Molded die slivers with exposed front and back surfaces

Information

  • Patent Grant
  • 11292257
  • Patent Number
    11,292,257
  • Date Filed
    Thursday, December 5, 2019
    4 years ago
  • Date Issued
    Tuesday, April 5, 2022
    2 years ago
Abstract
In some examples, a print cartridge comprises a printhead die that includes a die sliver molded into a molding. The die sliver includes a front surface exposed outside the molding to dispense fluid, and a back surface exposed outside the molding and flush with the molding to receive fluid. Edges of the die sliver contact the molding to form a joint between the die sliver and the molding.
Description
BACKGROUND

Inkjet pens and print bars can include one or more printhead dies, each having a plurality of fluid ejection elements on a surface of a silicon substrate. Fluid typically flows to the ejection elements through one or more fluid delivery slots formed in the substrate between opposing substrate surfaces. While such slots effectively deliver fluid to the fluid ejection elements, there are some disadvantages associated with their use. From a cost perspective, for example, fluid delivery slots occupy valuable silicon real estate and add significant slot processing cost. Lower printhead die costs can be achieved in part through shrinking the die size. However, a smaller die size results in a tighter slot pitch and/or slot width in the silicon substrate, which adds excessive assembly costs associated with integrating the smaller die into the inkjet pen. In addition, removing material from the substrate to form an ink delivery slot structurally weakens the printhead die. Thus, when a single printhead die has multiple slots (e.g., to improve print quality and speed in a single color printhead die, or to provide different colors in a multicolor printhead die), the printhead die becomes increasingly fragile with the addition of each slot.





BRIEF DESCRIPTION OF THE DRAWINGS

Examples are described below, with reference to the accompanying drawings, in which:



FIG. 1 shows a perspective view of an example of a thinned, molded printhead die that is suitable for use in a fluid ejection device;



FIG. 2 shows a cross section of the example printhead die taken across line A-A of FIG. 1;



FIG. 3 shows several basic steps of an example process for making and thinning a molded printhead die;



FIGS. 4-7 show examples of molded printhead dies with embedded die slivers that include different examples of joint enhancement features;



FIG. 8 shows an example printhead assembly with affixed molded printhead dies;



FIG. 9 shows a block diagram of an example inkjet printer with an example print cartridge incorporating an example of a printhead assembly with one or more thinned, molded printhead dies;



FIG. 10 shows a perspective view of an example print cartridge;



FIG. 11 shows a perspective view of an example print cartridge;



FIG. 12 shows a block diagram of an example inkjet printer with a media wide print bar implementing an example thinned, molded printhead die;



FIG. 13 shows a perspective view of an example molded print bar with multiple thinned, molded printhead dies.





Throughout the drawings, identical reference numbers designate similar, but not necessarily identical, elements.


DETAILED DESCRIPTION

Reducing the cost of inkjet printhead dies has been achieved in the past through shrinking the die size and reducing wafer costs. The die size depends significantly on the pitch of fluid delivery slots formed through the silicon substrate that deliver ink from a reservoir on one side of the die to fluid ejection elements on another side of the die. Therefore, prior methods used to shrink the die size have mostly involved reducing the slot pitch and size through a silicon slotting process that can include, for example, laser machining, anisotropic wet etching, dry etching, combinations thereof, and so on. Unfortunately, the silicon slotting process itself adds considerable cost to the printhead die. In addition, as die sizes have decreased, the costs and complexities associated with integrating the smaller dies into an inkjet pen or print bar have begun to exceed the savings gained from the smaller dies. Furthermore, as die sizes have decreased, the removal of die material to form ink delivery slots has had an increasingly adverse impact on die strength, which can increase die failure rates.


Recent developments in molded fluid flow structures, including molded inkjet printheads and molded inkjet print bars, have done away with the use of fluid delivery slots in the die substrate. Examples of the molded fluid flow structures and processes for making such structures are disclosed in international patent application numbers PCT/US2013/046065, filed Jun. 17, 2013, titled Printhead Die, and PCT/US2013/033046, filed Mar. 20, 2013, titled Molding A Fluid Flow Structure, each of which is incorporated herein by reference in its entirety.


These molded fluid flow structures (e.g., molded inkjet printheads) enable the use of tiny printhead die “slivers”. A die sliver includes a thin silicon, glass or other substrate (i.e., having a thickness on the order of 650 μm or less) with a ratio of length to width (L/W) of at least three. Molded fluid flow structures, such as a molded inkjet printhead, do not have fluid slots formed through the die sliver substrate. Instead, each die sliver is molded into a monolithic molded body that provides fluidic fan-out through fluid channels formed into the molding at the back surface of the die sliver. Thus, a molded printhead structure avoids significant costs otherwise associated with prior die slotting processes and the related assembly of slotted dies into manifold features of inkjet pens and print bars.


In prior molded inkjet printhead designs, fluid channels formed into the molded body enable printing fluid to flow to the back surface of each die sliver. Fluid/ink feed holes (IFH's) formed through the die sliver from its back surface to its front surface enable the fluid to flow through the sliver to fluid drop ejection chambers on the front surface, where it is ejected from the molded printhead through nozzles. Processes for forming the fluid channels into the molded body, and the ink feed holes into the die sliver, are considerably less costly and complex than the die slotting and assembly processes associated with prior printhead designs. However, these processes do present some added costs and complications. For example, in one fabrication process, a cutting saw is used to plunge cut through the molded body to form the fluid channels in the molded printhead die, as described in international patent application number PCT/US2013/048214, filed Jun. 27, 2013, titled Molded Fluid Flow Structure with Saw Cut Channel, which is incorporated herein by reference in its entirety. In other examples, the fluid channels can be formed in the molded body through compression molding and transfer molding processes such as those described, respectively, in international patent application numbers PCT/US2013/052512, filed Jul. 29, 2013 titled Fluid Structure with Compression Molded Fluid Channel, and PCT/US2013/052505, filed Jul. 29, 2013 titled Transfer Molded Fluid Flow Structure, each of which is incorporated herein by reference in its entirety. Thus, while there are a number of processes available to form the fluid channels in the molded body, each one contributes a measure of cost and complexity to the fabrication of the molded inkjet printheads.


