1. Technical Field
The present invention relates to an optical article in which a multilayer optical functional film is provided between a plurality of light transmissive members, for example, a prism, a polarization separation element, and other optical articles, and also relates to a process for producing the same.
2. Related Art
An optical article in which an optical functional film is formed between a plurality of optical members is used in an optical pickup, a liquid crystal projector, and other devices.
As such an optical article, for example, there are a prism in which a polarization separation film is provided as an optical functional film between four triangular prism-shaped members, a cross prism in which a dielectric multilayer film formed by alternately laminating a thin film of silicon dioxide (SiO2) having a low refractive index and a thin film of tantalum oxide (Ta2O5) having a high refractive index is provided between the bottoms of two prisms (Patent Document 1: JP-A-2007-78779), and a polarization separation element (PS converter) in which a polarization separation film obtained by alternately laminating a thin film having a high refractive index and a thin film having a low refractive index is sandwiched between two optical members each having a reflection film therein, and the two optical members with the polarization separation film therebetween are laminated one after another, and a retardation plate is provided on the side of the light emission surface of the polarization separation film interposed between the optical members.
As described above, an optical article in which a multilayer optical functional film is provided between a pair of optical members is produced by various methods. As a related example, there is a method in which a dielectric multilayer film is formed on the bonding surface of one of a pair of prism glasses in the form of a substantially triangular prism, a silicon dioxide layer constituting the uppermost layer of the dielectric multilayer film is formed by sputtering, and a silicon dioxide layer is formed on the bonding surface of the other prism glass by sputtering (Patent Document 2: JP-A-2007-219195).
In the related example shown in Patent Document 2, the uppermost layer made of silicon dioxide of the dielectric multilayer film is formed by sputtering, and therefore, an additional process for forming the uppermost layer of silicon dioxide is needed other than a process for forming the dielectric multilayer film, and thus, the productivity is not good. In general, an optical article is constituted of a film which is unsuitable for bonding, and therefore, it is essential to provide a low refractive index layer of silicon dioxide or the like as the uppermost layer. Accordingly, in the related example shown in Patent Document 2, the silicon dioxide film cannot be omitted or replaced by another film.
Moreover, in order for the silicon dioxide layer to have a smooth surface, a prism glass which is an underlying material is required to have smoothness (surface accuracy), and therefore, from this point of view, the productivity is not good.
An advantage of some aspects of the invention is to provide an optical article capable of increasing the productivity and a process for producing the optical article.
An optical article according to application example 1 of the invention has a plurality of light transmissive members and a plurality of optical functional films, wherein the plurality of light transmissive members are disposed to face one another; the optical functional film is disposed such that the optical functional film is sandwiched between the light transmissive members; a bonding layer that bonds a surface of the optical functional film to a surface of the light transmissive member is provided; the optical functional film is a multilayer film in which a plurality of low refractive index layers and a plurality of high refractive index layers are alternately arranged and a layer in contact with the side of the bonding layer is a high refractive index layer; and the bonding layer is a plasma-polymerized film having the same refractive index as that of the low refractive index layer.
In this application example having the above-mentioned configuration, the optical functional film is formed on one of the light transmissive members and the plasma-polymerized film is formed on either one of the other light transmissive members and the optical functional film, and a plurality of light transmissive members are bonded to one another by interposing the optical functional film and the plasma-polymerized film therebetween.
In this application example, the outermost layer of the optical functional film is a high refractive index layer and the plasma-polymerized film having a low refractive index is formed thereon, and therefore, it is not necessary to additionally provide a low refractive index layer which is formed as the outermost layer in the film structure of the related optical functional film, and thus, the productivity of the optical article is increased.
Application example 2 of the invention is directed to the optical article according to the above application example, wherein the plurality of light transmissive members are in the form of a triangular prism.
In this application example having this configuration, the productivity of a polarization separation element in which the optical functional film is a polarization separation film can be increased.
Application example 3 of the invention is directed to the optical article according to the above application example, wherein a bonded body of the plurality of light transmissive members disposed to face one another is in the form of a plate, and the bonded body has a light incidence surface and a light emission surface which are in parallel to each other, and on the light emission surface, a retardation plate is selectively provided.
