Motion controlling

Abstract

Motion controlling includes a combining network having an acceleration input for receiving an acceleration signal representative of acceleration of a movable element and a position input for receiving a position signal representative of position of the movable element and an output for providing an inferred position signal representative of an inferred position of the movable element. The network includes a first signal processor for processing the acceleration signal to provide modified acceleration signal, a second signal processor for processing the position signal to provide a modified position signal and a combiner for combining the modified acceleration signal with the modified position signal to provide the inferred position signal.

Description

The invention relates to servo systems, and more particularly to motion controlling and position sensing, and still more particularly to motion control systems employing accelerometers.

For background, reference is made to Dorf and Bishop, Modern Control Systems , Seventh Edition, 1995, Addison-Wesley Publishing Company, ISBN 0-201-50174-0, especially to Chapters 2, 4 and 8.

It is an important object of the invention to provide improved motion controlling.

In one aspect of the invention, a combining network in a closed loop feedback control system combines an acceleration signal (representing an acceleration of a movable element) and a position signal (representing a position of the movable element) to produce an inferred position signal (representing an inferred position of the movable element). The combining network includes a first signal processor for processing the acceleration signal to provide a processed acceleration signal and a combiner for combining the processed acceleration signal with the position signal to provide the inferred position signal.

In another aspect of the invention, in a closed loop feedback control system, a method for combining an acceleration signal and a measured position signal to provide an inferred position signal includes low-pass filtering the acceleration signal to provide a filtered acceleration signal and combining the filtered acceleration signal with the measured position signal to provide the inferred position signal.

In another aspect of the invention, apparatus for detecting position includes an accelerometer for providing an acceleration signal representative of acceleration, a position sensor for providing a position signal representative of position, a first processor for processing the acceleration signal to provide a modified acceleration signal, a combiner for combining the acceleration signal and the position signal to yield an inferred position signal representative of inferred position.

In another aspect of the invention, a motion control apparatus includes a movable element, an input for receiving a signal representative of a desired position of the movable element, a position sensor for providing a position signal representative of the position of the movable element, an accelerometer for providing an acceleration signal representative of the acceleration of the movable element, and a combining network for combining the position signal and the acceleration signal for providing an inferred signal representative of an; inferred position for the movable element. The combining network includes a first processor for processing the acceleration signal to provide a processed acceleration signal, a; combiner for combining the processed acceleration signal and the position signal to provide the inferred position signal, a summer for comparing the inferred position signal with the desired position signal to provide a control signal, and a mover responsive to the control signal for moving the movable element to reduce the difference between the inferred position and the desired position.

In still another aspect of the invention, a circuit for combining the acceleration signal and the position signal to provide the inferred signal includes an input for the acceleration signal; a first resistor having an input connected to the acceleration signal input; a first capacitor having an input connected to the output of the first resistor and having a grounded output; a second resistor having an input connected to the input of the first capacitor and the output of the first resistor; an input for the position signal; a third resistor having an input connected to the input for the position signal; a second capacitor having an input and an output, the input of the second capacitor connected to the output of the third resistor and the output of the second capacitor being grounded; a fourth resistor having an input connected to the input of the second capacitor and the output of the third resistor; an operational amplifier having an inverting input connected to the output of the second resistor and the output of the fourth resistor, the noninverting input of the operational amplifier being grounded; a fifth resistor having an input coupled to the output of the second resistor and the output of the fourth resistor; an output for the inferred signal coupled to the output of the fifth resistor and to the -output of the operational amplifier; and a fifth capacitor, connected in parallel with the fifth resistor.

A motion control system according to the invention is advantageous, because it greatly enhances the signal to noise ratio in providing the position signal, thereby enabling more accurate control of position in the presence of noise. Furthermore, in digital control systems, a motion control system according to the invention, is free of an anti-aliasing filter and consequently allows the faster sampling rates and greater bandwidth; because at high frequencies, the. invention uses the relatively high signal-to-noise ratio acceleration signal for providing the inferred position signal; and because at high frequencies the relatively low signal-to-noise ratio position signal is heavily filtered, thereby significantly attenuating noise.