In an effort to further reduce the cost and complexity of molded inkjet printheads, examples described herein include a “thinned”, molded printhead die that includes one or more die slivers embedded into a molded body. The molded printhead die is thinned, or ground down, from its back side to remove a portion of the molded body at the back surface of the molded printhead die. Because the molded printhead die is thinned down all the way to the surface of the die sliver (or die slivers) embedded in the molding, there are no fluid channels formed into the molded body to direct fluid to the back surface of the die sliver, as in prior molded inkjet printhead designs. Instead, both the front and back surfaces of each die sliver are flush with the molding material in which the die sliver is embedded. Thinning the molded printhead die in this manner opens up the previously formed fluid/ink feed holes (IFH's) in each die sliver from its back surface to enable fluid to flow from the back surface of the die sliver to fluid ejection chambers on the front surface of the die sliver.


In one example, a printhead includes a die sliver molded into a molding. The die sliver includes a front surface that is flush with the molding and exposed outside the molding to dispense fluid. The die sliver also includes a back surface that is flush with the molding and exposed outside the molding to receive fluid. The die sliver has edges that contact the molding to form a joint between the die sliver and the molding.


In another example, a print bar includes multiple thinned, molded printhead dies embedded in a molding material. The molded printhead dies are arranged generally end to end along the length of a printed circuit board (PCB) in a staggered configuration in which one or more of the dies overlaps an adjacent one or more of the dies. Each molded printhead die comprises a die sliver having a front surface and a back surface exposed outside of the molding. The back surface is to receive fluid and the front surface is to dispense fluid that flows from the back surface to the front surface through fluid feed holes in the die sliver.


In another example, a print cartridge includes a housing to contain a printing fluid and a thinned, molded printhead die. The thinned, molded printhead die comprises a die sliver embedded in a molding. The die sliver has edges forming a joint with the molding, and a front surface and back surface are exposed outside of the molding. The back surface is to receive fluid and the front surface is to dispense fluid that is to flow from the back surface to the front surface through fluid feed holes in the die sliver.


As used in this document, a “printhead” and a “printhead die” mean the part of an inkjet printer or other inkjet type dispenser that can dispense fluid from one or more nozzle openings. A printhead includes one or more printhead dies, and a printhead die includes one or more die slivers. A die “sliver” means a thin substrate (e.g., silicon or glass) having a thickness on the order of 200 μm and a ratio of length to width (L/W) of at least three. A printhead and printhead die are not limited to dispensing ink and other printing fluids, but instead may also dispense other fluids for uses other than printing.



FIG. 1 shows a perspective view of an example of a “thinned”, molded printhead die 100 that is suitable for use in fluid ejection devices such as a print cartridge and/or print bar of an inkjet printer. In addition, FIG. 1 shows how one or more printhead dies 100 can be arranged within a printhead assembly 800. The example printhead assembly 800 is discussed in more detail below with respect to FIG. 8. FIG. 2 shows a cross sectional view of the example printhead assembly 800 taken across line A-A of FIG. 1.


Referring generally to FIGS. 1 and 2, the example molded printhead die 100 in FIG. 1 comprises four die slivers 102. The molded printhead die 100 has been “thinned” such that the molding material 104 (referred to interchangeably herein as molding 104, or molded body 104), which comprises an epoxy mold compound, plastic, or other suitable moldable material, has been ground away down to the back surfaces 106 of each of the die slivers 102. Therefore, the back surface 106 of each die sliver 102 is flush with the molding material 104 and is exposed outside (i.e., not covered by) the molding material 104.


Each die sliver 102 has a front surface 108 that opposes its back surface 106. Through a molding process in which the die slivers 102 are molded into the molding material 104, the front surfaces 108 are flush with and remain exposed outside of the molding material 104, enabling each die sliver 102 (and printhead die 100) to dispense fluid. Each die sliver 102 includes a silicon die substrate 110 comprising a thin silicon sliver that includes fluid feed holes 112 dry etched or otherwise formed therein to enable fluid flow through the substrate 110 from a first substrate surface 114 to a second substrate surface 116. In addition to removing the molding material 104 from the back surfaces 106 of die slivers 102, the process used to thin the molded printhead die 100 (e.g., a grinding process) may also remove a thin silicon cap layer (not shown) covering up the fluid feed holes 112 to enable fluid at the back surfaces 106 to enter and flow through the fluid feed holes 112 to the front surfaces 108.


Formed on the second substrate surface 116 are one or more layers 118 that define a fluidic architecture that facilitates the ejection of fluid drops from the molded printhead die 100. The fluidic architecture defined by layer(s) 118 generally includes ejection chambers 120 having corresponding orifices 122, a manifold (not shown), and other fluidic channels and structures. The layer(s) 118 can include, for example, a chamber layer formed on the substrate 110, and a separately formed orifice layer over the chamber layer. In other examples, layer(s) 118 can include a single monolithic layer that combines the chamber and orifice layers. The fluidic architecture layer 118 is typically formed of an SU8 epoxy or some other polyimide material, and can be formed using various processes including a spin coating process and a lamination process.


