Information
-
Patent Grant
-
6688864
-
Patent Number
6,688,864
-
Date Filed
Friday, June 28, 200222 years ago
-
Date Issued
Tuesday, February 10, 200420 years ago
-
Inventors
-
Original Assignees
-
Examiners
Agents
-
CPC
-
US Classifications
Field of Search
US
- 418 104
- 418 2066
- 277 411
- 277 412
- 277 417
- 277 418
- 277 423
- 277 424
- 277 429
-
International Classifications
-
Abstract
A vacuum pump draws gas by operating a gas conveying body in a pump chamber through rotation of a rotary shaft. The vacuum pump has an oil housing member. The oil housing member defines an oil zone adjacent to the pump chamber. The rotary shaft has a projecting portion that projects from the pump chamber into the oil zone through the oil housing member. Stoppers are located on the rotary shaft to integrally rotate with the rotary shaft and prevent oil from entering the pump chamber. The stoppers are located along the axial direction of the rotary shaft.
Description
BACKGROUND OF THE INVENTION
The present invention relates to an oil leak prevention structure of vacuum pumps that draw gas by operating a gas conveying body in a pump chamber through rotation of a rotary shaft.
In a typical vacuum pump, lubricant oil is used for lubricating moving parts. Japanese Laid-Open Patent Publications No. 63-129829 and No. 3-11193 disclose vacuum pumps having structures for preventing oil from entering zones where presence of lubricant oil is undesirable.
In the vacuum pump disclosed in Publication No. 63-129829, a plate for preventing oil from entering a generator chamber is attached to a rotary shaft. Specifically, when moving along the surface of the rotary shaft toward the generator chamber, oil reaches the plate. The centrifugal force generated by rotation of the plate spatters the oil to an annular groove formed about the plate. The oil flows to the lower portion of the annular groove and is then drained to the outside along a drain passage connected to the lower portion.
The vacuum pump disclosed in Publication No. 3-11193 has an annular chamber for supplying oil to a bearing and a slinger provided in the annular chamber. When moving along the surface of a rotary shaft from the annular chamber to a vortex flow pump, oil is thrown away by the slinger. The thrown oil is then sent to a motor chamber through a drain hole connected to the annular chamber.
The plate (slinger), which rotates integrally with the rotary shaft, is a mechanism that prevents oil from entering undesirable zones. When centrifugal force generated by rotation of a plate (slinger) is used for preventing oil from entering a certain zone, the effectiveness is influenced by the shapes of the plate (slinger) and the walls surrounding the plate (slinger).
SUMMARY OF THE INVENTION
Accordingly, it is an objective of the present invention to provide an oil leak prevention mechanism that effectively prevents oil from entering a pump chamber of a vacuum pump
To achieve the foregoing and other objectives and in accordance with the purpose of the present invention, the invention provides a vacuum pump. The vacuum pump draws gas by operating a gas conveying body in a pump chamber through rotation of a rotary shaft. The vacuum pump has an oil housing member. The oil housing member defines an oil zone adjacent to the pump chamber. The rotary shaft has a projecting portion that projects from the pump chamber into the oil zone through the oil housing member. Stoppers are located on the rotary shaft to integrally rotate with the rotary shaft and prevent oil from entering the pump chamber. The stoppers are located along the axial direction of the rotary shaft.
Other aspects and advantages of the invention will become apparent from the following description, taken in conjunction with the accompanying drawings, illustrating by way of example the principles of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention, together with objects and advantages thereof, may best be understood by reference to the following description of the presently preferred embodiments together with the accompanying drawings in which:
FIG.
1
(
a
) is a cross-sectional plan view illustrating a multiple-stage Roots pump according to a first embodiment of the present invention; FIG.
1
(
b
) is an enlarged partial cross-sectional view of the pump shown in FIG.
1
(
a
);
FIG.
2
(
a
) is a cross-sectional view taken along line
2
a
—
2
a
in FIG.
1
(
a
); FIG.
2
(
b
) is a cross-sectional view taken along line
2
b
—
2
b
in FIG.
1
(
a
);
FIG.
3
(
a
) is a cross-sectional view taken along line
3
a
—
3
a
in FIG.
1
(
a
); FIG.
3
(
b
) is a cross-sectional view taken along line
3
b
—
3
b
in FIG.
1
(
a
);
FIG.
4
(
a
) is a cross-sectional view taken along line
4
a
—
4
a
in FIG.
3
(
b
); FIG.
4
(
b
) is an enlarged partial cross-sectional view of the pump shown in FIG.
4
(
a
); FIG.
4
(
c
) is an enlarged partial cross-sectional view of the pump shown in FIG.
4
(
b
);
FIG.
5
(
a
) is a cross-sectional view taken along line
5
a
—
5
a
in FIG.
3
(
b
); FIG.
5
(
b
) is an enlarged partial cross-sectional view of the pump shown in FIG.
5
(
a
); FIG.
5
(
c
) is an enlarged partial cross-sectional view of the pump shown in FIG.
5
(
b
);
FIG. 6
a
is an enlarged cross-sectional view of the pump shown in FIG.
1
(
a
); FIG.
6
(
b
) is an enlarged partial cross-sectional view of the pump shown in FIG.
6
(
a
);
FIG. 7
is an exploded perspective view illustrating part of the rear housing member, the second shaft seal, and a leak prevention ring of the pump shown in FIG.
1
(
a
);
FIG. 8
is an exploded perspective view illustrating part of the rear housing member, the second shaft seal, and a leak prevention ring of the pump shown in FIG.
1
(
a
);
FIG. 9
is an enlarged cross-sectional view illustrating a second embodiment of the present invention;
FIG. 10
is an enlarged cross-sectional view illustrating a third embodiment of the present invention; and
FIG. 11
is an enlarged cross-sectional view illustrating a fourth embodiment of the present invention;
FIG. 12
is an enlarged cross-sectional view illustrating a fifth embodiment of the present invention; and
FIG. 13
is an enlarged cross-sectional view illustrating a sixth embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
A multiple-stage Roots pump
11
according to a first embodiment of the present invention will now be described with reference to FIGS.
1
(
a
) to
8
.
As shown in FIG.
1
(
a
), the pump
11
, which is a vacuum pump, includes a rotor housing member
12
, a front housing member
13
, and a rear housing member
14
. The front housing member
13
is coupled to the front end of the rotor housing member
12
. A lid
36
closes the front opening of the front housing member
13
. The rear housing member
14
is coupled to the rear end of the rotor housing member
12
. The rotor housing member
12
includes a cylinder block
15
and chamber defining walls
16
, the number of which is four in this embodiment. As shown in FIG.
2
(
b
), the cylinder block
15
includes a pair of blocks
17
,
18
. Each chamber defining wall
16
includes a pair of wall sections
161
,
162
. As shown in FIG.
1
(
a
), a first pump chamber
39
is defined between the front housing member
13
and the leftmost chamber defining wall
16
. Second, third, and fourth pump chambers
40
,
41
,
42
are each defined between two adjacent chamber defining walls
16
in this order from the left to the right as viewed in the drawing. A fifth pump chamber
43
is defined between the rear housing member
14
and the rightmost chamber defining wall
16
.