Other features, objects, and advantages will become apparent from the following detailed description, which refers to the following drawings in which:

FIG. 1 is a block diagram of a motion control system according to the invention;

FIG. 2 is a block diagram of the motion control system of FIG. 1 , with transfer functions of various elements;

FIG. 3 is a block diagram of an embodiment of the combining network portion of FIGS. 1 and 2 ;

FIG. 4 is a Bode plot of the effects on position and acceleration signals of the elements of the block diagram of FIG. 3 ;

FIG. 5 is a block diagram of an alternate embodiment of the combining network portion of FIG. 2 ;

FIG. 6 is a block diagram of a simplified version of the combining network of FIG. 5 ;

FIG. 7 is a schematic diagram of a circuit which implements elements of the combining network of FIG. 6 ;

FIG. 8 is a Bode plot showing the effects of the combining network of FIG. 6 ;

FIG. 9 a is a Bode plot of gain in dB vs. log frequency for some values of a defined ratio α;

FIG. 9 b is a Bode plot of phase in degrees vs. log frequency for some value of the a defined ratio α;

FIG. 10 is a block diagram of an alternate embodiment of the combining network of FIG. 2 ;

FIG. 11 is a: pole/zero diagram for the defined transfer function A(s). for various values of a defined ratio α; and

FIG. 12 is a circuit which implements elements of the block diagram of FIG. 10 .

With reference now to the drawings and more particularly to FIG. 1 , there is shown a block diagram of a position control system according to the invention. Corresponding elements are identified by the same reference symbols throughout the drawings. Summer 16 has an input 8 for receiving a reference position signal x ref and an input 10 for receiving an inferred position signal x inferred . Summer 16 is coupled to a controller 20 , which is in turn coupled to an actuator 22 . Actuator 22 is mechanically coupled to a movable element 26 to move the element. Movable element 26 is coupled to an accelerometer 28 and to a position sensor 30 . Accelerometer 28 and position sensor 30 are coupled to a combining network 32 , which is in turn coupled to input 10 of summer 16 .

Summer 16 , actuator 22 , movable element 26 , and position sensor 30 may be conventional devices, and controller 20 may be a conventional PID (proportional integral derivative) controller. The invention is useful in a wide variety of applications (including, but not limited to, those mentioned above) and with other components (including, but not limited to, other types of controllers) to detect or control the position of devices.

Referring now to FIG. 2 , there is shown the position control system of FIG. 1 with blocks designating transfer functions associated with some elements. Summer 16 provides an error signal x error representative of the difference between the signals x ref and x inferred (that is sums [x ref and −x inferred ] indicated by the “+” at summer input 8 and the “−” at summer input 10 or sums [−x ref and x inferred ]). Controller 20 responds to the error signal by furnishing a control signal to actuator 22 for reducing the error signal. Actuator 22 applies a force F to movable element 26 , resulting in an acceleration (a or {umlaut over (x)}, the second derivative of the position x) according to the Newtonian formula F=ma. Accelerometer 28 (shown in FIG. 2 as a summer for reasons that will be explained below) provides an acceleration signal representative of the acceleration {umlaut over (x)}. Position sensor 30 measures the position {umlaut over (x)}, which is the second integral of the acceleration {umlaut over (x)}, receives a position signal representative of the second integral of the acceleration {umlaut over (x)}. Summers 31 and 28 receive noise n 1 , and n 2 added to the position signal x and acceleration measurement signal {umlaut over (x)}, respectively. Combining circuit 32 accepts as input the acceleration signal with noise n 2 from accelerometer 28 and the position signal with noise n 1 from position sensor 30 provides an inferred position signal x inferred which is fed back to summer 16 .

Referring now to FIG. 3 , there is shown combining network 32 in more detail. The combining network which has at least two inputs selectively weighs the inputs based on frequency bands, and combines the weighted inputs to provide the inferred acceleration signal. In the embodiment of FIG. 2 , the combining network has as one input an acceleration signal, representative of the acceleration of a movable element, as a second. input a position, representative of position of the movable element, and as an output a signal of an inferred position x inferred . A “crossover frequency” as used herein, refers to a predetermined frequency at which two inputs to combining network are weighted relatively equally.

Still referring to FIG. 3 , the output of accelerometer 28 (which includes the acceleration {umlaut over (x)} and noise n 2 ), is modified by a number of modifiers, which may include a high pass filter 31 ′ and a scaler 42 . The quantities α and {dot over (ω)} 0 defining the scaling factor are described below. The output of scaler 42 is low pass filtered by low pass filter 44 which has a bread frequency {dot over (ω)} 1 cascaded with a second low-pass filter 46 which has a break frequency {dot over (ω)} 2 to yield a modified accelerometer output signal ({umlaut over (x)}+n 2 ) modified .

