Patent Grant
8437000
The present disclosure relates generally to gas sensors, and more particularly, to cavity ring down gas sensors.
Gas sensors are widely used across many diverse applications including commercial, industrial, military and other applications. The sensitivity of such gas sensors can vary, and the type of gas sensor used for a particular application is often selected depending on the required sensitivity and cost. In some applications, it may be desirable to detect gas concentrations as low as a few parts per billion, or even less. Many commercially available gas sensors do not have a high enough sensitivity or accuracy to detect these and other gas concentrations.
The present disclosure relates generally to gas sensors, and more particularly, to cavity ring down gas sensors. In one illustrative embodiment, a gas sensor includes an optical cavity for receiving a gas to be detected, a first electromagnetic radiation source (e.g. laser), and a second electromagnetic radiation source (e.g. laser). The optical cavity is defined by one or more optical segments separating at least two mirrors. The first electromagnetic radiation source may be configured to emit a first beam of light having a first wavelength, wherein the first wavelength corresponds to an absorption line of a gas of interest. The second electromagnetic radiation source may be configured to emit a second beam of light having a second wavelength, where the second wavelength does not correspond to an absorption line of the gas of interest. The at least two mirrors can be configured to reflect the first beam of light and the second beam of light through the one or more optical segments, and thus the gas of interest. In some cases, the first beam of light and the second beam of light may be provided to the optical cavity simultaneously, while in other cases, the first beam of light and the second beam of light may be provided to the optical cavity sequentially, as desired.
A detector may be used to detect a first cavity ring down time decay of the first beam of light, which may be related to the absorption of the first beam of light by the gas of interest in the optical cavity, and thus may provide a measure that is related to the concentration of the gas of interest in the optical cavity. In some cases, the same detector may be used to detect a second cavity ring down time decay of the second beam of light in the optical cavity, which may correspond to a baseline cavity ring down time. In some cases, rather than using the same detector, a second detector may be used to detect a cavity ring down time decay of the second beam of light in the optical cavity. In either case, the baseline cavity ring down time may be used to help increase the accuracy of the sensor by, for example, helping to compensate for sensor variations such as sensor drift, which might be caused by, for example, sensor age, temperature or pressure changes, and/or other conditions.
The preceding summary is provided to facilitate an understanding of some of the innovative features unique to the present disclosure and is not intended to be a full description. A full appreciation of the disclosure can be gained by taking the entire specification, claims, drawings, and abstract as a whole.
The disclosure may be more completely understood in consideration of the following description of various illustrative embodiments of the disclosure in connection with the accompanying drawings, in which:
The following description should be read with reference to the drawings wherein like reference numerals indicate like elements throughout the several views. The description and drawings show several examples of the claimed invention, and are not meant to be limiting in any way.
In the illustrative embodiment of
Alternatively, lasers 20 and 22 having fixed wavelengths (i.e. non-tunable) may be used. In this case, laser 22 may be selected to have a wavelength that is close to or at a high (or other) absorption line of a gas species to be detected, and laser 20 may be selected to have a wavelength that is off of the high absorption line of the gas species to be detected. In some cases, quantum cascade lasers may be suitable. Some example lasers include, for example, lasers available from New Focus™, such as the Velocity Product line, Telecom, or Daylight Solutions, such as a 4.5 micron laser model number TLS-21045, or a Chiller Model 1001 having a model number TLS-21045. These are only illustrative. When the lasers 20 and 22 have a fixed wavelength (i.e. non-tunable), the wavelength of the lasers to be used depends on the absorption spectra of the gas of interest. While lasers are used here as one example, this is not meant to be limiting in any way, and it is contemplated that any suitable electromagnetic radiation source may be used, as desired.
