Some embodiments of the present disclosure relate, in general, to a motorized pressure exchanger with a low-pressure centerbore.
Well completion in the oil and gas industry often involves hydraulic fracturing (often referred to as fracking or fracing) to increase the release of oil and gas in rock formations to provide an oil or gas well. Hydraulic fracturing involves pumping a fluid (e.g., frac fluid) containing a combination of water, chemicals, and proppant (e.g., sand, ceramics) into a well at high pressures. The high pressures of the fluid increases crack size and crack propagation through the rock formation to release oil and gas, while the proppant prevents the cracks from closing once the fluid is depressurized. Hydraulic fracturing operations use high-pressure pumps to increase the pressure of the frac fluid. Unfortunately, the proppant in the frac fluid may interfere with the operation of the rotating equipment. In certain circumstances, the solids may slow or prevent the rotating components from rotating.
The present disclosure is illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings in which like references indicate similar elements. It should be noted that different references to “an” or “one” embodiment in this disclosure are not necessarily to the same embodiment, and such references mean at least one.
Embodiments describe herein are related to a motorized hydraulic energy transfer system.
Many industrial processes operate at an elevated pressure and have high-pressure waste streams. One way of providing a high pressure to operations requiring elevated pressure is to transfer pressure from a high-pressure fluid (e.g., high-pressure waste fluid) to a usable fluid for the high-pressure operations (e.g., frac fluid). A particular efficient type of pressure exchange is a rotary pressure exchanger. A rotary pressure exchanger uses a cylindrical rotor with longitudinal channels aligned parallel to the rotational axis. The rotor spins inside a sleeve enclosed by two end covers. Pressure energy is transferred directly from the high-pressure stream to the low-pressure stream in the channels of the rotor. Some fluid that remains in the channels serves as a barrier that inhibits mixing between the streams. The channels of the rotor charge and discharge as the pressure transfer process repeats itself.
High-pressure fluid entering a pressure exchanger causes components (e.g., seals) of the pressure exchanger to be under high pressure. Conventional pressure exchangers are limited in amount of pressure that can be transferred between fluids. In some conventional pressure exchangers, the seals limit the amount of pressure that can be transferred (e.g., high-pressure fluid cannot have a pressure higher than the seals can support). In some conventional pressure exchangers, one or more additional components (e.g., pressure compensators, canned motors, etc.) are used to help compensate for the seals. The manufacturing of the additional parts and coupling of the additional components to the pressure exchangers is an additional cost, an additional component that can fail, and are not readily available.
The devices and systems disclosed herein provide a hydraulic energy transfer system (e.g., rotary isobaric pressure exchanger (IPX)) that is capable of operating with high-pressure incoming fluid (e.g., upwards of 15 kilo pounds per square inch (ksi), or up to a pressure of an incoming fluid) while maintaining a centerbore under low pressure (e.g., under 150 pounds per square inch (psi) or as low as an outgoing fluid). The hydraulic energy transfer system may include a low-pressure port designed to receive a first fluid under a first pressure. The hydraulic energy transfer system may further include a rotor fluidly coupled to (e.g., in a flow path of the low-pressure port). The rotor may form a set of rotating longitudinal channels designed to receive and exchange pressure between the first fluid and a second fluid. The hydraulic energy transfer system may further include a shaft routed through a centerbore formed by the hydraulic energy transfer system. The shaft may be attached to the rotor. The hydraulic energy transfer system may form a low-pressure passageway from the low-pressure port to an opening of one of the channels in the set of channels of the rotor. The hydraulic energy transfer system may further form a fluid passageway from the low-pressure passageway to the centerbore. The fluid passageway may result in the centerbore and shaft being under a low pressure (e.g., lower than the pressure of the first incoming fluid at a high pressure).