A first rotary shaft
19
is rotatably supported by the front housing member
13
and the rear housing member
14
with a pair of radial bearings
21
,
37
. Likewise, a second rotary shaft
20
is rotatably supported by the front housing member
13
and the rear housing member
14
with a pair of radial bearings
21
,
37
. The first and second rotary shafts
19
,
20
are parallel to each other. The rotary shafts
19
,
20
extend through the chamber defining walls
16
. The radial bearings
37
are supported by bearing holders
45
. Two bearing receptacles
47
,
48
are formed in end
144
of the rear housing member
14
. The bearings holders
45
are fitted in the bearing receptacles
47
,
48
, respectively.
First, second, third, fourth, and fifth rotors
23
,
24
,
25
,
26
,
27
are formed integrally with the first rotary shaft
19
. Likewise, first, second, third, fourth, and fifth rotors
28
,
29
,
30
,
31
,
32
are formed integrally with the second rotary shaft
20
. As viewed in the direction along the axes
191
,
201
of the rotary shafts
19
,
20
, the shapes and the sizes of the rotors
23
-
32
are identical. As viewed in the direction along the axes
191
,
201
of the rotary shafts
19
,
20
, the shapes and the sizes of the rotors
23
-
32
are identical. The third rotors
23
,
28
are accommodated in the third pump chamber
39
and are engaged with each other. The fourth rotors
24
,
29
are accommodated in the fourth pump chamber
40
and are engaged with each other. The third rotors
25
,
30
are accommodated in the third pump chamber
41
and are engaged with each other. The fourth rotors
26
,
31
are accommodated in the fourth pump chamber
42
and are engaged with each other. The fifth rotors
27
,
32
are accommodated in the fifth pump chamber
43
and are engaged with each other. The first to fifth pump chambers
39
-
43
are not lubricated. Thus, the rotors
23
-
32
are arranged not to contact any of the cylinder block
15
, the chamber defining walls
16
, the front housing member
13
, and the rear housing member
14
. Further, the rotors of each engaged pair do not slide against each other.
As shown in FIG.
2
(
a
), the first rotors
23
,
28
define a suction zone
391
and a pressurization zone
392
in the first pump chamber
39
. The pressure in the pressurization zone
392
is higher than the pressure in the suction zone
391
. Likewise, the second to fourth rotors
24
-
26
,
29
-
31
define suction zones
391
and pressurization zones
392
in the associated pump chambers
40
-
42
. As shown in FIG.
3
(
a
), the fifth rotors
27
,
32
define a suction zone
431
and a pressurization zone
432
, which are similar to the suction zone
391
and the pressurization zone
392
, in the fifth pump chamber
43
.
As shown in FIG.
1
(
a
), a gear housing member
33
is coupled to the rear housing member
14
. A pair of through holes
141
,
142
is formed in the rear housing member
14
. The rotary shafts
19
,
20
extend through the through holes
141
,
142
and the first and second bearing receptacles
47
,
48
, respectively. The rotary shafts
19
,
20
thus project into the gear housing member
33
to form projecting portions
193
,
203
, respectively. Gears
34
,
35
are secured to the projecting portions
193
,
203
, respectively, and are meshed together. An electric motor M is connected to the gear housing member
33
. A shaft coupling
44
transmits the drive force of the motor M to the first rotary shaft
19
. The motor M rotates the first rotary shaft
19
in the direction indicated by arrow RI of FIGS.
2
(
a
) to
3
(
b
). The gears
34
,
35
transmit the rotation of the first rotary shaft
19
to the second rotary shaft
20
. The second rotary shaft
20
thus rotates in the direction indicated by arrow R
2
of FIGS.
2
(
a
) to
3
(
b
). Accordingly, the first and second rotary shafts
19
,
20
rotate in opposite directions. The gears
34
,
35
cause the rotary shafts
19
,
20
to rotate integrally.
As shown in FIGS.
4
(
a
) and
5
(
a
), a gear accommodating chamber
331
is defined in the gear housing member
33
. The gear accommodating chamber
331
retains lubricant oil Y for lubricating the gears
34
,
35
. The gears
34
,
35
form a gear mechanism, which is accommodated in the gear accommodating chamber
331
. The gear accommodating chamber
331
and the bearing receptacles
47
,
48
form a sealed oil zone. The gear housing member
33
and the rear housing member
14
form an oil housing, or an oil zone adjacent to the fifth pump chamber
43
. The gears
34
,
35
rotate to agitate the lubricant oil in the gear accommodating chamber
331
. The lubricant oil thus lubricates the radial bearings
37
.
As shown in FIG.
2
(
b
), a passage
163
is formed in the interior of each chamber defining wall
16
. Each chamber defining wall
16
has an inlet
164
and an outlet
165
that are connected to the passage
163
. Each adjacent pair of the pump chambers
39
-
43
are connected to each other by the passage
163
of the associated chamber defining wall
16
.
As shown in FIG.
2
(
a
), an inlet
181
extends through the block section
18
of the cylinder block
15
and is connected to the first pump chamber
39
. As shown in FIG.
3
(
a
), an outlet
171
extends through the block section
17
of the cylinder block
15
and is connected to the fifth pump chamber
43
. When gas enters the first pump chamber
39
from the inlet
181
, rotation of the first rotors
23
,
28
sends the gas to the pressurization zone
392
. In the pressurization zone
392
, the gas is compressed and its pressure is higher than in the suction zone
391
. Thereafter, the gas is sent to the suction zone of the second pump chamber
40
through the inlet
164
, the passage
163
, and the outlet
165
in the corresponding wall defining wall
16
. Afterwards, the gas flows from the second pump chamber
40
to the third, fourth, and fifth pump chambers
41
,
42
,
43
in this order while repeatedly compressed. The volumes of the first to fifth pump chambers
39
-
43
become gradually smaller in this order. When the gas reaches the suction zone
431
of the fifth pump chamber
43
, rotation of the fifth rotors
27
,
32
moves the gas to the pressurization zone
432
. The gas is then discharged from the outlet
171
to the exterior of the vacuum pump
11
. That is, each rotor
23
-
32
functions as a gas conveying body for conveying gas.
The outlet
171
functions as a discharge passage for discharging gas to the exterior of the vacuum pump
11
. The fifth pump chamber
43
is a final-stage pump chamber that is connected to the outlet
171
. Among the pressurization zones of the first to fifth pump chambers
39
-
43
, the pressure in the pressurization zone
432
of the fifth pump chamber
43
is the highest, and the pressurization zone
432
functions as a maximum pressurization zone. The outlet
171
is connected to the maximum pressurization zone
432
defined by the fifth rotors
27
,
32
in the fifth pump chamber
43
.
As shown in FIG.
