Nozzle assembly for an ink jet printer

Information

  • Patent Grant
  • 6644789
  • Patent Number
    6,644,789
  • Date Filed
    Thursday, July 6, 2000
    24 years ago
  • Date Issued
    Tuesday, November 11, 2003
    21 years ago
Abstract
An ink jet nozzle assembly includes a heater substrate and a nozzle plate. The nozzle plate includes a first resist layer having a first side laminated onto the heater substrate. The first resist layer includes an ink cavity and at least one heater chamber in fluid communication with the ink cavity. A support layer has a first side and a second side. The first side of the support layer is in contact with a second side of the first resist layer such that the support layer at least partially covers the ink cavity. A second resist layer has a side in contact with each of the second side of the first resist layer and the second side of the support layer. The second resist layer is supported by the support layer such that the second resist layer is retained substantially outside of the ink cavity. The second resist layer includes at least one nozzle hole. Each nozzle hole is substantially aligned with a corresponding heater chamber.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to ink jet printers, and, more particularly, to a nozzle assembly for an ink jet printer.




2. Description of the Related Art




An ink jet printer emits droplets of ink through the nozzles of a printhead and onto a print medium. The nozzles are formed in a nozzle plate that is laminated onto a heater chip to form a nozzle assembly. Resistive heaters within the heater chip heat the ink until the ink is vaporized and is thereby emitted through the nozzles.




Creation of a nozzle plate typically occurs in a process separate from the creation of the heater chip. The nozzle plate must then be aligned and adhered to the heater chip. The tolerances that build up during the fabrication, alignment and adhering of the nozzle plate limit the size and quantity of heaters and nozzles. Creating a nozzle plate on the heater chip itself improves the accuracy of the alignment between the nozzles and heaters to the level of the accuracy of the align/expose equipment.




It is known to create a structural member for ink flow channels and nozzles with two layers of imageable material. An ink cavity is formed in the first layer and nozzle holes are formed in the second layer. In a roof-shooter style ink jet printhead, the width of the ink cavity created in the first layer can be up to 500 microns. Because of the relatively large width of this span and the relative thinness of the second layer typically used, the second layer has a tendency to collapse into the ink cavity, thereby compromising the function of the nozzle plate.




What is needed in the art is a nozzle plate in which a relatively thin first layer of imageable material, which contains nozzle holes, is supported by a second layer that contains an ink cavity, such that the first layer does not collapse into the ink cavity of the second layer.




SUMMARY OF THE INVENTION




The present invention provides a nozzle plate formed from an imageable material sandwiched around a structural support mechanism.




The invention comprises, in one form thereof, an ink jet nozzle assembly including a heater substrate and a nozzle plate. The nozzle plate includes a first resist layer having a first side laminated onto the heater substrate. The first resist layer includes an ink cavity and at least one heater chamber in fluid communication with the ink cavity. A support layer has a first side and a second side. The first side of the support layer is in contact with a second side of the first resist layer such that the support layer at least partially covers the ink cavity. A second resist layer has a side in contact with each of the second side of the first resist layer and the second side of the support layer. The second resist layer is supported by the support layer such that the second resist layer is retained substantially outside of the ink cavity. The second resist layer includes at least one nozzle hole. Each nozzle hole is substantially aligned with a corresponding heater chamber.




An advantage of the present invention is that a relatively thin photoresist layer of the nozzle plate is able to successfully span the ink cavity without collapsing therein.




Another advantage is that the ink cavity can be easily cleaned out, resulting in fast throughput, less chemical usage, and tighter control on the ink cavity side wall definition.











BRIEF DESCRIPTION OF THE DRAWINGS




The above-mentioned and other features and advantages of this invention, and the manner of attaining them, will become more apparent and the invention will be better understood by reference to the following description of an embodiment of the invention taken in conjunction with the accompanying drawings, wherein:





FIG. 1

is a side, sectional view of one embodiment of a nozzle assembly of the present invention;





FIG. 2

is a top view of the first resist layer and heater chip substrate of

FIG. 1

;





FIG. 3

is a front, sectional view of the first resist layer and heater chip substrate through line


3





3


of

FIG. 2

;





FIG. 4

is a top view of the support layer, first resist layer and heater chip substrate of

FIG. 1

;





FIG. 5

is a front, sectional view of the support layer, first resist layer and heater chip substrate through line


5





5


of

FIG. 4

;





FIG. 6

is a top view of the nozzle assembly of

FIG. 1

;





FIG. 7

is a front, sectional view of the nozzle assembly through line


7





7


of

FIG. 6

; and





FIG. 8

is a front, sectional view of the nozzle assembly through line


8





8


of FIG.


