrate. Higher and lower intensities may be used with the appropriate adjustments in illumination time and applied voltage to achieve domain inversion.
The voltage and illumination sequence illustrated in
As previously describe, the function of the illuminated voltage pulse (i.e., the combination of voltage 1001 and illumination pulse 1010) is to seed or initiate the domain inversion, so the illumination is terminated before the poling is complete. In general, the domains resulting from this illuminated voltage pulse are tapered, and their width on the patterned face and depth into the substrate both generally increase with increasing voltage, increasing illumination intensity and increasing illumination time. This termination can be based on an empirically determined time or a charge flow monitored by the computer, at which point the light source shutter is closed and the illumination is blocked. Typical values for this first pulse are a duration of ˜0.5 to 1 sec, and a charge flow of 0.02 to 0.12 mC/cm2 at a voltage of ˜2000V (4000V/mm) and an illumination intensity of ˜0.5 W/cm2.
The domain shape and size may be further controlled and the quality of the domain inversion grating structure enhanced by applying a further voltage pulse 1002 after the illumination is removed. Preferably, this post-illumination voltage pulse is higher in magnitude than that used during the illuminated voltage pulse, since there are no photoexcited charges being generated to decrease the effective coercive field of the material. Typically a voltage 1002 of around 3500V (7000V per mm) may be applied post illumination. During this un-illuminated voltage pulse, the poling current 1021 typically increases to a clearly defined peak 1022, and then decreases to a plateau value 1023. The decreasing poling current is related to the completion of the domain inversion. If the voltage is removed while the current is at the peak, the poling pattern will typically be under duty cycle and some domain features will be incomplete. If the voltage is maintained until the poling current has decreased to its plateau value the domain pattern will typically be complete, with a duty cycle that is dependent on the parameters of the illumination and illumination voltage pulse. Maintaining the voltage for a significant time after the current has decreased to its threshold value typically leads to over duty cycle domains and a larger number of merges within the domain inversion pattern. The post-illumination voltage pulse may be controlled using the computer control program based on either the charge flow 1030 within the circuit or the value and gradient of the poling current 1021 or on a combination of both. Thus, poling may be terminated when a particular charge has been transferred, when the current has fallen to a particular value, when the rate of decrease of the current reaches a certain value or any combination of these (and other) parameters.
After poling, the insulating mask layer 1102 is stripped off of the substrate front face 1105. The substrate may then be etched in HF to reveal the poled pattern. The inverted domains are generally observed on the back face 1106 of the substrate. Tailoring of the dose of illumination (illumination time and intensity), the voltage applied when the illumination is on, the post-illumination voltage and pulse duration, etc can be used to adjust the duty cycle of the domain grating and the taper angle of the domain from front surface to the back surface.
After etching of the front and back faces of the substrate to reveal the domain inversion patterns, the quality of the domain inversion grating device can be estimated using
As described above, optimization of the domain grating quality, duty cycle and taper does not have to be limited to the simple sequence of one illuminated voltage pulse followed by a second higher voltage pulse. Any sequence of illuminated and un-illuminated voltage pulses may be used in any order to provide the required poling charge to realize the desired domain inversion pattern in the substrate independent of the presence of any photo-current due to the illumination.
Voltage pulses can be simultaneous with illumination pulses, voltage pulses can precede or follow illumination pulses, voltage pulses can be longer or shorter than illumination pulses. In addition, different illumination spectra (light wavelengths) may be used in different illumination pulses with any combination of different applied voltages.
The insulating mask may also be patterned on the +z face, depending on the type of substrate. In general, adjustments of the pulse parameters (such as the direction of the applied illumination, and the magnitude and sequence of the illumination and applied voltages) compared to those used for a −z face patterned crystal will be required to achieve optimal domain inversion patterns.
In another embodiment of the present invention, patterned current flow is generated by a combination of a patterned illumination and a patterned applied electric field. For instance, the substrate may be patterned with an electrically insulating and optically absorbing or reflecting masking material. This mask can simultaneously provide the dual roles of patterning the illumination and the applied electric field. The substrate is illuminated from the masked face, resulting in only the open areas in the mask pattern being illuminated and thus mobile charges being generated only in those areas of the substrate. Preferably, the illumination wavelength(s) are chosen such that the penetration depth into the illuminated regions of the substrate is short, such that no substantial diffraction or interference pattern can result in the substrate which otherwise would allow charge generation in unwanted areas of the substrate. Simultaneously with the illumination, the electric field is patterned by the insulating mask such that the areas of the substrate in the open areas of the mask pattern are subjected to a high electric field, while the field in the areas covered by the mask is lower. The combination of patterned illumination and patterned electric field results in a patterned photocurrent flow in the material which provides enhanced seeding for domain inversion at the patterned face.
