Claims
- 1. A suspension member, comprising:
a linear displacement member; and first and second counter rotation members arranged crosswise to the linear displacement member at either end thereof, each of the first and second counter rotation members including a mounting portion spaced apart from an isolated portion on respective first and second sides of the linear displacement member.
- 2. The suspension member of claim 1 wherein the linear displacement member and the first and second counter rotation members are structured such that a displacement of the mounting portions along the linear displacement member is balanced by a displacement of the isolated portions.
- 3. The suspension member of claim 2 wherein the linear displacement member is a substantially rigid beam.
- 4. The suspension member of claim 3 wherein the first and second counter rotation members each include a deflection beam arranged crosswise to the linear displacement member and positioned on the second side of the linear displacement member, and a moment arm coupled to the deflection beam at a portion thereof distal from the linear displacement member and extending therefrom to the first side of the linear displacement member.
- 5. The suspension member of claim 4 wherein the mounting portion of each counter rotation member is arranged on a portion of the moment arm formed on the first side of the linear displacement member.
- 6. The suspension member of claim 5 wherein the isolated portion of each counter rotation member is arranged on the second side of the linear displacement member adjacent to a junction of the moment arm and the deflection beam.
- 7. The suspension member of claim 2 wherein the linear displacement member is structured having an elastic curved portion between the first and second counter rotation members.
- 8. The suspension member of claim 7 wherein the first and second counter rotation members are substantially rigid members.
- 9. The suspension member of claim 2 wherein the suspension member comprises a first suspension member; and
further comprising a second suspension member structured similarly to the first suspension member, the first and second suspension members being spaced apart and arranged having the isolated portions of the first suspension member facing toward the isolated portions of the second suspension member.
- 10. The suspension member of claim 9, further comprising an acceleration sensor mechanism coupled to the respective isolated portions of the first and second suspension members.
- 11. The suspension member of claim 9, further comprising third and fourth suspension members being structured similarly to the first suspension member and arranged spaced apart and having the mounting portions of the third suspension member facing oppositely from the mounting portions of the fourth suspension member, each of the mounting portions of the first and second suspension members being coupled to one of the isolated portions of each of the third and fourth suspension members.
- 12. The suspension member of claim 11 wherein the mounting portions of the first and second suspension members are integrated with the respective isolated portions of the third and fourth suspension members.
- 13. The suspension member of claim 11 wherein the isolated portions are integrated with the acceleration sensor mechanism.
- 14. A suspension member, comprising:
a means for supporting the suspension member on a surface external to the suspension member; a means for supporting a device external to the suspension member; and a means for interconnecting the suspension member supporting means and the external device supporting means such that a displacement of the suspension member supporting means is cancelled by a displacement of the external device supporting means.
- 15. The suspension member of claim 14 wherein the suspension member supporting means, the external device supporting means, and the means for interconnecting the two supporting means operate in a plane.
- 16. The suspension member of claim 15, wherein the displacement of the suspension member supporting means that is cancelled by a displacement of the external device supporting means is an in-plane displacement of the suspension member supporting means acting along the interconnecting means.
- 17. The suspension member of claim 16 wherein the suspension member supporting means includes a first mounting portion arranged on a first means for generating a moment, and a second mounting portion arranged on a second means for generating a moment, the first and second moment generating means being arranged on opposite ends of the interconnecting means and the first and second mounting portions being arranged on a first side of the interconnecting means; and
the external device supporting means includes a first external device supporting means arranged on the first moment generating means on a second side of the interconnecting means, and a second external device supporting means arranged on the second moment generating means on the second side of the interconnecting means.
- 18. The suspension member of claim 17 wherein the displacement of the external device supporting means that cancels the in-plane displacement of the suspension member supporting means is provided by a moment that acts through the first and second moment generating means.
- 19. The suspension member of claim 18, further comprising a first pair of the suspension members being spaced apart and arranged with their respective first and second external device supporting means being arranged between their respective first and second external device supporting means and with their respective first and second mounting portions being arranged outside of their respective first and second external device supporting means.
- 20. The suspension member of claim 19, further comprising a second pair of the suspension members being spaced apart and arranged with their respective first and second external device supporting means being arranged between their respective first and second external device supporting means, and with their respective first and second mounting portions being arranged outside of their respective first and second external device supporting means, the mounting portions of the first plurality of suspension members being interconnected with respective external device supporting means of the second plurality of suspension members.
- 21. The suspension member of claim 20 wherein the mounting portions of the first plurality of suspension members are integrated with respective external device supporting means of the second plurality of suspension members.
- 22. The suspension member of claim 20, further comprising an acceleration sensor mechanism supported by the external device supporting means of the first plurality of suspension members.