6


.











Corresponding reference characters indicate corresponding parts throughout the several views. The exemplification set out herein illustrates one preferred embodiment of the invention, in one form, and such exemplification is not to be construed as limiting the scope of the invention in any manner.




DETAILED DESCRIPTION OF THE INVENTION




The present invention provides a nozzle plate formed with an imageable material on the die. The nozzle plate is structurally supported such that the nozzle plate can span the ink cavity without collapsing. More particularly, the nozzle plate has three-layers, wherein the first layer is an imageable material containing an ink cavity, the second layer acts as a structural support over the ink cavity, and the third layer is an imageable material supported by the second layer.




Referring now to the drawings and particularly to

FIG. 1

, there is shown one embodiment of a nozzle assembly


10


of the present invention, including a nozzle plate


12


laminated onto a heater chip substrate


14


. Nozzle plate


12


includes a first photoresist layer


16


, a support structure


18


and a second photoresist layer


20


.




First photoresist layer


16


is formed of an imageable material, such as a positive photoresist or a dry film, negative acting photoresist. Layer


16


includes ink channels


22


(

FIG. 2

) interconnecting heater chambers


24


with ink cavity


26


.




Support structure


18


can be in the form of a layer of fiber material, mesh material, or a solid material. Support structure


18


is adhered to first layer


16


such that support layer


18


spans across ink cavity


26


in a direction perpendicular to the page of FIG.


1


. Support layer


18


does not extend to the areas above heater chambers


24


. The thickness of support layer


18


in the direction perpendicular to nozzle plate


12


is exaggerated in the drawings for clarity of illustration.




Second photoresist layer


20


, like first photoresist layer


16


, is formed of a flexible, imageable material, such as a positive photoresist or a dry film, negative acting photoresist. Second layer


20


includes nozzle holes


28


, each aligned with a respective one of heater chambers


24


so as to provide fluid communication therebetween. Second layer


20


, which is laminated to first layer


16


and support layer


18


, is suspended above ink cavity


26


by support layer


18


.




Substrate


14


includes resistive heater elements


30


, each of which is aligned with a respective heater chamber


24


so as to heat and thereby vaporize ink in chambers


24


. The vaporization of the ink causes the ink to be emitted from nozzle holes


28


.




In a first step in forming nozzle plate


12


on wafer substrate


14


, an imageable material in the form of dry film resist layer


16


is laminated onto substrate


14


. The negative photoresist of first layer


16


is selectively exposed to light with a mask (not shown). The mask prevents the portion of first layer


16


that is to become ink cavity


26


, ink channels


22


and heater chambers


24


from being exposed to the light. For example, the mask could be in the form of a sheet of glass with a pattern of chrome adhered to one side, with the chrome pattern corresponding to the desired placements of ink cavity


26


, ink channels


22


and heater chambers


24


. Developing removes the unexposed resist in ink cavity


26


, ink channels


22


and heater chambers


24


, resulting in the structure shown in

FIGS. 2 and 3

.




Nozzle assembly


10


uses a center fed ink delivery method to supply ink to ink cavity


26


through the via (not shown). The via can be created either prior to laminating first layer


16


to substrate


14


, or after the creation of ink cavity


26


, ink channels


22


and heater chambers


24


.




After the formation of ink cavity


26


, ink channels


22


and heater chambers


24


, support material


18


is applied above the ink via portion of ink cavity


26


. The function of support material


18


is to provide structural support to second resist layer


20


. Support layer


18


can span ink cavity


26


either in the lengthwise direction (shown in

FIGS. 4 and 5

) or the perpendicular direction. Adhering support material


18


to first layer


16


can be achieved either through heat or a separate adhesive.