Electrical contact to the substrate surface during the poling process is easily made using a liquid conductor (electrolyte) 1207, such as a lithium chloride solution, for example, that functions as a liquid electrode. The electrolyte 1207 is preferably applied to the patterned face first and may be confined to the desired contact area using an o-ring or a simple tape cut-out. It is important to ensure that good electrical contact is made to the substrate surface by the electrolyte. This may be achieved by adding a small amount of a surfactant to the electrolyte to reduce the surface tension, allowing it to more readily wet the small features in the photoresist patter.
Electrical contact to the opposite (back) face of the substrate (the unpatterned or back face) is made in a similar way with a liquid electrode 1205 or, alternatively, may be achieved with metallization of the back face of the substrate. The substrate is oriented with the patterned face facing the output of the UV/visible illumination source. Contact to the liquid or metallic electrode on the unpatterned back face may be made with a simple probe in the liquid contact or to the metal electrode. Contact to the patterned front face may be made using a probe contact to the edge of the liquid conductor 1207 so as not to block the illumination from entering the substrate.
The poling sequence may be described as follows and as illustrated in
Once the light pulse is terminated, a second high voltage pulse (post-illumination voltage pulse) 1002 is applied to the substrate to grow the domains through the substrate. Typically the voltage of the second pulse is around 3500V (˜7000V per mm). During this post-illumination voltage pulse, the poling current 1021 generally increases to a clearly defined peak 1022, and then decreases to a plateau value 1023. The decreasing poling current is related to the completion of the domain inversion. If the voltage is removed while the current is at the peak 1022, the poling pattern will typically be under duty cycle and some domain features will be incomplete. If the voltage is maintained until the poling current has decreased to its plateau value 1023, the domain pattern will typically be complete with a duty cycle that is dependent on the parameters of the illumination and illumination voltage pulse. The post-illumination voltage pulse may be controlled using a computer control program, as described above in reference to the experimental setup of
The choice of wavelength in this embodiment is dictated by the consideration that the light should be absorbed close to the surface of the material. The absorption is preferably strong so as to prevent significant diffraction or the creation of an interference pattern in the bulk of the material. In the absence of diffraction, the photo current will be well-defined by the opening in the insulating mask layer and therefore the domain inversion seeding and subsequent growth will be similarly well-defined, creating the desired domain inversion patter. Preferably, the absorption depth of the illumination is a few microns into the substrate.
In another embodiment of the present invention, a coherent (i.e., single wavelength) UV or visible light source is used as the illumination source, enabling an interference pattern to be created within the substrate. The coherent light source may be a frequency doubled diode pumped solid state laser or gas laser such as an argon or krypton ion laser, or any other laser source operating in the UV/visible spectral region. Absorption of light at the constructive interference fringes within the substrate generates localized concentrations of photo-induced mobile charges. These charges form a photo-current in response to a voltage applied across the faces of the substrate, and this photocurrent/voltage combination is used as previously described to seed domain inversion in a localized manner.
In
An optically transparent conducting liquid 1304 such as LiCl in water may be used as an electrode and is introduced between the prism and the substrate surface, preferably forming a smooth, continuous layer with no bubbles or thickness variations that can affect the uniformity of the interference pattern. If desired, pressure can be applied to the prism to ensure that the liquid layer is thin and uniform. Alternatively, a transparent conductor such as ITO (indium tin oxide) may be deposited on the substrate surface or the surface of the prism to act as the electrode.
Electrical contact to the liquid electrode may be made at the edge of the prism. Typically a voltage of ˜2000V (˜4000V/mm) is applied to the substrate while it is being illuminated, and the photocurrent flow through the substrate is monitored as described above. Preferably, the value of the photocurrent is kept low so that the current flow is strongly localized to the narrow constructive interference regions of the interference pattern.