In addition to a fluidic architecture defined by layer(s) 118 on silicon substrate 110, each die sliver 102 includes integrated circuitry formed on the substrate 110 using thin film layers and elements (not shown). For example, corresponding with each ejection chamber 120 is an ejection element, such as a thermal resistor ejection element or a piezoelectric ejection element, formed on the second surface 116 of substrate 110. The ejection elements are actuated to eject drops or streams of ink or other printing fluid from chambers 120 through orifices 122. Thus, each chamber 120 and corresponding orifice 122 and ejection element generally make up a fluid drop generator formed on the second surface 116 of substrate 110. Ejection elements on each die sliver 102 are connected to bond pads 124 or other suitable electrical terminals on the die sliver 102, directly or through substrate 110. In general, wire bonds connect the die sliver bond pads 124 to a printed circuit board, and the printed circuit board is connected through signal traces in a flex circuit 922 (FIGS. 10, 11) to a controller (FIG. 9, 914; FIG. 12, 1212) on an inkjet printing device (FIG. 9, 900; FIG. 12, 1200), as described in international patent application number PCT/US2013/068529, filed Nov. 5, 2013 titled Molded Printhead, which is incorporated herein by reference in its entirety.



FIG. 3 shows several basic steps in an example process for making and thinning a molded printhead die 100. As shown in FIG. 3 at part “A”, a die sliver 102 is attached to a carrier 300 using a thermal release tape 302. The die sliver 102 is placed on the tape 302 with the front surface 108 positioned downward toward the carrier 300 and pressed against the tape 302. The contact between the front surface 108 and the tape 302 seals the area around the bond pads 124 and prevents epoxy mold compound material from entering during a subsequent molding process.


The molding process, generally shown in FIG. 3 at part “B”, can be a compression molding process, for example, or another suitable molding process such as a transfer molding process. In a compression molding process, a molding material 104 such as plastic or an epoxy mold compound is preheated and placed with the die sliver 102 in a bottom mold (not specifically shown). A mold top 304 is then brought down, and heat and pressure force the molding material 104 into all the areas within the mold (except in areas around bond pads 124 sealed by tape 302) such that it encapsulates the die sliver 102. During the compression molding process, a thin silicon cap 306 prevents molding material 104 from entering into the fluid feed holes 112 in the sliver substrate 102.


After the compression molding process, the carrier 300 is released from the thermal tape 302, and the tape is removed from the molded printhead die 100, as shown in FIG. 3 at part “C”. As shown at part “D” of FIG. 3, the molded printhead die 100 is thinned to remove the molding material covering the back surface 106 of the die sliver 102, and the thin silicon cap 306 covering the fluid feed holes 112. Thinning the die 100 can include grinding down the molding material 104 and the thin silicon cap 306 using a diamond grinding wheel, an ELID (electrolytic in-process dressing) grinding wheel, or another appropriate grinding process. The thinning of the molded printhead die 100 leaves the back surface 106 exposed (i.e., not covered over by molding material 104) and flush with the molding material 104, and it opens up the fluid feed holes 112 so that fluid can flow through the die sliver 102 from the back surface 106 to the front surface 108.


The molding process and the thinning process leave the die slivers 102 embedded within the molding material 104 such that the edges 126 or sides of the die slivers 102 comprise the amount of surface area that forms a joint or connection with the molding 104. In some examples, in order to make the joints between the die sliver 102 and the molding 104 more robust, a joint enhancement feature is incorporated at the edges 126 of the die sliver 102. The joint enhancement feature generally increases the amount of surface area contact between the die sliver 102 and the molding material 104 to improve the connection and reduce the possibility that the die sliver 102 could come loose from the molding material 104.



FIGS. 4-7 show examples of molded printhead dies 100 where the embedded die slivers 102 include examples of joint enhancement features 400. The joint enhancement features 400 shown in FIGS. 4-7 are not intended to be drawn to scale, and they comprise examples of various physical features that can be incorporated at the edges 126 of die slivers 102 to improve the connections between the die slivers 102 and the molding material 104. Thus, the features 400 are provided for the purpose of illustration, and in practice they may be shaped differently and may be smaller or larger than they are shown in FIGS. 4-7.


As shown in FIG. 4, one example of a joint enhancement feature 400 is provided where edges 126 of the bulk silicon substrate 110 of the die sliver 102 are tapered. In FIG. 4, the tapered edges 402 of substrate 110 taper outward (i.e., away from the die sliver 102) from the second substrate surface 116 to the first substrate surface 114. During the molding process, the molding material 104 forms a molded lip 404 area where the molding material 104 sits over the tapered substrate edges 402. The molded lip 404 and tapered edge 402 help to form a robust joint between the molding material 104 and the die sliver 102. The joint can be formed around all the edges of the die sliver 102 (i.e., four edges 126 of the rectangular die sliver 102), or fewer edges such as two edges.


As shown in FIG. 5, another example of a joint enhancement feature 500 is provided where edges 126 of the bulk silicon substrate 110 of the die sliver 102 are tapered in two different directions. In FIG. 5, the edges 126 of substrate 110 include outward tapered edges 502 (i.e., where edges taper away from the die sliver 102) tapering from the second substrate surface 116 to the first substrate surface 114, and inward tapered edges 504 that taper back in toward the die sliver 102 from the first substrate surface 114 to the second substrate surface 116. During the molding process, the molding material 104 forms upper and lower molded lip areas 506, 508, where the molding material 104 wraps around the tapered substrate edges 502, 504. The molded lip areas 506, 508, and tapered edges 502, 504, help to form a robust joint between the molding material 104 and the die sliver 102. The joint can be formed around all the edges of the die sliver 102 (i.e., four edges of the rectangular die sliver 102), or fewer edges such as two edges.


As shown in FIG. 6, another example of a joint enhancement feature 600 is provided where edges 126 of the bulk silicon substrate 110 of the die sliver 102 are notched. In FIG. 6, the notched edges 602 of substrate 110 are notched inward (i.e., toward the die sliver 102), but in other examples they can be notched outward (i.e., away from the die sliver 102). During the molding process, the molding material 104 forms molded notched areas 604 that protrude into, and fill in, the notched edges 602 of the substrate 110. The molded notched areas 604 and notched substrate edges 602 help to form a robust joint between the molding material 104 and the die sliver 102. The joint can be formed around all the edges of the die sliver 102 (i.e., four edges of the rectangular die sliver 102), or fewer edges such as two edges.


