Number | Name | Date | Kind |
---|---|---|---|
3753138 | Svendsen | Aug 1973 | |
3772606 | Waehner | Nov 1973 | |
3961280 | Sampei | Jun 1976 | |
3974455 | Kamimura et al. | Aug 1976 | |
4117418 | Hoglund | Sep 1978 | |
4158179 | Sakai et al. | Jun 1979 | |
4236120 | White | Nov 1980 | |
4319199 | Sunderland | Mar 1982 | |
4400652 | Sunderland | Aug 1983 |
Entry |
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International Electronics, McGraw-Hill, 11/9/78 entitled "X-Ray Lithography Breaking Through the Micron Line". |