After allowing the photocurrent to flow for a period of time varying from seconds to minutes, depending on the magnitude of the applied voltage, the intensity of the illumination, the magnitude of the photocurrent and the poled area and material type of the substrate being poled, a higher voltage is applied to complete the domain inversion. It is preferable to block the illumination as the higher voltage is applied, to prevent a dramatic increase in photo-current flow. The higher, poling growth voltage is generally of the order of 3500-4000V and may be applied either as a step function or continuously ramped from the initial to final values. A current sensor may be used to monitor the charge flow during the poling pulse and, accounting for the photocurrent flow, the poling pulse may be terminated when sufficient charge has been transferred to achieve the desired amount of poling.
When choosing an illumination wavelength for this embodiment it is necessary to consider the dual requirements of a reasonably strong absorption to generate the necessary photo-induced charges while simultaneously allowing the interference fringes to extend to a substantial depth into the substrate. Therefore the illumination wavelength is preferably in the long wavelength UV to short wavelength visible range around approximately 400 nm, considerably above the band edge of ˜320 nm. As the optical absorption will lead to a gradient in photo-charge density with depth into the substrate, there may be a preferential illumination direction. For example, it may be preferable to illuminate the substrate through the +z face.
In the above described process the inverted domains are seeded in the narrow illuminated regions of constructive interference in the optical interference pattern. However, in the arrangement of
An improvement to this embodiment is illustrated in
With the insulating mask and interference pattern aligned, a similar poling sequence to that described above for the unpatterned sample can be performed. With the illumination source incident on the substrate, a voltage is applied to liquid electrodes 1405 on the patterned face and unpatterned face, resulting in a photo-current flow which is now confined by both the constructive interference regions and the openings in the insulating mask aligned to the interference pattern. The extra current confinement effect of the insulating mask combines with a modulated electric field to improve the definition of the domain pattern and prevent unwanted lateral expansion of the domains.
The patterned insulating mask layer also provides a further benefit for the short period domain inversion process. As discussed earlier with reference to
Thus, the length of the domain features can be photolithographically reduced to the ≦230 μm length preferable for a 4 μm period grating, or ≦180 μm for a 3 μm period grating, based on an angular misalignment tolerance of ˜0.5 degrees between the grating and the crystal axes of the substrate.
Another embodiment of the invention is shown in
When using a high energy electron beam for domain inversion according to the present invention, the energy of the electron beam can be varied in time from high to low or low to high to vary the penetration depth of the electrons into the substrate. This capability in principle provides advantages over the illuminated embodiments of the present invention since the electron beam energy and penetration depth can be more flexibly and tightly controlled than the absorption of light, which is limited by the available wavelength spectrum and the absorption spectrum of the material.
An external voltage may be applied to the substrate in a similar manner to the illuminated embodiments, and may be applied before, during and after the electron bombardment. It should be noted that when the high energy electrons are stopped inside the substrate, the kinetic energy of the electrons will be absorbed and increase the temperature of the substrate, which may decrease the coercive field for the domain inversion process.
The electron beam is collimated to provide uniform exposure over a defined area, preferably over the entire substrate surface. For electric field poling, the electron beam is incident through the unpatterned −z face while the patterned +z face is grounded. The electric field generated by the accumulated electrons within the substrate is generally sufficient to cause domain inversion to occur. An external voltage may be applied between the patterned electrode 1502 and the unpatterned electrode 1503 to control the flow of mobile-charge-current through the substrate and improve the domain inversion pattern definition and quality.
The improved domain inversion structure of the present invention is of particular value when used to construct a frequency converter for the application of second harmonic generation for the creation of visible laser light sources. This application has proven very challenging for prior art devices due to the difficulty in fabricating the very short grating periods required, ˜4 μm to 6 μm, with high quality and uniformity, and due to the performance degradations due to photorefractivity and green and blue induced infra-red absorption (GRIIRA and BLIIRA). The present invention provides a fabrication process for high quality, high uniformity and high efficiency quasi-phasematched frequency converters with periods as short as 4 μm in a photorefractively robust material, MgO:CLN. The present invention also provides a high temperature annealing process coupled with a closed loop discharge path which enables the effects of BLIIRA and GRIIRA to be significantly reduced. In addition, the present invention provides an optimized frequency conversion device with a tapered domain structure which ensures that at least some portion of the bulk crystalline substrate has an optimum 50/50 duty cycle domain grating.