The output of the position sensor 30 , which includes the position measurement signal x and noise n 1 , is filtered by cascaded low-pass filters 48 and 49 with break frequencies of {dot over (ω)} 2 , to yield a modified position sensor output signal (x+n 1 ) modified . The modified accelerometer output signal and the modified position sensor output signal are combined by combiner 52 to yield an output {overscore (x)}. The frequencies {dot over (ω)} 1 and {dot over (ω)} 2 are frequencies with the relationship {dot over (ω)} 1 {dot over (ω)} 2 ={dot over (ω)} 0 2 (where {dot over (ω)} 0 is the crossover frequency, that is, a predetermined frequency at which the inputs from the accelerometer and the position sensor are weighted approximately equally by the combining network) and α is defined as the quantity {dot over (ω)} 2 /{dot over (ω)} 1 .

Referring to FIG. 4 , there is a Bode plot showing the effects on the signals of the elements of the block diagram of FIG. 3 . The curves of: FIG. 4 represent the normalized output of the various elements of FIG. 3 (in the form of log (V out /V in )) as a function of frequency. Curve 58 represents a signal representing: the actual position. Curve 58 - 58 a (assuming for the purpose of this explanation, a “white noise” model) represents the modified position signal. At low frequencies, the signal to noise ratio is high, and the position signal accurately represents the actual position. However, at high frequencies, at when the position signal becomes smaller but the noise does not, the signal to noise ratio is smaller, and the position signal diverges from accurately representing the actual position. The position sensor signal 58 a at high frequencies (such as {dot over (ω)} u ) begins to diverge from the actual position signal 58 . Low pass filters 48 and 49 modify the position signal so that curve 58 - 58 b represent the output of the second of the low pass filters 48 . At frequencies below {dot over (ω)} 2 , low pass filters 48 and 49 pass the signal from position sensor 30 . However, the cascaded low pass filters 48 and 49 sharply attenuate spectral components above {dot over (ω)} 2 .

Curve 62 represents the acceleration signal essentially constant below {dot over (ω)} 1 . Optional high pass filter 31 significantly attenuates spectral components above {dot over (ω)} a and has virtually no effect at frequencies in the range of {dot over (ω)} 0 , {dot over (ω)} 1 and {dot over (ω)} 2 . Low pass filters 44 and 46 having break frequencies at {dot over (ω)} 1 and {dot over (ω)} 2 , respectively, decrease the slope of curve 62 to match that of curve 58 above {dot over (ω)} 2 . Effectively, the two low pass filters double integrate the acceleration signal to yield a position signal.

Curve 64 represents the output of signal combiner 52 . At low frequencies, the modified output from position sensor 30 represented by curve 58 - 58 b is of greater magnitude than the modified output accelerometer 28 , so the output of summer 52 approximates the modified output 58 - 58 b of position sensor. Therefore, at low frequencies, the value {overscore (x )} can be used for the inferred position x inferred in the control system of FIGS. 1 and 2 .

At high frequencies, the modified output represented by curve 62 from accelerometer 28 is of greater magnitude than the modified output represented by curve 58 - 58 B from position sensor 30 , so the output represented by curve 64 of combiner 52 approximates the modified output represented by curve 62 of accelerometer 28 . FIG. 4 shows that the output represented by curve 64 of combiner 52 varies from the actual position signal curve 58 in the region between {dot over (ω)} 0 and {dot over (ω)} 2 .

Referring to FIG. 5 , there is shown combining network 32 ″ which is the combining network 32 ′ of FIG. 3 with additional signal processors to correct for the effect of the different slope of line 62 in the region between {dot over (ω)} 0 and {dot over (ω)} 2 . Signal processor 54 , which has a transfer characteristic with a pole at {dot over (ω)} 0 and signal processor 56 has a transfer characteristic with a zero at {dot over (ω)} 2 process the output X of combiner 52 to produce a modified inferred position signal {tilde over (x)}. The product of the transfer characteristic of signal processor 56 and those of low-pass filters 46 and 49 is unity so these signal processors may be omitted from the block diagram of FIG. 5 to form the equivalent block diagram of FIG. 6 .

