Claims
- 1. A plasma system comprising the combination of:
- a plasma gun positioned in operative relation to a workpiece and providing a supersonic plasma system of substantially inert gas, the plasma gun having a central mixing chamber and a plurality of electrodes of a first polarity surrounding a common electrode of a second polarity opposite the first polarity, each of the plurality of electrodes of a first polarity including an annular chamber extending into the central mixing chamber and means for injecting an inert gas into the annular chamber in a swirling pattern;
- an enclosure surrounding the plasma gun and the workpiece; and
- means for establishing an ambient pressure of 0.6-0.001 atmospheres within the enclosure.
- 2. The invention as set forth in claim 1, wherein the means for establishing a pressure environment includes at least one vacuum pump coupled to the enclosure to establish the ambient pressure of 0.6-0.001 atmospheres therein.
- 3. The invention set forth in claim 1, wherein the common electrode comprises an anode having central powder delivery apparatus and the plurality of electrodes comprises a plurality of cathodes surrounding the common anode.
- 4. The invention set forth in claim 3, wherein the plasma gun includes a body in which the anode and the plurality of cathodes are mounted, and the anode is of modular construction and is readily removable from the body to facilitate replacement of the anode.
- 5. The invention set forth in claim 3, wherein the plasma gun includes a body in which the anode and the plurality of cathodes are mounted, and each of the plurality of cathodes is of modular construction to facilitate installation in and removal from the body and is pressure-sealed to seal an interior of the modular cathode from the pressure at an exterior of the modular cathode.
- 6. A plasma system comprising the combination of:
- a plasma gun positioned in operative relation to a workpiece and having a common, centrally positioned anode and a plurality of cathodes spaced about the anode, each of the cathodes being positioned in plasma arc forming relation with the anode in response to the flow of substantially inert gas at the cathode and including means for providing the flow of substantially inert gas in a swirling pattern;
- means for injecting spray powder into the anode;
- an enclosure surrounding the plasma gun and the workpiece; and
- a vacuum source coupled to the enclosure to provide an ambient pressure of 0.6-0.001 atmospheres within the enclosure.
- 7. The invention set forth in claim 6, wherein the plasma system includes a transfer arc D.C. power supply coupled between the anode and the workpiece and a plurality of D.C. plasma power sources, each of which is coupled between the anode and a different one of the plurality of cathodes.
- 8. The invention set forth in claim 6, wherein the plasma gun includes an anode cooling system associated with the anode, a plurality of cathode cooling systems, each being associated with a different one of the plurality of cathodes and being separate from the other cathode cooling systems and the anode cooling system, a source of cooling liquid, and a plurality of conduits coupling each of the plurality of cathode cooling systems and the anode cooling system to the source of cooling liquid independent of the other cooling systems.
- 9. The invention set forth in claim 6, wherein the anode has a nozzle therein and a plurality of arc chambers therein communicating with the nozzle and each disposed adjacent a different one of the cathodes and the anode is of modular construction to facilitate replacement thereof within the plasma gun whereby the anode of the plasma gun can be relatively easily replaced in order to change the configuration of the arc chambers and the nozzle to optimize performance of the plasma system.
- 10. For use in a plasma gun having an anode, a plurality of cathodes and means for establishing a pressure environment substantially lower than atmospheric pressure adjacent the plurality of cathodes, a modular cathode assembly for providing one of the plurality of cathodes and comprising the combination of an enclosed, pressure-sealed housing having a hollow interior, a cathode tip structure mounted within the hollow interior of the housing, a fluid cooling system disposed within the hollow interior of the housing adjacent the cathode tip structure and having at least one fluid coupling at the exterior of the housing, and a gas supply system disposed within the hollow interior of the housing adjacent the cathode tip structure and having a gas coupling at the exterior of the housing and means for providing a flow of gas in a swirling pattern adjacent the cathode tip structure.
