Claims
- 1. Multi-zone method for controlling VOC and NO.sub.x emissions in a flatline conveyor wafer drying system embodying a plurality of dryer zones comprising:
- a. advancing wafers in random array on a flat wire conveyor belt having laterally restrictive openings with the wood wafers being supported upon the conveyor and the conveyor being supported on a planar surface, such that wafers are substantially suspended without contact above the planar surface;
- b. forcing heated air upwardly through spaced-apart holes of varying diameter and distribution defined in the planar surface, then forcing heated air above the planar surface, while laterally shielding heated air above the planar surface, then forcing heated air through the random array of advancing wafers, wherein the size and distribution of holes within the planar surface are a control of distributing heated air;
- c. heating the dryer zones in successively lower temperatures in the range 500.degree. F. to 200.degree. F. by flowing heating air upwardly through the flatline conveyor;
- d. removing VOC-rich exhaust air from a primary dryer zone while flowing heated air upwardly therein, and;
- e. removing VOC-rich exhaust air from a secondary dryer zone while flowing heated air upwardly therein.
- 2. Multi-zone method for controlling VOC and NO.sub.x emission in a flatline conveyor wafer drying system, as in claim 1, wherein the flatline wafer dryer conveyor is advanced through primary, secondary and tertiary dryer zones and including removing VOC exhaust from the tertiary dryer zone while flowing heated air upwardly therein.
- 3. Multi-zone method for controlling VOC and NO.sub.x emission in a flatline conveyor wafer drying system as in claim 2, wherein said heating is by a thermal oil heat exchanger.
- 4. Multi-zone method for controlling VOC and NO.sub.x emission in a flatline conveyor wafer drying system as in claim 1, wherein VOC-rich exhaust from at least one dryer zone is used as combustion air in a complementary energy system.
- 5. Multi-zone method for controlling VOC and NO.sub.x emission in a flatline conveyor wafer drying system as in claim 1, wherein VOC-rich exhaust removed from said primary dryer zone is used as combustion air in a hog fuel burner system.
- 6. Multi-zone method for controlling VOC and NO.sub.x emission in a flatline conveyor wafer drying system as in claim 2, including flowing exhaust from at least one dryer zone through an electrostatic precipitator.
- 7. Multi-zone method for controlling VOC and NO.sub.x emission in a flatline conveyor wafer drying system as in claim 2, including measuring moisture content and weight of wafers and varying temperature and volume of flowing said heated air in said primary, secondary and tertiary dryer zones as a control of VOC and NO.sub.x emissions.
CROSS-REFERENCE TO RELATED APPLICATIONS
A Continuation-in-Part of FLATLINE METHOD OF DRYING WAFERS (Ser. No. 08/388,075), filed Feb. 14, 1995, now U.S. Pat. No. 5,524,361.
US Referenced Citations (10)
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
388075 |
Feb 1995 |
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