The present disclosure relates to electronic technology field, especially to a multilayer and flexible capacitor composed of metal-ion doped TiO2 colossal permittivity material/polymer composites by simple techniques, demonstrating simultaneously large dielectric constant, negligible dielectric loss and relatively high energy density.
Colossal permittivity (CP) materials are imperative because of their potential for promising applications in the areas of device miniaturization and energy storage. High-performance CP materials require high dielectric permittivity, low dielectric loss and relatively weak dependence of frequency- and temperature. Dielectric capacitors exhibit advantages, including solid-state construction, high operating voltage and long cycling lifetime compared to other energy storage devices. However, low energy density and large dissipation are the two major problems to hinder their practical applications. It is known that conventional dielectric capacitors usually have an energy density less than 2 J/cm3, which is mainly restricted by the low dielectric constants of polymers or low breakdown field of ceramics. A wide range of solid-state capacitors with CP have been studied. Still, it is challengeable to maximize their performance as they show drawbacks in two aspects: temperature/frequency dependent properties and high dielectric loss. On one hand, the typical ferroelectric materials, barium titanate (BaTiO3)-based perovskites, can only attain CP at the tetragonal-cubic phase transition temperature (Tc˜120° C.). This may limit their applications to the devices working in a wide temperature range. On the other hand, the non-ferroelectric material CaCu3Ti4O12 (CCTO) accomplishes giant dielectric constant but with high dielectric loss (>10−1).
Although a great deal of effort has been put to explore on making ceramic/polymer composites, there is still a need in the art for a simple technique of making such a composite that possesses a large dielectric constant, a negligible dielectric loss and a relatively high energy density.
Materials with colossal permittivity (CP) have shown great technological potential for advanced microelectronics and high-energy-density storage applications. Several types of CP materials have been studied. Still, it is challengeable to maximize their performance as they show drawbacks in two aspects: temperature/frequency dependent properties and high dielectric loss. In our work, original CP ceramic capacitors exhibited high-performance dielectric behaviors, including temperature and frequency stable CP value (104-105) and sufficiently low dielectric loss (0.03). These results indicate a high reliability of the capacitors. In addition, technologies on ceramics were extended to multi-layer-structured ceramic/polymer composite films. Surface hydroxylated ceramic fillers, embedded in copolymer matrix achieved high dielectric constant up to 300 and exceptional low dielectric loss down to 0.04 over a broad frequency range, as well as a high energy density of 8.9 J/cm3 at breakdown field of 82 MV/m. Therefore, this composite film capacitors have great technological potential for many applications. In microelectronic systems, thin-film dielectric with high capacitance due to its minimal thickness and being located close to the microprocessor can reduce inductance. Thin-film capacitors can increase the capacitive density and drastically reduce the capacitor area, offering performance, volume, and cost advantages over discrete ceramic capacitors.
One object of the present disclosure is to provide a polymer-ceramic composite material with colossal permittivity, comprising polymer matrix and ceramic powders embedded in the polymer matrix, wherein a part of the polymer matrix is exposed and adsorbed to the surface of the ceramic powders, and the polymer is electrically insulating.
In some embodiments of the present disclosure, the ceramic powders comprise or essentially consisting of metal-ion doped TiO2 ceramic powders, preferably the doping metal is one or both selected from Er and Nb, and for example, the metal-ion doped TiO2 ceramic is represented by a formula of (ErmNbn)xTi1-xO2, wherein m≥0, n≥0, m+n=1, 0≤x≤1, and e.g., x≤30%, 25%, 20%, 15%, 10%, 5%, 4%, 3%, 2%, 1%, 0.9%, 0.8%, 0.7%, 0.6%, 0.5%, 0.4%, 0.3%, 0.2%, 0.1%, and e.g., m=n.
In some embodiments of the present disclosure, the polymer is a fluoropolymer, and preferably selected from the group consisting of polytetrafluoroethylene (PTFE) and polyvinylidenefluoride (PVDF), e.g. polyvinylidenefluoride trifluoroethylene (PVDF-TrFE).
The polymer-ceramic composite material of the present disclosure is in the form of a flexible sheet with one or more layers, such as 1, 2, 3, 4, 5, 6, 7, 8, 9, 10 layers or more.
The polymer-ceramic composite material of the present disclosure, wherein a part of the polymer is adsorbed physically or chemically to the surface of the ceramic powders, e.g., hydrogen bond is formed between the ceramic powders and the polymer.