Referring to FIG. 6 , combining network 32 ′″ provides an output signal {tilde over (x)} that can be expressed as: $$ x ~ = ( ω 0 ⁢ ω 2 ( s + ω 0 ) ⁢ ( s + ω 2 ) ) ⁢ x + ( α ω 0 2 * ω 0 ⁢ ω 1 ( s + ω 0 ) ⁢ ( s + ω 1 ) ) ⁢ x ~ + ( ω 0 ⁢ ω 2 ( s + ω 0 ) ⁢ ( s + ω 2 ) ) ⁢ n 1 + ( 1 ( s + ω 0 ) ⁢ ( s + ω 1 ) ) ⁢ n 2

which reduces to $$ x ~ = ( s 2 + ( α - 1 ) ⁢ ω 0 ⁢ s + ω 0 2 s 2 + ( α + ( 1 / α ) ) ⁢ ω 0 ⁢ s + ω 0 2 ) ⁢ x + ( ω 0 ⁢ ω 2 ( s + ω 0 ) ⁢ ( s + ω 2 ) ) ⁢ n 1 + ( 1 ( s + ω 0 ) ⁢ ( s + ω 1 ) ) ⁢ n 2

Since the break frequency {dot over (ω)} a of the high pass filter 31 is significantly lower than the crossover frequency {dot over (ω)} 0 or frequencies {dot over (ω)} 1 and {dot over (ω)} 2 , its effect on the signal is negligible and may be neglected. For α>>1, the value of the coefficient $$ ( s 2 + ( α - 1 ) ⁢ ω 0 ⁢ s + ω 0 2 s 2 + ( α + ( 1 / α ) ) ⁢ ω 0 ⁢ s + ω 0 2 )

of the position signal x, A(s) hereafter, is approximately 1. The cascaded low-pass filters significantly attenuate the two noise terms n 1 and n 2 integrates the output signal from accelerometer 28 to provide a velocity signal representative of the velocity of movable element 26 on terminal 53 .

Referring to FIG. 7 , there is shown a schematic diagram of a circuit embodying the combining network of FIG. 6 . Inputs 68 and 69 are connected to the outputs of accelerometer 28 and position sensor 30 , respectively. Low pass filters 44 and 48 of FIG. 6 correspond to first and second resistor and capacitor pairs 82 and 84 , respectively, and summer 52 , signal processor 42 and low pass filter 54 of FIG. 6 are in circuit 86 , which includes operational amplifier 87 , capacitor 89 and resistor 91 connected in parallel. High pass filter 31 ′ is conventional and not shown in FIG. 7 .

Referring to FIG. 8 , there is shown a Bode plot with curve 64 representing the output signal (see also FIG. 4 ) of a combining network as shown in FIG. 3 , a curve 58 of a signal representing the actual position, and output signal 66 of a combining network as shown in FIG. 6 (normalized) as a function of frequency. Curve 64 is a close representation of the actual position, deviating slightly in the region of frequencies near the crossover frequency {dot over (ω)} 0 .

Referring to FIG. 9 a , there is shown a Bode plot of gain in dB for the transfer function A(s) for various values of α, normalized to a frequency of 1 radian/sec. At higher values of α, the gain of the transfer function A(s) approaches zero dB (indicating that the value of A(s) approaches 1 as was noted above).

Referring to FIG. 9 b , there is shown a graph of phase in degrees as a function of frequency on a logarithmic scale for the transfer function A(s) for the same values of α. The phase shift at higher values of a approaches zero. The graphical representation of FIGS. 8 , 9 a and 9 b show that for large values of α, the output of the combining network of FIG. 6 is a close representation of the actual position. The combining network of FIG. 6 is especially useful in the position control system of FIGS. 1 and 2 , with the output signal {tilde over (x)} of FIG. 6 used for the signal x inferred of FIGS. 1 and 2 .

Referring to FIG. 10 , there is shown a block diagram of a combining network 32 ″″ which yields a closer representation of actual position in the region near the crossover frequency {dot over (ω)} 0 . The network of FIG. 10 includes the elements of FIG. 6 , plus a reconstruction filter 74 . Reconstruction filter 74 cancels the effect of the transfer function A(s) and therefore yields as an output {circumflex over (x)}, which is virtually an exact representation of the actual position, and the combining network of FIG. 10 can be used in the position control system of FIGS. 1 and 2 with the output signal {circumflex over (x)} used for the signal x inferred in FIGS. 1 and 2 .

