1. Technical Field
The present invention relates to an oil-lubricated bearing device and a vacuum pump.
2. Background Art
It has been demanded for a rolling bearing for high-speed rotation to maintain lubrication of a rolling surface by repeated supply of a slight amount of lubricant and to prevent lubricant more than necessary from adhering to the rolling surface. When the lubricant more than necessary for lubrication adheres to the rolling surface, agitation resistance of the lubricant is caused, leading to heat generation.
The method described in Patent Literature 1 (U.S. Pat. No. 5,303,137) has been proposed as the method for lubricating a rolling bearing in a vacuum pump. The following structure is employed for the rolling bearing described in Patent Literature 1: a tapered conical member is provided at a shaft rotating together with an inner ring, and a felt member provided at a lubricant storage device contacts the tapered conical surface to supply lubricant to the inner ring by centrifugal force. In this structure, the lubricant is supplied from a rolling surface (also referred to as a “raceway surface”) of the inner ring to a rolling surface of an outer ring via rolling bodies (balls), and extra lubricant having overflowed from the rolling surface of the outer ring returns to the lubricant storage device.
However, since it is configured such that the extra lubricant having overflowed from the rolling surface returns to the lubricant storage device, lubricant more than necessary for lubrication is present on the rolling surface in the case of lubricant overflowing. For this reason, generation of agitation resistance cannot be avoided.
An oil-lubricated bearing device comprises: a rolling bearing including an inner ring, an outer ring, rolling bodies, and a holder configured to maintain a gap between adjacent ones of the rolling bodies, and configured to support a rotor shaft; a tapered member provided at the rotor shaft to which the inner ring is fixed and formed with a first inclined surface rising with a slope toward the inner ring; a lubricant storage disposed on a side provided with the tapered member with respect to the inner ring; and a contact portion configured to contact the first inclined surface to supply lubricant of the lubricant storage to the first inclined surface. The holder includes pockets each formed with outer and inner ring side openings and configured to hold a corresponding one of the rolling bodies, a lubricant scraping portion formed at an inner peripheral surface of each of the pockets and configured to scrape lubricant adhering to a surface of each of the rolling body, and a second inclined surface formed at an outer peripheral surface portion of the holder adjacent to the outer ring side opening and rising with a slope toward the lubricant storage.
The lubricant scraping portion includes a plurality of raised portions formed in a circumferential direction of the inner peripheral surface of each of the pocket in a region close to the outer ring side opening such that the plurality of raised portions are aligned.
The second inclined surface is formed with a protrusion protruding from the second inclined surface.
The tapered member is an inner ring fixing member detachably provided at the rotor shaft and configured to fix the inner ring to the rotor shaft.
The oil-lubricated bearing device, further comprises: a lubricant guide portion disposed closer to the outer ring with respect to the holder to contact the lubricant storage and the outer ring and configured to guide lubricant scattered from the second inclined surface to the lubricant storage.
An oil-lubricated bearing device comprises: a rolling bearing including an inner ring, an outer ring, rolling bodies, and a holder configured to maintain a gap between adjacent ones of the rolling bodies, and configured to support a rotor shaft; a tapered member provided at the rotor shaft to which the inner ring is fixed and formed with a first inclined surface rising with a slope toward the inner ring; a lubricant storage disposed on a side provided with the tapered member with respect to the inner ring; and a contact portion configured to contact the first inclined surface to supply lubricant of the lubricant storage to the first inclined surface. The holder includes pockets each penetrating from an inner peripheral holder surface to an outer peripheral holder surface and configured to hold a corresponding one of the rolling bodies, a second inclined surface formed by the outer peripheral holder surface and rising with a slope such that a distance from a center axis increases toward the lubricant storage, a third inclined surface formed by the inner peripheral holder surface and falling with a slope such that a distance from the center axis increases with distance from the lubricant storage, and a connection surface formed at a holder end portion opposite to the lubricant storage and connecting between the second and third inclined surfaces.
The second inclined surface is formed with a protrusion formed in a ridge shape to extend from a side of the connection surface toward the lubricant storage through a portion between adjacent two of the pockets.
At least one of the pockets penetrates from an inner ring side opening with surroundings thereof closed to an outer ring side opening with surroundings thereof closed.
The holder is configured such that two or more members are integrally coupled together.
A vacuum pump comprises: the oil-lubricated bearing device; and a pump rotor provided with the rotor shaft.
Hereinafter, an embodiment of the present invention will be described with reference to drawings.
