Modeling of 3-D Diffraction and Scattering from Submicron Objects on Silicon for Particulate Monitoring and Photolithography

Information

• NSF Award
• 8560204

Owner

• WEIDLINGER ASSOCIATES, INC.

• Award Id

  8560204

• Award Effective Date

  2/1/1986 - 38 years ago

• Award Expiration Date

  7/31/1986 - 37 years ago

• Award Amount

  $ 39,894.00

• Award Instrument

  Standard Grant

• Program Officer

  Ritchie B. Coryell

• Min Amd Letter Date

  1/17/1986 - 38 years ago

• Max Amd Letter Date

  1/17/1986 - 38 years ago

• ARRA Amount

• Name

  Weidlinger Associates Inc

• City

  NEW YORK

• State

  NY

• Country

  United States

• Address

  40 Wall Street

• Postal Code

  100051304

• Phone Number

  2123673000

• First Name

  Gregory

• Last Name

  Wojcik

• Start Date

  2/1/1986 12:00:00 AM

• Name

  Telecommunications

• Code

  206000