Number | Name | Date | Kind |
---|---|---|---|
2885370 | Groszos et al. | May 1959 | |
3228895 | Burks et al. | Jan 1966 | |
3230242 | Fink | Jan 1966 | |
3239489 | Fink | Mar 1966 | |
3393218 | Van Wazer et al. | Jul 1968 | |
3481964 | Ismail | Dec 1969 | |
3655711 | Bush et al. | Apr 1972 | |
3892583 | Winter et al. | Jul 1975 | |
4200666 | Reinberg | Apr 1980 |
Entry |
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Seyferth et al., "A Liquid Silazane Precursor to Silicon Nitride", Communications of the American Ceramic Society, p. C-13, (Jan. 1983). |
E. G. Rochow, "Polymeric Methylsilazanes", Organosilicon Chemistry, pp. 247-262, IUPAC (1965). |