The turbo-molecular pump 1 illustrated in
The turbo pump portion P1 includes a plurality of rotor blades 30 formed at a pump rotor 3, and a plurality of stationary blades 20 arranged on the side of a base 2. On the other hand, the Holweck pump portion P2 provided on the exhaust downstream side of the turbo pump portion P1 includes a cylindrical portion 31 formed at the pump rotor 3, and a stator 21 disposed on the side of the base 2. The inner peripheral surface of the cylindrical stator 21 is formed with the spiral groove. The plurality of rotor blades 30 and the cylindrical portion 31 form a rotary side exhaust function, and the plurality of stationary blades 20 and the stator 21 form a stationary side exhaust function.
The pump rotor 3 is fastened to a shaft 10, and the shaft 10 is rotatably driven by a motor 4. For example, a DC brushless motor is used as the motor 4. A motor stator 4a is provided at the base 2, and a motor rotor 4b is provided at the shaft 10. A rotor unit R formed of the shaft 10 and the pump rotor 3 is rotatably supported by a permanent magnet magnetic bearing 6 using permanent magnets 6a, 6b and a ball bearing 8 as a rolling bearing.
Each permanent magnet 6a, 6b is a ring-shaped permanent magnet magnetized in an axial direction. The permanent magnets 6a provided at the pump rotor 3 are arranged in the axial direction such that the polarities of opposing ones of the permanent magnets 6a are the same as each other. On the other hand, the stationary side permanent magnets 6b are attached to a magnet holder 11 fixed to a pump case 12. These permanent magnets 6b are also arranged in the axial direction such that the polarities of opposing ones of the permanent magnets 6b are the same as each other. The axial position of each permanent magnet 6a provided at the pump rotor 3 is set slightly higher than the position of a corresponding one of the permanent magnets 6b arranged at the inner peripheral side of the permanent magnet 6a. That is, the magnetic pole of the rotary side permanent magnet shifts, in the axial direction, from the magnetic pole of the stationary side permanent magnet by a predetermined degree. The supporting force of the permanent magnet magnetic bearing 6 varies according to such a predetermined degree. In the example illustrated in
A bearing holder 13 configured to hold a ball bearing 9 is fixed to the center of the magnet holder 11. In
The ball bearing 8 is held by a bearing holder 114 bolted to the base 2. The outer peripheral side of the ball bearing 8 is provided with a ring-shaped radial damper 116. Elastomer such as rubber is used as the material of the radial damper 116. The ball bearing 8 is an oil-lubricated rolling bearing, and includes a wick 101 as a lubricant storage for supplying lubricant to the ball bearing 8. The wick 101 is held between the bearing holder 114 and a lower lid 15.
The outer peripheral surface of the conical nut 102 forms a tapered surface 102a pointed from the side of the conical nut 102 contacting the inner ring 82 of the ball bearing 8 toward the tip end of the conical nut 102. That is, the tapered surface 102a is an inclined surface rising with a slope toward the inner ring 82. The inner peripheral surface of the ring-shaped wick 101 is formed with an inwardly-protruding contact portion 101a, and the contact portion 101a contacts the tapered surface 102a of the conical nut 102. The wick 101 is formed of a felt or sponge member being able to hold lubricant, and is configured to hold lubricant. A cylindrical tube member 104 is provided between the outer ring 81 of the ball bearing 8 and the wick 101 to contact these components. The cylindrical tube member 104 is a member configured to use capillary phenomenon to transfer lubricant from the outer ring 81 to the wick 101. For example, a member formed such that a porous body is provided on the inner peripheral surface of the cylindrical tube, a fibrous member such as felt, or a member made of a porous material such as sponge or sintered metal may be used.
At the outer peripheral surface of the holder 84, a tapered surface 841 is formed adjacent to an outer ring side opening 840c of each pocket 840. As illustrated in the cross-sectional view of
The inner peripheral surface 840a of each pocket 840 is formed with a scraping portion 840b configured to scrape lubricant adhering to the surface of the rolling body 83. Note that the scraping portion 840b is in a minute raised-recessed shape, and in
As described above, each rolling body 83 orbiting in the R1 direction rotates in an R2 direction while contacting the inner peripheral surface 840a of the holder 84 on the side formed with the scraping portion 840b. Thus, part of lubricant adhering to the surface of the rolling body 83 is scraped by the scraping portion 840b. Since the holder 84 rotates in the R1 direction at high speed, the centrifugal force acts on the scraped lubricant, and such lubricant moves toward the outer peripheral side through the gap between the rolling body 83 and the inner peripheral surface 840a of the holder 84. Note that the holder 84 rotates in the R1 direction at the half of the angular velocity of the inner ring 82. As long as each rolling body 83 rotates not by sliding but by rolling, the angular velocity of the rolling body 83 at the inner ring contact point thereof is the same as that of the shaft (the shaft 10), and the angular velocity of the rolling body 83 at the outer ring contact point thereof is zero. Thus, the orbiting speed at the center of the rolling body between the inner and outer ring contact points is the half of the angular velocity of the inner ring 82.