In this application example having this configuration, the productivity of a polarization conversion element which converts incident light into polarization light can be increased.
Application example 4 of the invention is directed to a process for producing an optical article having a plurality of light transmissive members, an optical functional film interposed between the light transmissive members, and a bonding layer that bonds a surface of the optical functional film to a surface of the light transmissive member. The process includes an optical functional film forming step of alternately forming a low refractive index layer having a low refractive index and a high refractive index layer having a high refractive index on a surface of at least one of the plurality of light transmissive members, with the proviso that the outermost layer is formed of a high refractive index layer; a bonding layer forming step of forming a plasma-polymerized film having the same refractive index as that of the low refractive index layer on a surface of at least one of the plurality of light transmissive members and the optical functional film; a surface activating step of activating the plasma-polymerized film formed in the bonding layer forming step; and a bonding step of bonding the plurality of light transmissive members, the optical functional film, and the plasma-polymerized film to one another by interposing the optical functional film and the plasma-polymerized film between the light transmissive members.
In this application example having this configuration, a production process capable of increasing the productivity of an optical article can be provided.
Application example 5 of the invention is directed to the process for producing an optical article according to the above application example, wherein in the bonding layer forming step, the plasma-polymerized film is formed only on the optical functional film formed in the optical functional film forming step.
In this application example having this configuration, the plasma-polymerized film is formed only on the optical functional film, and this plasma-polymerized film is bonded to one of the light transmissive members. The density of the optical functional film is low, and therefore, the surface accuracy is slightly decreased. However, by forming the plasma-polymerized film on this optical functional film and bonding this plasma-polymerized film and the bonding surface in a mirror surface state of one of a first light transmissive member and a second light transmissive member to each other, a contact area is increased, resulting in increasing an intermolecular force. Accordingly, it becomes possible to omit a pressing operation in the bonding step, and the production steps can be simplified.
The invention will be described with reference to the accompanying drawings, wherein like numbers reference like elements.
Hereinafter, embodiments of the invention will be described with reference to the attached drawings. Here, in the description of the respective embodiments, the same symbols are assigned to the same constituent elements and the description thereof will be omitted or simplified.
A first embodiment of the invention will be described with reference to
In
The first light transmissive members 11 and the second light transmissive members 12 are arranged such that a plane on the light incidence side and a plane on the light emission side are in parallel to each other and the reflection film 14 and the polarization separation film 13 are arranged in parallel to each other at an angle with respect to these planes of 45°. In this embodiment, the polarization separation element 1 has a symmetric structure, and in the center of the polarization separation element 1, the retardation plates 15 are arranged side by side on the light emission surface side.
The first light transmissive member 11 and the second light transmissive member 12 which are the plurality of light transmissive members are formed of a glass such as an optical glass (such as BK7), a white plate glass, a borosilicate glass, or a blue plate glass.
As shown in
As shown in
Between the forty-fourth layer 1344 which is the outermost layer and the second light transmissive member 12, the bonding layer 16 is provided. This bonding layer 16 is formed of a plasma-polymerized film, and this plasma-polymerized film has the same refractive index as that of silicon dioxide constituting the low refractive index layer.
The reflection film 14 is a dielectric multilayer film constituted of an even number of layers in the same manner as the polarization separation film 13 shown in
The retardation plate 15 is a strip-shaped ½ wavelength plate, and the width dimension thereof corresponds to the dimension between the polarization separation film 13 and the reflection film 14. The retardation plate 15 is formed of quartz composed of single crystal of SiO2. This quartz may be either artificial quartz or natural quartz.
Subsequently, a process for producing an optical article according to the first embodiment will be described with reference to
A strip-shaped optical block 11A for forming the first light transmissive member 11 and a strip-shaped optical block 12A for forming the second light transmissive member 12 (see
On one surface of the strip-shaped optical block 11A, the polarization separation film 13 is formed. Due to this, first, a low refractive index layer is formed as a first layer on one plane of the strip-shaped optical block 11A, and thereon, a high refractive index layer is formed. The low refractive index layer and the high refractive index layer are alternately formed thereon, with the proviso that the outermost layer is formed of the high refractive index layer. The formation of these layers is performed by a method such as vapor deposition in the same manner as in the related art.