- 11. For use in a plasma gun having an anode and a plurality of cathodes, a modular cathode assembly for providing one of the plurality of cathodes and comprising the combination of an enclosed, pressure-sealed housing having a hollow interior, a cathode tip structure mounted within the hollow interior of the housing, a fluid cooling system disposed within the hollow interior of the housing adjacent the cathode tip structure and having at least one fluid coupling at the exterior of the housing, and a gas supply system disposed within the hollow interior of the housing adjacent the cathode tip structure and having a gas coupling at the exterior of the housing, the cathode tip structure including an elongated cathode connector tube having an axis of elongation and disposed within the hollow interior of the housing and a cathode tip coupled to an end of the cathode connector tube, the housing including a hollow chamber insulator surrounding and forming an annular space between an inner wall thereof and the cathode connector tube and the cathode tip, and the gas supply system including means coupling the annular space to the gas coupling and an annular collar disposed within the annular space between the cathode connector tube and the inner wall of the chamber insulator and having an array of apertures therein obliquely oriented relative to the axis of elongation of the cathode connector tube, whereby gas supplied to the gas coupling and passed to the annular space is forced by the array of apertures into a swirling pattern as it passes over the cathode tip.
- 12. For use in a plasma gun having an anode and a plurality of cathodes, a modular cathode assembly for providing one of the plurality of cathodes and comprising the combination of an enclosed, pressure-sealed housing having a hollow interior, a cathode tip structure mounted within the hollow interior of the housing, a fluid cooling system disposed within the hollow interior of the housing adjacent the cathode tip structure and having at least one fluid coupling at the exterior of the housing, and a gas supply system disposed within the hollow interior of the housing adjacent the cathode tip structure and having a gas coupling at the exterior of the housing, the cathode tip structure including a cathode connector tube having a hollow interior and a cathode tip coupled to an end of the cathode connector tube, and the fluid cooling system including an inner connector tube structure disposed within the hollow interior of the cathode connector tube and having a hollow interior, means coupling a supply of cooling fluid to the hollow interior of the inner connector tube structure, whereby cooling fluid flow along the hollow interior of the inner connector tube structure and then through a space at an exterior of the inner connector tube structure and within the hollow interior of the cathode connector tube, and means coupling the space to the at least one fluid coupling, whereby cooling fluid within the space exits to the at least one fluid coupling.
- 13. For use in a plasma gun having an anode and a plurality of cathodes, a modular cathode assembly for providing one of the plurality of cathodes and comprising the combination of an enclosed, pressure-sealed housing having a hollow interior, a cathode tip structure mounted within the hollow interior of the housing, a fluid cooling system disposed within the hollow interior of the housing adjacent the cathode tip structure and having at least one fluid coupling at the exterior of the housing, and a gas supply system disposed within the hollow interior of the housing adjacent the cathode tip structure and having a gas coupling at the exterior of the housing, the cathode tip structure including a cathode connector tube disposed within the hollow interior of the housing and a cathode tip having a threaded end thereof received within a mating threaded aperture in an end of the cathode connector tube.
- 14. A modular cathode assembly comprising the combination of:
- a generally cylindrical cathode insulator connector having a hollow interior and opposite first and second ends;
- a hollow, generally cylindrical cable insulator coupled to the first end of the cathode insulator connector;
- a generally ring-shaped insulator retainer coupled to the second end of the cathode insulator connector and having a hollow interior;
- a chamber insulator mounted within the hollow interior of the insulator retainer and a portion of the hollow interior of the cathode insulator connector, the chamber insulator extending outwardly from the insulator retainer opposite the cathode insulator connector and having a hollow interior;
- a generally cylindrical gas conductor tube mounted within the hollow interior of the cathode insulator connector and forming an annular gas inlet chamber with the hollow interior of the cathode insulator connector, the gas conductor tube having a hollow interior and having apertures therein spaced around the annular gas inlet chamber, the cathode insulator connector having a passage therein connecting the annular gas inlet chamber to a location at an exterior of the cathode insulator connector;
- an elongated cathode connector tube disposed within and forming a gas passage with the hollow interior of the gas conductor tube and the hollow interior of the chamber insulator, the cathode connector tube also being disposed within and forming an annular cooling liquid outlet chamber with the hollow interior of the cathode insulator connector, the cathode connector tube having a hollow interior and having apertures therein spaced around the annular cooling liquid outlet chamber, the cathode insulator connector having a passage therein connecting the annular cooling liquid chamber to a location at the outside of the cathode insulator connector;
- a cathode tip coupled to an end of the cathode connector tube and disposed within the hollow interior of the chamber insulator;
- an inner connector tube having a hollow interior and mounted within the hollow interior of the cathode connector tube and forming a cooling liquid return passage with the hollow interior of the cathode connector tube including the apertures within the cathode connector tube spaced around the annular cooling liquid outlet chamber; and
- a fitting coupled to an end of the inner connector tube and communicating with the hollow interior thereof so that cooling liquid may be supplied via the fitting to the hollow interior of the inner connector tube.