In the illustrative embodiment of
In the illustrative embodiment of
In some cases, active mirror 18 may be mechanically and/or electrically deformable or otherwise actuatable so as to move the optical cavity 12 in and out of resonance conditions for the electromagnetic radiation sources 20 and 22. In the illustrative embodiment, the resonance condition for electromagnetic radiation source 22 may correspond to a wavelength for a high absorption line of the gas to be detected, while the resonance condition for electromagnetic radiation source 20 may correspond to a wavelength at which there is little or no absorption by the gas to be detected. In some cases, the active mirror 18 may be a piezoelectric mirror 18, but this is not required. When so provided, piezoelectric mirror 18 may be configured to deform when an electrical potential is applied across a piezoelectric element of the mirror 18. For example, an applied electrical potential may cause at least a portion of the mirror to expand and/or contract. In one example, the center of the piezoelectric mirror 18 may move in and out in response to the applied electrical potential, causing the position of the mirror 18 to change. In some embodiments, the electrical potential may oscillate, causing the piezoelectric mirror 18 to deform at a frequency of the applied oscillating electrical potential. The frequency that the active mirror 18 oscillates may dictate a chopping frequency at which light pulses are periodically applied to the optical cavity 12, with cavity ring down decay times in between.
In some cases, the piezoelectric mirror 18 may be configured to deform around one or more node positions. The one or more node positions may be positions of the piezoelectric mirror 18 in which the optical cavity 12 may have a resonance condition. For example, in one case, the piezoelectric mirror may have a first node position corresponding to the resonance condition for electromagnetic radiation source 22 and a second node position corresponding to the resonance condition for electromagnetic radiation source 20. When so provided, the oscillation of the piezoelectric mirror 18 may cause the optical cavity 12 to move in and out of the resonance conditions at the oscillating frequency of the piezoelectric mirror 18. In some cases, the resonance condition may occur twice for each oscillation cycle of the mirror 18, but could be more or less depending on the resonance conditions of the optical cavity 12. In one example, the oscillating frequency of the piezoelectric mirror 18 may be such that the resonance conditions of the optical cavity 12 occurs on the order of milliseconds, however, any suitable time period may be used. Similar to mirrors 14 and 16, piezoelectric mirror 18 may be configured to have a relatively high reflectivity on the internal surface to reduce loss, and in some cases, be at least partially transparent on the external surface, when desired.
In the illustrative embodiment shown in
Rather than (or in addition to) having an active mirror 18 that causes the optical cavity 12 to fall out of/into resonance to selectively control the initiation of a cavity ring down time decay time, in some embodiments, an acousto-optic (AO) modulator, such as AO modulators 36 and 38, can be associated with each of the electromagnetic radiations sources 20 and 22. The AO modulators 36 and 38 may be configured to selectively transmit the beams of light 26 and 27 into the optical cavity 12 and, in some cases, shut off the light that is input into the optical cavity 12 when the optical cavity 12 reaches a desired intensity. In some cases, the AO modulators 36 and 38 may receive a trigger signal from a detector (e.g. detectors 24, 34) that receives light leaking out of the optical cavity 12 through one of the mirrors. Rather than using AO modulators, it is contemplated that the electromagnetic radiations sources 20 and 22 themselves may be simply turned on and off by a controller, if desired.
Detectors 24 and 34 may be configured to detect the cavity ring down time decay of light beams 26 and 27 in the optical cavity 12. In some cases, the detectors 24 and 34 may be optical detectors that are configured to detect optical light that leaks out one of the mirrors, such as mirrors 14 and 16. In some cases, the detectors 24 and 34 may produce a zero measurement when no light is detected in the optical cavity 12.
In operation, the optical cavity 12 may couple in light beam 26 via mirror 14 and light beam 27 via mirror 16 at different times. In some cases, light beams 26 and 27 may be sequentially, alternatively, or otherwise coupled into optical cavity 12 at different times, as desired. This may be controlled by a control block 23. When the optical cavity 12 is in a resonance condition for light beam 26, e.g. according to the current state of the active mirror 18, the light beam 26 may be amplified and may interact with the gas sample in the optical cavity 12. In some cases, AO modulator 36 may shut off laser 22 when the intensity of the cavity reaches a desired level, as detected by Detector 24. Detector 24 may then detect a cavity ring down time decay of light beam 26, which is related to the absorption of the light beam 26 by the gas sample in the optical cavity 12.