In one embodiment of the present invention, an efficient visible frequency conversion element and device is provided for the generation of visible light using an improved domain inversion structure. Such a device is shown schematically in
The temperature of the frequency converter 1601 is generally adjusted using a heated mount 1605 so as to match the operating wavelength of the converter with the input fundamental pump laser wavelength. Alternatively, the wavelength of the pump laser may be tuned using a grating or an etalon (i.e., a Fabry-Pérot interferometer) so that it matches the acceptance wavelength of the frequency converter. An advantage of the MgO:CLN devices enabled by the present invention is that the operating temperature is much lower than that required for CLN devices, less than 100° C. versus greater than 200° C. The position of the pump beam 1603 within the frequency converter 1601 should be adjusted for maximum conversion efficiency to make use of the 50/50 duty cycle of the domain grating which is ensured by the tapered domain structure. An optical filter 1606 may be located in the output beam to remove the residual pump beam and transmit the second harmonic output at visible or UV wavelengths.
In the second harmonic generation application described here, the required period of the domain inversion grating in the frequency converter is determined by the wavelengths of the interacting beams as follows:
where Λ is the grating period, λpump is the pump wavelength, nsh is the refractive index at the second harmonic wavelength and np is the refractive index at the pump wavelength.
A knowledge of the refractive index dispersion and thermo-optic coefficients of the nonlinear optical crystal enables a domain inversion grating to be designed to quasi-phasematch a second harmonic interaction at a particular wavelength and at a particular temperature.
The frequency conversion device of
An alternative application for the frequency conversion device of the present invention to yield efficient second harmonic generation is intra-cavity frequency conversion as shown in
For a crystal gain medium (e.g. Nd:YAG), the laser wavelength is defined by the crystal structure energy levels and is generally well determined and narrow band (excepting certain crystals and dopants such as Ti:Sapphire which show widely tunable laser action). For semiconductor pump sources, the gain bandwidth is typically quite broad, and a further frequency selective element must be provided to determine the laser wavelength and bandwidth. This frequency selective element 1705 may be placed inside the cavity, where it may be an etalon or narrow band filter, or it may be incorporated into one of the two cavity mirrors in the form of a Bragg reflection grating. Thirdly, a Bragg reflection grating 1706 may be deployed outside the main laser cavity to provide wavelength selective feedback to the laser pump source to determine the laser wavelength. For optimum efficiency with the frequency converter of the present invention, the frequency converter should be positioned such that the pump beam travels through the optimum 50/50 duty cycle portion of the crystal which is ensured by the tapered domain structure.
Since the conversion efficiency of the second harmonic generator is proportional to the square of the pump power, more efficient energy conversion can generally be obtained from a pulsed laser source than from a CW laser. Increasing the peak and average powers too much however can cause crystal damage, such as surface damage at the polished faces, or residual photorefractive effects which are not compensated by the MgO dopant at very high optical powers. For this reason, for some applications where high visible powers are required, it may be preferable to provide an array of pump beams coupled into different regions of the same frequency conversion chip. In this way, the power in each individual beam can be maintained well below the material damage thresholds, while the total output power from all the beams can be scaled as high as several watts to 10 watts of power. The frequency converter enabled by the present invention is ideal for this application since it provides high peak conversion efficiency and high lateral uniformity for uniform and efficient frequency doubling performance across an entire array of laser beams.
An example of an application which benefits strongly from the array scalability of the frequency converter enabled by the present invention is that of laser projection displays. In this case, the fact that the total output power is made up of a number of individual beams is not a disadvantage, since a single mode diffraction limited optical beam is not generally required. In fact, multiple beams each with slightly different wavelengths helps to reduce the speckle effect which can otherwise render laser displays uncomfortable to watch.
An example of a laser light source for projection display applications is shown in
The array scaling capability of the frequency converter of the present invention is key to generating the power levels that are required for a projection display. For instance, 2.0 W of 465 nm blue, 1.6 Watts of 532 nm green and 2.2 Watts of 635 nm red laser light will provide 1400 lumens, which after traveling through the typical spatial light modulators and projection optics should yield around 400 lm on the screen. For brighter displays, even more optical power is needed, leading to the desire to reliably produce 4-5 watts of light in each primary color.