- 15. The invention set forth in claim 14, wherein the cathode connector tube has an axis of elongation and includes an annular collar extending across the gas passage between the chamber insulator and the gas conductor tube and having a plurality of apertures therethrough spaced around the collar and being oriented at oblique angles relative to the axis of elongation to force gas passing therethrough into a swirling pattern.
- 16. A cathode assembly comprising the combination of:
- a generally cylindrical housing having a hollow interior;
- an elongated, generally cylindrical connector tube member having an axis of elongation, the connector tube member being disposed within and forming an annular space with the hollow interior of the housing;
- a cathode tip coupled to an end of the connector tube member within the hollow interior of the housing;
- an annular gas chamber within the housing communicating with the annular space and adapted to receive a supply of pressurized, substantially inert gas; and
- an annular collar disposed within the annular space between the gas chamber and the cathode tip, the annular collar having a plurality of apertures therethrough spaced about the annular collar and being at oblique angles relative to the axis of elongation of the connector tube member.
- 17. The invention set forth in claim 16, wherein the housing includes a cylindrical wall disposed between the annular gas chamber and the annular space, the cylindrical wall having a plurality of apertures therethrough spaced around the annular collar to admit gas from the annular collar into the annular space.
- 18. The invention set forth in claim 16, wherein the annular space has a first portion of first, generally uniform diameter extending from the annular collar and a second portion of second, generally uniform diameter smaller than the first diameter, the second portion extending from a juncture thereof with the first portion to the cathode tip, and the annular collar is located adjacent the juncture of the second portion with the first portion of the annular space.
- 19. A cathode assembly comprising the combination of:
- a generally cylindrical housing having a hollow interior;
- an elongated, generally cylindrical connector tube member having a hollow interior extending from a first end thereof along most of the length of the connector tube member between the first end and an opposite second end thereof, the connector tube member being disposed within the hollow interior of the housing;
- a cathode tip coupled to the second end of the connector tube member;
- means for introducing pressurized, substantially inert gas to an exterior of the connector tube member and the cathode tip;
- an elongated cooling tube member having a hollow interior and disposed within the hollow interior of the connector tube member to form a space between an exterior thereof and the hollow interior of the connector tube member; and
- means for introducing a cooling liquid to the hollow interior of the cooling tube member, whereby the cooling liquid flows along the hollow interior of the cooling tube member, out an open end thereof, and through the space between the exterior of the cooling tube member and the hollow interior of the connector tube member.
- 20. The invention set forth in claim 19, wherein the means for introducing a cooling liquid includes a conduit fitting coupled to communicate with the hollow interior of the cooling tube member to introduce cooling liquid into the hollow interior of the cooling tube member, and the housing includes means for coupling the space between the exterior of the cooling tube member and the hollow interior of the connector tube member to an exterior location on the housing.
- 21. The invention set forth in claim 20, wherein the means for coupling the space between the exterior of the cooling tube member and the hollow interior of the connector tube member to an exterior location on the housing includes an annular cooling liquid outlet chamber within the housing surrounding a portion of the connector tube member and communicating through the connector tube member to the space via a plurality of apertures in the connector tube member, and an aperture in the housing extending between the annular cooling exit chamber and the exterior location on the housing.
