The document “VCSEL-based miniature laser-Doppler interferometer,” A. Pruijmboom et al., Proc. of SPIE, vol. 6908 describes an integrated Doppler sensor where a VCSEL and a photodiode are integrated on a common semiconductor substrate. VCSEL Doppler sensors are already used in high-resolution computer mice. VCSEL Doppler sensors measure the relative velocity of a reflecting object and the distance thereof (in modulated operation). Alternatively, instead of VCSEL, VeCSEL (VCSEL having an external cavity) can also be used. MEMS mirrors or micromirrors, as well as laser scanner projectors having such MEMS mirrors are also available in the related art.
It is an object of the present invention to provide a compact and inexpensive object recognition device that can be used, for example, for recognizing gestures on a plane surface, such as a computer mouse, touch screen or wall switch, for example.
The present invention relates to an object recognition device having a VCSEL Doppler sensor and an MEMS scanner; the MEMS scanner having at least one deflectable MEMS mirror for scanning an angular region using a laser beam from the VCSEL Doppler sensor; the VCSEL Doppler sensor being connected to a Doppler control and evaluation element that is adapted for determining the velocity and/or the distance of an object. This device may be advantageously used to scan an angular region for objects. The device is advantageously very energy efficient.
An advantageous embodiment of the present invention provides that the VCSEL Doppler sensor have a laser and a photodiode that are monolithically integrated. This embodiment is especially compact and inexpensive.
An advantageous embodiment of the present invention provides that the VCSEL Doppler sensor have a laser having an external cavity, namely a VeCSEL.
An advantageous embodiment of the present invention provides that the device feature a scanner control and position recognition element that is linked to the MEMS scanner and is adapted for determining the angular position of the MEMS mirror. The location of the object is thereby able to be determined in polar coordinates, for example. It is especially advantageous that the device have a synchronization unit that is linked to the Doppler control and evaluation element and to the scanner control and position recognition element, and that it be adapted for determining the velocity and/or distance of the object in a time- and angle-resolved manner.
The structure of the scanned surface of the object may also be advantageously determined when working with an appropriate object size and resolving power of the object recognition device. An advantageous embodiment of the present invention provides that the MEMS scanner have an MEMS mirror that is deflectable in two different axes of rotation or two MEMS mirrors that are deflectable in different axes of rotation for scanning a solid angle region. To recognize objects or gestures, scanning is advantageously carried out using one or a plurality of laser beams generally parallel to an operating interface. For this, one or a plurality of micromirrors employing MEMS technology is/are used. The present invention provides that the laser beam be produced by a VCSEL (vertical cavity surface emitting laser) or a VeCSEL (vertical external-cavity surface-emitting laser) that is part of a Doppler sensor. In the case of a VCSEL Doppler sensor, (infrared) laser radiation is emitted by a VCSEL. If an object backscatters a portion of the laser light (up to 10−6 of the power output), photons are coupled into the cavity of the VCSEL and, there, constructively or destructively superpose the stationary wave of the stimulated emission. This changes the output signal. The power output of the VCSEL is directly measured by a monolithically integrated photodiode. An especially compact and cost-saving configuration is provided here by monolithically integrating the photodiode with the VCSEL in a very small, inexpensive component. It is also advantageous that the mirror structure of the VCSEL (multiple semiconductor layers) be a very narrow-band structure for the transmission of light, that it thereby filter out ambient light, and, in principle, that it only carry the coherent photons of the emission thereof to produce a superimposition effect, thereby achieving a very high sensitivity.
The power output begins to oscillate when the scattering object moves toward the laser or away therefrom (Doppler effect). In the case of a modulated operation of the VCSEL Doppler sensor, besides the velocity, the distance to the reflecting surface may also be determined.
The Gaussian beam geometry of the VCSEL advantageously makes it possible for a simple wafer level collimation optics to be used. The VCSEL Doppler sensor advantageously has a high sensitivity. Moreover, it is very insensitive to background light and temperature fluctuations. For that reason, the device according to the present invention makes do with very little reflected light and may be used under a variety of even unfavorable environmental conditions.
Moreover, object recognition devices are also possible where MEMS scanner 3 features an MEMS mirror that is deflectable in two different axes of rotation or two MEMS mirrors that are deflectable in different axes of rotation. This provides a scanning of a solid angle region.
Number | Date | Country | Kind |
---|---|---|---|
10 2014 207 965.9 | Apr 2014 | DE | national |
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/EP2015/054377 | 3/3/2015 | WO | 00 |