As shown in FIG. 7, another example of a joint enhancement feature 700 is provided where edges 126 of the bulk silicon substrate 110 of the die sliver 102 are tapered. In FIG. 7, the tapered edges 702 of substrate 110 taper outward (i.e., away from the die sliver 102) from the first substrate surface 114 to the second substrate surface 116. This results in the die sliver substrate 110 being slightly wider than the SU8 forming the fluidic architecture layer 118. Therefore, during the molding process, the molding material 104 wraps around the edges 702 and 704 of the substrate 110, forming a molded lip area 706. The molded lip area 706, and substrate 110 edges 702 and 704 help to form a robust joint between the molding material 104 and the die sliver 102. The joint can be formed around all the edges of the die sliver 102 (i.e., four edges of the rectangular die sliver 102), or fewer edges such as two edges.


While specific examples of joint enhancement features are shown and discussed herein with respect to the silicon substrate 110 and fluidics layer 118 at the edges 126 of die sliver 102, the shapes and configurations of such features are not limited in this respect. Rather, joint enhancement features made at the edges 126 of die sliver 102 generally can take on numerous other shapes and configurations including, for example, grooves, cuts, notches, channels, tapers, indentations, bumps, combinations thereof, and so on.


As shown in FIG. 8, one or more molded printhead dies 100 can be adhered to or otherwise affixed to a printhead assembly 800. A printhead assembly 800 typically includes a printed circuit board (PCB) 802, to which the one or more molded printhead dies 100 are attached. Methods of attaching a molded printhead die 100 to a PCB 802 include, for example, using an adhesive or using an additional molding process that molds the PCB 802 and molded printhead die 100 into a monolithic structure. In the example printhead assembly 800 of FIG. 8, each of four molded printhead dies 100 is positioned within a window 804 cut out of the PCB 802. The molded printhead dies 100 and PCB 802 can then be further affixed to a die carrier (FIG. 9; 913) and other structural elements such as a manifold of a print cartridge or print bar for use within an inkjet printing device.


As noted above, thinned, molded printhead dies 100 are suitable for use in, for example, a print cartridge and/or print bar of an inkjet printing device. FIG. 9 is a block diagram showing an example of an inkjet printer 900 with a print cartridge 902 that incorporates an example of a printhead assembly 800 comprising one or more thinned, molded printhead dies 100. In printer 900, a carriage 904 scans print cartridge 902 back and forth over a print media 906 to apply ink to media 906 in a desired pattern. Print cartridge 902 includes one or more fluid compartments 908 housed together with printhead 100 that receive ink from an external supply 910 and provide ink to molded printhead die 100. In other examples, the ink supply 910 may be integrated into compartment(s) 908 as part of a self-contained print cartridge 902. Generally, the number of compartments 908 in cartridge 902 corresponds with the number of die slivers 102 embedded in the molded printhead die 100, such that each die sliver 102 can be supplied with a different printing fluid (e.g., a different color ink) from a different compartment 908. A manifold 911 includes ribs or other internal routing structures with corresponding apertures 915 coupled to the back surfaces 106 (e.g., FIG. 1) of the die slivers 102 and/or a die carrier 913 to route printing fluid from each compartment 908 to the appropriate die sliver 102 in the molded printhead die 100. During printing, a media transport assembly 912 moves print media 906 relative to print cartridge 902 to facilitate the application of ink to media 906 in a desired pattern. Controller 914 generally includes the programming, processor(s), memory(ies), electronic circuits and other components needed to control the operative elements of printer 900.



FIG. 10 shows a perspective view of an example print cartridge 902. Referring to FIGS. 9 and 10, print cartridge 902 includes a thinned, molded printhead die 100 supported by a cartridge housing 916. The molded printhead die 100 includes four elongated die slivers 102 and a PCB 802 embedded in a molding material 104 such as an epoxy mold compound. In the example shown, the die slivers 102 are arranged parallel to one another across the width of the molded printhead die 100. The printhead die 100 is located within a window 804 that has been cut out of PCB 802. While a single molded printhead die 100 with four die slivers 102 is shown for print cartridge 902, other configurations are possible, for example with more printhead dies 100 each with more or fewer die slivers 102. At either end of the die slivers 102 are bond wires (not shown) covered by low profile protective coverings 917 comprising a suitable protective material such as an epoxy, and a flat cap placed over the protective material.


Print cartridge 902 is fluidically connected to ink supply 910 through an ink port 918, and is electrically connected to controller 914 through electrical contacts 920. Contacts 920 are formed in a flex circuit 922 affixed to the housing 916. Signal traces (not shown) embedded within flex circuit 922 connect contacts 920 to corresponding contacts (not shown) on printhead die 100. Ink ejection orifices 122 (not shown in FIGS. 9 and 10) on each die sliver 102 are exposed through an opening in the flex circuit 922 along the bottom of cartridge housing 916.



FIG. 11 shows a perspective view of another example print cartridge 902 suitable for use in a printer 900. In this example, the print cartridge 902 includes a printhead assembly 924 with four thinned, molded printhead dies 100 and a PCB 802 embedded in a molding material 104 and supported by cartridge housing 916. Each molded printhead die 100 includes four die slivers 102 and is located within a window 804 cut out of the PCB 802. While a printhead assembly 924 with four thinned, molded printhead dies 100 is shown for this example print cartridge 902, other configurations are possible, for example with more or fewer molded printhead dies 100 that each have more or fewer die slivers 102. At either end of the die slivers 102 in each molded printhead 100 are bond wires (not shown) covered by low profile protective coverings 917 that comprise a suitable protective material such as an epoxy, and a flat cap placed over the protective material. As in the example cartridge 902 shown in FIG. 10, an ink port 918 fluidically connects cartridge 902 with ink supply 910 and electrical contacts 920 electrically connect printhead assembly 924 of cartridge 902 to controller 914 through signal traces embedded in flex circuit 922. Ink ejection orifices 122 (not shown in FIG. 11) on each die sliver 102 are exposed through an opening in flex circuit 922 along the bottom of cartridge housing 916.