- 22. A plasma gun for generation of a supersonic plasma stream comprising the combination of:
- a body;
- a plurality of electrodes of like polarity mounted in the body; and
- a common electrode of polarity opposite the like polarity of the plurality of electrodes mounted within the body and having a central mixing chamber therein defining a sonic region of the plasma gun, a plurality of arc chambers therein, each receiving a different one of the plurality of electrodes of like polarity and extending into the central mixing chamber, and a nozzle chamber extending in diverging fashion from the central mixing chamber to an exterior of the body and defining a supersonic region of the plasma gun.
- 23. The invention set forth in claim 22, wherein the common electrode has a central powder delivery aperture therein extending to a portion of the central mixing chamber opposite the nozzle chamber.
- 24. A plasma gun comprising the combination of:
- an anode assembly having a central axis and including a central mixing chamber of generally cylindrical configuration therein disposed along the central axis and defining a sonic region of the plasma gun, a central nozzle chamber of generally partially conical configuration therein disposed along the central axis and extending from the central mixing chamber to an exterior of the anode assembly and defining a supersonic region of the plasma gun, and a plurality of arc chambers therein extending from portions of the central mixing chamber opposite the nozzle chamber, the plurality of arc chambers being generally equally spaced around the central axis; and
- a plurality of cathodes, each disposed within a different one of the plurality of arc chambers.
- 25. The invention set forth in claim 24, wherein each of the plurality of arc chambers is comprised of a generally cylindrical portion terminating at the central mixing chamber and a generally partially conical portion extending in diverging fashion from an end of the generally cylindrical portion opposite the mixing chamber and receiving one of the cathodes therein.
- 26. The invention set forth in claim 24, wherein each of the arc chambers has a central axis which intersects the central axis of the anode assembly within the central mixing chamber.
- 27. The invention set forth in claim 24, wherein the anode assembly includes a material delivery aperture therein disposed along the central axis and terminating at a portion of the central mixing chamber opposite the nozzle chamber.
- 28. A plasma gun comprising the combination of:
- a gun body;
- a plurality of electrodes of like polarity mounted in the gun body;
- a common electrode of polarity opposite the like polarity of the plurality of electrodes mounted within the gun body and including an electrode body having a central axis, a central chamber therein disposed along the central axis, a plurality of arc chambers therein spaced around the central axis and each receiving a different one of the plurality of electrodes of like polarity and extending into the central chamber, and a material delivery aperture therein extending along the central axis and terminating at the central chamber; and
- a material delivery element removably mounted within the material delivery aperture and having at least one port therein for delivery of spray material to the central chamber, the at least one port being disposed along the central axis and terminating at the central chamber.
- 29. The invention set forth in claim 28, wherein the at least one port comprises a plurality of ports in the material delivery element, each terminating at a different one of the plurality of arc chambers.
- 30. A plasma gun comprising the combination of:
- an anode body having a central axis, a central mixing chamber therein disposed at the central axis and having opposite first and second ends thereof, a central nozzle chamber therein disposed along the central axis and extending from the second end of the central mixing chamber to an exterior of the anode body, an aperture therein disposed along the central axis and extending from the first end of the central mixing chamber, and a plurality of arc chambers therein extending from portions of the central mixing chamber adjacent the first end of the central mixing chamber;
- a plurality of cathodes, each disposed within a different one of the plurality of arc chambers; and
- a material delivery element removably mounted within the aperture in the anode body and having at least one port therein for delivery of spray material to the central mixing chamber, the material delivery element comprising a generally cylindrical powder insert having at least one material delivery port therein.
- 31. The invention set forth in claim 22, wherein the powder insert has a single powder delivery port disposed along the central axis and terminating at the central mixing chamber.
- 32. The invention set forth in claim 30, wherein the powder insert has a plurality of powder delivery ports therein, each terminating at a different one of the plurality of arc chambers.
- 33. The invention set forth in claim 32, wherein the powder insert has a central bore therein and each of the powder delivery ports extends from the central bore at an acute angle relative to the central axis of the anode body.
