This application claims the benefit of Japanese Priority Patent Application JP 2018-013962 filed Jan. 30, 2018, the entire contents of which are incorporated herein by reference.
The present disclosure relates to a multi-layer piezoelectric ceramic component usable as a piezoelectric actuator and to a piezoelectric device.
A piezoelectric actuator is an actuator that includes a piezoelectric element including a piezoelectric material and an electrode, and uses deformation that is caused in the piezoelectric material by an inverse piezoelectric effect when a voltage is applied to the electrode. The piezoelectric actuator includes a bimorph piezoelectric actuator that includes two piezoelectric actuators.
A general bimorph piezoelectric actuator has a structure in which the piezoelectric actuators are attached to both surfaces of a metal plate, and one of the piezoelectric actuators is expanded and the other one of the piezoelectric actuators is contracted, to enable the whole of the actuator to be largely deformed. Further, in the bimorph piezoelectric actuator, a piezoelectric actuator having an element bimorph structure in which two piezoelectric actuators are integrated is developed (for example, WO 2013/051328).
From the viewpoint of insulation properties and moisture resistance, an insulating film may be provided to a surface of the element as described above in a later step. In this case, how to improve adhesion properties of the insulating film, in order to maintain insulation properties and moisture resistance, is important.
In view of the circumstances as described above, it is desirable to provide a multi-layer piezoelectric ceramic component and a piezoelectric device, in which adhesion properties of an insulating film formed on a surface of an element are improved.
According to an embodiment of the present disclosure, there is provided a multi-layer piezoelectric ceramic component including a piezoelectric ceramic body, first internal electrodes, second internal electrodes, a first terminal electrode, and a second terminal electrode.
The piezoelectric ceramic body has a cuboid shape having an upper surface and a lower surface facing each other in a thickness direction, a first end surface and a second end surface facing each other in a length direction, and a pair of side surfaces facing each other in a width direction.
The first internal electrodes are formed in the piezoelectric ceramic body, and are drawn to the first end surface.
The second internal electrodes are formed in the piezoelectric ceramic body, and are drawn to the second end surface, the second internal electrodes being laminated alternately with the first internal electrodes at predetermined distances from the respective first internal electrodes in the thickness direction.
The first terminal electrode is formed on the first end surface, and is electrically connected to the first internal electrodes.
The second terminal electrode is formed on the second end surface, and is electrically connected to the second internal electrodes.
The first internal electrodes and the second internal electrodes each have a width equal to a distance between the pair of side surfaces, and at least one of the pair of side surfaces includes a groove extending in non-parallel with the length direction.
With such a configuration, when a voltage is applied between the first internal electrodes and the second internal electrodes, the piezoelectric ceramic body can be deformed. Further, since at least one of the pair of side surfaces includes a groove extending in non-parallel with the length direction, if an insulating film is formed on the side surface, adhesion properties of the insulating film are improved by an anchoring effect. Moreover, the first internal electrodes and the second internal electrodes each have a width equal to the width of the piezoelectric ceramic body, and restraint by the piezoelectric ceramic body (side margins) covering the side surfaces of those internal electrodes disappears, which makes it possible to prevent reduction in displacement performance.
The multi-layer piezoelectric ceramic component may further include third internal electrodes and a third terminal electrode.
The third internal electrodes may be formed in the piezoelectric ceramic body, and are drawn to a position of the first end surface, the position being different from a position to which the first internal electrodes are drawn, the third internal electrodes being laminated alternately with the second internal electrodes at predetermined distances from the respective second internal electrodes in the thickness direction.
The third terminal electrode may be electrically connected to the third internal electrodes at a position of the first end surface, the position being different from the position to which the first internal electrodes are drawn.
The third internal electrodes may each have a width equal to a distance between the pair of side surfaces.
In the multi-layer piezoelectric ceramic component, the pair of side surfaces may be covered with an insulating film made of an insulator different from the piezoelectric ceramic body.