1
(
a
), first and second annular shaft seals
49
,
50
are securely fitted about the first and second rotary shafts
19
,
20
, respectively. The shaft seals
49
,
50
are located in the first and second bearing receptacles
47
,
48
, respectively. A seal ring
51
is located between the inner circumferential surface of the first shaft seal
49
and the circumferential surface
192
of the first rotary shaft
19
. Likewise, a seal ring
52
is located between the inner circumferential surface of the second shaft seal
50
and the circumferential surface
202
of the second rotary shaft
20
. Each seal ring
51
,
52
prevents lubricant oil Y from leaking from the associated receptacle
47
,
48
to the fifth pump chamber
43
along the circumferential surface
192
,
202
of the associated rotary shaft
19
,
20
.
As shown in FIG.
4
(
b
), space exists between the outer circumferential surface
491
of the large diameter portion
60
of the first shaft seal
49
and the circumferential wall
471
of the first receptacle
47
. Also, as shown in FIG.
5
(
b
), space exists between the outer circumferential surface
501
of the large diameter portion
80
of the second shaft seal
50
and the circumferential wall
481
of the second receptacle
48
. Also, space exists between the front surface
492
of the first shaft seal
49
and the bottom
472
of the first receptacle
47
, and space exists between the front surface
502
of the second shaft seal
50
and the bottom
482
of the second receptacle
48
. The shaft seals
49
,
50
rotate integrally with the rotary shafts
19
,
20
, respectively.
Annular projections
53
coaxially project from the bottom
472
of the first receptacle
47
. In the same manner, annular projections
54
coaxially project from the bottom
482
of the second receptacle
48
. Annular grooves
55
are coaxially formed in the front surface
492
of the first shaft seal
49
, which faces the bottom
472
of the first receptacle
47
. In the same manner, annular grooves
56
are coaxially formed in the front surface
502
of the second shaft seal
50
, which faces the bottom
482
of the second receptacle
48
. Each annular projection
53
,
54
projects in the associated groove
55
,
56
. The distal end of the projection
53
,
54
is located close to the bottom of the groove
55
,
56
. Each projection
53
divides the interior of the associated groove
55
of the first shaft seal
49
to a pair of labyrinth chambers
551
,
552
. Each projection
54
divides the interior of the associated groove
56
of the second shaft seal
50
to a pair of labyrinth chambers
561
,
562
. The projections
53
and the grooves
55
form a first labyrinth seal
57
corresponding to the first rotary shaft
19
. The projections
54
and the grooves
56
form a second labyrinth seal
58
corresponding to the second rotary shaft
20
. The front surfaces
492
,
502
of the shaft seals
49
,
50
function as sealing surface of the shaft seals
49
,
50
. The bottoms
472
,
482
of the bearing receptacles
47
,
48
function as sealing surface of the rear housing member
14
. In this embodiment, the front surface
492
and the bottom
472
are formed along a plane perpendicular to the axis
191
of the first rotary shaft
19
. Likewise, the front surface
502
and the bottom
482
are formed along a plane perpendicular to the axis
201
of the rotary shaft
20
. In other words, the front surface
492
and the bottom
472
are seal forming surfaces that extend in a radial direction of the first shaft seal
49
. Likewise, the front surface
502
and the bottom
482
are seal forming surfaces that extend in a radial direction of the second shaft seal
50
.
As shown in FIGS.
4
(
b
) and
7
, a second helical groove
61
is formed in the outer circumferential surface
491
of the large diameter portion
60
of the first shaft seal
49
. As shown in FIGS.
5
(
b
) and
8
, a second helical groove
62
is formed in the outer circumferential surface
501
of the large diameter portion
60
of the second shaft seal
50
. Along the rotational direction R
1
of the first rotary shaft
19
, the first helical groove
61
forms a path that leads from a side corresponding to the gear accommodating chamber
331
toward the fifth pump chamber
43
. Along the rotational direction R
2
of the second rotary shaft
20
, the second helical groove
62
forms a path that leads from a side corresponding to the gear accommodating chamber
331
toward the fifth pump chamber
43
. Therefore, each helical groove
61
,
62
exerts a pumping effect and conveys fluid from a side corresponding to the fifth pump chamber
43
toward the gear accommodating chamber
331
when the rotary shafts
19
,
20
rotate. That is, each helical groove
61
,
62
forms pumping means that urges the lubricant oil between the outer circumferential surface
491
,
501
of the associated shaft seal
49
,
50
and the circumferential wall
471
,
481
of the associated receptacle
47
,
48
to move from a side corresponding to the fifth pump chamber
43
toward the oil zone. The circumferential walls
471
,
481
of the bearing receptacles
47
,
48
function as sealing surfaces. The outer circumferential surfaces
491
,
501
face the sealing surfaces.
As shown in FIG.
3
(
b
), first and second discharge pressure introducing channels
63
,
64
are formed in a chamber defining wall
143
of the rear housing member
14
. The chamber defining wall
143
defines the fifth pump chamber
43
, which is at the final stage of compression. As shown in FIG.
4
(
a
), the first discharge pressure introducing channel
63
is connected to the maximum pressurization zone
432
, the volume of which is varied by rotation of the fifth rotors
27
,
32
. The first discharge pressure introducing channel
63
is also connected to the through hole
141
. As shown in FIG.
5
(
a
), the second discharge pressure introducing channel
64
is connected to the maximum pressurization zone
432
and the through hole
142
.
As shown in FIGS.
1
(
a
),
4
(
a
), and
5
(
a
), a cooling loop chamber
65
is formed in the rear housing member
14
. The loop chamber
65
surrounds the shaft seals
49
,
50
. Coolant circulates in the loop chamber
65
. Coolant in the loop chamber
65
cools the lubricant oil Y in the bearing receptacles
47
,
48
. This prevents the lubricant oil Y from evaporating.
As shown in FIGS.
1
(
b
),
6
(
a
) and
6
(
b
), an annular leak prevention ring
66
is fitted about the small diameter portion
59
of the first shaft seal
49
to block flow of oil. The leak prevention ring
66
includes a first stopper
67
having a smaller diameter and a second stopper
68
having a larger diameter. A front end portion of the bearing holder
45
has an annular projection
69
projecting inward and defines an annular first oil chamber
70
and an annular second oil chamber
71
about the leak prevention ring
66
. The first oil chamber
70
surrounds the first stopper
67
, and the second oil chamber
71
surrounds the second stopper
68
.
The first oil stopper
67
has a tapered circumferential surface
671
. The distance between the tapered circumferential surface
671
and the axis
191
of the first rotary shaft
19
increases from the side corresponding to the fifth pump chamber
43
toward the side corresponding to the gear accommodating chamber
331
.
A circumferential surface
671
of the first stopper
67
is located in the first oil chamber
70
, and a circumferential surface
681
of the second stopper
68
is located in the second oil chamber
71
. The circumferential surface
671
faces a circumferential wall surface
702
, which defines the first oil chamber
70
. The circumferential surface
681
of the second stopper
68
faces a circumferential wall surface
712
, which defines the second oil chamber
71
.