Another object of the present disclosure is to provide a method for fabricating the polymer-ceramic composite material, comprising:
In some embodiments of the present disclosure, the hydroxylating step comprises treating the ceramic powders with a H2O2 solution under stirring and heating at 50-150° C. for 1-5 h; collecting the powders by centrifuge; washing the powders with water and then alcohol such as ethanol; and drying at 50-100° C.
In some embodiments of the present disclosure, the polymer solution is prepared by dissolving the polymer in an organic solvent such as dimethylformamide, and preferably, the polymer is polyvinylidenefluoride trifluoroethylene (PVDF-TrFE).
In some embodiments of the present disclosure, the method comprises the following steps:
Preferably, the poly(vinylidene fluoride trifluoroethylene) solution has a concentration of 10 wt %, the ceramic powder solution has a concentration of 2.5-7.5%, and the weight ration of the ceramic powder solution to the poly(vinylidene fluoride trifluoroethylene) solution in introducing is 30-50%.
Preferably, prior to hot pressing, comprising annealing the film at 100-150° C. for 8-12 h.
The method provided by the present disclosure, further comprises performing solution-casting for 2-6 times to obtain the polymer-ceramic composite with multiple layers.
The present disclosure also provides an electric capacitor comprising the polymer-ceramic composite material as dielectric layer.
The present disclosure also provides an energy storage device comprising the electric capacitor.
Furthermore, the present disclosure provides a microelectronic device comprising the electric capacitor.
In the present invention, it is found that the CP behavior of rutile TiO2 ceramics co-doped with metal ions, such as Nb and Er, exhibits high-performance dielectric behaviors, including temperature and frequency stable CP value (104-105) and sufficiently low dielectric loss (0.03). These results indicate a high reliability of the capacitors. Importantly, technology on the metal-ion doped TiO2 ceramics are developed to multilayer-structured CP ceramic/polymer composite films, which can combine the advantages of ceramics (high dielectric permittivity) and polymers (high breakdown field strengths, easily fabricated into complex shapes, flexible and layer features). Surface hydroxylated ceramic fillers, embedded in copolymer matrix achieved high dielectric constant up to 300 and exceptional low dielectric loss down to 0.04 in the low frequency range, as well as a high energy density of 8.9 J/cm3 at breakdown field of 82 MV/m. Therefore, these composite film capacitors have great technological potential for many applications. In microelectronic systems, thin-film dielectric with high capacitance due to its minimal thickness and being located close to the microprocessor can reduce inductance. Thin-film capacitors can increase the capacitive density and drastically reduce the capacitor area, offering performance, volume, and cost advantages over discrete ceramic capacitors.
The present invention provides:
Before details of the present invention are provided, the problems solved by the present invention and the advantages thereof are provided.
Problems solved by the present invention:
The present invention is the first example to incorporate newly discovered metal ion-doped TiO2 based CP materials into polymer matrix, which would be the first step towards the next generation of fully solid-state supercapacitor and high-energy-density storage devices. The problem of searching on CP material indicates that most of the heteroatomic substitutions that might be employed to improve one of the dielectric properties, always simultaneously worsen the dielectric performance of another. In fact, it is a challenge to satisfy the requirements of simultaneously possessing a high and breakdown strength in dielectric capacitors. In the present invention, the multilayer and flexible capacitors composed of the CP composites demonstrate simultaneously large dielectric constant, negligible dielectric loss, and relatively high energy density.
Compared to conventional ceramic materials, the composites disclosed in the present invention are lightweight, scalable and are easily fabricated into complex shapes towards miniaturization of the compact electronic and electrical systems. The additional flexibility feature of them also possesses broad application prospects in modern electronic and electrical devices; ranging from electric powered automobiles, drive trains and motors, to mobile communication devices and microwave generation.
The process disclosed in the present invention is relatively simple, low cost and mass production for the composite since the ceramic fillers in the composites are fabricated by conventional solid-state sintering method.
Advantages offered by the present invention:
Host titanium dioxide used in this colossal permittivity system is friendly to the environment, non-toxic and abundant.
The developed process, which is solution casting and hot-pressing technique, is relatively simple and low cost.
The developed process is suitable for mass production as the ceramic powders are fabricated by conventional solid-state sintering method. By contrast, fabrication processes for nano-size materials or core-shell nanostructure are usually complicated, and the production capacity might not suitable for mass production-scale.
The developed dielectric capacitors based on the composite multilayers present a relatively high dielectric constant with exceptional low loss. The maximum energy density achieved simultaneously is remarkable compared to those nanocomposites with other ceramic particle fillers. Such novel composite multilayers capacitors are expected to be greatly superior to conventional dielectrics currently used in systems.