In the multi-layer piezoelectric ceramic component, the piezoelectric ceramic body may have a relationship in which a length is larger than a width and the width is larger than a thickness.
According to another embodiment of the present disclosure, there is provided a piezoelectric device including a vibration member and a multi-layer piezoelectric ceramic component mounted to the vibration member.
The multi-layer piezoelectric ceramic component includes a piezoelectric ceramic body, first internal electrodes, second internal electrodes, a first terminal electrode, and a second terminal electrode.
The piezoelectric ceramic body has a cuboid shape having an upper surface and a lower surface facing each other in a thickness direction, a first end surface and a second end surface facing each other in a length direction, and a pair of side surfaces facing each other in a width direction.
The first internal electrodes are formed in the piezoelectric ceramic body, and are drawn to the first end surface.
The second internal electrodes are formed in the piezoelectric ceramic body and are drawn to the second end surface, the second internal electrodes being laminated alternately with the first internal electrodes at predetermined distances from the respective first internal electrodes in the thickness direction.
The first terminal electrode is formed on the first end surface, and is electrically connected to the first internal electrodes.
The second terminal electrode is formed on the second end surface, and is electrically connected to the second internal electrodes.
The first internal electrodes and the second internal electrodes each have a width equal to a distance between the pair of side surfaces, and at least one of the pair of side surfaces includes a groove extending in non-parallel with the length direction.
With such a configuration, a piezoelectric device including the multi-layer piezoelectric ceramic component described above is provided.
As described above, according to the present disclosure, it is possible to provide a multi-layer piezoelectric ceramic component and a piezoelectric device, in which adhesion properties of an insulating film formed on a surface of an element are improved.
These and other objects, features, and advantages of the present disclosure will become more apparent in light of the following detailed description of embodiments thereof, as illustrated in the accompanying drawings.
Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. In each figure, an X-Y-Z coordinate system is used in some cases.
Configuration of Multi-layer Piezoelectric Ceramic Component
As shown in
The piezoelectric ceramic body 101 is made of a piezoelectric ceramic material. The piezoelectric ceramic body 101 includes a plurality of piezoelectric ceramic layers arranged in a Z-axis direction. The plurality of piezoelectric ceramic layers are provided in the Z-axis direction between the first internal electrodes 102 and the second internal electrodes 103 and also between the third internal electrodes 104 and the second internal electrodes 103. In this embodiment, the plurality of piezoelectric ceramic layers are also referred to as the piezoelectric ceramic body 101.
The piezoelectric ceramic body 101 may be made of, for example, lithium niobate (LiNbO3), lithium tantalite (LiTaO3), or lead zirconate titanate (PbZrO3—PbTiO3).
As shown in
For the surfaces of the piezoelectric ceramic body 101, surfaces facing in the width direction (Y-axis direction) are assumed as a first side surface 101a and a second side surface 101b, and surfaces facing in the length direction (X-axis direction) are assumed as a first end surface 101c and a second end surface 101d. Further, surfaces facing in the thickness direction (Z-axis direction) are assumed as an upper surface 101e and a lower surface 101f.
As shown in
The first internal electrodes 102 are formed in the first region 101g and face the second internal electrodes 103 and the first surface electrode 105 via the piezoelectric ceramic body 101 (see
Further, the first internal electrode 102 has the same width as the width (Y-axis direction) of the piezoelectric ceramic body 101 and is exposed at the first side surface 101a and the second side surface 101b (see
The third internal electrodes 104 are formed in the second region 101h and face the second internal electrodes 103 and the second surface electrode 106 via the piezoelectric ceramic body 101 (see
Further, the third internal electrode 104 has the same width as the width (Y-axis direction) of the piezoelectric ceramic body 101 and is exposed at the first side surface 101a and the second side surface 101b (see
The second internal electrodes 103 are formed in the first region 101g and the second region 101h.