The rear surface
672
of the first stopper
67
faces a wall surface
701
, which defines the first oil chamber
70
. The rear surface
682
, which is located at the right side as viewed in
FIG. 6
, of the second stopper
68
faces a end surface
711
, which defines the second oil chamber
71
. The front surface
683
of the second stopper
68
faces and is widely separated from the rear surface
601
of the large diameter portion
60
of the first shaft seal
49
.
The rear surface
682
is perpendicular to the axis
191
of the rotary shaft
19
and blocks flow of oil. The tapered circumferential surface
671
is located adjacent to the rear surface
682
at the side closer to the gear accommodating chamber
331
. The tapered circumferential surface
671
starts from the proximal end
684
of the rear surface
682
. The surface of an imaginary cone that includes the tapered circumferential surface
671
intersects the end surface
701
of the first oil chamber
70
.
The third stopper
72
is integrally formed with the large diameter portion
60
of the first shaft seal
49
. A third annular oil chamber
73
is defined in the first receptacle
47
to surround the third stopper
72
. A circumferential surface
721
of the third stopper
72
is defined on a portion that projects into the third oil chamber
73
. Also, the circumferential surface
721
of the third stopper
72
faces a circumferential wall surface
733
defining the third oil chamber
73
. The rear surface
601
of the third stopper
72
faces and is located in the vicinity of an end surface
731
defining the third oil chamber
73
. The front surface
722
of the third stopper
72
faces and is located in the vicinity of a wall
732
defining the third oil chamber
73
.
The radiuses of the stoppers
67
,
68
,
72
decrease from the side corresponding to the fifth pump chamber
43
toward the gear accommodating chamber
331
. Likewise, the radiuses of the oil chambers
70
,
71
,
73
decrease from the side corresponding to the fifth pump chamber
43
toward the gear accommodating chamber
331
. The second stopper
68
is located adjacent to the first stopper
67
and is closer to the fifth pump chamber
43
than the first stopper
67
is. The radially central portion of the rear surface
682
of the second stopper
68
is exposed to the first oil chamber
70
, which corresponds to the first stopper
67
. The third stopper
72
is located adjacent to the second stopper
68
and is closer to the fifth pump chamber
43
than the second stopper
68
is. The radially central portion of the rear surface
601
of the third stopper
72
is exposed to the second oil chamber
71
, which corresponds to the first stopper
67
. That is, the rear surface
682
of the second stopper
68
is part of the walls defining the first oil chamber
70
. The rear surface
601
of the third stopper
72
is part of the walls defining the second oil chamber
71
.
A drainage channel
74
is defined in the lowest portion of the first receptacle
47
and the end
144
of the rear housing
14
to return the lubricant oil Y to the gear accommodation chamber
331
. The drainage channel
74
has an axial portion
741
, which is formed in the lowest part of the receptacle
47
, and a radial portion
742
, which is formed in the end
144
. The axial portion
741
is communicated with the third oil chamber
73
, and the radial portion
742
is communicated with the gear accommodation chamber
331
. That is, the third oil chamber
73
is connected to the gear accommodating chamber
331
by the drainage channel
74
.
An annular leak prevention ring
66
is fitted about the small diameter portion
59
of the second shaft seal
50
to block flow of oil. A third stopper
72
is formed on the large diameter portion
80
of the second shaft seal
50
. The first and second oil chambers
70
,
71
are defined in the bearing holder
45
, and the third oil chamber
73
is defined in the second receptacle
48
. A drainage channel
74
is formed in the lowest part of the receptacle
48
. Part of the third oil chamber
73
corresponding to the second shaft seal
50
is connected to the gear accommodating chamber
331
by the drainage channel
74
corresponding to the second shaft seal
50
.
Lubricant oil Y stored in the gear accommodating chamber
331
lubricates the gears
34
,
35
and the radial bearings
37
. After lubricating the radial bearings
37
, lubricant oil Y enters a through hole
691
formed in the projection
69
of each bearing holder
45
through space
371
,
382
in each radial bearing
37
. Then, the lubricant oil Y moves toward the corresponding first oil chamber
70
via a space between the circumference of the small diameter portion
59
of the shaft seal
49
,
50
and the circumference of the through hole
691
, and a space g
1
between the rear surface
672
of the corresponding first stopper
67
and the end surface
701
of the corresponding first oil chamber
70
. At this time, some of the lubricant oil Y that reaches the rear surface
672
of the first stopper
67
is thrown to the circumferential wall surface
702
or the end surface
701
of the first oil chamber
70
by the centrifugal force generated by rotation of the first stopper
67
. At least part of the lubricant oil Y thrown to the circumferential wall surface
702
or the end surface
701
remains on the wall
702
or the surface
701
. The remaining oil Y falls along the walls
701
,
702
by the self weight and reaches the lowest part of the first oil chamber
70
. After reaching the lowest part of the first oil chamber
70
, the lubricant oil Y moves to the lowest part of the second oil chamber
71
.
After entering the first oil chamber
70
, the lubricant oil Y moves toward the second oil chamber
71
through a space g
2
between the rear surface
682
of the second stopper
68
and the end surface
711
of the second oil chamber
71
. At this time, the lubricant oil Y on the rear surface
682
is thrown to the circumferential wall surface
712
or the end surface
711
of the second oil chamber
71
by the centrifugal force generated by rotation of the second stopper
68
. At least part of the lubricant oil Y thrown to the circumferential wall surface
712
or the end surface
711
remains on the circumferential wall surface
712
or the surface
711
. The remaining oil Y falls along the surfaces
712
,
711
by the self weight and reaches the lowest part of the second oil chamber
71
.
After reaching the lowest part of the second oil chamber
71
, the lubricant oil Y moves to the lowest part of the third oil chamber
73
.
After entering the second oil chamber
71
, the lubricant oil Y moves toward the third oil chamber
73
through a space g
3
between the rear surface
601
of the third stopper
72
and the end surface
731
of the third chamber
73
. At this time, the lubricant oil Y on the rear surface
601
is thrown to the circumferential wall surface
733
or the end surface
731
of the third oil chamber
73
by the centrifugal force generated by rotation of the third stopper
72
. At least part of the lubricant oil Y thrown to the circumferential wall surface
733
or the end surface
731
remains on the wall
733
or the surface
731
. The remaining oil Y falls along the wall
733
and the surface
731
by the self weight and reaches the lowest part of the third oil chamber
73
.
After being thrown from the rear surface
672
of the first stopper
67
to part of the circumferential wall surface
702
or the end surface
701
that is above the rotary shafts
19
,
20
, part of the oil may drop on the tapered circumferential surface
671
. Also, after being thrown from the rear surface
682
to the circumferential wall surface
712
or the end surface
711
, part of the oil Y drops on the tapered circumferential surface
671
. After dropping on the tapered circumferential surface
671
, the oil Y is thrown toward the circumferential wall surface
702
by the centrifugal force generated by rotation of the leak prevention ring
66
or moves from the side corresponding to the rear surface
682
toward the end surface
701
along the surface
671
. When moving on the tapered circumferential surface
671
toward the end surface
701
, the oil Y is thrown to the end surface
701
or moves to the rear surface
672
of the first stepper
672
. Therefore, after reaching the tapered circumferential surface
671
, the oil Y moves to the lowest part of the second oil chamber
71
.