- 23. A net zero isolator, comprising:
an elongated reaction beam formed of a substantially planar substrate; and
a first and a second counter rotation member formed in the substrate and arranged adjacent to a first and a second end of the elongated reaction beam, respectively, each of the first and second counter rotation members being oriented transverse to the elongated reaction beam and having a mounting portion extending on a first side of the reaction beam and an isolated portion extending on a second side of the reaction beam opposite from the mounting portion, the elongated reaction beam and the first and second counter rotation members being structured such that a substantially linear displacement of the mounting portions directed generally along the elongated reaction beam in the plane of the substrate generates a moment in each of the first and second counter rotation members that rotates each of the first and second counter rotation members to counter the in-plane linear displacement of the mounting portions at a null point that coincides with the respective isolated portion.
- 24. The isolator of claim 23 wherein each of the mounting portions comprises a mounting pad projecting from the respective first and second counter rotation members on the first side of the elongated reaction beam; and
each of the isolated portions comprises an isolated pad projecting from the respective first and second counter rotation members on the second side of the elongated reaction beam opposite from the mounting pad.
- 25. The isolator of claim 24 wherein each of the first and second counter rotation members comprises:
a deflection beam that projects crosswise from one end of the elongated reaction beam toward the second side of the elongated reaction beam; and a moment arm that is coupled to the deflection beam at a junction at an end of the deflection beam that is distal from the reaction beam, the moment arm being doubled back along the respective deflection beam at a position spaced a short distance away therefrom and being extended onto the first side of the elongated reaction beam opposite from the deflection beam.
- 26. The isolator of claim 24 wherein the elongated reaction beam is structured having an elastic curved portion arranged between the first and second counter rotation members; and
each of the first and second counter rotation members comprises a moment arm that extends on both sides of the curved reaction beam.
- 27. A two-axis suspension system, comprising:
a first pair of generally planar net zero isolators each having an elongated linear displacement member floating between a pair of crosswise counter rotation members, the counter rotation members each having a mounting portion extended on a first side of the linear displacement member and a isolated portion extended on a second side of the linear displacement member, the linear displacement member and the pair of net zero isolators being structured such that a substantially linear displacement applied to the mounting portions and directed generally along the elongated linear displacement member in the plane of the net zero isolator generates moments that rotate the counter rotation members to cancel the in-plane linear displacement of the mounting portions at the respective isolated portion, the first pair of net zero isolators spaced apart in a plane with the isolated portions arranged between them and the mounting portions arranged outside them; and a second pair of generally planar net zero isolators each being substantially similar to the first pair and being similarly arranged crosswise to the first pair, the mounting portions at respective first ends of the first pair being coupled to the isolated portions at respective first ends of the second pair, and the mounting portions at respective second ends of the first pair being coupled to the isolated portions at respective second ends of the second pair.
- 28. The suspension system of claim 27 wherein the first and second pairs of net zero isolators are formed integrally of a single substrate.
- 29. The suspension system of claim 27 wherein the respective coupled mounting portions and isolated portions are integrated.
- 30. The suspension system of claim 27 wherein the counter rotation members are structured having a plurality of interconnected beam members.
- 31. The suspension system of claim 27, further comprising an acceleration sensing mechanism positioned between the first and second pairs of net zero isolators and having a frame portion coupled to the respective isolated portions of the first pair of net zero isolators.
- 32. The suspension system of claim 27 wherein the respective isolated portions of the first pair of net zero isolators are integrated with the frame portion of the acceleration sensing mechanism.
- 33. A device suspension means, comprising:
a means for mounting to an external body at a plurality of mounting points that are spaced apart in a substantially planar two-dimensional pattern, the mounting means including a plurality of mounting portions that coincide with the two-dimensional pattern of mounting points; and an isolating means interconnected to the mounting means for isolating from stresses due to translation of the mounting points a plurality of isolated points that are spaced apart in a substantially planar two-dimensional pattern, the isolating means including a plurality of isolated portions that coincide with the two-dimensional pattern of isolated points.
- 34. The device suspension means of claim 33 wherein the mounting means form a perimeter within which the isolating means are located.
- 35. The device suspension means of claim 34 wherein the isolating means acts through a moment arm to generate a displacement of the isolated points that cancels a linear displacement of the mounting means.
- 36. The device suspension means of claim 35, further comprising a means for sensing acceleration, the acceleration sensing means being interconnected to the isolating means.
- 37. A method of suspending a device, the method comprising:
suspending a plurality of isolated portions from mounting portions interconnected to a surface external to the suspension member; and acting through a moment arm to generate a displacement of the isolated portions that cancels a linear displacement of the mounting portions.