The second internal electrodes 103 are laminated alternately with the first internal electrodes 102 in the first region 101g at predetermined distances from the respective first internal electrodes 102 in the thickness direction (Z-axis direction) and face the respective first internal electrodes 102 via the piezoelectric ceramic body 101 (see
Further, the second internal electrodes 103 are laminated alternately with the third internal electrodes 104 in the second region 101h at predetermined distances from the respective third internal electrodes 104 in the thickness direction (Z-axis direction) and face the respective third internal electrodes 104 via the piezoelectric ceramic body 101 (see
Further, the second internal electrode 103 has the same width as the width (Y-axis direction) of the piezoelectric ceramic body 101 and is exposed at the first side surface 101a and the second side surface 101b (see
It should be noted that at least one of the first side surface 101a, the second side surface 101b, the first end surface 101c, or the second end surface 101d includes a groove having an arithmetic average roughness (Ra) of, for example, 0.2 μm or more and 2.0 μm or less. The groove will be described later with reference to other drawings.
The first surface electrode 105 extends from the second end surface 101d side to be formed on the upper surface 101e (see
The second surface electrode 106 extends from the second end surface 101d side to be formed on the lower surface 101f and is electrically connected to the second end surface terminal electrode 108 (see
The first end surface terminal electrode 107 is formed on the first end surface 101c (see
The third end surface terminal electrode 109 is formed on the first end surface 101c (see
The second end surface terminal electrode 108 is formed on the second end surface 101d (see
The first surface terminal electrode 110 is formed on the upper surface 101e (see
The second surface terminal electrode 111 is formed on the upper surface 101e (see
The first internal electrodes 102, the second internal electrodes 103, the third internal electrodes 104, the first surface electrode 105, the second surface electrode 106, the first end surface terminal electrode 107, the second end surface terminal electrode 108, the third end surface terminal electrode 109, the first surface terminal electrode 110, and the second surface terminal electrode 111 are each made of an electrically conductive material. The electrically conductive material may be any one of, for example, Ag, Ag/Pd, Pd, Cu, and Ni.
As described above, the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are formed in the piezoelectric ceramic body 101, the first internal electrodes 102 and the second internal electrodes 103 face each other via the piezoelectric ceramic body 101, and the third internal electrodes 104 and the second internal electrodes 103 face each other via the piezoelectric ceramic body 101. The first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are insulated from one another.
Groove
The first side surface 101a according to this embodiment is a surface at which the piezoelectric ceramic body 101, the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are exposed and to which the grooves 120 are provided. Each of the grooves 120 extends in non-parallel with the X-axis direction (length direction). For example, the groove 120 is configured to be arc-like on the X-Z axis plane. The groove 120 may continuously extend or may be intermittent. Further, the groove 120 may be linear. The number of grooves 120 may be set to be denser or coarser than that of the example shown in the figures.
The grooves 120 are formed, for example, when the first side surface 101a is cut with a disc-like dicing blade. For example, when diamond abrasive grains or the like included in the dicing blade scratch the first side surface 101a, the grooves 120 are formed. The grooves 120 are so-called dicing traces. Surface roughness of the first side surface 101a on which the grooves 120 are formed is controlled by adjusting a grain size of the diamond abrasive grains.
In such a manner, in this embodiment, at least one of the first side surface 101a, the second side surface 101b, the first end surface 101c, or the second end surface 101d includes the grooves 120.
From the viewpoint of insulation properties and moisture resistance between the electrodes, the insulating film 112 may be provided to the first side surface 101a at which the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are exposed.
In such a case, since the first side surface 101a includes the grooves 120, adhesion properties between the insulating film 112 and the first side surface 101a are largely improved by an anchoring effect. Further, in a case where the dicing traces are used as the grooves 120, the step of polishing the first side surface 101a, the second side surface 101b, the first end surface 101c, and the second end surface 101d can be omitted, and increase in cost of the multi-layer piezoelectric ceramic component 100 can be suppressed.