FIG. 12 is a block diagram illustrating an inkjet printer 1200 with a media wide print bar 1202 implementing another example of a thinned, molded printhead die 100. Printer 1200 includes print bar 1202 spanning the width of a print media 1204, flow regulators 1206 associated with print bar 1202, a media transport mechanism 1208, ink or other printing fluid supplies 1210, and a printer controller 1212. Controller 1212 represents the programming, processor(s) and associated memories, and the electronic circuitry and components needed to control the operative elements of a printer 1200. Print bar 1202 includes an arrangement of thinned, molded printhead dies 100 for dispensing printing fluid on to a sheet or continuous web of paper or other print media 1204. Die slivers 102 within each molded printhead die 100 receive printing fluid through a flow path from supplies 1210 into and through flow regulators 1206 and a manifold 1214 in print bar 1202.



FIG. 13 is a perspective view showing a molded print bar 1300 with multiple thinned, molded printhead dies 100 that is suitable for use in the printer 1200 shown in FIG. 12. The molded print bar 1300 includes multiple thinned, molded printhead dies 100 and a PCB 802 embedded in a molding material 104. The molded printhead dies 100 are arranged within windows 804 cut out of PCB 802 that are in a row lengthwise across the print bar 1300 in a staggered configuration in which each molded printhead die 100 overlaps an adjacent molded printhead die 100. Although ten molded printhead dies 100 are shown in a staggered configuration, more or fewer printhead dies 100 may be used in the same or a different configuration. At either end of the die slivers 102 in each printhead die 100 are bond wires (not shown) that are covered by low profile protective coverings 917 comprising a suitable protective material such as an epoxy, and a flat cap placed over the protective material.

Claims
  • 1. A printhead die comprising: a molding having a front surface and a back surface; anda die sliver molded into the molding, a front surface of the die sliver to dispense fluid and being flush with the front surface of the molding, a back surface of the die sliver to receive the fluid and being flush with the back surface of the molding.
  • 2. The printhead die of claim 1, wherein the front surface and the back surface of the die sliver are exposed outside the molding and flush with the molding.
  • 3. The printhead die of claim 1, wherein the molding includes a non-epoxy material.
  • 4. The printhead die of claim 1, wherein the molding includes an epoxy material.
  • 5. The printhead die of claim 1, wherein the molding includes a thermal plastic material.
  • 6. The printhead die of claim 1, wherein the printhead die further includes edges that connect the molding to form a joint between the die sliver and the molding.
  • 7. An apparatus comprising: a printhead die that includes a die sliver having a front surface having a plurality of nozzles to dispense fluid, and having a back surface to receive the fluid; anda layer of molding material, wherein the molding material is molded onto the printhead die and the layer of molding material having a front surface that is flush with the front surface of the die sliver and having a back surface that is flush with the back surface of the die sliver.
  • 8. The apparatus of claim 7, the apparatus including a media wide print bar and wherein the printhead die includes a plurality of die slivers including said die sliver.
  • 9. The apparatus of claim 8, wherein a plurality of ejection fluid slots are defined in the molding material to feed an ejection fluid to the plurality of die slivers.
  • 10. The apparatus claim 7, wherein the molding material includes a non-epoxy molding material.
  • 11. The apparatus of claim 7, further comprising a printed circuit board molded with the molding material with the printhead die.
  • 12. A method, comprising: placing a printhead die face down on a carrier, the printhead die including a die sliver having a front surface to dispense fluid and having a back surface to receive the fluid; andmolding the printhead die on the carrier with a molding material such that front and back surfaces of the molding material are respectively flush with the front surface and the back surface of the die sliver.
  • 13. The method of claim 12, further comprising placing a printed circuit board on the carrier with the printhead die prior to molding the printhead die on the carrier.
  • 14. The method of claim 12, wherein the molding material comprises a non-epoxy molding material.
Priority Claims (6)
Number Date Country Kind
PCT/US2013/033046 Mar 2013 WO international
PCT/US2013/046065 Jun 2013 WO international
PCT/US2013/048214 Jun 2013 WO international
PCT/US2013/052505 Jul 2013 WO international
PCT/US2013/052512 Jul 2013 WO international
PCT/US2013/068529 Nov 2013 WO international
CROSS REFERENCE TO RELATED APPLICATIONS

This is a continuation of U.S. application Ser. No. 16/110,346, filed Aug. 23, 2018, which is a continuation of U.S. application Ser. No. 15/646,163, filed Jul. 11, 2017, which is a continuation of U.S. Pat. No. 9,724,920, having a national entry date of Aug. 24, 2015, which is a national stage application under 35 U.S.C. § 371 of International Application No. PCT/US2014/030945, filed Mar. 18, 2014, which claims priority to each of International Application Nos. PCT/US2013/033046, filed Mar. 20, 2013, PCT/US2013/046065, filed Jun. 17, 2013, PCT/US2013/048214, filed Jun. 27, 2013, PCT/US2013/052505, filed Jul. 29, 2013, PCT/US2013/052512, filed Jul. 29, 2013, and PCT/US2013/068529, filed Nov. 5, 2013, all of the above hereby incorporated by reference in their entirety.