Referring to FIG. 11 , there is shown a pole/zero diagram for the coefficient A(s) for various values of α. Applying a quadratic formula for all α≧9, the singularities are real, and therefore, with the teachings of this disclosure, the reconstruction filter can be implemented with simple passive components. For values of α<9, the poles of the reconstruction filter 74 can be implemented actively with resistors and capacitors or passively with inductors and capacitors.

Referring to FIG. 12 , there is shown a circuit embodying the network of FIG. 10 . The resistor capacitor pairs ( 82 and 84 ) and the circuit 86 correspond to the similarly identified circuits of FIG. 7 . The reconstruction filter circuit 88 corresponds to reconstruction filter 74 of FIG. 10 . The output at terminal 76 is a signal representing the value of x inferred of FIG, 1 , with significantly attenuated noise, and with the measured value that is virtually an exact representation of the actual position of x.

Other embodiments are within the claims.

Claims

1. A motion control method for processing an acceleration signal and a measured position signal representative of acceleration and position, respectively, of a movable element to provide an inferred position signal comprising:low-pass filtering said acceleration signal; and additively combining the low-pass filtered acceleration signal with said position signal to provide said inferred position signal.

2. A method in accordance with claim 1 and further comprising low-pass filtering said position signal.

3. A method in accordance with claim 2 and further comprising,processing said inferred position signal in accordance with a transfer characteristic ω0/(s+ω0) to provide a first modified inferred position signal; and processing said first modified inferred position signal in accordance with a transfer characteristic 1/A(s), where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02)ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω2/ω1, and s is a Laplace operator, to provide a second modified inferred position signal.

4. A method in accordance with claim 1 and further comprising processing inferred position signal according to a transfer function ω0/(s+ω0) where s is a Laplace operator and ω0 is a predetermined crossover frequency to provide a first modified inferred position signal.

5. A method in accordance with claim 1 and further comprising,processing said first modified inferred position signal in accordance with a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02)ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω1/ω2 and s is a Laplace operator, to provide a second modified inferred position signal.

6. Apparatus for providing an inferred position signal representative of the position of a movable element comprising,an accelerometer for providing an acceleration signal representative of the acceleration of said movable element, a position sensor for providing a position signal representative of the position of said movable element, a first signal processor for processing said acceleration signal to provide a modified acceleration signal, and a combiner for combining said modified acceleration signal and said position signal to provide said inferred position signal.

7. Apparatus in accordance with claim 6 and further comprising,a second signal processor characterized by a transfer characteristic ω0/s+ω0 for processing said inferred position signal to provide a first modified inferred position signal, where ω0 is a predetermined crossover frequency.

8. Apparatus in accordance with claim 7 and further comprising a reconstruction filter characterized by a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02).ω0 is a predetermined crossover frequency, ω1ω2=ω02, α is ω2/ω1 and s is a Laplace differential operator.

9. Motion control apparatus comprising,a movable element, an input for receiving a desired position signal representative of a desired position of said movable element, a position sensor for providing a position signal representative of the position of said movable element, an accelerometer for providing an acceleration signal representative of the acceleration of said movable element, a combining network for combining said position signal and said acceleration signal to provide an inferred position signal, said signal combining network comprising, a first signal processor for processing said acceleration to provide a modified signal, a combiner for additively combining said modified acceleration signal and said position signal to provide said inferred position signal, a summer for combining said inferred position signal with a signal on said input to provide a control signal, and a mover responsive to said control signal for moving said movable element.

10. Apparatus in accordance with claim 9 wherein said combining network further comprisesa second signal processor characterized by a transfer characteristic ω0/(s+ω0) where s is a Laplace operation and ω0 is a predetermined crossover frequency for processing said inferred position signal to provide a first modified position signal.

11. Apparatus in accordance with claim 10 wherein said crossover network further comprisesa reconstruction filter characterized by a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02)ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω2/ω1 and s is a Laplace differential operator for processing said first modified inferred position signal to provide a second modified inferred position signal.