In some embodiments, the hydraulic energy transfer system (e.g., rotary IPX) may include an assembly (e.g., cartridge assembly) having a first seal plate that forms a first hydraulic chamber (e.g., hydraulic chamber structure) to receive a first fluid under a first pressure. The assembly may further include a first end cover connected to the first seal plate, the first end cover forming a first set of apertures configured to direct flow of the first fluid from the first hydraulic chamber into a first side of a rotor via the first set of apertures. The assembly may further include a rotor connected to the first end cover, the rotor may form a set of rotating longitudinal channels to receive the first fluid on a side of the rotor from the first end cover, receive a second fluid on a second side of the rotor, and exchange pressure between the first fluid and the second fluid. The assembly may further include a shaft routed through a centerbore formed by the assembly. The shaft may be attached to the rotor. The assembly may form a fluid passageway from the first hydraulic chamber to the centerbore. A first pressure of the first hydraulic chamber may be communicated to the centerbore formed by the first seal plate, the first end cover, and the rotor via the fluid passageway. This first pressure may be a low pressure (e.g., 150 psi) resulting in the centerbore being held at the low pressure while the rotor is in operation.
The devices and systems disclosed herein have advantages over conventional solutions. The hydraulic energy transfer system may have a low-pressure centerbore (e.g., under 150 psi, or substantially equivalent to a low-pressure fluid entering the system) within a rotary IPX operating with an incoming high-pressure fluid (e.g., 15 ksi or substantially equivalent to an incoming high-pressure fluid). The low-pressure centerbore allows for the use of an easily sourced, compact, and reliable shaft seal without requiring custom manufacturing or designing conventional pressure compensators and/or canned motor systems combinations. The low-pressure centerbore may allow for a wider variety of shaft seals and/or motor systems capable of coupling to the rotary IPX, such as seal and motor system designed for various operations and functionality. The low-pressure centerbore may also allow for instrumentation through the low-pressure centerbore that may not be possible in a high-pressure centerbore. This may include taking real time measurements within the rotary IPX. For example, diagnostic measurements may be performed while the rotary IPX is in operation.
The hydraulic energy transfer system 102 may also be described as a hydraulic protection system, a hydraulic buffer system, or a hydraulic isolation system, because the hydraulic energy transfer system 102 may block or limit contact between a frac fluid and various hydraulic fracturing equipment (e.g., high-pressure pumps, second fluid pumps 108), while still exchanging work and/or pressure between the first and second fluids. By blocking or limiting contact between various pieces of hydraulic fracturing equipment and the second fluid (e.g., proppant containing fluid). Moreover, the hydraulic energy transfer system 102 may enable the hydraulic fracturing system, for example, high-pressure pumps that are not designed for abrasive fluids (e.g., frac fluids and/or corrosive fluids). In some embodiments, the hydraulic energy transfer system may be a rotating isobaric pressure exchanger (e.g., rotary IPX). Rotating isobaric pressure exchangers may be generally defined as devices that transfer fluid pressure between a high-pressure inlet stream and a low-pressure inlet stream at efficiencies in excess of approximately 50%, 60%, 70%, 80%, or 90% without utilizing centrifugal technology. Centrifugal technology may include a device spinning a fluid at a high speed to separate fluids of different densities. The fluids are forced outward from a radial direction about a central rotating axis. The notation of “first” fluid and “second” fluid is merely exemplary and not used to identify or limit each fluid to any specified limitation herein.
In some embodiments, the hydraulic energy transfer system 102 may include or be a part of a refrigeration system (e.g. trans-critical carbon dioxide refrigeration system) that uses a fluid in a supercritical state. For example, the first and/or second fluid may include a refrigerant (e.g. carbon dioxide).