Moreover, power electronics applications are currently limited by the capacitor size and performance. Multi-layered capacitors are easily patterned in principle and fully solid-state construction, offering many merits such as improved safety consideration when compared to conventional electrochemical construction.
High-performance dielectric materials are indispensable to advanced microelectronic and high-density energy storage systems. Particularly, tremendous demand for energy storage systems continues to grow, due to their potential applications in modern electronic and electrical industry; pulsed power generation and hybrid power systems [1-3]. Dielectric capacitors exhibit some advantages, including solid state construction, high power density, high operating voltage and long cycling lifetime compared to other energy storage devices. However, low energy density and large dissipation are the two major problems to hinder their practical application. In order to enhance the maximum stored energy density U (U=εrε0Emax2, where E is the electric breakdown strength, εr and ε0 are the material's relative permittivity or dielectric constant and the vacuum permittivity, respectively), ideal dielectric materials with sufficient low loss should have a high εr and breakdown strength. Therefore, the exploration on alternative colossal permittivity (CP) based materials with low loss attracted increasing attention. Noted that CP (εr>104) and low loss (mostly <0.05) were found in (In+Nb) co-doped rutile TiO2 ceramic bulks by Liu's group [4]. The dielectric properties are almost independent over a wide frequency and temperature range, which is superior to other earlier CP materials, such as CaCu3Ti4O12, doped NiO, La2-xSrxNiO4, and ferroelectrics.
It is known that conventional dielectric capacitors usually have an energy density less than 2 J/cm3, which is mainly restricted by the low dielectric constants of polymers or low breakdown field of ceramics. To enhance the energy density of the dielectric capacitors, a great deal of effort has been put to explore on making ceramic/polymer composites [5-7]. It is believed that incorporating CP materials into polymer matrix would probably be the next generation of energy density storage devices [2]. Compared to the conventional ceramic materials, these composites with high energy-storage density are lightweight, scalable and are easily fabricated into complex shapes towards miniaturization of the compact electronic and electrical systems. The additional flexibility features of them also possess broad application prospects in modern electronic and electrical devices; ranging from electric powered automobiles, drive trains and motors, to mobile communication devices and microwave generation. Among the currently studied composite systems, high εr ferroelectric ceramics, such as Pb(Mg1/3Nb2/3) O3—PbTiO3 (PMN-PT), Pb(Zr,Ti)O3(PZT) and BaTiO3 (BTO) have been widely used as fillers in polymers [6, 8]. As they usually exhibit a strong electromechanical effect, a mechanical resonance in the device would be arisen during charging and discharging. This may limit the reliability of the device [5]. In addition, the εr values of these materials are strongly dependent on the temperature in the vicinity of phase transition temperature [9]. Several emergent CP materials have also been proposed, such as CaCu3Ti4O12 (CCTO) [5, 10], doped NiO, and La2-xSrxNiO4 in the past decade. However, these classes of materials are not ideal for straightforward application. They commonly showed a relative large dielectric loss leading to energy leaking out, and the breakdown strength was unclear. Stimulated by our previous studies on CP materials [11-13], it is anticipated that the development of the CP TiO2/polymer composites might further light on the practical energy storage since excellent dielectric properties have been found in the CP ceramics co-doped by different metal-ions in our studies. Unfortunately, there is no report on the above aspects with TiO2-based CP composite materials. It is well known that the large dielectric difference between ceramic fillers and polymer matrix exhibiting inhomogeneous electric field would weaken the breakdown strength of the composites. Besides, agglomeration and phase separation from the matrix might deteriorate the electrical performance of the composites. As a result, surface modification is highly desirable to help improve compatibility in ceramic/polymer composites. In fact, dielectric properties of composites are strongly dependent on filler concentration, surface activity and its distribution in polymer matrix.
Here, the present invention discloses ceramic/polymer composite multilayers by combining solution casting and hot-pressing (HP) processes. Solution casting offers opportunity for high reliability and low cost manufacturing, while HP method reduces voids and other structural defects in composites. The poly(vinylidene fluoride trifluoroethylene) (P(VDF-TrFE)) 55/45 mol % copolymer was utilized as matrix. It has very weak piezoelectric effect and a high dielectric constant (˜15) at room temperature due to the high polarity from fluorine with high electronegativity. (Er+Nb)-modified TiO2 was used as ceramic fillers. It is recognized that the fluorine atom presented in the polymer can strongly interact with Ti4+ ions through dipole-dipole interaction. The surface of ceramic fillers was chemically modified by H2O2 to introduce hydroxyl groups. The results indicate that surface hydroxylated composite with a dense structure can effectively enhance dielectric properties. Finally, high-performance of dielectric capacitors simultaneously possessing large dielectric constant, negligible dielectric loss and highest energy density among the previously reported components are successfully achieved in the flexible multilayered composites.