- 34. The invention set forth in claim 32, wherein the powder insert has a central bore therein and each of the powder delivery ports extends from the central bore generally parallel to and spaced-apart from the central axis of the anode body.
- 35. A plasma gun comprising the combination of:
- a plurality of electrodes of like polarity; and
- a common electrode of polarity opposite the like polarity of the plurality of electrodes and having a central chamber therein, a plurality of arc chambers therein each receiving a different one of the plurality of electrodes of like polarity therein and extending into the central chamber, and a plurality of material delivery ports each of which extends into a different one of the arc chambers adjacent the central chamber.
- 36. The invention set forth in claim 35, further including means for delivering powder material to the material delivery ports.
- 37. The invention set forth in claim 35, wherein the plurality of material delivery ports are contained within a powder insert which is removably mounted in the common electrode.
- 38. A plasma gun comprising the combination of:
- an anode assembly having a central axis and including a central mixing chamber therein disposed at the central axis and having opposite first and second ends thereof, a central nozzle chamber disposed along the central axis and extending from the second end of the central mixing chamber to an exterior of the anode assembly, a plurality of arc chambers therein extending from portions of the central mixing chamber adjacent the first end thereof and being generally equally spaced around the central axis, a central material delivery port disposed at the central axis adjacent the first end of the central mixing chamber, and a plurality of branch material delivery ports, each extending from the central material delivery port to a different one of the arc chambers adjacent the central mixing chamber; and
- a plurality of cathodes, each disposed within a different one of the plurality of arc chambers.
- 39. The invention set forth in claim 38, wherein the central material delivery port and the plurality of branch material delivery ports are contained within a generally cylindrical powder insert removably mounted within the anode assembly.
- 40. A plasma gun assembly comprising the combination of:
- a gun body;
- an electrode mounted within the gun body and having an annular cavity therein surrounding a base thereof, a central plasma chamber extending into the electrode from the base, at least one arc chamber within the electrode extending from the central plasma chamber and a plurality of passages extending through the electrode from the annular cavity;
- means for conveying cooling fluid from outside the gun body to a region adjacent the base of the electrode;
- means defining a plurality of angled apertures adjacent the base of the electrode, the angled apertures introducing cooling fluid into the annular cavity with a swirling motion; and
- means coupled to the plurality of passages extending through the electrode for conveying cooling fluid passing through the plurality of passages from the annular cavity to the outside of the gun body.
- 41. The invention set forth in claim 40, wherein the plasma gun assembly includes an electrode retainer plate fastened to the gun body at the base of the electrode to secure the electrode within the gun body, the electrode retainer plate having a circular array of angled slots therein disposed between the region adjacent the base of the electrode and the annular cavity, the angled slots together with an adjacent portion of the gun body defining the plurality of angled apertures.
- 42. The invention set forth in claim 40, further including a material delivery structure coupled to the electrode at a top end of the electrode opposite the base and communicating with the arc chamber within the electrode and an insert clamp structure coupled to the top end of the electrode and forming an annular passage between the insert clamp structure and the material delivery structure, the insert clamp structure having lower and upper hollow, generally cylindrical portions thereof having arrays of apertures therein, the lower hollow, generally cylindrical portion introducing cooling fluid passing through the plurality of apertures from the annular cavity into the annular passage between the insert clamp structure and the material delivery structure with a swirling motion and the upper hollow, generally cylindrical portion introducing cooling fluid in the annular passage between the insert clamp structure and the material delivery structure into a further portion of the material delivery structure.
- 43. A plasma gun assembly comprising the combination of:
- a generally cylindrical gun body having a top with an annular cavity therein, an opposite bottom, a generally cylindrical bore therein extending along a central axis of the gun body between the top and the bottom and a plurality of apertures extending through the gun body from the annular cavity in the top to the bottom;
- an anode assembly mounted within a portion of the bore of the gun body adjacent the bottom of the gun body;
- material delivery apparatus mounted within the bore of the gun body between the anode assembly and the top of the gun body;
- a generally disk-shaped top plate coupled to the top of the gun body and having at least one cooling liquid inlet fitting mounted thereon and communicating with the annular cavity in the top of the gun body and at least one cooling liquid outlet fitting mounted thereon and communicating with the bore at the top of the gun body; and
- a generally disk-shaped bottom plate coupled to the bottom of the gun body and having an annular cavity therein communicating with the plurality of apertures extending through the gun body and with the anode assembly.