After reaching the lowest part of the third oil chamber
73
, the lubricant oil Y is returned to the gear accommodating chamber
331
by the corresponding drainage channel
74
.
The first embodiment has the following advantages.
(1-1) While the vacuum pump is operating, the pressures in the five pump chambers
39
,
40
,
41
,
42
,
43
are lower than the pressure in the gear accommodating chamber
331
, which is a zone exposed to the atmospheric pressure. Thus, the atomized lubricant oil Y moves along the surface of the leak prevention rings
66
and the surface of the shaft seals
49
,
50
toward the fifth pump chamber
43
. To prevent the atomized lubricant oil Y from entering the fifth pump chamber
43
, the lubricant oil Y is preferably liquefied on a stationary wall. Also, the lubricant oil Y on the rotary shafts
19
,
20
or on the members integrally rotating with the rotary shaft
19
,
20
is preferably moved to the stationary wall.
The stoppers
67
,
68
,
72
effectively moves the lubricant oil Y to the walls defining the oil chambers
70
,
71
,
73
. As the number of the stoppers is increased, the area for receiving oil in the stoppers is increased. As the area for receiving oil is increased, the amount of oil that is thrown by the centrifugal force generated by rotation of the stoppers is increased. That is, the stoppers
67
,
68
,
72
, which are arranged on each rotary shaft
19
,
20
, effectively blocks flow of oil.
(1-2) The oil Y on the stoppers
67
,
68
,
72
is thrown into the oil chambers
70
,
71
,
73
surrounding the stoppers
67
,
68
,
72
. The oil Y thrown into the oil chambers
70
,
71
,
73
reaches the walls defining the oil chambers
70
,
71
,
73
. Ultimately, the oil Y on the walls defining the oil chambers
70
,
71
,
73
reaches the drainage channel
74
. Since the stoppers
67
,
68
,
72
are surrounded by the oil chambers
70
,
71
,
73
, respectively, the oil Y thrown by the stoppers
67
,
68
,
72
is easily guided to the gear accommodating chamber
331
.
(1-3) The atomized lubricant oil Y moves through the oil chambers from the side corresponding to the gear accommodating chamber
331
to the fifth pump chamber
43
. The enclosing property of each oil chamber
70
,
71
,
73
is important for preventing the movement of the atomized oil Y.
The first stopper
67
is located closer to the gear accommodating chamber
331
than the second stopper
68
is. The rear surface
682
of the second stopper
68
functions to define the first oil chamber
70
, which corresponds to the first stopper
67
. Likewise, the second stopper
68
is located closer to the gear accommodating chamber
331
than the third stopper
72
is. The rear surface
601
of the third stopper
72
functions to define the second oil chamber
71
, which corresponds to the second stopper
68
. This structure is relatively simple for retaining independence of the oil chamber
70
,
71
,
73
from one another and for improving the enclosing property of each oil chamber
70
,
71
,
73
.
(1-4) The first and second oil chambers
70
,
71
are formed about the projections
69
of the bearing holders
45
, respectively. Since the oil chambers
70
,
71
are formed in the bearing holders
45
supporting the radial bearings
37
, the sealing property of the oil chambers
70
,
71
are improved.
(1-5) While the vacuum pump is operating, the pressures in the five pump chambers
39
,
40
,
41
,
42
,
43
are lower than the pressure in the gear accommodating chamber
331
, which is a zone exposed to the atmospheric pressure. Thus, the atomized lubricant oil Y moves along the surface of the leak prevention rings
66
and the surface of the shaft seals
49
,
50
toward the fifth pump chamber
43
. The atomized lubricant oil Y is more easily liquefied in a bent path than in a straight path. That is, when the atomized lubricant oil Y collides with the wall forming a bent path, the atomized lubricant oil Y is easily liquefied. The first stopper
67
has the tapered circumferential surface
671
located in the first oil chamber
70
. The path along which the atomized lubricant oil Y in the first oil chamber
70
moves is bent by the first stopper
67
located in the first oil chamber
70
. The second stopper
68
has the circumferential surface
681
located in the second oil chamber
71
. The path along which the atomized lubricant oil Y in the second oil chamber
71
moves is bent by the second stopper
68
located in the second oil chamber
71
.
The third stopper
72
has the circumferential surface
721
located in the third oil chamber
73
. The path along which the atomized lubricant oil Y in the third oil chamber
73
moves is bent by the third stopper
72
located in the third oil chamber
73
. Since the tapered circumferential surfaces
671
,
681
,
721
of the stoppers
67
,
68
,
72
are located in the oil chambers
70
,
71
,
73
, respectively, the atomized oil Y in the oil chambers
70
,
71
,
73
scarcely reaches the fifth pump chamber
43
.
(1-6) The path from the through hole
691
of each bearing holder
45
to the space g
1
between the rear surface
672
of the first stopper
67
and the end surface
701
functions as an oil passage from the side corresponding to the gear accommodating chamber
331
to the first oil chamber
70
. The first stopper
67
narrows the space g
1
, which is at the end of the oil passage.
The path from the first oil chamber
70
to the space g
2
between the rear surface
682
of the second stopper
68
and the end surface
711
functions as an oil passage from the side corresponding to the gear accommodating chamber
331
to the second oil chamber
71
via the first oil chamber
70
. The second stopper
68
narrows the space g
2
, which is at the end of the oil passage.
The path from the second oil chamber
71
to the space g
3
between the front surface
722
of the third stopper
72
and the end surface
731
functions as an oil passage from the side corresponding to the gear accommodating chamber
331
to the third oil chamber
73
via the first oil chamber
70
and the second oil chamber
71
. The third stopper
72
narrows the space g
3
, which is at the end of the oil passage.
The end portions of the oil passage (the spaces g
1
, g
2
, g
3
) are narrowed. This structure is advantages in preventing atomized lubricant oil Y from entering each the oil chambers
70
,
71
,
73
from the side corresponding to the gear accommodating chamber
331
.
(1-7) The lubricant oil Y moves along the surface of the leak prevention rings
66
and the surface of the shaft seals
49
,
50
toward the fifth pump chamber
43
. Oil on the rear surface
682
is thrown in the radial direction by the centrifugal force generated by rotation of the oil leak prevention ring
66
. Lubricant Y is thrown from the rear surface
682
to the tapered circumferential surface
671
. At least part of this oil is moved from the small diameter side to the large diameter side of the tapered circumferential surface
671
by the centrifugal force generated by rotation of the oil leak prevention ring
66
. That is, the oil Y moves away the fifth pump chamber
43
. This is advantageous in preventing oil from entering the fifth pump chamber
43
. That is, since the tapered circumferential surface
671
is adjacent to the rear surface
682
, the oil pump Y is prevented from moving toward the fifth pump chamber
43
.