An alternative embodiment for the projection display uses a digital micro-mirror device (DMD, Texas Instruments) as the spatial light modulator. In this embodiment, the light output from the three primary-color second harmonic generation laser modules are spatially overlapped before the spatial light modulator. Time sequencing of the light output from the laser modules is used to provide color-sequential operation using a single spatial light modulator (SLM). Alternatively, a separate SLM can be used for each primary color and the images superimposed after the SLM. The light output from the SLM is projected onto the screen by the projection optics. In this embodiment the laser light sources enable the elimination of the rotating color wheel which is currently used to provide color-sequential light output from the continuous wave mercury lamp, as well as simplifying the collection and projection optics.
It should be noted that although the above projection display embodiments have been described with reference to full color, 3-primary source displays, it may in some cases be preferable to provide more or less than 3 primary colors. For instance, by providing 4 or 5 colors, the overall color gamut of the display can be increased and a wider range of natural colors can be displayed. On the other hand, a simpler and cheaper display device can be provided with only a single color, producing a monochrome display with potentially much more compact dimensions and lower cost. The frequency converter of the present invention is particularly valuable for the small dimension and low cost projection display device, often termed the pocket projector This is because the frequency conversion device enabled by the present invention has the combined properties of highly efficient operation, high uniformity, high manufacturing yield, and fabrication in a commercially available substrate material. This enables, for the first time, the prospect of scaling the manufacturing cost of a precision designed and fabricated periodically poled nonlinear optical crystal down to the few dollar price point required for mass volume manufacturing for consumer electronics applications.
An alternative approach to the projection display, especially for compact and low power devices is that of directly scanning the image over the screen, using for instance 1 or 2 axes MEMS (micro-electrical mechanical systems) scanners. This is shown schematically in
Another application of the improved optical frequency converter is in the generation of infra-red light for use, for example, in remote gas sensing, countermeasures and LIDAR (light detection and ranging). Infra-red wavelengths are generated with a difference frequency converter or an optical parametric oscillator. FIG. 20 shows a difference frequency converter using one embodiment of the present invention. Two pump lasers 2001, 2002 are coupled into the frequency converter 2003 by coupling means 2004 which may consist of one or more lenses to focus or collimate the pump laser beams. The quasi-phasematched domain inversion grating in the frequency converter 2003 transfers optical energy from the two pump lasers into a third beam 2006 (which is actually generally collinear with the combined pump beam 2005) with a frequency equal to the difference between the frequencies of the pump lasers. The temperature controller 2007 controls the temperature of the chip to provide maximum conversion efficiency. In this way, a pump beam from an Nd:YAG laser at 1064 nm mixes with a diode laser at 810 nm to create a difference frequency beam at about 3.4 μm. Alternatively, the difference frequency generator can be used for telecom wavelength conversion and dispersion compensation applications. In this case a pump beam at 775 nm is combined with a signal beam at around 1550 nm to generate an idler beam also around 1550 nm. In this configuration the signal and idler beams can range from around 1520 nm to 1570 nm due to the slow variation of the refractive index around the 1550 nm wavelength in lithium niobate. By using a different (shorter) grating period, the frequency conversion device can be used for sum frequency generation. For example, a 1480 nm laser and a 920 nm laser can be mixed to create 567 nm yellow light for medical applications.
An alternative configuration for generating infra-red light is the optical parametric oscillator (OPO), where a single pump beam is used and one or both of the signal and idler wavelengths are resonated in a cavity formed by mirrors placed around the frequency converter as is well known in the art. Once above threshold, (i.e. at high enough pump levels to cause oscillation) the OPO is very efficient in transferring energy from the pump to the signal and idler beams.
Although the present invention has been described in detail with reference to magnesium oxide doped congruent lithium niobate, MgO:CLN, it is equally applicable to other nonlinear optical materials known in the art including: undoped congruent lithium niobate and tantalate, stoichiometric lithium niobate and tantalate materials, either grown from the melt or prepared by vapor transport equilibrium, magnesium doped stoichiometric lithium niobate (SLN) and tantalate (STN), Ti doped and Ti diffused CLN, SLN and SLT and similar materials with other dopants designed to reduce the photorefractive effect such as zinc doped congruent lithium niobate.