The size of the multi-layer piezoelectric ceramic component 100 is not particularly limited, but assuming that the length (X-axis direction) is L and the width (Y-axis direction) is W, it is suitable that L/W is approximately 16 to 50. Further, it is suitable that the thickness (Z-axis direction) is approximately 0.5 mm to 1.5 mm.
Operation of Multi-layer Piezoelectric Ceramic Component
In the multi-layer piezoelectric ceramic component 100, a voltage can be independently applied between the first internal electrodes 102 and the second internal electrodes 103 and between the third internal electrodes 104 and the second internal electrodes 103.
When a voltage is applied between the first internal electrodes 102 and the second internal electrodes 103, an inverse piezoelectric effect occurs in the piezoelectric ceramic body 101 between the first internal electrodes 102 and the second internal electrodes 103 and causes deformation (expansion and contraction) in the X-axis direction in the first region 101g. Further, when a voltage is applied between the third internal electrodes 104 and the second internal electrodes 103, an inverse piezoelectric effect occurs in the piezoelectric ceramic body 101 between the third internal electrodes 104 and the second internal electrodes 103 and causes deformation (expansion and contraction) in the X-axis direction in the second region 101h.
In such a manner, in the multi-layer piezoelectric ceramic component 100, the deformation in the first region 101g and the deformation in the second region 101h can be independently controlled. The first region 101g and the second region 101h are separately deformed in the X-axis direction, and thus the multi-layer piezoelectric ceramic component 100 can be deformed (bent) in the Z-axis direction.
In particular, even if such an operation continues over a long period of time, since the insulating film 112 tightly adheres to the first side surface 101a, the second side surface 101b, the first end surface 101c, and the second end surface 101d, the insulating film 112 is less likely to be peeled off from those side surfaces and end surfaces in the multi-layer piezoelectric ceramic component 100.
It should be noted that when the thickness of the first region 101g and the thickness of the second region 101h have a ratio of 1:1, the first region 101g and the second region 101h are symmetrical with each other in terms of the amount of deformation, which is suitable. Further, the waveforms of the voltage V1 and the voltage V2 are not limited to those shown in
Regarding Structure Without Side Margin
As described above, the multi-layer piezoelectric ceramic component 100 has a structure in which the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are exposed at the first side surface 101a and the second side surface 101b.
As shown in
In the multi-layer piezoelectric ceramic component 300, the internal electrodes are not exposed at the side surfaces and are embedded in the piezoelectric ceramic body 301. As shown in
The side margins S are not sandwiched by the internal electrodes in the Z-axis direction when the multi-layer piezoelectric ceramic component 300 is driven. Thus, the side margins S act as restraint portions that suppress the displacement of the multi-layer piezoelectric ceramic component 300. This reduces displacement performance of the multi-layer piezoelectric ceramic component 300.
To the contrary, in the multi-layer piezoelectric ceramic component 100, each width of the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 is equal to a distance between the pair of side surfaces 101a and 101b. In other words, the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are exposed at the first side surface 101a and the second side surface 101b in the multi-layer piezoelectric ceramic component 100, and the multi-layer piezoelectric ceramic component 100 does not include side margins. Thus, it is possible to generate large displacement without receiving a restraint effect provided by the side margins and to prevent the displacement performance from being reduced.
Regarding Insulating Film
The insulating film 112 described above may cover not only the first side surface 101a, the second side surface 101b, the first end surface 101c, and the second end surface 101d but also the outer periphery of the multi-layer piezoelectric ceramic component 100. Here, in the X-axis direction, the length of the insulating film 112 formed on the upper surface 101e is equal to the length of the second surface electrode 106.
In other words, the insulating film 112 includes an opening 112a from which the first surface terminal electrode 110, the second surface terminal electrode 111, and the first surface electrode 105 are partially exposed. In the multi-layer piezoelectric ceramic component 100, electrical connection (three-terminal connection) to the first surface terminal electrode 110, the second surface terminal electrode 111, and the first surface electrode 105 via the single opening 112a can be established. This makes a wiring structure compact.