To facilitate rotation, the hydraulic energy transfer system 102 may couple to a motor system 104 (e.g., an out-board motor system) or may include a motor system 104 within a casing of the hydraulic energy transfer system (e.g., an in-board motor system). For example, the motor system may include an electric motor, a hydraulic motor, a pneumatic motor, another rotary drive, or any combination thereof. In operation, the motor system 104 enables the hydraulic energy transfer system 102 to rotate with highly viscous and/or fluids that have solid particles, powders, debris, etc. For example, the motor system 104 may facilitate startup with highly viscous or particulate-laden fluids, which enables a rapid start of the hydraulic energy transfer system 102. The motor system 104 may also provide additional force that enables the hydraulic energy transfer system 102 to grind through particulate to maintain a proper operating speed (e.g., rpm) with a highly viscous/particulate-laden fluid. Additionally, the motor system 104 may also substantially extend the operating range of the hydraulic energy transfer system 102. For example, the motor system 104 may enable the hydraulic energy transfer system 102 to operate with good performance at lower or higher flow rates than a “free-wheeling” hydraulic energy transfer system without a motor system, because the motor system 104 may facilitate control of the speed (e.g., rotating speed) of the hydraulic energy transfer system 102 and control of the degree of mixing between the first and second fluids. For example, during well completion operations the fluid handling system 100 pumps a pressurized particulate-laden fluid that increases the release of oil and gas in rock formations 110 by propagating and increasing the size of cracks 112. In order to block the cracks 112 from closing once the fluid handling system 100 depressurizes, the fluid handling system 100 uses fluids that have solid particles, powders, debris, etc. that enter and keep the cracks 112 open.
In order to pump this particulate-laden fluid into the well, the fluid handling system 100 may include one or more first fluid pumps 106 and one or more second fluid pumps 108 coupled to the hydraulic energy transfer system 102. For example, the hydraulic energy transfer system 102 may be a rotary IPX. In operation, the hydraulic energy transfer system 102 transfers pressures without any substantial mixing between a first fluid (e.g., proppant free fluid) pumped by the first fluid pumps 106 and a second fluid (e.g., proppant containing fluid or frac fluid) pumped by the second fluid pumps 108. In this manner, the hydraulic energy transfer system 102 blocks or limits wear on the first fluid pumps 106 (e.g., high-pressure pumps), while enabling the fluid handling system 100 to pump a high-pressure frac fluid into the well (e.g., rock formation 110) to release oil and gas. In order to operate in corrosive and abrasive environments, the hydraulic energy transfer system 102 may be made from materials resistant to corrosive and abrasive substances in either the first and second fluids. For example, the hydraulic energy transfer system 102 may be made out of ceramics (e.g., alumina, cermets such as carbide, oxide, nitride, or boride hard phases, etc.) within a metal matrix (e.g., Co, Cr or Ni or any combination thereof) such as tungsten carbide in a matrix of CoCr, Ni, NiCr or Co.
The hydraulic energy transfer system 102 may include a low-pressure port designed to receive a first fluid under a first pressure. The hydraulic energy transfer system 102 may further include a rotor (e.g., rotor 304 of
As shown in
In some embodiments, ports 204A-B may be integrated into housing 210A and ports 204C-D are integrated into housing 210B. Pressures from the first and second fluid enclosed by the hydraulic energy transfer system 200 may be applied to the housing. For example, the housing may experience a compression force resulting from the pressurized first fluid and pressurized second fluid entering and exiting ports 204A-D.
As shown in
As shown in
In some embodiments, one of ports 204A-D may be a low-pressure port designed to receive a first fluid under a first pressure. The hydraulic energy transfer system 200 may further include a rotor (e.g., disposed within center vessel 208) fluidly coupled to (e.g., in a flow path of the low-pressure port). The hydraulic energy transfer system 200 may further include a shaft (e.g., shaft 302 of
In the some embodiments, the hydraulic energy transfer system 200 may be a frac system. However, it should be appreciated that the hydraulic energy transfer system 200 may be any suitable system capable of handling an abrasive (e.g., particulate-laden) fluid. For example, the hydraulic energy transfer system 200 may be configured for water injection, for well recovery, and fluid transportation using the hydraulic energy transfer system 200 as a pump. In embodiments in which the fluid handling system is a frac system, the frac system pumps a pressurized particulate-laden fluid that increases the release of oil and gas in rock formations by propagating and increasing the size of cracks.