A spherical morphology is shown in the ceramic powders, with an average size of about 1 μm (
Such large dielectric constants in the ceramic/polymer composites were previously described by some effective medium theory. The effective dielectric constants (εeff) of 1 layer and 4-layer HP surface modified composites are depicted in
In fact, it is a challenge to satisfy the requirements of simultaneously possessing a high εr and breakdown strength in dielectric capacitors. The HP composites may be promising candidates for practical applications of electric energy storage devices since they exhibit large dielectric constant and low loss as shown in
a)(Ba,Ca)TiO3;
b)(Ba,Zr)TiO3;
c)(Ba,Sr)TiO3
It can be observed that using ferroelectric ceramics as ceramic fillers exhibits higher breakdown strengths, but generally results in lower dielectric constant. In the present work, CP ceramic fillers are utilized and hence the maximum energy density achieved is remarkable compared to those nanocomposites with other ceramic particle fillers. It is reported that using microsized particle might have a higher dielectric constant compared to employing the nanosized one [10, 17]. In recent years, many studies have focused on the introduction of controllable morphology fillers, such as large-aspect-ratio fibers [25, 26] for achieving great enhancements in both polarization and breakdown strength. Furthermore, some effective approaches have been proposed via adopting the strategy of a core-shell structure for the inorganic fillers [27] and modulating the multilayer structure of ceramic/polymer composites [28], which can weaken interfacial polarization and thus reduce the energy loss for improving the energy efficiency of the composites Earlier studies showed that ultrahigh energy density of polymer nanocomposites was achieved in a sandwich-structured 20 vol % BTO/PVDF and 3 vol % BTO@TiO2 nanofibers/PVDF, in which the energy density was 18.8 J/cm3 [29] and 20 J/cm3 [25], respectively. However, the fabrication process for nano-size materials or core-shell nanostructure is usually complicated, and the production capacity might not suitable for mass production-scale. Apparently, the process developed in the present work is relatively simple, low cost and mass production for the composite since the ceramic powders are fabricated by conventional solid-state sintering method. For CP-based composites, although 50 vol % CCTO/P(VDF-TrFE) exhibited a large dielectric constant, 610 [5], but unfortunately it displayed a relatively high loss above 0.1 as well, causing a major problem of energy leaking out in dielectric capacitor. Besides, the properties of breakdown strength and energy storage are unknown in these earlier studies. In contrast, our developed dielectric capacitors based on the novel composite multilayers present a relatively high εr with exceptional low tan δ, and a high energy density with a suitable breakdown strength simultaneously. It is believed that the approach of this study can be extended to other types of composites to achieve high-energy storage density. Moreover, power electronics applications are currently limited by the capacitor size and performance. Multilayered capacitors are easily patterned in principle and fully solid state construction, offering many merits such as improved safety consideration when compared to conventional electrochemical construction.
In summary, this invention shows composite capacitors with metal-ions co-doped CP materials and polymers. As an example, the multi-layer structured composites composed of P(VDF-TrFE) and surface functionalized (εr,Nb) TiO2 ceramic fillers with homogeneous ceramic particle dispersions were prepared by practical solution-cast and hot pressing method. We found that the surface hydroxylation of ceramic fillers benefits dielectric properties, breakdown strength and energy storage densities of the composites. The enhanced energy storage density is attributed to the combined effects of surface modification by H2O2, improved dielectric constant and breakdown strength of composite films. The measurements have been compared with classical models and our experimental results are in good agreement with theoretical calculations. Importantly, the multilayered capacitors reported in this work can increase the capacitive density and drastically reduce the capacitor area, offering high-performance, volume cost advantages over discrete ceramic capacitors. The research results are helpful for not only investigating the fundamental dielectric properties of the composite materials, but also developing device applications in advanced microelectronics and high-density energy storage system.