Second resist layer


20


of imageable material is laminated over first resist layer


16


and support layer


18


. As is evident in

FIG. 1

, the thickness of support layer


18


can cause a middle portion


32


of second resist layer


20


to be slightly elevated from the portions of second resist layer


20


that directly contact first resist layer


16


. Nozzle holes


28


are created in second resist layer


20


by exposure while masking nozzle holes


28


and then developing away the material in nozzle holes


28


. The final structure is shown in

FIGS. 6-8

. Since support material


18


is present over the main portion of ink cavity


26


but does not cover heater chambers


24


and nozzle holes


28


, support material


18


is not required to be photoimageable, transparent, or opaque.




The first resist layer


16


has been described herein as being a dry film resist layer. However, it is to be understood that the imageable material of layer


16


could also be of a liquid form which is applied with a spin coating process.




Support layer


18


has been shown herein as being in the form of a continuous layer of material. However, support layer


18


can also be formed a plurality of disconnected pieces. For example, elongate strands of support material can be laid side-by-side across ink cavity


26


. The sides of adjacent ones of such strands may or may not be touching each other.




While this invention has been described as having a preferred design, the present invention can be further modified within the spirit and scope of this disclosure. This application is therefore intended to cover any variations, uses, or adaptations of the invention using its general principles. Further, this application is intended to cover such departures from the present disclosure as come within known or customary practice in the art to which this invention pertains and which fall within the limits of the appended claims.