- 38. The method of claim 37 wherein suspending a plurality of isolated portions from mounting portions includes:
suspending one of the isolated portions from a first end of each of a pair of moment arms; suspending one of the mounting portions from a second end of each of the pair of moment arms; suspending the pair of moment arms adjacent to opposite ends of an elongated linear displacement member with the mounting portions positioned on a first side of the elongated linear displacement member and the isolated portions positioned on a second side of the elongated linear displacement member opposite from the mounting portions; and suspending a plurality of the pairs of isolated portions from corresponding pairs of the mounting portions coupled thereto through the corresponding pairs of moment arms adjacent opposite ends of a corresponding elongated linear displacement member.
- 39. The method of claim 38 wherein suspending a plurality of isolated portions from mounting portions interconnected to a surface external to the suspension member further comprises suspending a subset of the plurality of the pairs of mounting portions from a subset of the plurality of the pairs of isolated portions.
- 40. The method of claim 38, further comprising interconnecting a device to a subset of the plurality of the pairs of isolated portions different from the subset of the plurality of the pairs of isolated portions from which the subset of the plurality of the pairs of mounting portions are suspended.
- 41. The method of claim 38, further comprising interconnecting an acceleration sensing device to a subset of the plurality of the pairs of isolated portions different from the subset of the plurality of the pairs of isolated portions from which the subset of the plurality of the pairs of mounting portions are suspended.
- 42. An accelerometer comprising:
an outer frame member formed of a monocrystalline silicon substrate having essentially parallel opposing surfaces; an acceleration sensing mechanism positioned within the outer frame member; and a plurality of net zero isolators suspending the acceleration sensing mechanism from the outer frame member, each of the net zero isolators comprising:
a pair of spaced apart counter rotation members each including a mounting portion positioned on a first end and coupled to the outer frame member, and an isolated portion positioned on a second end and coupled to the acceleration sensing mechanism, and a linear displacement member arranged between the pair of spaced apart counter rotation members, the pair of spaced apart counter rotation members being arranged crosswise to the linear displacement member and having the mounting portions projected on a first side of the linear displacement member toward the outer frame member and the isolated portions projected on a second side thereof toward the acceleration sensing mechanism, wherein the linear displacement member and the interconnected pair of spaced apart counter rotation members are structured such that a linear displacement applied to the mounting portions in alignment with the linear displacement member is balanced by a displacement of the isolated portions.
- 43. The accelerometer of claim 42 wherein the displacement of the isolated portions is generated by a moment that acts through the respective counter rotation members.
- 44. The accelerometer of claim 42 wherein the mounting portion is suspended from the first end of the respective counter rotation member by a flexible neck portion.
- 45. The accelerometer of claim 44 wherein the mounting portion is integrated with the outer frame member.
- 46. The accelerometer of claim 42 wherein the isolated portion is suspended from the second end of the respective counter rotation member by a flexible neck portion.
- 47. The accelerometer of claim 46 wherein the isolated portion is integrated with a portion of the acceleration sensing mechanism.
- 48. The accelerometer of claim 42 wherein the plurality of net zero isolators suspending the acceleration sensing mechanism from the outer frame member further comprises:
a first pair of spaced apart net zero isolators having their respective linear displacement members substantially aligned on opposite sides of the acceleration sensing mechanism, having their respective mounting portions facing outwardly away from the acceleration sensing mechanism and coupled to the outer frame member, and having their respective isolated portions facing inwardly toward but spaced away from the acceleration sensing mechanism; and a second pair of spaced apart net zero isolators arranged orthogonal to the first pair and having their respective linear displacement members substantially aligned on opposite ends of the acceleration sensing mechanism, having their respective mounting portions facing outwardly away from the acceleration sensing mechanism and coupled to the respective isolated portions of the first pair of net zero isolators, and having their respective isolated portions facing inwardly toward the acceleration sensing mechanism and coupled to a portion thereof.
- 49. The acceleration sensor recited in claim 42, further comprising:
a bottom cover plate; a top cover plate; and respective first and second opposing surfaces of the outer frame attached to the bottom and top cover plates.
- 50. An acceleration sensing device comprising:
a means for sensing acceleration of a body along an input axis; and a suspension means for suspending the acceleration sensing means from a body to be accelerated, the suspension means including first mounting means for mounting the suspension means to the body and second mounting means for mounting the acceleration sensing means to the suspension means such that a linear displacement applied to the first mounting means is balanced by a responsive displacement of the second mounting means.
- 51. The accelerometer of claim 50 wherein the linear displacement is applied to the first mounting means in alignment with the first mounting means
- 52. The accelerometer of claim 50 wherein the responsive displacement of the second mounting means is generated by a moment acting through the suspension means.