The bonding layer 16 constituted of a plasma-polymerized film is formed on the polarization separation film 13 provided on the strip-shaped optical block 11A using a plasma polymerization apparatus shown in
In
The power supply circuit 120 is provided with a matching box 121 and a high-frequency power source 122.
The gas supply unit 140 is provided with a liquid storage section 141 which stores a liquid membrane material, a vaporization device 142 which vaporizes the liquid membrane material to convert the material into a raw material gas, and a gas cylinder 143 which stores a carrier gas.
The liquid storage section 141, the vaporization device 142, the gas cylinder 143, and the chamber 101 are interconnected to one another by a pipe 102, and constitute a structure such that a mixed gas of the gaseous film material and the carrier gas is supplied to the inside of the chamber 101.
Examples of the raw material gas include organosiloxanes such as methylsiloxane and hexamethyldisiloxane; organometallic compounds such as trimethyl gallium, triethyl gallium, trimethyl aluminum, triethyl aluminum, triisobutyl aluminum, trimethyl indium, triethyl indium, trimethyl zinc, and triethyl zinc; a variety of hydrocarbon compounds, and a variety of fluorine compounds.
The plasma-polymerized film obtained by using such a raw material gas is constituted of a material obtained by polymerizing such a raw material (polymerized material), i.e., a polyorganosiloxane, an organometallic polymer, a hydrocarbon polymer, a fluorine polymer, or the like.
Subsequently, a procedure for forming the plasma-polymerized film will be described with reference to
As shown in
In the polymerized film forming step, by operating the gas supply unit 140, a mixed gas of a raw material gas and a carrier gas is supplied to the inside of the chamber 101. The chamber 101 is filled with the supplied mixed gas, and as shown in
By applying a high-frequency voltage between the first electrode 111 and the second electrode 112, the gas molecules present between the first electrode 111 and the second electrode 112 are ionized and plasma is generated. Due to the energy of the plasma, the molecules in the raw material gas are decomposed. The decomposed molecules are recombined to effect polymerization, and the polymerized material is attached and deposited on the surface of the uppermost layer of the polarization separation film 13 as shown in
Thereafter, as shown in
In the surface activating step, for example, a method of irradiation with plasma, a method of contacting with an ozone gas, a method of treatment with ozone water, a method of treatment with an alkali, or the like can be used.
The bonding layer 16 constituted of the plasma-polymerized film formed on the polarization separation film 13 on the strip-shaped optical block 11A and the strip-shaped optical block 12A are bonded to each other. Due to this, as shown in
Incidentally, in this embodiment, the reflection film 14 is formed on the strip-shaped optical blocks 11A and 12A provided with the polarization separation film 13 and the bonding layer 16 therebetween. To be more specific, on the plane of the strip-shaped optical block 12A of the strip-shaped optical blocks 11A and 12A, the reflection film 14 is formed by vapor deposition or the like in the same manner as the above-mentioned method for forming the polarization separation film 13, and then, the bonding layer 16 which is a plasma-polymerized film is formed such that the bonding layer 16 comes in contact with the uppermost layer of the reflection film 14. Then, to this bonding layer 16, the plane of the strip-shaped optical block 11A of the strip-shaped optical blocks 11A and 12A is bonded. This bonding is performed in a state where the position of the end of the strip-shaped optical blocks 11A and 12A in which the polarization separation film 13 is bonded therebetween by way of the bonding layer 16 is shifted for every two blocks 11A and 12A (see
A material obtained by laminating a plurality of the strip-shaped optical blocks 11A and 12A is cut into a predetermined shape.
As shown in
As shown in
As shown in
Two polarization separation films having different outermost layers were prepared and the transmittance of p-polarized light through the films was measured. One of the polarization separation films was a multilayer film having a silicon dioxide layer as the outermost layer, and the other polarization separation film was a multilayer film having a plasma-polymerized film as the outermost layer. As for the measurement of the transmittance of p-polarized light, by using a spectrophotometer manufactured by Hitachi Co., Ltd. and a polarizer, the ratio of the transmitted p-polarized light to the incident p-polarized light to a sample was measured.