As shown in
As shown in
In some embodiments, the hydraulic energy transfer system 300 includes piston 324. The piston may be coupled to adapter plates 362A-B and/or seal plate 314A-B. The piston may be adapted to permit axial movement of the cartridge assembly relative to the adapter plate 312A-B while maintaining a seal between the cartridge assembly 310 and adapter plate 362A-B. For example, the piston 324 may axially move towards or away from the adapter plate 362A-B to increase a compression force on the cartridge assembly 310 and laterally shift the cartridge assembly 310 between housing endcaps 312A-B.
As shown in
As shown in
As shown in
In operation, the motor system 202 facilitates operation of the rotor 304 by providing torque for grinding through particulate, maintaining the operating speed of the rotor 304, controlling the mixing of fluids within the hydraulic energy transfer system 300 (e.g., changing the rotating speed of the rotor 304), and/or starting the rotor 304 with highly viscous or particulate-laden fluids. The motor may be coupled to a controller (not illustrated) that uses feedback from sensor to control the motor system. The controller may include a processor and a memory (not illustrated) that stores non-transitory computer instructions executable by a processor. For example, as the controller receives feedback from one or more sensor, the processor executes instructions stored in the memory to control power output from the motor system.
In some embodiments, a controller using sensor feedback may control the extent of mixing between the first and second fluids in the hydraulic energy transfer system 300 which may be used to improve overall operability. For example, varying the proportions of the first and second fluids entering the hydraulic energy transfer system 300 allows an operator to control the amount of fluid mixing occurring within the system. Three possible characteristics of rotary IPX that affect mixing are: (1) the aspect ratio of the rotor channels 322 (2) the short duration of exposure between the first and second fluids, and (3) the creation of a fluid barrier (e.g., an interface) between the first and second fluids within the rotor channels 322. First, the rotor channels 322 are generally long and narrow, which stabilizes the flow within the rotary IPX. In addition the first and second fluids may move through the channels 322 in a plug flow regime with minimal axial mixing. Second, in certain embodiments, the speed of the rotor 304 reduces contact between the first and second fluids. For example, the speed of the rotor 304 may reduce contact times between the first and second fluids to less than approximately 0.15 seconds, 0.10 seconds, or 0.05 seconds. Third, a small portion of the rotor channel 322 is used for the exchange of pressure between the first and second fluids. A volume of fluid may remain in the channel 322 as a barrier between the first and second fluids. All these mechanisms may limit mixing within the cartridge assembly 310 Moreover, in some embodiments, the cartridge assembly 310 may be designed to operate with one or more internal pistons that isolate the first and second fluids while enabling pressure transfer.
As shown in
In some embodiments, the end covers 404A-B are configured to or adapted to direct flow of a first fluid and a second fluid in and out of a rotor enclosed by the rotor sleeve 402. As will be discussed further, the end covers 404A-B may each include a surface that is adapted to couple with the rotor enclosed by rotor sleeve 402. The end covers may have a cylindrical shape (e.g., similar to the rotor sleeve). The end covers 404A-B are coupled to seal plates 406A-B. The coupling of the end covers 404A-B and the seal plates 406A-B may include similar coupling techniques disclosed regarding the coupling between the rotor sleeve 402 and the end covers 404A. Additionally, the seal plates 406A-B may form a seal between the end covers 404A-B and the seal plates 406A-B. The seal plates 406A-B may also include a cylindrical structure.