- 53. The accelerometer of claim 42 wherein the suspension means further comprises a plurality of net zero isolators each comprising a pair of counter rotation members having the first mounting means adjacent to a first end and having the second mounting means adjacent to a second end, the pair of counter rotation members being spaced apart and arranged substantially orthogonally to opposite ends of a linear displacement member, wherein the pair of counter rotation members and the linear displacement member are structured such that a linear displacement aligned with the linear displacement member and applied to the first mounting means is balanced by a responsive displacement of the second mounting means that is generated by a moment that acts through the respective counter rotation members.
- 54. The accelerometer of claim 53 wherein the suspension means further comprises a pair of the net zero isolators arranged on first and third opposing sides of the acceleration sensing means, the first mounting means of each of the net zero isolators being coupled to the body and the second mounting means of each of the net zero isolators being coupled to the acceleration sensing means.
- 55. The accelerometer of claim 53 wherein the suspension means further comprises:
a first pair of the net zero isolators arranged on first and third opposing sides of the acceleration sensing means, the first mounting means of each of the first pair net zero isolators being coupled to the body and the second mounting means of each of the first pair net zero isolators facing away from the acceleration sensing means; and a second pair of the net zero isolators arranged crosswise to the first pair of net zero isolators and positioned on second and fourth opposing sides of the acceleration sensing means, the first mounting means of each of the second pair of net zero isolators being coupled to the second mounting means of the respective first pair of the net zero isolators, and the second mounting means of each of the second pair net zero isolators being coupled to the acceleration sensing means.
- 56. The accelerometer of claim 55, wherein the first mounting means of each of the second pair of net zero isolators are integrated with the second mounting means of the respective first pair of the net zero isolators.
- 57. The accelerometer of claim 56 wherein the second mounting means of each of the second pair net zero isolators are integrated with a portion of the acceleration sensing means.
- 58. The accelerometer of claim 57 wherein the first mounting means of each of the first pair net zero isolators are integrated with a portion of the body.
- 59. A monolithic micro-machined accelerometer having improved shock survivability and external stress de-coupling characteristics, the accelerometer comprising:
an accelerometer mechanism die formed of a first monocrystalline silicon substrate having essentially parallel opposing surfaces, the mechanism die comprising:
an integral outer frame member, an integral acceleration sensing mechanism disposed within said outer frame member, and a plurality of integral net zero isolators pliantly suspending the acceleration sensing mechanism from the outer frame member, each of the integral net zero isolators comprising a pair of counter rotation members having a mounting pad adjacent to a first end and coupled to the outer frame member and having an isolated pad adjacent to a second end and coupled to the acceleration sensing mechanism, the pair of counter rotation members being spaced apart and arranged substantially orthogonally to opposite ends of a reaction beam, wherein the pair of counter rotation members and the reaction beam are structured such that a linear displacement aligned with the reaction beam and applied to the respective mounting pads is balanced by a responsive displacement of the respective isolated pads that is generated by a moment that acts through the respective counter rotation members; a top cover plate formed of a second monocrystalline silicon substrate, the top cover plate including a peripheral bond area adhesively bonded to a first surface of the outer frame member; and a bottom cover plate formed of a third monocrystalline silicon substrate, the bottom cover plate including a peripheral bond area adhesively bonded to a second surface of the outer frame member opposite from the top cover plate.
- 60. The accelerometer of claim 59 wherein the plurality of integral net zero isolators further comprises a pair of the net zero isolators arranged on first and third opposing sides of the acceleration sensing mechanism, the mounting pads of each of the net zero isolators being coupled to the outer frame member and the isolated pads of each of the net zero isolators being coupled to the acceleration sensing mechanism.
- 61. The accelerometer of claim 59 wherein each of the plurality of integral net zero isolators further comprises:
a first pair of the net zero isolators arranged on first and third opposing sides of the acceleration sensing mechanism, a pair of mounting pads of each of the first pair net zero isolators being coupled to the outer frame member and the isolated pads of each of the first pair net zero isolators facing away from the acceleration sensing mechanism; and a second pair of the net zero isolators arranged crosswise to the first pair of net zero isolators and positioned on second and fourth opposing sides of the acceleration sensing mechanism, the mounting pads of each of the second pair of net zero isolators being coupled to the isolated pads of the respective first pair of the net zero isolators, and the isolated pads of each of the second pair net zero isolators being coupled to the acceleration sensing mechanism.
- 62. The accelerometer recited in claim 59, wherein said acceleration sensing mechanism further comprises:
an accelerometer frame member; a proof mass suspended from said accelerometer frame member by one or more flexures; and one or more mechanical resonators extending between said accelerometer frame member and said proof mass.
Parent Case Info
[0001] This application claims the benefit of U.S. Provisional Application Ser. No. 60/244,824 filed in the name of Steven A. Foote on Oct. 31, 2000, the complete disclosure of which is incorporated herein by reference.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60244824 |
Oct 2000 |
US |