Accordingly, in the first embodiment, the following operation effects can be obtained.
(1) A polarization separation film 13 in which a high refractive index layer and a low refractive index layer were alternately laminated to each other, with the proviso that the uppermost layer was formed of the high refractive index layer was formed on a first light transmissive member 11, and a bonding layer 16 was provided between the polarization separation film 13 and a second light transmissive member 12. Further, a reflection film 14 in which a high refractive index layer and a low refractive index layer were alternately laminated to each other, with the proviso that the uppermost layer was formed of the high refractive index layer was formed on the second light transmissive member 12, and the bonding layer 16 was provided between the reflection film 14 and the first light transmissive member 11. In this connection, these bonding layers 16 were each formed of a plasma-polymerized film having the same refractive index as that of the low refractive index layer. Accordingly, the film constituted of the polarization separation film 13 and the bonding layer 16 has the same film structure as that of the related polarization separation film, and in a similar way, the film constituted of the reflection film 14 and the bonding layer 16 has the same film structure as that of the related reflection film. Therefore, the optical characteristics of the polarization separation film 13 or the reflection film 14 are not deteriorated. Moreover, since the uppermost layer formed of the low refractive index layer in the related film structure turns out to be replaced by the bonding layer 16, the step of forming the low refractive index layer constituting the uppermost layer is omitted when the polarization separation film or the reflection film is formed, and therefore, the productivity of the polarization separation element 1 is increased.
(2) The low refractive index layer of the polarization separation film 13 or the reflection film 14 was formed of silicon dioxide, and the bonding layer 16 was formed of the plasma-polymerized film having the same refractive index as that of the silicon dioxide. Accordingly, the intermolecular distance between the plasma-polymerized film having the same refractive index as that of silicon dioxide and the plane of the first light transmissive member 11 or the second light transmissive member 12 is made appropriate, and an intermolecular attractive force occurs therebetween, and therefore, a strong bonding can be obtained.
(3) The plasma-polymerized film was formed only on the polarization separation film 13 or the reflection film 14, and this plasma-polymerized film is bonded to the mirror-finished plane of the second light transmissive member 12 or the first light transmissive member 11 which has higher surface accuracy than the polarization separation film or the reflection film, and therefore, there are a lot of contact points and a contact area is increased, resulting in increasing an intermolecular force. Accordingly, it becomes possible to omit a pressing operation in the bonding step, and the production steps can be simplified.
Subsequently, a second embodiment of the invention will be described with reference to
In the second embodiment, a prism 2 is exemplified as the optical article. The prism 2 is used as a polarization separation element for an optical pickup.
In
The first light transmissive member 21 and the second light transmissive member 22 are each a triangular prism-shaped member having a right-angled triangular end face. The shape and the length of the end faces of both members are the same.
The first light transmissive member 21 and the second light transmissive member 22 are formed of a glass such as an optical glass (such as BK7), a white plate glass, a borosilicate glass, or a blue plate glass, and are made of the same material.
The optical functional film 23 is a polarization separation film having a polarization separation action and is constituted of twenty-four layers. When the layer disposed on the side of the bottom of the first light transmissive member 21 is designated as a first layer 2301, the other layers from the layer next to the first layer 2301 to the layer on the side of the second light transmissive member 22 are designated as a second layer 2302, a third layer 2303, . . . , an eleventh layer 2311, a twelfth layer 2312, a thirteenth layer 2313, a fourteenth layer 2314, a fifteenth layer 2315, . . . , a twenty-third layer 2323, and a twenty-fourth layer 2324, respectively. Among these layers, the odd-numbered layers are each made mainly of silicon dioxide (SiO2) which is a low refractive index layer material, and the even-numbered layers are each made mainly of titanium dioxide (TiO2) which is a high refractive index layer material. That is, in this embodiment, a high refractive index layer and a low refractive index layer are alternately laminated to each other, and the twenty-fourth layer 2324 which is the uppermost layer is the high refractive index layer. A bonding layer 26 is provided between the twenty-fourth layer 2324 and the second light transmissive member 22. The bonding layer 26 is formed of a plasma-polymerized film, and the plasma-polymerized film has the same refractive index as that of silicon dioxide constituting the low refractive index layer. In this embodiment, the bonding layer 26 is formed by combining two plasma-polymerized films 26H together (see
Subsequently, a process for producing the optical article according to the second embodiment will be described with reference to
The twenty-four layers from the first layer 2301 to the twenty-fourth layer 2324 are formed on the first light transmissive member 21 using a method similar to that used in the related art such as vacuum vapor deposition, ion-assisted deposition, an ion-plating method, or a sputtering method.