US Referenced Citations (206)
Number Name Date Kind
4224627 Powell et al. Sep 1980 A
4460537 Heinle Jul 1984 A
4521788 Kimura Jun 1985 A
4633274 Matsuda Dec 1986 A
4873622 Komuro et al. Oct 1989 A
4881318 Komuro et al. Nov 1989 A
4973622 Baker et al. Nov 1990 A
5016023 Chan May 1991 A
5160945 Drake Nov 1992 A
5387314 Baughrnan et al. Feb 1995 A
5565900 Cowger Oct 1996 A
5696544 Komuro Dec 1997 A
5719605 Anderson Feb 1998 A
5745131 Kneezel et al. Apr 1998 A
5841452 Silverbrook Nov 1998 A
5847725 Cleland Dec 1998 A
5894108 Mostafazeadeh et al. Apr 1999 A
6022482 Chen et al. Feb 2000 A
6123410 Beerling et al. Sep 2000 A
6132028 Su et al. Oct 2000 A
6145965 Inada et al. Nov 2000 A
6179410 Kishima Jan 2001 B1
6188414 Wong et al. Feb 2001 B1
6190002 Spivey Feb 2001 B1
6227651 Watts et al. May 2001 B1
6250738 Wailer et al. Jun 2001 B1
6254819 Chatterjee et al. Jul 2001 B1
6281914 Hiwada et al. Aug 2001 B1
6291317 Salatino et al. Sep 2001 B1
6305790 Kawamura et al. Oct 2001 B1
6341845 Scheffelin Jan 2002 B1
6379988 Peterson et al. Apr 2002 B1
6402301 Powers et al. Jun 2002 B1
6454955 Beerling et al. Sep 2002 B1
6464333 Scheffelin et al. Oct 2002 B1
6543879 Feinn et al. Apr 2003 B1
6554399 Wong et al. Apr 2003 B2
6560871 Ramos et al. May 2003 B1
6634736 Miyakoshi et al. Oct 2003 B2
6666546 Buswell et al. Dec 2003 B1
6676245 Silverbrook Jan 2004 B2
6767089 Buswell et al. Jul 2004 B2
6866790 Milligan et al. Mar 2005 B2
6869166 Brugue Mar 2005 B2
6896359 Miyazaki et al. May 2005 B1
6930055 Bhowmik et al. Aug 2005 B1
6938340 Haluzak et al. Sep 2005 B2
6962406 Kawamura et al. Nov 2005 B2
6997540 Horvath et al. Feb 2006 B2
7051426 Buswell May 2006 B2
7185968 Kim et al. Mar 2007 B2
7188942 Haines et al. Mar 2007 B2
7238293 Donaldson et al. Jul 2007 B2
7240991 Timm Jul 2007 B2
7347533 Elrod et al. Mar 2008 B2
7490924 Haluzak et al. Feb 2009 B2
7498666 Hussa Mar 2009 B2
7543924 Silverbrook Jun 2009 B2
7547094 Kawamura Jun 2009 B2
7591535 Nystrom et al. Sep 2009 B2
7614733 Haines et al. Nov 2009 B2
7658467 Silverbrook Feb 2010 B2
7658470 Jones et al. Feb 2010 B1
7727411 Yamamuro et al. Jun 2010 B2
7824013 Chung-Long-Shan et al. Nov 2010 B2
7828417 Haluzak et al. Nov 2010 B2
7862147 Ciminelli et al. Jan 2011 B2
7862160 Andrews et al. Jan 2011 B2
7877875 O'Farrell et al. Feb 2011 B2
8063318 Williams et al. Nov 2011 B2
8091234 Ibe et al. Jan 2012 B2
8101438 McAvoy et al. Jan 2012 B2
8118406 Ciminelli et al. Feb 2012 B2
8163463 Kim et al. Apr 2012 B2
8177330 Suganuma et al. May 2012 B2
8197031 Stephens et al. Jun 2012 B2
8235500 Nystrom et al. Aug 2012 B2
8246141 Petfuchik et al. Aug 2012 B2
8272130 Miyazaki Sep 2012 B2
8287104 Sharan et al. Oct 2012 B2
8342652 Nystrom et al. Jan 2013 B2
8405232 Hsu et al. Mar 2013 B2
8429820 Koyama et al. Apr 2013 B2
8439485 Tamaru et al. May 2013 B2
8454130 Iinuma Jun 2013 B2
8476748 Darveaux et al. Jul 2013 B1
8485637 Dietl Jul 2013 B2
8496317 Ciminelli Jul 2013 B2
9446587 Chen Sep 2016 B2
9724920 Chen Aug 2017 B2
9731509 Chen Aug 2017 B2
9844946 Chen Dec 2017 B2
9944080 Chen et al. Apr 2018 B2
20010037808 Deem et al. Nov 2001 A1
20020024569 Silverbrook Feb 2002 A1
20020030720 Kawamura et al. Mar 2002 A1
20020033867 Silverbrook Mar 2002 A1
20020041308 Cleland Apr 2002 A1
20020051036 Scheffelin et al. May 2002 A1
20020122097 Beerling et al. Sep 2002 A1
20020180825 Buswell et al. Dec 2002 A1
20020180846 Silverbrook Dec 2002 A1
20030007034 Horvath et al. Jan 2003 A1
20030052944 Scheffelin et al. Mar 2003 A1
20030081053 Barinaga May 2003 A1
20030090558 Coyle May 2003 A1
20030140496 Buswell et al. Jul 2003 A1
20030156160 Yamaguchi Aug 2003 A1
20030169308 Audi Sep 2003 A1
20030186474 Haluzak et al. Oct 2003 A1
20040032468 Killmeier et al. Feb 2004 A1
20040055145 Buswell Mar 2004 A1
20040084404 Donaldson May 2004 A1
20040095422 Eguchi et al. May 2004 A1
20040119774 Conta et al. Jun 2004 A1
20040196334 Cornell Oct 2004 A1
20040201641 Brugue Oct 2004 A1
20040233254 Kim Nov 2004 A1
20050018016 Silverbrook Jan 2005 A1
20050024444 Conta et al. Feb 2005 A1
20050030358 Haines et al. Feb 2005 A1
20050046663 Silverbrook Mar 2005 A1
