The present invention relates to the field of display and, in particular, to the field of an organic light-emitting diode (OLED) display panel.
An organic light-emitting diode (OLED) is an active light-emitting device. Compared with the current mainstream panel display technology, i.e, the thin film transistor liquid crystal display (TFT-LCD), OLED has the advantages of high contrast, wide viewing angle, low power consumption and thinner volume, and is expected to become the next generation panel display technology after LCD. Thus, OLED is one of the most attention-worthy technologies in panel display technology.
Compared with amorphous germanium (a-Si) TFTs, metal oxide TFTs (eg, IGZO, IGTO . . . ) have higher carrier mobility, low leakage current, and higher electrical stability, and thus are applied to the driving circuit of the OLED display. However, the oxygen atoms in the metal oxide TFT are easily reduced by hydrogen atoms to form oxygen defects, causing the electrical characteristics of the TFT to drift. To reduce the source of hydrogen atoms in the TFT structure, the dielectric layer uses the material of SiOx instead of SiNx film layer. According to different chemical vapor deposition (CVD) film forming conditions, the SiOx film still contains one to several tens of atomic percent (at %) hydrogen content. In the subsequent high temperature process or the local high temperature generated by the current during the operation of the display, the hydrogen atoms in the SiOx film have the opportunity to diffuse into the channel of the metal oxide TFT to cause the electrical characteristics of the TFT to shift and result in an abnormal display.
Referring to
The TFT array substrate mainly comprises: a substrate 1, a buffer layer 2 disposed on the substrate 1, an active layer 3 disposed on the buffer layer 2, a gate insulating layer 4 disposed on the buffer layer 2 and the active layer 3, a gate metal layer 5 disposed on the gate insulating layer 4, an interlayer insulating layer 6 disposed on the buffer layer 2, the active layer 3, and the gate metal layer 5, a source/drain metal layer 7 disposed on the interlayer insulating layer 6, a passivation layer 8 disposed on the source/drain metal layer 7, and a planarization layer 9 disposed on the passivation layer 8; devices such as a switching TFT, a driving TFT, and a storage capacitor are formed by a patterned active layer 3, a gate metal layer 5, and a source/drain metal layer 7 to form the TFT driving circuit to drive the pixels. The interlayer insulating layer 6 and the passivation layer 8 are manufactured by using SiOx, as shown by the dotted arrow in
A top-emitting OLED device is prepared on the planarization layer 9, and the planarization layer 9 is disposed with vias for connecting to the TFT devices in the TFT array substrate. The top-emitting OLED device mainly comprises: a reflective anode 10 disposed on the planarization layer 9, a pixel definition layer 20 disposed on the planarization layer 9 and the reflective anode 10, an organic functional layer 21 disposed on the reflective anode 10 and the pixel definition layer 20, and a transparent cathode 22 disposed on the organic functional layer 21; when a suitable voltage is applied to the reflective anode 10 and the cathode 22, the organic functional layer 21 emits light. A general top-emitting organic light-emitting display panel adopts an ITO/Ag/ITO three-layer structure including an Indium Tin Oxide (ITO) layer 11, an Ag metal layer 12, and an ITO layer 13 as a reflective anode 10 to reflect light of the organic functional layer 21 to emit from the top.
The primary object of the present invention is to provide an OLED display panel, able to reduce the diffusion of hydrogen atoms into the active layer of the metal oxide TFT.
To achieve the above objects, the present invention provides an OLED display panel, which comprises: a TFT array substrate comprising a metal oxide TFT, and a top-emitting OLED device disposed on the TFT array substrate; the top-emitting OLED device having a reflective anode of a multi-layer structure, and a bottom layer of the reflective anode being made of a hydrogen absorbing material.
Wherein, the hydrogen absorbing material is titanium metal.
Wherein, the reflective anode is a titanium metal/silver metal/ITO three-layer structure.
Wherein, the titanium metal layer has a thickness of 20 nm to 100 nm.
Wherein, the OLED device comprises red, green and blue OLED sub-pixels arranged side by side.
Wherein, the organic functional layer of the OLED sub-pixel comprises a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, and an electron injection layer.
Wherein, the OLED device comprises a white light OLED device.
Wherein, the organic functional layer of the white OLED device comprises a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a charge generation layer.
Wherein, the TFT array substrate comprises: a substrate, a buffer layer disposed on the substrate, an active layer disposed on the buffer layer, a gate insulating layer disposed on the buffer layer and the active layer, a gate metal layer disposed on the gate insulating layer, an interlayer insulating layer disposed on the buffer layer, the active layer, and the gate metal layer, a source/drain metal layer disposed on the interlayer insulating layer, a passivation layer disposed on the source/drain metal layer, and a planarization layer disposed on the passivation layer; the interlayer insulating layer and the passivation layer are prepared using SiOx.