A plasma polymerization apparatus 100 shown in
A procedure for forming the plasma-polymerized film 26H will be described with reference to
As shown in
In this polymerized film forming step, when a mixed gas of a raw material gas and a carrier gas is supplied to the inside of the chamber 101, as shown in
Thereafter, as shown in
In the bonding step, the plasma-polymerized film 26H formed on the optical functional film 23 and the plasma-polymerized film 26H formed on the second light transmissive member 22 are bonded and combined with each other to form the bonding layer 26. Therefore, as shown in
In this embodiment, as shown in
After the first light transmissive member 21 and the second light transmissive member 22 are pressed to each other, these members are heated (heating step). By heating the prism 2, a bonding strength can be increased.
The heating step is provided according to need, and the heating temperature is from 25 to 250° C., preferably from 50 to 100° C.
Accordingly, in the second embodiment, the same effects as described in the above-mentioned items (1) and (2) in the first embodiment can be obtained.
The invention is not limited to the above-mentioned embodiments and includes modifications shown below within a scope that can obtain the advantages of the invention.
For example, in the above-mentioned embodiments, the plasma-polymerized film constituting the bonding layer 16 or 26 is made of silicon dioxide (SiO2), however, in the invention, the plasma-polymerized film may be formed using a material other than silicon dioxide. To be more specific, in the invention, the bonding layer 16 or 26 has the same refractive index as that of the low refractive index layer of the polarization separation film 13, the reflection film 14, or the optical functional film 23, and therefore, the material of the plasma-polymerized film is determined according to the film structure of the polarization separation film 13, the reflection film 14, or the optical functional film 23. For example, in the case of a polarization separation film in which a high refractive index layer of magnesium oxide (MgO having a refractive index of 1.73) and a low refractive index layer of magnesium fluoride (MgF2 having a refractive index of 1.38) are alternately laminated to each other, the material of the plasma-polymerized film constituting the bonding layer is determined such that the resulting plasma-polymerized film has the same refractive index as that of magnesium fluoride constituting the low refractive index layer.
Further, in the above-mentioned embodiments, the first light transmissive members 11 and 21 and the second light transmissive members 12 and 22 are formed of a glass, however, in the invention, they may be formed of a material other than a glass, for example, a transparent plastic material such as a polycarbonate or acrylic plastic material.
Further, in the first embodiment, the bonding layer 16 which is a plasma-polymerized film is formed only on the polarization separation film 13 and the reflection film 14, however, this plasma-polymerized film may be formed only on the second light transmissive member 12 and the first light transmissive member 11, and further, it may be formed on all of the polarization separation film 13, the reflection film 14, the second light transmissive member 12, and the first light transmissive member 11. Meanwhile, in the second embodiment, the plasma-polymerized film 26H is formed on both of the optical functional film 23 and the second light transmissive member 22, however, it may be formed on either one of the optical functional film 23 and the second light transmissive member 22.
Further, in the invention, the optical article can be used in an optical device such as a camera other than an optical pickup or a liquid crystal projector.
The invention can be applied to an optical article to be used in an optical pickup, a liquid crystal projector, and other devices.
The entire disclosure of Japanese Patent Application Nos: 2009-078374, filed Mar. 27, 2009, 2010-010706 and filed Jan. 21, 2010 are expressly incorporated by reference herein.
Number | Date | Country | Kind |
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2009-078374 | Mar 2009 | JP | national |
2010-010706 | Jan 2010 | JP | national |