When the optical cavity 12 is in a resonance condition for light beam 27, e.g. according to the current state of the active mirror 18, the light beam 27 is amplified, but since light beam 27 may not be at a high (or any other) absorption line of the gas to be detected, the light beam 27 may not significantly interact with the gas sample in the optical cavity 12. In some cases, AO modulator 38 may shut off laser 20 when the intensity of the cavity reaches a desired level, as detected by detector 34. Detector 34 may then detect a cavity ring down time decay of light beam 27, which may be used as a baseline cavity ring down time decay for the optical cavity 12. The baseline cavity ring down time decay can be used with the cavity ring down time decay of beam 26 to more accurately determine the concentration of the gas of interest in the optical cavity 12 by, for example, helping to compensate for sensor variations such as sensor drift, which might be caused by, for example, sensor age, temperature or pressure changes, and/or other conditions. Control block 23 may be coupled to detectors 24 and 34, and may use the baseline cavity ring down time decay to compensate a gas concentration value computed from the cavity ring down time decay of light beam 27. In some cases, the cavity ring-down time of the optical cavity may be on the order of micro-seconds, such as, for example, 10 micro-seconds, depending on the concentration and/or degree of absorption by the gas.
As shown, and in some illustrative embodiments, mirror 18 may include an actuator 42 for actuating the position of mirror 18. As noted above with respect to
In some cases, the piezoelectric actuator may cause mirror 18 to deform around one or more node positions. The one or more node positions may be positions of the mirror 18 in which the optical cavity 12 may have a resonance condition. For example, in one case, the mirror 18 may have a first node position corresponding to the resonance condition for electromagnetic radiation source 22, and a second node position corresponding to the resonance condition for electromagnetic radiation source 20. When so provided, the oscillation of the mirror 18 may cause the optical cavity 12 to move in and out of the resonance conditions at the oscillating frequency of the piezoelectric actuator. While a piezoelectric actuator is used as an example, it is contemplated that actuator 42 may be any suitable actuator, as desired.
As shown in
In the illustrative embodiment of
Detector 24 may be configured to detect the cavity ring down time decay of both light beams 26 and 27 in the optical cavity 12. In some cases, the detector 24 may be an optical detector that is configured to detect optical light that leaks out one of the mirrors, such as mirror 14. However, it is contemplated that separate detectors may be provided for light beams 26 and 27, if desired.
In operation, light beams 26 and 27 may be sequentially, alternatively, or otherwise coupled into optical cavity 12 at different times, as desired. When the optical cavity 12 is in a resonance condition for light beam 26, such as according to the current state of the active mirror 16 or 18, the light beam 26 is amplified and interacts with the gas sample in the optical cavity 12.
In some cases, AO modulator 36 may shut off laser 22 when the intensity of the cavity reaches a desired level. Detector 24 may then detect a cavity ring down time decay of light beam 26 that is related to the absorption of the light beam 26 by the gas sample.
When the optical cavity 12 is in a resonance condition for light beam 27, such as according to the current state of the active mirror 16 or 18, the light beam 27 is amplified, but since it is not at the high (or other) absorption line of the gas to be detected, it does not significantly interact with the gas sample in the optical cavity 12. In some cases, AO modulator 38 may shut off laser 20 when the intensity of the cavity reaches a desired level. Detector 24 then may detect a cavity ring down time decay of light beam 27. As discussed above, the cavity ring down time decay of light beam 27 may be used as a baseline cavity ring down time decay of the optical cavity 12. The baseline cavity ring down time decay can be used with the cavity ring down time decay of beam 26 to more accurately determine the concentration of the gas of interest in the optical cavity 12 by, for example, helping to compensate for sensor variations such as sensor drift, which might be caused by, for example, sensor age, temperature or pressure changes, and/or other conditions. Control block 25 may be coupled to detector 24, and may use the baseline cavity ring down time decay to compensate a gas concentration value computed from the cavity ring down time decay of light beam 27. In some cases, the cavity ring-down time of the optical cavity may be on the order of micro-seconds, such as, for example, 10 micro-seconds, depending on the concentration and/or degree of absorption by the gas.
It should be understood that the above-described optical cavity 12 is only illustrative, and that the optical cavity 12 can take on any form that permits incoming light beams 26 and 27 to be introduced into the cavity 12, travel around and be amplified by the cavity 12, and allow direct or indirect measurement of the cavity ring down time decays of light beams 26 and 27 in the optical cavity 12.
Having thus described some illustrative embodiments of the present disclosure, those of skill in the art will readily appreciate that yet other embodiments may be made and used within the scope of the claims hereto attached. It will be understood that this disclosure is, in many respect, only illustrative. Changes may be made in details, particularly in matters of shape, size, and arrangement of parts without exceeding the scope of the disclosure. The invention's scope is, of course, defined in the language in which the appended claims are expressed.
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