Wherein, the top-emitting OLED device comprises: a reflective anode disposed on the TFT array substrate, a pixel definition layer disposed on the TFT array substrate and the reflective anode, and an organic functional layer disposed on the reflective anode and the pixel definition layer, and a cathode disposed on an organic functional layer.
In summary, the organic light-emitting display panel of the present invention can reduce the diffusion of hydrogen atoms into the active layer of the metal oxide TFT, thereby improving the stability of the TFT.
To make the technical solution of the embodiments according to the present invention, a brief description of the drawings that are necessary for the illustration of the embodiments will be given as follows. Apparently, the drawings described below show only example embodiments of the present invention and for those having ordinary skills in the art, other drawings may be easily obtained from these drawings without paying any creative effort.
Refer to
In a preferred embodiment, the top-emitting OLED device is prepared on the planarization layer 9, and the planarization layer 9 is disposed with vias for connecting to the TFT devices in the TFT array substrate. The top-emitting OLED device mainly comprises: a reflective anode 30 disposed on the planarization layer 9, a pixel definition layer 20 disposed on the planarization layer 9 and the reflective anode 30, an organic functional layer 21 disposed on the reflective anode 30 and the pixel definition layer 20, and a transparent cathode 22 disposed on the organic functional layer 21; when a suitable voltage is applied to the reflective anode 30 and the cathode 22, the organic functional layer 21 emits light, and the reflective anode 30 reflects the light from the organic functional layer 21 to emit from the top. Specifically, the reflective anode 30 adopts an Ti/Ag/ITO three-layer structure including an titanium metal layer 31, an Ag metal layer 32, and an ITO layer 33. The titanium metal layer has a thickness of 20 nm to 100 nm.
In the preferred embodiment, the OLED device may comprise red, green and blue OLED sub-pixels arranged side by side. The organic functional layer of the OLED sub-pixel comprises, sequentially disposed on the reflective anode, a hole injection layer (HIL), a hole transport layer (HTL), an organic light-emitting layer (EML), an electron transport layer (ETL), and an electron injection layer (EIL). The OLED device may also be a white light OLED device, and the organic functional layer of the white OLED device comprises a hole injection layer, a hole transport layer, an organic light-emitting layer, an electron transport layer, an electron injection layer, and a charge generation layer (CGL).
In the preferred embodiment, the TFT array substrate comprises: a substrate 1, a buffer layer 2 disposed on the substrate 1, an active layer 3 disposed on the buffer layer 2, the active layer 3 forming a channel in the middle and having two ends connected respectively to a source and a drain of a TFT, a gate insulating layer 4 disposed on the buffer layer 2 and the active layer 3, a gate metal layer 5 disposed on the gate insulating layer 4, an interlayer insulating layer 6 disposed on the buffer layer 2, the active layer 3, and the gate metal layer 5, a source/drain metal layer 7 disposed on the interlayer insulating layer 6, a passivation layer 8 disposed on the source/drain metal layer 7, and a planarization layer 9 disposed on the passivation layer 8; devices such as a switching TFT, a driving TFT, and a storage capacitor are formed by a patterned active layer 3, a gate metal layer 5, and a source/drain metal layer 7 to form the TFT driving circuit to drive the pixels, wherein the interlayer insulating layer 6 and the passivation layer 8 are prepared using SiOx.
The present invention replaces the ITO at the bottom of the existing reflective anode with titanium metal, and the overall reflective anode structure is Ti/Ag/ITO. Since titanium is a hydrogen absorbing material, hydrogen atoms can be stored in the interstitial atom of titanium or react with titanium to form a hydrogenated state (TiHx; x=1.5 to 1.99). When a hydrogen atom enters the titanium metal, a higher activation energy is required to be released from the titanium metal. Therefore, when the hydrogen atoms in the interlayer insulating layer or the passivation layer start to diffuse due to the high temperature, as shown by the dotted arrow in
In summary, the organic light-emitting display panel of the present invention can reduce the diffusion of hydrogen atoms into the active layer of the metal oxide TFT, thereby improving the stability of the TFT.
It should be noted that each of the embodiments in this specification is described in a progressive manner, each of which is primarily described in connection with other embodiments with emphasis on the difference parts, and the same or similar parts may be seen from each other. For the device embodiment, since it is substantially similar to the method embodiment, the description is relatively simple and the relevant description may be described in part of the method embodiment.
Embodiments of the present invention have been described, but not intending to impose any unduly constraint to the appended claims. Any modification of equivalent structure or equivalent process made according to the disclosure and drawings of the present invention, or any application thereof, directly or indirectly, to other related fields of technique, is considered encompassed in the scope of protection defined by the clams of the present invention.
Number | Date | Country | Kind |
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201810785449.1 | Jul 2018 | CN | national |
Filing Document | Filing Date | Country | Kind |
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PCT/CN2018/107775 | 9/26/2018 | WO | 00 |