- 44. The invention set forth in claim 43, wherein the bottom plate has a circular flange thereon at an inner portion of the annular cavity therein, the circular flange having a plurality of angled slots therein to provide cooling liquid flowing from the annular cavity to the anode assembly with a swirling motion.
- 45. The invention set forth in claim 44, wherein the anode assembly has an annular cavity therein surrounding a base thereof adjacent the annular flange of the bottom plate and a plurality of passages extending therethrough between the annular cavity surrounding the base thereof and a top of the anode assembly opposite thereof.
- 46. The invention set forth in claim 45, wherein the material delivery apparatus includes a powder insert holder disposed along a portion of the central axis of the gun body and extending into the top of the anode assembly, and further including an insert clamp coupled to the top of the anode assembly and having a portion of hollow, generally cylindrical configuration surrounding and spaced-apart from the powder insert holder to form an annular passage therebetween, the portion of hollow, generally cylindrical configuration of the insert clamp having angled apertures in a lower portion thereof to produce swirling motion in cooling liquid passing therethrough into the annular passage and apertures in an upper portion thereof through which cooling liquid passes as it leaves the annular passage.
- 47. The invention set forth in claim 46, wherein the material delivery apparatus includes an anode connector plug of generally cylindrical configuration extending between the insert clamp and the top plate and forming an annular passage with the wall of the bore of the gun body between a lower flange thereof which extends into contact with the wall of the bore and the top plate, the lower flange having a plurality of radial slots therein to pass cooling liquid from the upper portion of the insert clamp to the annular passage between the anode connector plug and the wall of the bore.
- 48. A plasma gun assembly comprising the combination of:
- a gun body;
- an anode assembly mounted within the gun body and having a central axis;
- a plurality of cathode assemblies mounted within the gun body and disposed about the central axis of the anode assembly;
- a material delivery insert structure extending into the anode assembly along the central axis;
- an insert clamp structure mounted on the anode assembly and coupled to the material delivery insert structure, the insert clamp structure surrounding and forming a passage with the material delivery insert structure; and
- means introducing cooling liquid at the insert clamp structure, the insert clamp structure being operative to convey cooling liquid introduced thereat into the passage and over a substantial portion of the material delivery insert structure.
- 49. The invention set forth in claim 48, wherein the means for introducing cooling liquid at the insert clamp structure includes means for introducing cooling liquid at a base of the anode assembly and a plurality of passages extending through the anode assembly from the base thereof to an opposite top end of the anode assembly adjacent the insert clamp structure.
- 50. The invention set forth in claim 48, wherein the insert clamp structure has a lower hollow, generally cylindrical portion thereof having a plurality of angled apertures therein to convey cooling liquid into the passage with a swirling motion.
- 51. The invention set forth in claim 50, wherein the insert clamp structure is coupled to the material delivery insert structure at an upper end of the passage and has an upper hollow, generally cylindrical portion adjacent the upper end of the passage and having a plurality of apertures therein through which cooling liquid in the passage exits.
- 52. A plasma gun comprising the combination of:
- a body;
- a plurality of electrodes of like polarity mounted in the body;
- a common electrode of polarity opposite the like polarity mounted within the body, the common electrode interacting with the plurality of electrodes of like polarity to produce a plasma stream; and
- means coupled to the common electrode for introducing metal in a molten state into the plasma stream, the common electrode having a plurality of arc chambers therein receiving the plurality of electrodes of like polarity and a central chamber therein communicating with the plurality of arc chambers and forming the plasma stream therein, and the means for introducing metal in a molten state including a hollow feed tube extending into the common electrode and communicating with the central chamber therein and means for introducing metal in a molten state into the hollow feed tube.