As shown in
In some embodiments, cartridge assembly 400 is designed to generate a net force in a longitudinal direction of the assembly. For example, the cartridge assembly 400 may include a first side, depicted in
In some embodiments, the seal plates 406A-B, the end covers 404A-B, and the sleeve is held together by compression forces based on the pressurized fluid flowing through the cartridge assembly 400. In some embodiment, the cartridge assembly 400 may include one or more compression rods 430A-C. The compression rods 430A-C may include fasteners that are affixed at one or more ends of the compression rods 430A-C and are coupled to the seal plates 403A-C, the end covers 404A-B, and/or the rotor sleeve 402. The compression rods 430A-C may be adapted to compress the cartridge assembly 400 together. For example, a central compression force is applied to the seal plates 406A-B against the end covers 404A-B, and a compression force is applied to the end covers 404A-B against the rotor sleeve 402. In some embodiments, the cartridge assembly is held together with a combination of fluid compression forces and external compression forces (e.g., using compression rods 430A-C). The rotor sleeve 402 enables an enclosed rotor to rotate about a central axis while the cartridge assembly 400 is compressed together.
In some embodiments, the cartridge assembly 400 is enclosed by a fluid disposed in a cavity created between the casing of the hydraulic energy transfer system and the cartridge assembly 400. This fluid may include a fluid bearing comprising a thin layer of rapidly moving pressurized liquid and/or gas between a surface of the cartridge assembly 400 and the casing of the hydraulic energy transfer system.
As shown in
In some embodiments, a seal plate 406A may form a high-pressure hydraulic chamber (e.g., 410B) and a low-pressure hydraulic chamber (e.g., 410A). The high-pressure hydraulic chamber (e.g., 410B) may enclose one of the first fluid or the second fluid at a high pressure (e.g., around 15000 ksi) while the low-pressure hydraulic chamber (e.g., 410A) may include one of the first fluid or the second fluid at a low-pressure (e.g., 150 psi). In some embodiments, the high-pressure hydraulic chamber and the low-pressure hydraulic chamber enclose the same fluid, however in other embodiments, the high-pressure hydraulic chamber may include one of the first fluid or the second fluid and the low-pressure hydraulic chamber may include the one of the first fluid or the second fluid that is not included in the high-pressure hydraulic chamber.
As discussed further in other embodiments, the seals plates 406A-B may be designed such that the pressurized fluids in the hydraulic chamber 410A-B generate a substantially similar force to opposing internal cartridge forces (e.g to reduce the net force on the endcovers). 404A-B. Reducing the net on the endcover may reduce the deflections of the bearing surfaces of a rotor disposed within the rotor sleeve 402. It should be noted, as a result of a low-pressure centerbore 416 (e.g., provided by the fluid passageway 418), forces can be generated that can alter the seals and contact points between the seal plates 406A-B, end covers 404A-B, and rotor sleeve 402. The seal plates are designed to counter these forces to minimize net force on the end covers 404A-B. The efficiency of the pressure transfer between the first and second fluids may be improved by minimizing the deflections caused net forces (e.g. pressure imbalance) on the end covers 404A-B.
The cartridge assembly 400 may further include a centerbore 416 and a shaft seal 420. In some embodiments, the shaft seal 420 is disposed within the housing (e.g., housing endcap 312A or adapter plate 362A of
In some embodiments fluid passageway 418 is substantially uniform in diameter. In some embodiments, the diameter of the fluid passageway is smaller then one of a fluid passageway between hydraulic chamber 410A and the rotor disposed within the rotor sleeve 402. In some embodiments, the hydraulic chamber 410A encloses either the first or second fluid and communicates the pressure of the fluid enclosed in the hydraulic chamber to the centerbore 416. For example, the hydraulic chamber 410A may enclose fluid of a low pressure (150 psi). This fluid communicates this low pressure to the centerbore 416. The cartridge assembly may form a centerbore 416 that encloses a shaft. The centerbore 416 may be routed through seal plate 406A, end cover 404A, and the rotor enclosed within the rotor sleeve 402. The centerbore 416 may be adapted to receive one or more components (e.g., motor shaft, crank, rotary attachment, etc.) of a motor system (e.g., motor system 104 of
In operation, the hydraulic chambers 410A-B enable the first and second fluids (e.g., proppant free fluid) to enter and exit the cartridge assembly. One of hydraulic chambers 410A-B may receive a high-pressure first fluid and after exchanging pressure, the other hydraulic chamber 410A-B may be used to route a low-pressure fluid out of the cartridge assembly 400. The cartridge assembly may also include hydraulic chambers (not shown) on a lower side (proximate seal 308) opposite hydraulic chambers 410A-B. The hydraulic chambers on the lower side may be configured to receive one of the first or second fluids.
