This application is a national phase entry under 35 U.S.C. § 371 of International Application No. PCT/KR2014/010481, filed Nov. 4, 2014, published in Korean, which claims priority to Korean Patent Application No. 10-2013-0133103, filed on Nov. 4, 2013, the disclosures of which are incorporated herein by reference.
Field of the Invention
The present invention relates to a non-contact vibration suppressing device and a method of processing an object using the same, and more particularly, to a non-contact vibration suppressing device able to suppress vibrations using repelling force induced from ultrasonic vibrations and a method of processing an object using the same.
Description of Related Art
In an operation of processing an object (e.g. cutting, polishing, shaping, printing on, or coating the object), more particularly, in a thin sheet processing operation, the object vibrates due to a plurality of reasons, such as mechanical vibrations. In some cases, the object undesirably vibrates through resonance. Such vibrations of the object not only generate noise, but also become a factor lowering and degrading several types of processing precision. Such vibrations also cause adverse effects not only on the operation of processing the object, but also on the precision of the operations of examining, measuring, controlling, or transporting the object.
In order to solve these problems, as illustrated in
As illustrated in
Various aspects of the present invention provide a device for maintaining an object in a firm non-contact state and suppressing vibrations occurring from the operation of processing the object by applying uniform pressure onto the object without mechanical contact.
In an aspect of the present invention, provided is a non-contact vibration suppressing device that includes first and second ultrasonic vibrators spaced apart from and facing each other such that an object can be disposed therebetween. The first and second ultrasonic vibrators hold the object therebetween in a non-contact manner by generating ultrasonic vibrations and applying repelling force induced from the ultrasonic vibrations onto the object, thereby suppressing vibrations of the object.
In another aspect of the present invention, provided is a method of processing an object that includes the following operations of: suppressing vibrations of the object using the above-described non-contact vibration suppressing device; and processing the vibration-suppressed object.
According to the present invention as set forth above, it is possible to reliably carry out operations including processing, examination, measurement, control or transportation, by suppressing vibrations of an object while preventing the object from being damaged by mechanical contact.
Reference will now be made in detail the present invention, embodiments of which are illustrated in the accompanying drawings and described below, so that a person skilled in the art to which the present invention relates could easily put the present invention into practice.
Throughout this document, reference should be made to the drawings, in which the same reference numerals and signs are used throughout the different drawings to designate the same or similar parts. In the following description of the present invention, detailed descriptions of known functions and parts incorporated herein will be omitted in the case that the subject matter of the present invention is rendered unclear.
The present invention relates to a non-contact vibration suppressing device able to suppress vibrations occurring from operations performed on an object including processing (e.g. cutting, polishing, shaping, printing, or coating), examination, measurement, control, or transportation. In particular, the non-contact vibration suppressing device can be used for suppressing vibrations in the operation of continuously processing a thin glass web. A thin glass web or a thin glass sheet produced therefrom can be used in a variety of fields, such as displays, electronic materials (e.g. photovoltaic cells, touch sensors, or wafers), construction and home appliances.
The object may be a thin material, a web or a sheet. The object may typically be a brittle material, for example, glass. However, the present invention is not limited thereto, but the object can be made of a variety of other materials.
As illustrated in
Typically, the object O is transported during the operation, and the non-contact vibration suppressing device 200 is disposed on the path along which the object O is transported such that it suppresses vibrations of the object O that is being transported or vibrations of the object that is being processed in a stationary state.
The first ultrasonic vibrator 221 and the second ultrasonic vibrator 222 are spaced apart from and face each other such that the object O can be disposed therebetween. The ultrasonic vibrators 221 and 222 are in the shape of a flat plate or an arc, and can generate ultrasonic vibrations to apply holding force (pressure) onto the object O such that the object can be reliably held at a uniform height without being damaged by mechanical contact (Korean Patent Application Publication No. 10-2010-0057530).
The first ultrasonic vibrator 221 and the second ultrasonic vibrator 222 hold the object O therebetween in a non-contact manner by generating ultrasonic vibrations and applying the repelling force of a high-pressure air layer induced from the ultrasonic vibrations onto the object O, thereby suppressing vibrations of the object O. Specifically, the ultrasonic vibrators 221 and 222 generate force to reliably push the object O away from the opposite surfaces of the ultrasonic vibrators 221 and 222 by periodically compressing air using the ultrasonic vibrations, such that the object O does not come into contact with the ultrasonic vibrators 221 and 222. The ultrasonic vibrators 221 and 222 are arranged vertically (or laterally) to generate holding force to hold the object O in a non-contact manner.
According to the present invention, the air repelling force is maintained constant, thereby making it possible to respond to the problem of an unstable state (vibrating or trembling) that would otherwise occur in a non-contact vibration suppressing device of the related art.
For the precision of, for example, processing, examination, measurement, control and transportation, the non-contact vibration suppressing device 200 protects the object O from propagating vibrations.
As illustrated in
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The space extending between the first ultrasonic vibrator 221 and the second ultrasonic vibrator 222 may be straight along the length thereof, or as illustrated in
As illustrated in
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The thin object O may collide into corners of the ultrasonic vibrators 221 and 222, there breaking or damaging itself. Accordingly, the corner portions of the ultrasonic vibrators 221 and 222 are chamfered at an incline or machined into a round shape such that the corner portions are farther away from the object O than the other part of the first and second ultrasonic vibrators in order to minimize the breakage or damage of the object O.
Number | Date | Country | Kind |
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10-2013-0133103 | Nov 2013 | KR | national |
Filing Document | Filing Date | Country | Kind |
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PCT/KR2014/010481 | 11/4/2014 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2015/065147 | 5/7/2015 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
20110198378 | Chang | Aug 2011 | A1 |
20110311320 | Schilp | Dec 2011 | A1 |
Number | Date | Country |
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2011200843 | Oct 2011 | JP |
2012187453 | Oct 2012 | JP |
20030053390 | Jun 2003 | KR |
20060100917 | Sep 2006 | KR |
20080016518 | Feb 2008 | KR |
20100057530 | May 2010 | KR |
20110095191 | Aug 2011 | KR |
Entry |
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International Search Report for Application No. PCT/KR2014/010481 dated Mar. 2, 2015. |
Number | Date | Country | |
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20160304382 A1 | Oct 2016 | US |