(1-8) The smallest diameter portion of the tapered circumferential surface
671
is directly connected to the proximal end
684
of the rear surface
682
of the second oil stopper
68
. If a circumferential surface that is parallel to the axis of the rotary shaft
19
,
20
is connected to the proximal end
684
of the rear surface
682
, part of the oil Y thrown from the rear surface
682
reaches the circumferential surface. The oil on the circumferential surface may return to the rear surface
682
of the second stopper
68
. This is disadvantages in preventing oil from entering the fifth pump chamber
43
. However, in the first embodiment, the tapered circumferential surface
671
is directly connected to the rear surface
682
of the second stopper
68
. This structure prevent lubricant oil Y thrown from the rear surface
682
from returning to the rear surface
682
.
(1-9) Above the axes
191
,
201
of the rotary shafts
19
,
20
, lubricant oil Y flows downward along the front surfaces
492
,
502
of the shaft seals
49
,
50
from the circumferential surface
491
of the shaft seal
49
,
50
to the fifth pump chamber
43
. Below the axes
191
,
201
of the rotary shafts
19
,
20
, lubricant oil Y flows upward along the front surfaces
492
,
502
of the shaft seals
49
,
50
from the circumferential surface
491
of the shaft seal
49
,
50
to the fifth pump chamber
43
. Therefore, the lubricant oil Y is more likely to enter the fifth chamber
43
along the shaft seals
49
,
50
above the axes
191
,
201
.
At least part of the lubricant oil Y thrown to the circumferential wall surfaces
702
,
712
remains on the circumferential wall surfaces
702
,
712
. Above the rotary shafts
19
,
20
, the circumferential wall surfaces
702
,
712
are tapered downward from the side corresponding to the fifth pump chambers
43
toward the side corresponding to the gear accommodating chamber
331
. That is, the lubricant oil Y on the part of the circumferential wall surfaces
702
,
712
above the rotary shafts
19
,
20
flows downward in relation with the rotary shafts
19
,
20
while flowing away from the fifth pump chamber
43
. Since the circumferential wall surfaces
702
,
712
permit the lubricant oil Y to flow downward in relation to the rotary shafts
19
,
20
and away from the fifth pump chambers
43
, the lubricant oil Y is effectively prevented from entering the fifth pump chambers
43
.
(1-10) The lubricant oil Y on part of the circumferential wall surfaces
702
,
712
above the rotary shafts
19
,
20
flows downward along the walls
701
,
711
, which are perpendicular to the axes
191
,
201
of the rotary shafts
19
,
20
. Thereafter, the lubricant oil Y smoothly flows downward along the walls
701
,
711
to the portion below the rotary shafts
19
,
20
. The walls
701
,
711
, which are connected to and perpendicular to the circumferential wall surfaces
702
,
712
, permits the lubricant oil Y on the area above the rotary shafts
19
,
20
to smoothly flow downward to the area below the rotary shafts
19
,
20
.
(1-11) In the Roots pump
11
having the laterally arranged rotary shafts
19
,
20
, the lubricant oil Y on the walls of the oil chambers
70
,
71
,
73
falls to the third oil chamber
73
by the self weight. In other words, the lubricant oil Y on the walls of the oil chambers
70
,
71
,
73
is collected to the lowest part of the third oil chamber
73
along the walls. Therefore, the oil on the walls of the oil chambers
70
,
71
,
73
reliably flows to the gear accommodating chamber
331
via the drainage channel
74
connected to the lowest part of the third oil chamber
73
.
(1-12) The diameters of the shaft seals
49
,
50
fitted about the rotary shafts
19
,
20
are larger than the diameter of the circumferential surface of the rotary shafts
19
,
20
. Therefore, the diameters of the labyrinth seals
57
,
58
between the front surfaces
492
,
502
of the shaft seals
49
,
50
and the bottom
472
,
482
of the bearing receptacles
47
,
48
are larger than the diameters of the labyrinth seals located between the circumferential surface
192
,
202
of the rotary shafts
19
,
20
and the rear housing member
14
. As the diameters of the labyrinth seals
57
,
58
increase, the volumes of the labyrinth chambers
551
,
552
,
561
,
562
for preventing pressure fluctuation are increased, which improves the sealing performance of the labyrinth seals
57
,
58
. That is, the spaces between the front surface
492
,
502
of each shaft seals
49
,
50
and the bottom
472
,
482
of the corresponding bearing receptacle
47
,
48
is suitable for retaining the labyrinth seal
57
,
58
in terms of increasing the volumes of the labyrinth chambers
551
,
552
,
561
,
562
to improve the sealing property.
(1-13) As the space between each bearing receptacle
47
,
48
and the corresponding shaft seal
49
,
50
is decreased, it is harder for the lubricant oil Y to enter the space between the bearing receptacle
47
,
48
and the shaft seal
49
,
50
. The bottom surface
472
,
482
of each receptacle
47
,
48
, which has the circumferential wall
471
,
481
, and the front surface
492
,
502
of the corresponding shaft seal
49
,
50
are easily formed to be close to each other. Therefore, the space between the end of each annular projection
53
,
54
and the bottom of the corresponding annular groove
55
,
56
and the space between the bottom surface
472
,
482
of each receptacle
47
,
48
and the front surface
492
,
502
of the corresponding shaft seal
49
,
50
can be easily decreased. As the spaces are decreased, the sealing performance of the labyrinth seals
57
,
58
is improved. That is, the bottom surface
472
,
482
of each receptacle
47
,
48
is suitable for accommodating the labyrinth seal
57
,
58
.
(1-14) The labyrinth seals
57
,
58
sufficiently blocks flow of gas. When the Roots pump
11
is started, the pressures in the five pump chambers
39
-
43
are higher than the atmospheric pressure. However, each labyrinth seal
57
,
58
prevents gas from leaking from the fifth pump chamber
43
to the gear accommodating chamber
331
along the surface of the associated shaft seal
49
,
50
. That is, the labyrinth seals
57
,
58
stop both oil leak and gas leak and are optimal non-contact type seals.
(1-15) Although the sealing performance of a non-contact type seal does not deteriorate over time unlike a contact type seal such as a lip seal, the sealing performance of a non-contact type seal is inferior to the sealing performance of a contact type seal. The stoppers
67
,
68
,
72
compensate for the sealing performance. Each circumferential surface
671
,
681
,
721
is located in the oil chambers
70
,
72
,
73
, respectively. This structure further compensates for the sealing performance.
(1-16) The tapered circumferential surface
671
is adjacent to the rear surface
682
of the second stopper
68
further compensates the sealing performance.
