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5170100 | Shi | Dec 1992 | |
5234541 | Shannon et al. | Aug 1993 | |
5238435 | Te Velde | Aug 1993 | |
5361079 | Yamamoto | Nov 1994 | |
5375005 | Komano | Dec 1994 | |
5563470 | Li | Oct 1996 | |
5603649 | Zimmerman | Feb 1997 |
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T. Giorgi; Getters & Gettering; Japan J. Appl. Physics Suppl. 2, P&L pp. 53-60, 1994 (No Month. |