Nano-array and fabrication method thereof

Abstract

The invention provides a method for fabricating a nano-array comprising the following steps. A template with a plurality of nano-holes is provided. A polymer is embossed by the template to integrally form a plurality of nano-protrusions thereon, and demolding to reveal the nano-protrusions. The nano-protrusion has a concave or convex top surface.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention can be more fully understood by reading the subsequent detailed description and examples with references made to the accompanying drawings, wherein:

FIG. 1 to FIG. 3 are cross-sectional diagrams of embossing process;

FIG. 4 a and FIG. 4b are cross-sectional diagrams of nano-arrays with organic or inorganic coating thereon of the invention;

FIG. 5 and FIG. 6 are cross-sectional diagrams of nano-arrays formed by embossing process in different conditions;

FIG. 7 a is a cross-sectional diagram of concave head nano-arrays observed by an electron microscope;

FIG. 7 b is a top view of FIG. 7a;

FIG. 8 a is a tilt diagram of convex head nano-arrays observed by an electron microscope;

FIG. 8 b is a top view of FIG. 8a;

FIG. 9 a shows the contact angle between a drop of water and a thermoplastic polymer substrate;

FIG. 9 b shows the contact angle between a drop of water and a thermoplastic polymer substrate having a plurality of nano-protrusions thereon formed by embossing process of the invention;

FIG. 10 a shows the gecko's effect of the nano-protrusion of the invention;

FIG. 10 b shows sweat adhering to a surface having a plurality of nano-protrusions;

FIG. 11 shows the reflectivity of visible spectrum;

FIG. 12 a shows the adhesion test result of 100 nm thick Au sputtered on a polymer substrate with and without nano-protrusions; and

FIG. 12 b shows the adhesion test result of 200 nm thick Au sputtered on a polymer substrate with and without-nano-protrusions.

Claims

1. A nano-array, comprising: a polymer substrate; anda plurality of nano-protrusions formed integrally on the polymer substrate, having a concave or convex top surface thereof.

2. The nano-array as claimed in claim 1, wherein the polymer substrate and the nano-protrusions are the same materials.

3. The nano-array claimed in claim 2, wherein the polymer substrate comprises thermoplastic polymer, thermoset polymer or UV curing polymer.

4. The nano-array as claimed in claim 3, wherein the thermoplastic polymer comprises PMMA (polymethyl methacrylate), PC (polycarbonate), COC (cyclo-olefin copolymers), PP (polypropylene), PE (polyethylene), PVC (polyvinyl chloride), PET (polyethylene terephthalate), LCP (liquid crystal polymer)or TPI (thermoplastic polyimide).

5. The nano-array as claimed in claim 3, wherein the thermoset polymer comprises PI (polyimide) or Epoxy.

6. The nano-array as claimed in claim 1, being a self-cleaning substrate.

7. The nano-array as claimed in claim 1, being a anti-reflecting substrate.

8. The nano-array claimed in claim 1, being an adsorptive substrate.

9. The nano-array as claimed in claim 1, further comprising an organic or inorganic coating conformally formed on the polymer substrate and the nano-protrusions.

10. The nano-array as claimed in claim 9, wherein the organic coating comprises polysiloxane, silicon, conductive polymer, OLED (organic light emitting diode), PLED (polymer light emitting diode) or PEDOT (polyethylenethioxythiophene).

11. The nano-array as claimed in claim 9, wherein the inorganic coating comprises Zr, Ti, Cu, Ag, Au, Al, Ni, W, Fe, Pt, SiO2, TiO2, ITO, GaAs, InGaAs, polysilicon or amorphous silicon.

12. The nano-array as claimed in claim 9, wherein the thickness of the organic and inorganic coatings is 50 nm to 10 μm.

13. The nano-array as claimed in claim 9, being a capping coating.

14. The nano-array as claimed in claim 9, wherein the nano-protrusions improve adhesion between the polymer substrate and the organic or inorganic coating.

15. A method of fabricating a nano-array, comprising: providing a template with a plurality of nano-holes;embossing a polymer substrate by the template to integrally form a plurality of nano-protrusions thereon; anddemolding to reveal the nano-protrusion.

16. The method of fabricating a nano-array as claimed in claim 15, further comprising introducing a surfactant for demolding.

17. The method of fabricating a nano-array as claimed in claim 15, the template is formed by anodizing aluminum once or twice.

18. The method of fabricating a nano-array as claimed in claim 15, further comprising forming an organic or inorganic coating conformally on the polymer substrate and the nano-protrusions.

19. The method of fabricating a nano-array as claimed in claim 18, wherein the organic coating comprises polysiloxane, silicon, conductive polymer, OLED (organic light emitting diode), PLED (polymer light emitting diode) or PEDOT (polyethylenethioxythiophene).

20. The method of fabricating a nano-array as claimed in claim 18, wherein the inorganic coating comprises Zr, Ti, Cu, Ag, Au, Al, Ni, W, Fe, Pt, SiO2, Ti2, ITO, GaAs, InGaAs, polysilicon or amorphous silicon.

21. The method of fabricating a nano-array as claimed in claim 18, wherein the thickness of the organic and inorganic coatings is smaller than 100 nm.

22. The method of fabricating a nano-array as claimed in claim 15, wherein the nano-protrusion has a concave or convex top surface thereof.

23. The method of fabricating a nano-array as claimed in claim 15, wherein the polymer substrate comprises thermoplastic polymer, thermoset polymer or UV curing polymer.

24. The method of fabricating a nano-array as claimed in claim 23, wherein the thermoplastic polymer comprises PMMA (polymethyl methacrylate), PC (polycarbonate), COC (cyclo-Olefin copolymers), PP (polypropylene), PE (polyethylene), PVC (polyvinyl chloride), PET (polyethylene terephthalate) LCP (liquid crystal polymer) or TPI (thermoplastic polyimide), thermoset polymer comprises PI (polyimide), Epoxy.

25. The method of fabricating a nano-array as claimed in claim 23, wherein the thermoset polymer comprises PI (polyimide) or Epoxy.