The lubricant having moved from the tapered surface 102a to the inner ring 82 moves onto the rolling surface 82a of the inner ring 82 to lubricate the rolling surface 82a and to adhere to each rolling body 83. While each rolling body 83 to which the lubricant adheres is rotating, part of the lubricant adhering to the rolling body 83 is, as described above, scraped by the scraping portion 840b formed at the holder 84. When the scraped lubricant moves to the tapered surface 841 formed on the outer peripheral side of the holder 84, the centrifugal force moves such lubricant on the tapered surface 841 toward the greater-diameter lower side (the wick side) as illustrated in the figure. When the lubricant having moved downward on the tapered surface 841 reaches the lower end 841a, the lubricant is scattered by the centrifugal force to adhere to the inner peripheral surface of the outer ring 81 or the cylindrical tube member 104.
As described above, since the cylindrical tube member 104 is the member configured to use the capillary phenomenon to guide, to the wick 101, the lubricant scattered toward the inner peripheral surface of the outer ring 81 or the surface of the cylindrical tube member 104, the lubricant scattered from the holder 84 can be returned to the wick 101 regardless of the attachment orientation of the turbo-molecular pump 1. In the above-described manner, lubricant is supplied from the wick 101 to the ball bearing 8, and then, is collected from the ball bearing 8 by the wick 101.
In the case of a typical holder including no scraping portion 840b, lubricant supplied to a rolling surface 82a of an inner ring 82 moves to a rolling surface 81a of an outer ring 81 by rotation of rolling bodies 83. Moreover, lubricant on the rolling surface 81a of the outer ring 81 also adheres to the rotating rolling bodies 83 to move toward the inner ring side. However, since the inner ring 82 of a ball bearing 8 and a holder 84 are rotating at high speed, the lubricant tends to be accumulated on the outer ring side due to the centrifugal force acting on the lubricant. As a result, the lubricant tends to be excessive on the rolling surface 81a of the outer ring 81, leading to heat generation due to agitation resistance.
On the other hand, in the present embodiment, when the amount of lubricant adhering to each rolling body 83 increases and the thickness of the lubricant film formed on the surface of each rolling body 83 increases, part of such lubricant is accordingly scraped by the scraping portion 840b. Thus, an excessive increase in lubricant on the rolling surface 81a of the outer ring 81 can be suppressed, and therefore, the agitation resistance can be reduced.
Moreover, since the tapered surface 841 in the shape expanding toward the wick side (i.e., the shape with the rising slope toward the wick side) is formed by the outer peripheral surface of the holder 84, the lubricant scraped by each scraping portion 840b moves, by action of the centrifugal force, on the tapered surface 841 toward the wick side. The lubricant having moved to the wick side is scattered from the lower end 841a of the tapered surface 841, and eventually, is collected by the wick 101.
(Specific Shapes of Scraping Portion 840b)
In the example illustrated in
Lubricant 90 scraped by the raised portions 843 of the scraping portion 840b moves, by the viscous force between the rolling body surface and the lubricant 90 and the centrifugal force acting on the lubricant, toward the tapered surface 841 through the gap 844 between adjacent ones of the raised portions 843. The lubricant 90 having moved to the tapered surface 841 moves to the greater-diameter side (the lower side as viewed in the figure) of the tapered surface 841 by the centrifugal force. As illustrated in
Note that the shape of the scraping portion 840b is not limited to the configurations illustrated in
According to the above-described embodiment, the following features and advantageous effects are obtained:
(1) The oil-lubricated bearing device 100 includes the conical nut 102 as the tapered member provided at the shaft 10 fixed to the inner ring 82 and formed with the tapered surface 102a rising with the slope toward the inner ring 82, the wick 101 disposed on the side provided with the conical nut 102 with respect to the inner ring 82, and the contact portion 101a configured to contact the tapered surface 102a to supply lubricant from the wick 101 to the tapered surface 102a. As illustrated in
Since the holder 84 is provided with the scraping portions 840b as described above, lubricant moving from each rolling body 83 toward the rolling surface 81a of the outer ring 81 can be reduced. As a result, this prevents excessive lubricant from being on the rolling surface 81a of the outer ring 81, and therefore, heat generation due to agitation resistance can be reduced. Particularly in a pump operating while a rotation speed changes according to an exhaust load, the amount of lubricant to be delivered by a conical nut 102 also changes. Thus, in the case of a design made to ensure a lubricant amount under any conditions, the delivery amount becomes more than necessary at the maximum rotation speed, and on the other hand, a temperature increase due to agitation resistance becomes noticeable. For these reasons, it is important for rotation maintaining to ensure the amount of lubricant to be scraped in the case of a high rotation speed. This is advantageous in the case of the high rotation speed because the number of contact of the rolling body 83 with the scraping portion 840b of the holder 84 also increases.