The rotor 502 may include a cylindrical structure that is adapted to rotate within the rotor sleeve 402. The rotor 502 may further include one or more channels 504 extending substantially longitudinally through the rotor 502 with openings at each end. The channels 504 may be arranged symmetrically about a central axis. The openings of the channels 504 may be arranged for hydraulic communication between both end covers 404A-B. For example, the rotor 502 is designed to rotate and during rotation the channels 504 are exposed to a fluid at high-pressure and fluid at low-pressure that are directed to the channels by apertures 506A-D formed by end covers 404 A-B. Apertures 506A-D may be in the form of arcs or segments of a circle (e.g., C-shaped).
As shown in
As shown in
In some embodiments, the centerbore 416 may form a passage (e.g., hole, slot, clearance, centerbore, etc.) through a seal plate 406A, an end cover 404A, and the rotor 502. This passage may communicate a pressure (e.g., low pressure, 150 psi) to a centerbore 416 of the rotor 502. In some embodiments, the cartridge assembly 400 includes a passage external to the cartridge assembly 400 that is in hydraulic communication between the centerbore 416 and a low-pressure fluid flow of a first or second fluid disposed external to the cartridge assembly.
In some embodiments, to compensate for the lower pressure distribution on the inside of the cartridge assembly 400 due to a low-pressure centerbore 416, a larger low-pressure distribution is on the outside of the cartridge to balance forces (i.e. minimize deflections). In one embodiment, the force balance is adjusted by altering the diameter of piston 412. Piston 412 may include plenums 363A-Badapted to counter a force resulting from a low-pressure centerbore 416 by applying a compression force generated by a pressurized fluid disposed within hydraulic chamber 410A. For example, there is a low pressure plenum 363A above the piston 412, and a high pressure plenum 323B. By changing the piston 412 diameter the relative plenum 363A-B areas changes which can adjust the net force. For example, the size of low pressure plenum 363A may be increased (by increasing piston 412 diameter) which corresponds to a decrease high pressure plenum size 363B. In some embodiments, a top seal plate (e.g., seal plate 406A) may set a pressure balance by applying a compression force on the cartridge assembly 400. Seal plate 406A may include two hydraulic chambers 410A-B and a piston 412. The piston 412 may include one or more radial seals (e.g., radial O-rings) that seal into one or more receiving bores of a casing (e.g., housing endcaps 312A-B). The seal plate 406A may include one or more face seals to seal the seal plate onto end cover 404A. In some embodiments the seal plate 406A and end cover 404A are used in combination to establish separate sealed flow paths between hydraulic chambers 410A-B (e.g., a high-pressure chamber and a low-pressure chamber) on the cartridge assembly 400 to ports on a casing (e.g., housing) of a hydraulic energy transfer system (e.g., hydraulic energy transfer system 200-300 of
In some embodiments, piston 412 include a radial seal (e.g., radial O-rings) that maintain pressure-containment of the cartridge assembly 400 by axially moving under pressures. In some embodiments, the piston 412 allows for relative movement between the casing and the cartridge assembly 400. In some embodiments, the piston 412 accommodates variations in cartridge heights. For example, the cartridge height may be variable due to standard machine tolerance and material removal during repair, replacement, resurfacing of the cartridge assembly 400 or parts associated of the cartridge assembly 400.
In some embodiments, a bottom seal plate (e.g., seal plate 406B) is omitted. For example, one or more face seals of the seal plate 406B are integrated into the casing and couples to the end cover 404B. For example, a seal created at a contact surface between the casing and end cover 404B may be created by increasing a compression force generated by plenums 363A-B.