Claims
  • 1. An ink jet nozzle assembly, comprising:a heater substrate; and a nozzle plate, including: a first resist layer having a first side laminated onto said heater substrate, said first resist layer including an ink cavity and at least one heater chamber in fluid communication with said ink cavity; a support layer having a first side and a second side, said first side of said support layer being in contact with a second side of said first resist layer such that said support layer at least partially covers said ink cavity; and a second resist layer having a side in contact with each of said second side of said first resist layer and said second side of said support layer, said second resist layer being supported by said support layer such that said second resist layer is retained substantially outside of said ink cavity, said second resist layer including at least one nozzle hole, said nozzle hole being substantially aligned with a corresponding said heater chamber.
  • 2. The nozzle assembly of claim 1, wherein said heater substrate includes at least one heater element, each said heater element being associated with a corresponding said heater chamber.
  • 3. The nozzle assembly of claim 1, wherein said first resist layer comprises a first negative acting photoresist layer, said second resist layer comprising a second negative acting photoresist layer.
  • 4. The nozzle assembly of claim 1, wherein said support layer comprises one of a fiber material, mesh material and solid material.
  • 5. The nozzle assembly of claim 1, wherein said support layer comprises at least one elongate element spanning said ink cavity in at least one of a lengthwise direction and a direction perpendicular to said lengthwise direction.
  • 6. The nozzle assembly of claim 1, wherein said first resist layer includes at least one ink channel, each said ink channel interconnecting said ink cavity with a corresponding said heater chamber.
  • 7. An ink jet nozzle assembly, comprising:a heater substrate; and a nozzle plate, including: a first resist layer having a first side laminated onto said heater substrate, said first resist layer including an ink cavity and at least one heater chamber in fluid communication with said ink cavity; a support layer having a first side and a second side, said first side of said support layer being in contact with a second side of said first resist layer such that said support layer at least partially covers said ink cavity; and a second resist layer having a side in contact with each of said second side of said first resist layer and said second side of said support layer, said second resist layer being supported by said support layer such that said second resist layer is retained substantially outside of said ink cavity, said second resist layer including at least one nozzle hole, said nozzle hole being substantially aligned with a corresponding said heater chamber; wherein said support layer leaves said at least one heater chamber and said at least one nozzle hole uncovered.
  • 8. An ink jet nozzle plate, comprising:a first resist layer having a first side and a second side, said first resist layer including an ink cavity and at least one heater chamber in fluid communication with said ink cavity; a support layer having a first side and a second side, said first side of said support layer being in contact with said second side of said first resist layer such that said support layer at least partially covers said ink cavity; and a second resist layer having a side in contact with each of said second side of said first resist layer and said second side of said support layer, said second resist layer being supported by said support layer such that said second resist layer is retained substantially outside of said ink cavity, said second resist layer including at least one nozzle hole, said nozzle hole being substantially aligned with a corresponding said heater chamber.
  • 9. The nozzle plate of claim 8, wherein said first resist layer comprises a first negative acting photoresist layer, said second resist layer comprising a second negative acting photoresist layer.
  • 10. The nozzle plate of claim 8, wherein said support layer comprises one of a fiber material, mesh material and solid material.
  • 11. The nozzle plate of claim 8, wherein said support layer comprises at least one elongate element spanning said ink cavity in at least one of a lengthwise direction and a direction perpendicular to said lengthwise direction.
  • 12. The nozzle plate of claim 8, wherein said first resist layer includes at least one ink channel, each said ink channel interconnecting said ink cavity with a corresponding said heater chamber.
  • 13. An ink jet nozzle plate, comprising:a first resist layer having a first side and a second side, said first resist layer including an ink cavity and at least one heater chamber in fluid communication with said ink cavity; a support layer having a first side and a second side, said first side of said support layer being in contact with said second side of said first resist layer such that said support layer at least partially covers said ink cavity; and a second resist layer having a side in contact with each of said second side of said first resist layer and said second side of said support layer, said second resist layer being supported by said support layer such that said second resist layer is retained substantially outside of said ink cavity, said second resist layer including at least one nozzle hole, said nozzle hole being substantially aligned with a corresponding said heater chamber; wherein said support layer leaves said at least one heater chamber and said at least one nozzle hole uncovered.
  • 14. An ink jet nozzle plate, comprising:a first imageable layer having a first side and a second side, said first imageable layer including an ink cavity and at least one heater chamber in fluid communication with said ink cavity; a support structure having a first side and a second side, said first side of said support structure being in contact with said second side of said first imageable layer such that said support structure is at least partially covering said ink cavity; and a second imageable layer having a side in contact with each of said second side of said first imageable layer and said second side of said support structure, said second imageable layer being supported by said support structure such that said second imageable layer is retained substantially outside of said ink cavity, said second imageable layer including at least one nozzle hole, said nozzle hole being substantially aligned with a corresponding said heater chamber.
  • 15. The nozzle plate of claim 14, wherein said first imageable layer comprises a first negative acting photoresist layer, said second imageable layer comprising a second negative acting photoresist layer.
  • 16. The nozzle plate of claim 14, wherein said support structure comprises one of a fiber material, mesh material and solid material.
  • 17. The nozzle plate of claim 14, wherein said support structure comprises at least one elongate element spanning said ink cavity in at least one of a lengthwise direction and a direction perpendicular to said lengthwise direction.
  • 18. The nozzle plate of claim 14, wherein said first imageable layer includes at least one ink channel, each said ink channel interconnecting said ink cavity with a corresponding said heater chamber.
  • 19. An ink jet nozzle plate, comprising:a first layer having a first side and a second side, said first layer including an ink cavity and at least one heater chamber, said at least one heater chamber in fluid communication with said ink cavity; a support structure having a first side and a second side, said first side of said support structure being in contact with said second side of said first layer such that said support structure at least partially covers said ink cavity; and a second layer supported by said support structure such that said second layer is retained substantially outside of said ink cavity, said second layer including at least one nozzle hole, said nozzle hole being substantially aligned with a corresponding said heater chamber; wherein said support structure leaves said at least one heater chamber and said at least one nozzle hole uncovered.
  • 20. A method of manufacturing an ink jet nozzle plate, comprising the steps of:providing a first layer including an ink cavity and at least one heater chamber in fluid communication with said ink cavity; adhering a support structure to said first layer, said support structure at least partially covering said ink cavity; laminating a second layer to each of said first layer and said support structure such that said second layer is retained substantially outside of said ink cavity; and creating at least one nozzle hole in said second layer such that each said nozzle hole is substantially aligned with a corresponding said heater chamber.
  • 21. The method of claim 20, wherein said support structure supports said second layer above said ink cavity of said first layer.
  • 22. The method of claim 20, comprising the further step of laminating said first layer onto a substrate.
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