Moreover, since the tapered surface 841 rising with the slope toward the wick 101 is formed by the holder outer peripheral surface portion adjacent to the outer ring side opening 840c of each pocket 840, lubricant scraped by each scraping portion 840b to adhere to the tapered surface 841 moves toward the wick 101, and then, is scattered. As a result, lubricant exhausted from the ball bearing 8 as extra lubricant is collected by the wick 101, and therefore, a lubricant circulation system being able to supply and collect lubricant can be configured.
In the configuration made such that lubricant is, as in the device described in Patent Literature 1, exhausted not in the direction toward the lubricant storage, the path for returning the exhausted lubricant to the lubricant storage needs to be formed on a pump base side, leading to a complex configuration and a cost increase. However, in the above-described embodiment, lubricant scraped from the holder 84 formed with the scraping portion 840b is exhausted toward the lubricant storage (the wick 101), and therefore, no complex path needs to be formed on a pump base side.
Note that in the holder 84 illustrated in
Moreover, in the example illustrated in
(2) As illustrated in, e.g.,
(3) As illustrated in
The location where the protrusion 845 is formed is preferably the region to which lubricant scraped by the scraping portion 840b tends to be collected, and for example, may be the largest-diameter end region of the tapered surface 841 close to the scraping portion 840b.
(4) As illustrated in
Note that in the cylindrical tube member 104 illustrated in
Note that in the case of applying porous electroplating, the porous electroplated layer formed on a base interposed between the outer ring 81 and the wick 101 can be utilized as the lubricant guide portion in the configuration illustrated in
In a bearing rotating at high speed, the moving speed of each rolling body is extremely high. Depending on conditions in such a state, the amount of lubricant splashed from a rolling surface of an inner ring by the rolling bodies might be greater than the amount of lubricant adhering to the rolling bodies. Centrifugal force acts on the rolling surface of the inner ring. Thus, particularly when the amount of lubricant is even slightly greater at the position near a groove end portion of the rolling surface, the above-described phenomenon tends to occur with passage of the rolling bodies as a trigger. When the lubricant splashed by the rolling bodies as described above adheres to the inner peripheral surface of an outer ring, there is a probability that the amount of lubricant on a rolling surface of the outer ring becomes excessive.
In a second embodiment, an oil-lubricated bearing device being able to effectively prevent excessive lubricant on the outer ring rolling surface due to such splashed lubricant will be described.
In the second embodiment, the conical nut 102, the wick 101, and the cylindrical tube member 104 have the same configurations as those of the corresponding members of the first embodiment described above. The second embodiment is different from the first embodiment in the configuration of a holder 84 of the ball bearing 8.
One of two contacting surfaces of the lower and upper holders 84a, 84b is formed with a through-hole 847a, and the other surface is formed with a snap-fit coupling portion 847b. In the example illustrated in
In the example illustrated in
On the other hand, the inner peripheral surface of the holder 84 facing an inner ring 82, i.e., the inner peripheral surfaces of the lower and upper holders 84a, 84b, forms inclined surfaces (848a, 848b) falling with a slope toward the upper side as viewed in the figure such that the distance from the center axis J increases with distance from the wick 101 in the axial direction. In the example illustrated in
Lubricant supplied from the wick 101 to the tapered surface 102a of the conical nut 102 moves, by action of the centrifugal force, toward the inner ring 82 on the tapered surface 102a as indicated by a dashed arrow R3 of
Since the holder 84 and the rolling bodies 83 together rotate at high speed, the lubricant adhering to the inclined surface 848a moves, by action of the centrifugal force, upward as viewed in the figure in the direction in which the distance from the center axis increases. The moved lubricant adheres to the rolling bodies 83. Note that the inclined surface 848a of the lower holder 84a is not necessarily formed. That is, in the case of no inclined surface 848a or a short inclined surface 848a, most of the lubricant scattered in the direction of the arrow R4 is scattered toward the wick 101, and therefore, there is no influence regarding excessive lubricant on the outer ring.