The range covered with the insulating film 112 is not limited to the range shown in
It should be noted that the insulating film 112 is made of a material different from the material of the piezoelectric ceramic body 101, and a soft material can be used therefor. Thus, a restraint effect provided by the insulating film 112 can be made significantly small. In other words, in the multi-layer piezoelectric ceramic component 100, the displacement performance is prevented from being reduced.
The material of the insulating film 112 is not particularly limited as long as the material is an insulating material. For example, examples of the material of the insulating film 112 include an organic resin of polyimide, polypropylene, acrylic, epoxy, or the like, or an inorganic insulating film of Si3N4, SiO2, or the like. In particular, when an organic resin is used as the insulating film 112, the surface roughness of the side surfaces and the end surfaces is made larger than that when the inorganic insulating film is used, so that the adhesion of the insulating film 112 tends to be improved.
Regarding Production Method
A production method for the multi-layer piezoelectric ceramic component 100 will be described.
The multi-layer piezoelectric ceramic component 100 can be produced by laminating sheet members.
First, a sheet member including only a piezoelectric ceramic body (hereinafter, referred to as piezoelectric sheet member) is laminated on the sheet member 250, and thereon, the sheet member 240, a piezoelectric sheet member, and the sheet member 230 are laminated in this order. Moreover, the sheet members 240 and the sheet members 230 are alternately laminated via piezoelectric sheet members.
Subsequently, the sheet members 220 and the sheet members 230 are alternately laminated via piezoelectric sheet members, and thereon, a piezoelectric sheet member and the sheet member 210 are laminated in this order. Subsequently, this laminate is pressure-bonded, and a binder is removed by heating or the like.
Subsequently, sintering is performed. At this stage, each internal electrode is embedded in the piezoelectric ceramic body 201, and side margins are formed. Subsequently, by heat treatment, the first end surface terminal electrode 107 and the third end surface terminal electrode 109 are formed on the first end surface 101c, and the second end surface terminal electrode 108 is formed on the second end surface 101d.
Subsequently, the side margins are cut by dicing and removed. Accordingly, the grooves 120 are formed in at least one of the first side surface 101a, the second side surface 101b, the first end surface 101c, or the second end surface 101d. It should be noted that the surface roughness of each of the first side surface 101a, the second side surface 101b, the first end surface 101c, and the second end surface 101d may be appropriately adjusted to be predetermined roughness by using a polishing technique.
Accordingly, the piezoelectric ceramic body 101 is formed from the piezoelectric ceramic bodies 201. When the side margins are cut, the first side surface 101a and the second side surface 101b are formed, and the first internal electrodes 102, the second internal electrodes 103, and the third internal electrodes 104 are exposed at the first side surface 101a and the second side surface 101b (see
Subsequently, the insulating film 112 including the opening 112a is formed (see
The multi-layer piezoelectric ceramic component 100 can be produced as described above. It should be noted that the production method for the multi-layer piezoelectric ceramic component 100 is not limited to the method described herein.
Regarding Piezoelectric Device
The multi-layer piezoelectric ceramic component 100 can be mounted to a vibration member to configure a piezoelectric device.
The vibration member 410 is a metal plate or a glass panel of a display and is not particularly limited. The joint 420 is made of a resin or the like and joins the multi-layer piezoelectric ceramic component 100 to the vibration member 410.
In the multi-layer piezoelectric ceramic component 100, a region of the upper surface 101e on the first end surface 101c side is joined to the joint 420. Wiring (not shown) is electrically connected to the first surface terminal electrode 110, the second surface terminal electrode 111, and the first surface electrode 105.
When a voltage is applied to each electrode, as described above, the multi-layer piezoelectric ceramic component 100 is deformed in the Z-axis direction (arrow in
Hereinabove, the embodiment of the present disclosure has been described, but the present disclosure is not limited to the embodiment described above and can be variously modified as a matter of course. Each embodiment is not limited to be an independent embodiment, and some embodiments can be combined as long as it is technically possible.
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