The detailed discussion of the present invention has been presented with reference to a substrate thickness of 0.5 mm since this is a standard, commercially available substrate dimension. The present invention is equally applicable to both thinner and thicker substrates, in particular 0.25 mm and 1.0 mm substrates. Thicker substrates, such as 2 mm and 3 mm, can be readily poled using this technique for high power applications especially in infra red generating devices. There is no limitation on the wafer diameter or transverse dimensions of the substrate. If the illumination system cannot uniformly illuminate the entire substrate at once, the surface of the substrate may simply be masked off with an opaque material, such as dicing tape, and the domain inversion process performed in sections across the substrate.
In one embodiment, the present invention relates to the fabrication of domain inverted structures. Generally the applications for these domain inverted devices are in the field of optical frequency conversion using quasi-phase matching to provide efficient energy transfer from one wavelength to another. Whilst the present invention has been described in detail with reference to domain inversion gratings, it should be understood that quasi-phasematched devices may contain periodic, aperiodic and pseudo-random phase reversal structures as required to produce the desired phase matching curve. In addition, whilst a grating generally consists of a multiple number of features arrayed periodically or aperiodically, in a domain inverted device it may consist of as few as two domains, requiring only a single domain boundary Domain inversion devices may also be used for applications other than optical frequency conversion, such as polarization rotation, optical switching and optical beam deflection.
Throughout the embodiments described above, reference has been made to the front and back surfaces of the substrate. These faces are not fixed with respect to the crystal orientation and depend on the photolithographically applied mask layers and the direction of the illumination applied to the crystal. In general, the photolithographically masked face is referred to as the front face, and the spatially uniform illumination is incident on the back face.
No limitations have been set on the period of the domain inversion grating that can be realized with the techniques of the present invention. Isolated domains with submicron dimensions have been observed, offering the prospect of domain inversion gratings with periods of less than 2 μm for quasi-phasematching of UV interactions. The visible frequency conversion applications which are the most promising application of the present invention require periods ranging from ˜4 μm for the blue, through ˜7 um for the green up to ˜12 μm for the red. There is also no upper limit to the period which can be fabricated, in fact isolated domains can be reliably fabricated using the present invention with high repeatability and precise domain size control for use in applications such as beam deflectors or optical total internal switches.
Although both the device fabrication and applications have been written with reference to bulk frequency conversion applications, the frequency conversion device fabricated by the present invention can also be used as a substrate for highly efficient waveguide frequency conversion applications. In this case, the tapered domain structure does not ensure that there is a 50/50 duty cycle within the waveguide region, but by careful control of the poling parameters the grating duty cycle at one of the two crystal faces can be controlled to be substantially 50/50 for 1st order quasi-phasematching. Optical waveguides can be fabricated in the MgO:CLN substrate using any of the techniques known in the art, such as annealed proton exchange (APE), reverse proton exchange (RPE), titainium indiffusion and zinc indiffusion. In the fabrication sequence for APE and RPE devices the waveguide and periodic poling steps can be performed in any order since neither substantially affects the capability to perform the other. With the metal indiffusion waveguides the waveguide process is preferably performed first so that it does not disturb the short period domain inversion during the high temperature process. In this instance the present invention is particularly important since the mobile charge electrode enables high quality domain inversion to be generated even through the metal indiffused waveguide regions. In general the same fabrication techniques are applied to waveguide frequency converters as for the bulk embodiments described above. The design approach for the devices is very similar, the optical waveguide mode effective index is used to compute the required grating period for a given wavelength rather than the bulk crystal refractive index.
The embodiments described above serve the purpose of demonstrating the principle of the current invention. A person with ordinary skill-in-the art can derive more specific embodiments beyond those described here that are in the spirit of the current invention. Techniques described in the different embodiments can be freely combined to produce further embodiments which enhance the control of the domain growth.
This application is a continuation-in-part of U.S. Ser. No. 11/530,336, filed Sep. 8, 2006, now U.S. Pat. No. 7,436,579, which application is fully incorporated herein by reference.
| Number | Name | Date | Kind |
|---|---|---|---|
| 5436758 | Agostinelli et al. | Jul 1995 | A |
| 7112263 | Nihei | Sep 2006 | B2 |
| 7236674 | Mizuuchi et al. | Jun 2007 | B2 |
| 7413635 | Essaian | Aug 2008 | B2 |
| Number | Date | Country | |
|---|---|---|---|
| 20080174736 A1 | Jul 2008 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 11530336 | Sep 2006 | US |
| Child | 12034138 | US |