On the other hand, the lubricant adhering to the inclined surface 848b moves, by action of the centrifugal force, upward as viewed in the figure in the direction in which the distance from the center axis J increases, and then, moves from the inclined surface 848b to the connection surface 849 as indicated by an arrow R7. Since the connection surface 849 is connected to the tapered surface 841 formed by the outer peripheral surface of the holder 84, the lubricant on the connection surface 849 moves to the tapered surface 841 as indicated by the arrow R7.
The tapered surface 841 is the inclined surface rising with the slope toward the wick 101 such that the distance from the center axis J increases toward the wick 101. Thus, the lubricant on the tapered surface 841 moves, by the centrifugal force, downward as viewed in the figure in the direction in which the distance from the center axis J increases. The lubricant having reached the lower end of the tapered surface 841 is collected to the tip end of the protrusion 841b by the centrifugal force, and then, is scattered toward the outer ring as indicated by an arrow R8. The scattered lubricant returns to the wick 101 through the cylindrical tube member 104 as indicated by an arrow R9.
As described above, the lubricant scattered from the rolling surface 82a of the inner ring 82 is caught by the inclined surfaces 848a, 848b. In particular, there is a high probability that the lubricant scattered in the direction of the arrow R5 reaches and adheres to the outer ring 81 in the case where the upper holder 84b is not attached and no lubricant is caught by the inclined surface 848b. In such a case, the lubricant on a rolling surface 81a of the outer ring 81 becomes excessive, leading to an increase in agitation resistance.
In the case of the present embodiment, the inclined surface 848b is connected to the tapered surface 841 through the connection surface 849, and therefore, the lubricant caught by the inclined surface 848b moves, by the centrifugal force, in the order of the inclined surface 848b, the connection surface 849, the tapered surface 841, the protrusion 841b, and the cylindrical tube member 104. As a result, the surface of the holder 84 can be utilized so that the lubricant scattered in the direction of R5 can return to the wick 101. As described above, in the present embodiment, excessive lubricant on the rolling surface 81a due to scattered lubricant can be prevented.
Note that in the present embodiment, the holder 84 is formed of two divided upper and lower components (the lower holder 84a and the upper holder 84b). Typically, in the case of a deep groove ball bearing, such a bearing can be assembled using such a divided structure. Needless to say, the holder 84 may be integrally formed. Particularly in the case of an angular contact ball bearing, such an integrated bearing can be easily assembled.
Moreover, even in the case where a pocket 840 forms a through-hole such that part of the holder 84 opens on the upper side in the axial direction as illustrated in
In the case of the protrusion 851 illustrated in
As indicated by a dashed arrow R10 of
Thus, for the lubricant having moved from the inner peripheral side to the outer peripheral side of the holder 84, the probability that the lubricant re-adheres to the rolling body (not shown) in the pocket 840 is low. Most of the lubricant is scattered toward the outer ring through the protrusion 851, and then, returns to the wick 101 as indicated by the arrow R9 of
As described above, in the second embodiment, the lubricant scattered from the rolling surface 82a of the inner ring 82 in the direction of the arrow R5 adheres to the inclined surface 848b formed by the inner peripheral holder surface, as illustrated in
As described above, the lubricant scattered from the rolling surface 82a of the inner ring 82 and adhering to the inclined surface 848b is scattered from the wick side end portion of the outer peripheral side tapered surface 841. This prevents excessive lubricant on the rolling surface 81a of the outer ring 81.
Moreover, as illustrated in
Further, in
Various embodiments and variations have been described above, but the present invention is not limited to the contents of theses embodiments and variations. For example, in the above-described embodiments, the turbo-molecular pump has been described as an example. However, the present invention is not limited to the turbo-molecular pump, and is applicable not only to oil-lubricated bearing devices of various vacuum pumps but also to oil-lubricated bearing devices of other devices than the vacuum pump. Other aspects conceivable within the scope of the technical idea of the present invention are included in the scope of the present invention.
Number | Date | Country | Kind |
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2015-202379 | Oct 2015 | JP | national |
2016-147412 | Jul 2016 | JP | national |