(1-17) As the first rotary shaft
19
rotates, the lubricant oil Y in the first helical groove
61
is guided from the side corresponding to the fifth pump chamber
43
to the side corresponding to the gear accommodating chamber
331
. The lubricant oil Y in the helical groove
61
is moved from the side corresponding to the fifth chamber
43
to the gear accommodating chamber
331
. As the second rotary shaft
20
rotates, the lubricant oil Y in the second helical groove
62
is guided from the side corresponding to the fifth pump chamber
43
to the side corresponding to the gear accommodating chamber
331
. The lubricant oil Y in the helical groove
62
is moved from the side corresponding to the fifth chamber
43
to the gear accommodating chamber
331
. That is, the shaft seals
49
,
50
, which have the first and second helical grooves
61
,
62
functioning as pumping means, positively prevent leakage of the lubricant oil Y.
(1-18) The outer circumferential surfaces
491
,
501
, on which the helical grooves
61
,
62
are formed, coincide with the outer surface of the large diameter portions
60
of the first and second shaft seals
49
,
50
. At these parts, the velocity is maximum when the shaft seals
49
,
50
rotate. Gas located between the outer circumferential surface
491
,
501
of each shaft seal
49
,
50
and the circumferential wall
471
,
481
of the corresponding receptacle
47
,
48
is effectively urged from the side corresponding to the fifth pump chamber
43
to the side corresponding to the gear accommodating chamber
331
through the first and second helical grooves
61
,
62
, which are moving at a high speed. The lubricant oil Y located between the outer circumferential surface
491
,
501
of each shaft seal
49
,
50
and the circumferential wall
471
,
481
of the corresponding receptacle
47
,
48
flows with gas that is effectively urged from the side corresponding to the fifth pump chamber
43
to the side corresponding to the gear accommodating chamber
331
. The helical grooves
61
,
62
formed in the outer circumferential surface
491
,
501
of each shaft seal
49
,
50
effectively prevent the lubricant oil Y from leaking into the fifth pump chamber
43
from the corresponding bearing receptacle
47
,
48
via the spaces between the outer circumferential surface
491
,
501
and the circumferential wall
471
,
481
.
(1-19) The lubricant oil Y is moved from the side corresponding to the pump chamber
43
to the gear accommodating chamber
331
by the helical grooves
61
,
62
. Part of this oil reaches the front surface
722
of third stopper
72
. At this time, the lubricant oil Y on the front surface
722
is thrown to the circumferential wall surface
733
of the third oil chamber
73
by the centrifugal force generated by rotation of the third stopper
72
. The oil Y thrown toward the circumferential wall surface
733
reaches the circumferential wall surface
733
. That is, the lubricant Y is moved from the side corresponding to the fifth pump chamber
43
by each helical groove
61
,
62
to the side corresponding to the gear accommodating chamber
331
. The third stopper
72
then guides the lubricant oil Y to the gear accommodating chamber
331
via the third oil chamber
73
.
(1-20) A small space is created between the circumferential surface
192
of the first rotary shaft
19
and the through hole
141
. Also, a small space is created between each rotor
27
,
32
and the chamber defining wall
143
of the rear housing member
14
. Therefore, the labyrinth seal
57
is exposed to the pressure in the fifth pump chamber
43
introduced through the narrow spaces. Likewise, a small space is created between the circumferential surface
202
of the second rotary shaft
20
and the through hole
142
. Therefore, the second labyrinth seal
58
is exposed to the pressure in the fifth pump chamber
43
through the space. If there are no channels
63
,
64
, the labyrinth seals
57
,
58
are equally exposed to the pressure in the suction zone
431
and to the pressure in the maximum pressurization zone
432
.
The first and second discharge pressure introducing channels
63
,
64
expose the labyrinth seals
57
,
58
to the pressure in the maximum pressurization zone
432
. That is, the labyrinth seals
57
,
58
are influenced more by the pressure in the maximum pressurization zone
432
via the introducing channels
63
,
64
than by the pressure in the suction zone
431
. Thus, compared to a case where no discharge pressure introducing channels
63
,
64
are formed, the labyrinth seals
57
,
58
of the first embodiment receive higher pressure. As a result, compared to a case where no discharge pressure introducing channels
63
,
64
are formed, the difference between the pressures acting on the front surface and the rear surface of the labyrinth seals
57
,
58
is significantly small. In other words, the discharge pressure introducing channels
63
,
64
significantly improve the oil leakage preventing performance of the labyrinth seals
57
,
58
.
(1-21) Since the Roots pump
11
is a dry type, no lubricant oil Y is used in the five pump chambers
39
,
40
,
41
,
42
,
43
. Therefore, the present invention is suitable for the Roots pump
11
.
The present invention may be embodied in other forms. For example, the present invention may be embodied as second to sixth embodiments, which are illustrated in
FIGS. 9
to
13
, respectively. In the second to fourth embodiments, like or the same reference numerals are given to those components that are like or the same as the corresponding components of the first embodiment. Since the first and second rotary shafts
19
,
20
have the same structure, only the first rotary shaft
19
will be described in the second to sixth embodiments.
In the second embodiment shown in
FIG. 9
, a recess
493
is formed in the large diameter portion
60
of the shaft seal
49
. The circumferential surface
494
of the recess
493
is tapered such that the recess
493
widens from the side corresponding to the fifth pump chamber
43
to the gear accommodating chamber
331
. The drainage channel
74
is inclined downward toward the gear accommodating chamber
331
.
The lubricant oil Y on the circumferential surface
494
is moved toward the gear accommodating chamber
331
by the centrifugal force generated by rotation of the shaft seal
49
. Thereafter, the lubricant oil Y reaches the end surface
731
. Then, the oil Y is thrown to the circumferential wall surface
733
of the third oil chamber
73
. The recess
493
reduces the weight of the shaft seal
49
. The recess
493
also increases the amount of oil received by the shaft seal
49
before the third oil chamber
73
.
In the third embodiment shown in
FIG. 10
, a pair of stopper rings
75
,
76
are fitted about the small diameter portion
59
of the shaft seal
49
. Separation rings
77
,
78
are fitted in the receptacle
47
. The stopper rings
75
,
76
define three oil chambers
79
,
80
,
81
in the space between the projection
69
of the bearing holder
45
and the bottom
472
of the receptacle
47
.
In the fourth embodiment shown in
FIG. 11
, stoppers
82
,
83
,
72
are integrally formed with the shaft seal
49
.
In the fifth embodiment shown in
FIG. 12
, stoppers
84
,
85
,
72
are integrally formed with the shaft seal
49
. The radial dimensions of the stoppers
84
,
85
,
72
increase in this order. The stoppers
84
,
85
,
72
are surrounded by oil chambers
86
,
87
,
88
, respectively. The radiuses of the oil chambers
86
,
87
,
88
increase in this order. Circumferential walls
861
,
871
,
881
of the oil chambers
86
,
87
,
88
are not tapered. The fifth embodiment has the same advantages as the advantages (1-1) to (1-5), (1-8) to (1-14), and (1-15) to (1-20).
In the sixth embodiment shown in
FIG. 13
, a shaft seal
49
A is integrally formed with the end surfaces of the rotary shaft
19
and the rotor
27
. The shaft seal
49
A is located in a receptacle
89
formed in the front wall of the rear housing member
14
, which faces the rotor housing member
12
. A labyrinth seal
90
is located between the rear surface of the first shaft seal
49
A and the bottom
891
of the receptacle
89
.