12. Apparatus for combining an acceleration signal and a position signal representative of the acceleration and position respectively of a movable element to provide an inferred position signal comprising,an acceleration input for receiving said acceleration signal; a first resistor having an input and an output, said input of said first resistor connected to said acceleration input; a first capacitor having an input and an output, said input of said first capacitor connected to said output of said first resistor and said output of said capacitor being grounded; a second resistor having an input and an output, said input of said second resistor connected to said input of said first capacitor and said output of said first resistor; a position input for receiving said position signal; a third resistor having an input and an output, said input of said third resistor connected to said position input; a second capacitor having an input and an output, said input of said second capacitor connected to said output of said third resistor and said output of said second capacitor being grounded; a fourth resistor having an input and an output, said input of said fourth resistor connected to said input of said second capacitor and said output of said third resistor; an operational amplifier having an inverting input, a noninverting input, and an output, said inverting input connected to said output of said second resistor and said output of said fourth resistor, said noninverting input being grounded; a fifth resistor having an input and an output, said input of said fifth resistor coupled to said output of said second resistor and said output of said fourth resistor; an output for said inferred position signal coupled to said output of said fifth resistor and to said output of said operational amplifier; and a third capacitor, connected in parallel with said fifth resistor.

13. A circuit in accordance with claim 12 and further comprising,a sixth resistor having an input and an output, the input of said sixth resistor coupled to said output of said fifth resistor; a seventh resistor having an input, the input of said seventh resistor connected to said output of said sixth resistor; an eighth resistor having an input and an output, the input of said eighth resistor connected to said input of said seventh resistor and said output of said sixth resistor and said output of said eighth resistor coupled to said output for said inferred position signal; a fourth capacitor connected in parallel with said sixth resistor; a ninth resistor having an input and an output, said input of said ninth resistor coupled to said output of said eighth resistor and said output for said inferred position signal and said output of said ninth resistor being coupled to ground; and a fifth capacitor connected in series with said ninth resistor between said output of said ninth resistor and ground.

14. Motion controlling apparatus comprising,a combining network having an acceleration input for receiving an acceleration signal representative of acceleration of a movable element and a position input for receiving a position signal representative of position of said movable element and an output for providing an inferred position signal representative of an inferred position of said movable element, said network including a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a second signal processor for processing said position signal to provide a modified position signal, a combiner for combining said modified acceleration signal with said modified position signal to provide said inferred position signal, a reconstruction filter for processing said inferred position signal to provide a modified inferred position signal, wherein said reconstruction filter is characterized by a transfer characteristic 1/A(s) where A(s) is the quantity (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02),ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω1/ω2, and s is a Laplace operator.

15. Apparatus in accordance with claim 14 and further comprising:a second low-pass filter for processing said position signal; a third signal processor characterized by a transfer characteristic ω2/s+ω2 for processing said inferred position signal to provide a first modified inferred position signal, a second reconstruction filter for processing said first modified inferred position signal to provide a second modified inferred position signal, said second reconstruction filter characterized by a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02),ω0 is a predetermined crossover frequency, is ω1ω2=ω02, α is ω1/ω2, α is ω1/ω2, and s is a Laplace operator.

16. A motion control method for processing an acceleration signal and a measured position signal representative of acceleration and position, respectively, of a movable element to provide an inferred position signal comprising,low-pass filtering the acceleration signal; combining the low-pass filtered acceleration signal with said position signal to provide said inferred position signal, and processing said inferred position signal in accordance with a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02),ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω1/ω2 and s is a Laplace operator, to provide a modified inferred position signal.

17. A motion control method in accordance with claim 16 and further comprising,low-pass filtering said position signal, processing said inferred position signal in accordance with a transfer characteristic ω0/(s+ω0) to provide a first modified inferred position signal, and processing said first modified inferred position signal in accordance with a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02),ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω1/ω2 and s is a Laplace operator, to provide a modified inferred position signal.

18. Apparatus for providing an inferred position signal representative of the position of a movable element comprising,an accelerometer for providing an acceleration signal representative of the acceleration of said movable element, a position sensor for providing a position signal representative of the position of said movable element, a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a combiner for combining said modified acceleration signal and said position signal to provide said inferred position signal, a second signal processor characterized by a transfer characteristic ω0/s+ω0 for processing said inferred position signal to provide a first modified inferred position signal, and a reconstruction filter characterized by a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02),frequency, ω1ω2=ω02, α is ω2/ω1 and s is a Laplace differential operator.