20050116995 Tanikawa et al. Jun 2005 A1
20050122378 Touge Jun 2005 A1
20050162466 Silverbrook et al. Jul 2005 A1
20060022273 Halk Feb 2006 A1
20060028510 Park et al. Feb 2006 A1
20060066674 Sugahara Mar 2006 A1
20060132543 Elrod et al. Jun 2006 A1
20060175726 Kachi Aug 2006 A1
20060209110 Vinas et al. Sep 2006 A1
20060243387 Haluzak et al. Nov 2006 A1
20060256162 Hayakawa Nov 2006 A1
20060280540 Han Dec 2006 A1
20070139470 Lee Jun 2007 A1
20070153070 Haines et al. Jul 2007 A1
20070188561 Eguchi et al. Aug 2007 A1
20070211095 Hirayama Sep 2007 A1
20080061393 Yen Mar 2008 A1
20080079781 Shim et al. Apr 2008 A1
20080149024 Petruchik et al. Jun 2008 A1
20080174636 Kim et al. Jul 2008 A1
20080186367 Adkins Aug 2008 A1
20070738654 Haluzak et al. Oct 2008
20080239002 Nystrom et al. Oct 2008 A1
20080259125 Haluzak et al. Oct 2008 A1
20080291243 Osaki Nov 2008 A1
20080292986 Park et al. Nov 2008 A1
20080297564 Jeong et al. Dec 2008 A1
20090009559 Jindai et al. Jan 2009 A1
20090011185 Giri Jan 2009 A1
20090014413 Nystrom et al. Jan 2009 A1
20090022199 Jikutani et al. Jan 2009 A1
20090051717 Kuwahara Feb 2009 A1
20090086449 Minamio et al. Apr 2009 A1
20090225131 Chen et al. Sep 2009 A1
20090256891 Anderson Oct 2009 A1
20090267994 Suganuma et al. Oct 2009 A1
20100035373 Hunziker et al. Feb 2010 A1
20100079542 Ciminelli et al. Apr 2010 A1
20100132874 Anderson et al. Jun 2010 A1
20100156989 Petruchik Jun 2010 A1
20100224983 Huang et al. Sep 2010 A1
20100271445 Sharan et al. Oct 2010 A1
20110018941 McAvoy et al. Jan 2011 A1
20110019210 Chung et al. Jan 2011 A1
20110037808 Ciminelli Feb 2011 A1
20110080450 Ciminelli et al. Apr 2011 A1
20110115852 Bibl et al. May 2011 A1
20110141691 Slaton et al. Jun 2011 A1
20110222239 Dede Sep 2011 A1
20110292121 McAvoy et al. Dec 2011 A1
20110292124 Anderson Dec 2011 A1
20110292126 Nystrom et al. Dec 2011 A1
20110296688 Fielder et al. Dec 2011 A1
20110298868 Fielder et al. Dec 2011 A1
20110304673 Ciminelli et al. Dec 2011 A1
20120000595 Mase et al. Jan 2012 A1
20120003902 Mase Jan 2012 A1
20120019593 Scheffelin et al. Jan 2012 A1
20120061857 Ramadoss et al. Mar 2012 A1
20120098114 Ishibashi Apr 2012 A1
20120120158 Sakai et al. May 2012 A1
20120124835 Okano et al. May 2012 A1
20120132874 Anderson et al. Jun 2012 A1
20120154486 Anderson et al. Jun 2012 A1
20120186079 Ciminelli Jul 2012 A1
20120188307 Ciminelli Jul 2012 A1
20120210580 Dietl Aug 2012 A1
20120212540 Dietl Aug 2012 A1
20120242752 Mou et al. Sep 2012 A1
20130026130 Watanabe Jan 2013 A1
20130027466 Petruchik et al. Jan 2013 A1
20130029056 Asai et al. Jan 2013 A1
20130194349 Ciminelli et al. Aug 2013 A1
20130201256 Fricke et al. Aug 2013 A1
20130320471 Luan Dec 2013 A1
20140028768 Chen Jan 2014 A1
20160001552 Chen Jan 2016 A1
20160001558 Chen et al. Jan 2016 A1
20160009084 Chen et al. Jan 2016 A1
20160009085 Chen Jan 2016 A1
20160016404 Chen Jan 2016 A1
20170008281 Chen Jan 2017 A1
20180141337 Chen et al. May 2018 A1
20180326724 Chen et al. Nov 2018 A1
Foreign Referenced Citations (121)
Number Date Country
1175506 Mar 1998 CN
1197732 Nov 1998 CN
1286172 Mar 2001 CN
1297815 Jun 2001 CN
1314244 Sep 2001 CN
1512936 Jul 2004 CN
1530229 Sep 2004 CN
1541839 Nov 2004 CN
1593924 Mar 2005 CN
1622881 Jun 2005 CN
1872554 Dec 2006 CN
1903578 Jan 2007 CN
1903579 Jan 2007 CN
101020389 Aug 2007 CN
101085573 Dec 2007 CN
101124519 Feb 2008 CN
101163591 Apr 2008 CN
101274514 Oct 2008 CN
101274515 Oct 2008 CN
101274523 Oct 2008 CN
101372172 Feb 2009 CN
101607477 Dec 2009 CN
101668696 Mar 2010 CN
101668698 Mar 2010 CN
101909893 Dec 2010 CN
102470672 May 2012 CN
102596575 Jul 2012 CN
102673155 Sep 2012 CN
102689511 Sep 2012 CN
102689512 Sep 2012 CN
103052508 Apr 2013 CN
102011078906 Jan 2013 DE
102011084582 Feb 2013 DE
0705698 Apr 1996 EP
0755793 Jan 1997 EP
0822078 Feb 1998 EP
1027991 Aug 2000 EP
1095773 May 2001 EP
1080907 Jul 2001 EP
1264694 Dec 2002 EP
1386740 Feb 2004 EP
1518685 Mar 2005 EP
1827844 Sep 2007 EP
1908593 Apr 2008 EP
60262649 Dec 1985 JP
61125852 Jun 1986 JP
62240562 Oct 1987 JP
H04-292950 Oct 1992 JP
H06-015824 Jan 1994 JP