- 53. The invention set forth in claim 52, wherein the means for introducing metal in a molten state into the hollow feed tube includes a hollow supply tube coupled to the hollow feed tube and adapted to receive metal therein in solid form and a power supply coupled to the supply tube to heat metal therein to a molten state.
- 54. The invention set forth in claim 53, wherein the means for introducing metal in a molten state into the hollow feed tube includes a melt bowl disposed between the feed tube and the supply tube and a supply of pressurized gas selectively coupled to an opposite portion of the supply tube from the melt bowl, the melt bowl being operative to block the flow of metal in a molten state from the supply tube to the feed tube in response to gas pressure in the central chamber of the common electrode except when the supply of pressurized gas is coupled to the opposite portion of the supply tube.
- 55. The invention set forth in claim 1, wherein each of the plurality of electrodes of a first polarity includes an electrode tip extending into the annular chamber, and the means for injecting injects an inert gas over the electrode tip and into the annular chamber in a swirling pattern.
- 56. The invention set forth in claim 55, wherein the electrode tip has an axis of elongation, and the means for injecting directs inert gas through a plurality of apertures spaced about the electrode tip and forming oblique angles relative to the axis of elongation of the electrode tip.
- 57. The invention set forth in claim 6, wherein each of the cathodes has a cathode tip, and the means for providing provides the flow of substantially inert gas in a swirling pattern over the cathode tip.
- 58. The invention set forth in claim 57, wherein the cathode tip has an axis of elongation, and the means for providing includes means for directing inert gas through a plurality of apertures spaced above the cathode tip and forming oblique angles relative to the axis of elongation of the cathode tip.
- 59. A plasma system comprising the combination of:
- a plasma gun positioned in operative relation to a workpiece and having a common, centrally positioned anode, a plurality of cathodes spaced above the anode and each having a tip, each of the cathodes being positioned in plasma arc forming relation with the anode in response to the flow of substantially inert gas at the cathode, the anode having a central mixing chamber and a plurality of arc chambers therein, each of the arc chambers receiving the tip of a different one of the plurality of cathodes and having a length extending from a region surrounding the tip to a downstream end thereof at the central mixing chamber, power supply means coupling the anode to each of the plurality of cathodes and producing an arc comprised of an ion flow extending from the tip of each cathode within the arc chamber receiving the tip, the length of each arc chamber being of sufficient size to contain essentially of the ion flow of the arc, with the central mixing chamber defining an essentially electrically neutral region downstream of the arc chambers;
- an enclosure surrounding the plasma gun and the workpiece; and
- a vacuum source coupled to the enclosure to provide an ambient pressure of 0.6-0.001 atmospheres within the enclosure.
- 60. The invention set forth in claim 59, further including spray power injection means extending into the central mixing chamber from a location intermediate the arc chambers.
Parent Case Info
This is a file wrapper continuation of Ser. No. 07/660,167 filed on Feb. 25, 1991, now abandoned, which application is a file wrapper continuation of Ser. No. 07/222,507 filed on Jul. 21, 1988, now abandoned.
US Referenced Citations (8)
Foreign Referenced Citations (2)
Number |
Date |
Country |
7556 |
Mar 1976 |
JPX |
230300 |
Oct 1986 |
JPX |
Non-Patent Literature Citations (3)
Entry |
IEEE Journal of Solid.gtoreq.State Circuits, vol. SC-22, No. 3, Jun. 1987, pp. 437-441, T, Furuyama et al., "A New On-Chip Voltage Converter for Submicrometer High-Density DRAM's". |
IEEE Journal of Solid-State Circuits, vol. 25, No 1, Feb. 1990, pp. 48-54, W. Heimisch, et al., "A 3.8-NS 16K BiCMOS SRAM". |
"Dual Operating-Voltgae Scheme for a Single 5-V 16-Mbit -DRAM" IEEE J of Solid State Circuit vol. 23, No. 5 pp. 1128-1132, Oct. 1988 M. Horiguchi et al. |
Continuations (2)
|
Number |
Date |
Country |
Parent |
660167 |
Feb 1991 |
|
Parent |
222507 |
Jul 1988 |
|