19. Motion control apparatus comprising,a movable element, an input for receiving a desired position signal representative of a desired position of said movable element, a position sensor for providing a position signal representative of the position of said movable element, an accelerometer for providing an acceleration signal representative of the acceleration of said movable element, a signal combining network for combining said position signal and said acceleration signal to provide an inferred position signal, said signal combining network comprising, a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a combiner for combining said modified acceleration signal and said position signal to provide said inferred position signal, and a summer for combining said inferred position signal with a signal on said input to provide a control signal, a mover responsive to said control signal for moving said movable element, a second signal processor characterized by a transfer characteristic ω1/(s+ω0) where s is a Laplace operation and ω0 is a predetermined crossover frequency for processing said inferred position signal to provide a first modified position signal, wherein said second signal processor comprises a reconstruction filter characterized by a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02),ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, α is ω2/ω1 and s is a Laplace differential operator for processing said first modified inferred position signal to provide a second modified inferred position signal.

20. Motion controlling apparatus comprising:a combining network having an acceleration input for receiving an acceleration signal representative of acceleration of a movable element and a position input for receiving a position signal representative of position of said movable element and an output for providing an inferred position signal representative of an inferred position of said movable element, said network including a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a second signal processor for processing said position signal to provide a modified portion signal, a combiner for additively combining said modified acceleration signal with said modified position signal to provide said inferred position signal, and wherein said first signal processor comprises a first low-pass filter.

21. Apparatus in accordance with claim 20 and wherein said first low-pass filter includes a velocity terminal for providing a velocity signal representative of the velocity of said movable element.

22. Apparatus in accordance with claim 20 and further comprising a second low-pass filter for filtering said position signal to provide said modified position signal.

23. Apparatus in accordance with claim 20 and further comprising:a second low-pass filter for processing said position signal; a third signal processor characterized by a transfer characteristic ω2/(S+ω2) for processing said inferred position to provide a first modified inferred position signal, a reconstruction filter for processing said first modified inferred position signal to provide a second modified inferred position signal, said reconstruction filter characterized by a transfer characteristic 1/A(s) where A(s) is (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s=ω02)ω0 is a predetermined crossover frequency, ω1ω2=ω02, β is ω1/ω2, is ω1/ω2, and S is a Laplace operator.

24. Motion controlling apparatus comprising:a combining network having an acceleration input for receiving an acceleration signal representative of acceleration of a movable element and a position input for receiving a position signal representative of position of said movable element and an output for providing an inferred position signal representative of an inferred position of said movable element, said network including a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a second signal processor for processing said portion signal to provide a modified position signal, a combiner for additively combining said modified acceleration signal with said modified position signal to provide said inferred position signal, and further comprising a third signal processor for processing said inferred position signal to provide a process inferred position signal.

25. Motion controlling apparatus comprising,a combining network having an acceleration input for receiving an acceleration signal representative of acceleration of a movable element and a position input for receiving a position signal representative of position of said movable element, said network including a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a second signal processor for processing said position signal to provide a modified position signal, a combiner for additively combining said modified acceleration signal with said modified position signal to provide said inferred position signal, and further comprising a reconstruction filter for processing said inferred position signal to provide a modified inferred position signal.

26. Apparatus in accordance with claim 25 wherein said reconstruction filter is characterized by a transfer characteristic 1/A(s) where A(s) is the quantity (s2+(α-1)⁢ω0⁢s+ω02s2+(α+(1/α))⁢ω0⁢s+ω02)ω0 is a predetermined crossover frequency, ω1 and ω2 are predetermined frequencies with the relationship ω1ω2=ω02, β is ω1/ω2, and S is a Laplace operator.

27. Motion controlling apparatus comprising,a combining network having an acceleration input for receiving an acceleration signal representative of acceleration of a movable element and a position input for receiving a position signal representative of position of said movable element and an output for providing an inferred position signal representative of an inferred position of said movable element, said network including a first signal processor for processing said acceleration signal to provide a modified acceleration signal, a second signal processor for processing said position signal to provide a modified position signal, a combiner for additively combining said modified acceleration signal with said modified position signal to provide said inferred position signal, wherein said combining network includes weighing circuity that selectively weighs an acceleration signal in said acceleration input and a position signal on said position input in providing said inferred position signal.

28. Apparatus in accordance with claim 27 wherein said inferred position signal substantially corresponds to said modified acceleration signal at frequencies above a predetermined crossover frequency.

29. Apparatus in accordance with claim 27 wherein said inferred position signal substantially corresponds to said modified position signal at frequencies below a predetermined crossover frequency.