H06-226977 Aug 1994 JP
H07-227970 Aug 1995 JP
H09-001812 Jan 1997 JP
H09-029970 Feb 1997 JP
H09-131871 May 1997 JP
H11091108 Apr 1999 JP
H11-208000 Aug 1999 JP
2000108360 Mar 2001 JP
2001071490 Mar 2001 JP
2001-246748 Sep 2001 JP
2004-517755 Jul 2002 JP
2002291262 Oct 2002 JP
2003-011365 Jan 2003 JP
2003-063010 Mar 2003 JP
2003063020 Mar 2003 JP
2004-148827 May 2004 JP
2005-088587 Apr 2005 JP
2005161710 Jun 2005 JP
2005212134 Aug 2005 JP
2006-009149 Jan 2006 JP
2006224624 Aug 2006 JP
2006-315321 Nov 2006 JP
2006315321 Nov 2006 JP
2006321222 Nov 2006 JP
2007531645 Nov 2007 JP
2008-009149 Jan 2008 JP
2008-087478 Apr 2008 JP
2008-511130 Apr 2008 JP
2009-255448 Nov 2009 JP
2010028841 Feb 2010 JP
2010050452 Mar 2010 JP
2010137460 Jun 2010 JP
2010-524713 Jul 2010 JP
2011240516 Dec 2011 JP
2012-158150 Aug 2012 JP
2013501655 Jan 2013 JP
2015-217679 Dec 2015 JP
20020025590 Apr 2002 KR
20040097848 Nov 2004 KR
2012-0079171 Jul 2012 KR
1020120079171 Jul 2012 KR
501979 Sep 2002 TW
503181 Sep 2002 TW
I295632 Apr 2008 TW
200903685 Jan 2009 TW
200926385 Jun 2009 TW
200936385 Sep 2009 TW
201144081 Dec 2011 TW
WO-2006066306 Jun 2006 WO
WO-2008134202 Nov 2008 WO
WO-2008151216 Dec 2008 WO
WO-2010005434 Jan 2010 WO
2011001952 Jan 2011 WO
WO-2011019529 Feb 2011 WO
WO-2011019529 Feb 2011 WO
WO-2011058719 May 2011 WO
WO-2012011972 Jan 2012 WO
WO-2012-023941 Feb 2012 WO
WO-2012023939 Feb 2012 WO
WO-2012106661 Aug 2012 WO
WO-2012134480 Oct 2012 WO
WO-2012168121 Dec 2012 WO
WO-201 3016048 Jan 2013 WO
2014013356 Jan 2014 WO
WO-2014133575 Sep 2014 WO
WO-2014133576 Sep 2014 WO
WO-2014133577 Sep 2014 WO
WO-2014133578 Sep 2014 WO
WO-2014133600 Sep 2014 WO
WO-2014133516 Sep 2014 WO
WO-2014133561 Sep 2014 WO
WO-2014153305 Sep 2014 WO
Non-Patent Literature Citations (11)
Entry
European Patent Office, Communication pursuant to Ruie 164(1) EPC for Appl. No. 13876407.1 dated Jan. 5, 2017 (7 pages).
European Patent Office, Extended European Search Report for Appl. No. 13876407.1 dated May 31, 2017 (18 pages).
Hayes, D.J. et al.; Microjet Printing of Solder and Polymers for Multi-chip Modules and Chip-scale Packages ; http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.88.3951&rep=rep1&type=pdf >; May 14, 1999 (6 pages).
Korean Intellectual Property Office, International Search Report and Written Opinion for PCT/US2013/062221 dated Dec. 19, 2013 (13 pages).
Kumar, Aditya et al; Wafer Level Embedding Technology for 3D Wafer Level Embedded Package; Institute of Microelectronics, A*Star; 2Kinergy Ltd, TECHplace II; 2009 Electronic Components and Technology Conference.
Lee, J-D. et el.; A Thermal Inkjet Printhead with a Monolithically Fabricated Nozzle Plate and Self-aligned Ink Feed Hole; http://ieee.xplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=788525 > on pp. 229-236; vol. 8; Issue: 3, Sep. 1999 Search Results: 83139693 & 83139415.
Lindemann, T. et al.; One Inch Thermal Bubble Jet Printhead with Laser Structured Integrated Polyimide Nozzle Plate: http://ieeexplore.ieee org/stamp/stamp.jsp?tp=&arnumber=4147592 > on pp. 420-428; vol. 16; Issue: 2 ; Apr. 2007 Search Results 83139712.
Miettinen et al; Molded Substrates for Inkjet Printed Modules; IEEE Transactions on Components and Packaging Technologies, vol. 32, No. 2, Jun. 2009 293; pp. 293-301.
Chen Yue Cheng et al.; A Monolithic Thermal Inkjet Printhead Combining Anisotropic Etching and Electro Plating; in Input/Output and Imaging Technologies II, 246 Proceedings of SPIE vol. 4080 Jul. 26-27, 2007; pp. 245-252.
International Search Report & Written Opinion received for PCT Application No. PCT/US2013/074925, dated Mar. 20, 2014, 14 pages.
Yim, M.J. et al.; Ultra Thin Pop Top Package Using Compression Mold;It's Warpage Contorl; http://ieeexplore.IEEE.org/xpl/articleDetails.jsp?tp=&arnumber=5898654&queryText%3Dmold+cap+thick*> May 31-Jun. 3, 2011, pp. 1141-1146.
Related Publications (1)
Number Date Country
20200180314 A1 Jun 2020 US
Continuations (3)
Number Date Country
Parent 16110346 Aug 2018 US
Child 16704122 US
Parent 15646163 Jul 2017 US
Child 16110346 US
Parent 14769883 US
Child 15646163 US