An oil leak prevention rings
91
,
92
are fitted about the rotary shaft
19
. An annular oil chamber
93
is defined between the bottom
472
of the receptacle
47
and the projection
69
of the bearing holder
45
.
It should be apparent to those skilled in the art that the present invention may be embodied in many other specific forms without departing from the spirit or scope of the invention. Particularly, it should be understood that the invention may be embodied in the following forms.
(1) Four or more stoppers may be arranged along the axis of each rotary shaft.
(2) In the first embodiment, each shaft seal
49
,
50
may be integrally formed with the corresponding leak prevention ring
66
.
(3) In the third embodiment, each shaft seal ring
77
,
78
may be integrally formed.
(4) The present invention may be applied to other types of vacuum pumps than Roots types.
Therefore, the present examples and embodiments are to be considered as illustrative and not restrictive and the invention is not to be limited to the details given herein, but may be modified within the scope and equivalence of the appended claims.
Claims
- 1. A vacuum pump that draws gas by operating a gas conveying body in a pump chamber through rotation of a rotary shaft, the vacuum pump comprising:an oil housing member, wherein the oil housing member defines an oil zone adjacent to the pump chamber, and the rotary shaft has a projecting portion that projects from pump chamber into the oil zone through the oil housing member; a plurality of stoppers, which are located on the rotary shaft to integrally rotate with the rotary shaft and prevent oil from entering the pump chamber, wherein the stoppers are located along the axial direction of the rotary shaft, wherein each of the stoppers has a circumferential surface; and a plurality of annular oil chambers, each of which surrounds one of the circumferential surfaces, wherein the stoppers are arranged in decreasing order of diameter from the side closer to the pump chamber toward the oil zone, wherein the oil chambers are arranged in decreasing order of diameter from the side closer to the pump chamber to the oil zone, wherein one of an adjacent pair of the stoppers is a first stopper, which is closer to the oil zone, and the other stopper of the pair is a second stopper, which is closer to the pump chamber, wherein the second stopper has an end surface that is perpendicular to an axis of the rotary shaft and faces toward the oil zone, and wherein the end surface of the second stopper is part of the walls defining the oil chamber in which the first stopper is located.
- 2. The pump according to claim 1, wherein each stopper has an end surface that is perpendicular to the axis of the rotary shaft, wherein a tapered circumferential surface is located about the rotary shaft, wherein the tapered circumferential surface is adjacent to at least one of the end surfaces of the stoppers and is closer to the oil zone than the adjacent end surface, and wherein the diameter of the tapered circumferential surface gradually increases from the side closer to the pump chamber toward the oil zone.
- 3. The pump according to claim 1, wherein the oil zone accommodates a bearing, which rotatably supports the rotary shaft.
- 4. The pump according to claim 1, further comprising:an annular shaft seal, which is located about the projecting portion to rotate integrally with the rotary shaft, wherein the shaft seal is located closer to the pump chamber than the stoppers are and has a first seal forming surface that extends in a radial direction of the shaft seal; a second seal forming surface formed on the oil housing member, wherein the second seal forming surface faces the first seal forming surface and is substantially parallel with the first seal forming surface; and a non-contact type seal located between the first and second seal forming surfaces.
- 5. The pump according to claim 1, further comprising:a seal surface located on the oil housing; and an annular shaft seal, which is located about the projecting portion to rotate integrally with the rotary shaft, wherein the shaft seal is located closer to the pump chamber than the stoppers are, wherein the shaft seal includes pumping means located on a surface of the shaft seal that faces the seal surface, wherein the pumping means guides oil between a surface of the shaft seal and the seal surface from the side closer to the pump chamber toward the side closer to the oil zone.
- 6. The pump according to claim 1, further comprising a drainage channel, which connects the oil chambers to the oil zone to conduct oil to the oil zone.
- 7. The pump according to claim 6, wherein the drainage channel is connected to the lowest parts of the oil chambers.
- 8. The pump according to claim 7, wherein the drainage channel is substantially horizontal or is inclined downward toward the oil zone.
- 9. The pump according to claim 8 further comprising a plurality of circumferential wall surfaces, the center of curvature of each coinciding with that of the rotary shaft, wherein each circumferential wall surface surrounds at least a part of one of the circumferential surfaces of the stoppers that is above the rotary shaft, and wherein at least one of the circumferential wall surfaces is inclined such that the distance between the wall and the rotary shaft decreases toward the oil zone.
- 10. The pump according to claim 1, wherein a peripheral portion of each stopper protrudes into the corresponding oil chamber.
- 11. The pump according to claim 10, wherein the oil chambers form a bent path extending from the side closer to the pump chamber to the side closer to the oil zone.
- 12. The pump according to claim 10, wherein the bent path has a radially extending oil passage, wherein the oil passage connects each adjacent pair of the oil chambers, and wherein the oil passage is narrower than the oil chamber in the axial direction of the rotary shaft.
- 13. The vacuum pump according to claim 1, wherein the rotary shaft is one of a plurality of parallel rotary shafts, wherein the rotary shafts are connected to one another by a gear mechanism such that the rotary shafts rotate synchronously, and wherein the gear mechanism is located in the oil zone.
- 14. The vacuum pump according to claim 13, wherein a plurality of rotors are located about each rotary shaft such that each rotor functions as the gas conveying body, and wherein the rotors of one rotary shaft are engaged with the rotors of another rotary shaft.
- 15. A vacuum pump that draws gas by operating a gas conveying body in a pump chamber through rotation of a rotary shaft, the vacuum pump comprising:an oil housing member, wherein the oil housing member defines an oil zone adjacent to the pump chamber, and the rotary shaft has a projecting portion that projects from the pump chamber into the oil zone through the oil housing member; a plurality of annular stoppers, which are located on the rotary shaft to integrally rotate with the rotary shaft and prevent oil from entering the pump chamber, wherein each stopper has a circumferential surface, which has a greater diameter than that of the rotary shaft, and wherein the stoppers are arranged along the axis of the rotary shaft in decreasing order of diameter from the side closer to the pump chamber toward the oil zone, wherein each of the stoppers has a circumferential surface; and a plurality of annular oil chambers, each of which surrounds one of the circumferential surfaces, wherein the stoppers are arranged in decreasing order of diameter from the side closer to the pump chamber toward the oil zone, wherein the oil chambers are arranged in decreasing order of diameter from the side closer to the pump chamber to the oil zone, wherein one of an adjacent pair of the stoppers is a first stopper, which is closer to the oil zone, and the other stopper of the pair is a second stopper, which is closer to the pump chamber, wherein the second stopper has an end surface that is perpendicular to an axis of the rotary shaft and faces toward the oil zone, and wherein the end surface of the second stopper is part of the walls defining the oil chamber in which the first stopper is located.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2001-204582 |
Jul 2001 |
JP |
|
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FR |
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GB |
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JP |
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Jun 1988 |
JP |
03-011193 |
Jan 1991 |
JP |
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JP |
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