In some embodiments, the seal plate 700A forms a centerbore 416 routed through a center of seal plate 700A that is adapted to receive a shaft. In other embodiments, the seal plate forms a bore disposed off-center that is adapted to receive the shaft. In some embodiments, the centerbore 416 is disposed within a hydraulic chamber 410A or through piston 412. In other embodiments, the centerbore 416 is disposed outside the piston 412 as not to be routed through piston 412.
In some embodiments, a first hydraulic chamber 410A includes one of the first fluid or the second fluid (e.g., proppant free fluid or proppant laden fluid) having a first pressure and a second hydraulic chamber 410B that includes the first fluid or the second fluid having a second pressure that is greater than the first pressure. For example, both hydraulic chambers 410A-B may include the same fluid but with different pressures.
As discussed previously, hydraulic chambers 410A-B can input and/or output the first and/or second fluids. The hydraulic chambers 410A-B are fluidly coupled to a port on a casing (e.g., housing) of a hydraulic energy transfer system (e.g., hydraulic energy transfer systems 200-300 of
In some embodiments, the fluid passageway 418 (e.g., fluid passageway structure) is in hydraulic communication with the centerbore 416 and the seal plate 406. For example, the fluid passageway 418 may communicate fluid from one of hydraulic chamber 410A, or piston 412 to the centerbore 416. For example, hydraulic chamber 410A may enclose fluid at a low pressure (e.g., 150 psi) and communicate this pressure to the centerbore 416. The centerbore 416 of the seal plate may communicate this pressure to the centerbore 416 of the rotor, resulting in a centerbore 416 under a pressure that is less than a pressure of a casing of a hydraulic energy transfer system that may enclose the cartridge assembly (e.g., cartridge assembly 400 of
In some embodiments, seals 704A-B are designed to create a hydraulic seal between the seal plates 700A-B and corresponding end covers (e.g., end covers 404A-B of
The one or more apertures 506A-B may be formed by the end cover and be adapted to direct fluid flow from a seal plate (e.g., seal plate 406A-B of
The preceding description sets forth numerous specific details such as examples of specific systems, components, methods, and so forth, in order to provide a good understanding of several embodiments of the present disclosure. It will be apparent to one skilled in the art, however, that at least some embodiments of the present disclosure may be practiced without these specific details. In other instances, well-known components or methods are not described in detail or are presented in simple block diagram format in order to avoid unnecessarily obscuring the present disclosure. Thus, the specific details set forth are merely exemplary. Particular implementations may vary from these exemplary details and still be contemplated to be within the scope of the present disclosure.
Reference throughout this specification to “one embodiment” or “an embodiment” means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrase “in one embodiment” or “in an embodiment” in various places throughout this specification are not necessarily all referring to the same embodiment. In addition, the term “or” is intended to mean an inclusive “or” rather than an exclusive “or.” When the term “about,” “substantially,” or “approximately” is used herein, this is intended to mean that the nominal value presented is precise within ±10%.
Although the operations of the methods herein are shown and described in a particular order, the order of the operations of each method may be altered so that certain operations may be performed in an inverse order or so that certain operation may be performed, at least in part, concurrently with other operations. In another embodiment, instructions or sub-operations of distinct operations may be in an intermittent and/or alternating manner. In one embodiment, multiple metal bonding operations are performed as a single step.
It is to be understood that the above description is intended to be illustrative, and not restrictive. Many other embodiments will be apparent to those of skill in the art upon reading and understanding the above description. The scope of the disclosure should, therefore, be determined with reference to the appended claims, along with the full scope of equivalents to which each claim is entitled.
This application is a continuation of U.S. patent application Ser. No. 17/190,379, filed Mar. 2, 2021, the content of which is incorporated by reference in its entirety.
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Number | Date | Country | |
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Parent | 17190379 | Mar 2021 | US |
Child | 17900663 | US |