Ceramic/polymer composite samples were fabricated by combining solution casting and HP method. The synthesis of ceramic powders (Er0.5Nb0.5)xTi1-xO2 can be found in our previous reports [15, 11]. The sintered ceramic powders were dispersed in an aqueous solution of hydrogen peroxide (H2O2, 35% w/v, Acros Organics) with stirring and heating at 100° C. for 3 h. The suspensions were subsequently centrifuged at 3000 rpm for 5 min. The collected powders were washed with distilled water and ethanol. Finally, surface hydroxylated ceramic powders ((Er+Nb)—OH) were obtained by drying overnight at 70° C. in an oven. P(VDF-TrFE) 55/45 mol % copolymer powder purchased from Piezotech was utilized as the matrix. To begin with, P(VDF-TrFE) copolymer powder was dissolved in a dimethylformamide (DMF) without further purification to obtain a solution with 10 wt % concentration. Different weight ratios (0 wt %, 30 wt % and 50 wt %) of 2.5% (Er+Nb)—OH or 7.5% (Er+Nb)—OH were ultrasonically dispersed in DMF and then introduced into P(VDF-TrFE) solution with constantly stirring at 50° C. for 8 h and sonicated for about 30 min to form stable suspensions. As-deposited composite film was subsequently dried on a hotplate at 70° C. The film was annealed at 120° C. overnight in an oven and then allowed to cool to room temperature. To improve the uniformity, the solution-cast film was then hot-pressed at 200° C. for 10 min. 2-, 4-, 6-layers solution-cast films could be finally obtained [5]. Gold layers were deposited on the films by sputtering to serve as electrode layers for electrical measurements.
X-ray Diffraction (XRD, Smart Lab; Rigaku Co., Japan), The Bruker Vertex-70 Fourier transform infrared (FTIR) spectrophotometer, field emission scanning electron microscopy (FESEM) was used for material morphology and crystal structure characterization. An impedance analyzer (HP 4294A; Agilent Technologies Inc., Palo Alto, CA) was used to measure the frequency dependence of the dielectric properties over the range of 102 to 105 Hz at room temperature. The temperature-dependent dielectric properties (298-413 K) were conducted inside a Carbolite furnace connected to the impedance. A high voltage power supply (model P0621, TREK, Inc.) was used for the breakdown strength measurement. All samples were kept inside a 400 mL beaker filled with silicon oil to limit moisture influence on testing results and sparking while applying high voltage. Energy density of the composites was calculated according to their dielectric constant and breakdown strength with different weight ratios of ceramic fillers.
The images in
The ceramic fillers were homogeneously dispersed in the polymer matrix. The thickness of the composites film prepared under different condition, as solution-cast composite film, 2 and 6-layer as solution-cast composite film after HP process were 22, 30 and 24 μm, respectively.
where n is the fitting parameter or the morphology factor. Using EMT model, the experimental value fitted well with the shape parameter n=0.28. The difference between the experimental data and the predicted value for 1 layer was 3% and 16% with the 50 and 30 wt % ceramic fillers, respectively. It is stated that this model is suitable for the ceramic particles less than 10 □μm and depends on their morphology. The small value of n indicates the fillers particles is in near spherical shape, while a high value of n indicates largely non-spherically shaped particles. Our ceramic particles size was around 1 μm. Therefore, the close agreement was found between the experimental and theoretical values. One of the most general attempts of describing the dielectric behavior of composites was the one by Yamada et al. [20]. It is based on the properties of the individual materials and considers a factor (n=4π/m) related with the shape and relative orientation of the fillers, while others authors only work with spherical particles. The equation that describes Yamada model is shown as follows [20]:
In this work, our experimental values are in close agreement with the Yamada model by taking into account the shape factor [20]. The n value is found to be 3.6 as obtained from the best fitting result. It was claimed that an n value of 3.5 was found for a PZT particle size of 1.5 μm by the work of Gregorio et al. [21]. Our results (1 μm of the ceramic fillers) are in good agreement of it.
There follows a list of references that are occasionally cited in the specification. Each of the disclosures of these references is incorporated by reference herein in its entirety.
This application is a US National Phase application based upon PCT Application No PCT/CN2019/04740, fled Apr. 28, 2019, which claims the priority of U.S. provisional patent application No. 62/663,340, filed on Apr. 27, 2018, and the disclosures of which are hereby incorporated by reference.
Filing Document | Filing Date | Country | Kind |
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PCT/CN2019/084740 | 4/28/2019 | WO |
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WO2019/206321 | 10/31/2019 | WO | A |
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20120245016 | Curry | Sep 2012 | A1 |
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102070854 | May 2011 | CN |
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Number | Date | Country | |
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20210054168 A1 | Feb 2021 | US |
Number | Date | Country | |
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62663340 | Apr 2018 | US |