The present application is based on and claims priority of French patent application FR2013151 filed on Dec. 14, 2020 and entitled “Filtre angulaire optique”, which is incorporated herein by reference as authorized by law.
The present disclosure concerns an optical angular filter.
More particularly, the present disclosure concerns an angular filter intended to be used within an optical system, for example, an imaging system, or to be used to collimate the rays of a light source, particularly for an application of directional illumination by an organic light-emitting diode (OLED), liquid crystal display (LCD), or by a light-emitting diode, possibly coupled to a waveguide or an application of optical inspection, for example, of fingerprint or vein capture.
An angular filter is a device enabling to filter an incident radiation according to the incidence of this radiation and thus to block rays having an incidence greater than a maximum incidence. Angular filters are frequently used in association with image sensors.
There is a need to improve known angular filters.
An embodiment overcomes all or part of the disadvantages of known angular filters.
An embodiment provides an angular filter for an image acquisition device comprising a stack comprising:
According to an embodiment, said layer comprises a plurality of sub-layers.
According to an embodiment, the refraction index of each sub-layer is different from the refraction index of the sub-layer that it covers by at least 0.15, preferably 0.2.
According to an embodiment, the layer is an interference filter.
According to an embodiment, the layer is a fiber optic panel.
According to an embodiment, the layer comprises a group of optical fibers.
According to an embodiment, the layer comprises a group of parallel optical fibers, each surrounded with an opaque material.
According to an embodiment, the layer corresponds to a microstructured layer that can be assimilated to a photonic crystal, the microstructured layer having a resolution greater than the resolution of the array of microlenses.
According to an embodiment, the layer comprises a film of a first material transparent to said radiation crossed by pillars of a second material transparent to said radiation arranged in an array.
According to an embodiment, the array of microlenses is located between the array and the layer.
According to an embodiment, the layer is located between the array of microlenses and the array.
According to an embodiment, the array is located between the array of microlenses and the layer.
According to an embodiment, the first maximum incidence which corresponds to the half width at half maximum of the transmittance is smaller than 10°, preferably smaller than 4°.
According to an embodiment, the first maximum incidence which corresponds to the half width at half maximum of the transmittance is greater than 15° and smaller than 60°.
According to an embodiment, the first maximum incidence is smaller than or equal to 30°.
According to an embodiment, the openings are filled with air, with a partial vacuum, or with a material at least partially transparent in the visible and infrared ranges.
According to an embodiment:
An embodiment provides an image acquisition device comprising an angular filter such as described hereabove and an image sensor.
The foregoing features and advantages, as well as others, will be described in detail in the rest of the disclosure of specific embodiments given by way of illustration and not limitation with reference to the accompanying drawings, in which:
Like features have been designated by like references in the various figures. In particular, the structural and/or functional features that are common among the various embodiments may have the same references and may dispose identical structural, dimensional and material properties.
For the sake of clarity, only the steps and elements that are useful for an understanding of the embodiments described herein have been illustrated and described in detail. In particular, the forming of the image sensor and of the elements other than the angular filter has not been detailed, the described embodiments and implementation modes being compatible with usual embodiments of the sensor and of these other elements.
In the following disclosure, when reference is made to absolute positional qualifiers, such as the terms “front”, “back”, “top”, “bottom”, “left”, “right”, etc., or to relative positional qualifiers, such as the terms “above”, “below”, “upper”, “lower”, etc., or to qualifiers of orientation, such as “horizontal”, “vertical”, etc., reference is made, unless specified otherwise, to the orientation of the figures.
Unless specified otherwise, the expressions “around”, “approximately”, “substantially” and “in the order of” signify within 10%, and preferably within 5%.
Unless specified otherwise, the expressions “all the elements”, “each element”, signify between 95% and 100% of the elements.
Unless specified otherwise, the expression “it only comprises the elements” signifies that it comprises, by at least 90%, the elements, preferably that it comprises, by at least 95%, the elements.
For the needs of the present disclosure, the refraction index of a medium is defined as being the refraction index of the material forming the medium for the wavelength range of the radiation captured by the image sensor. The refraction index is considered as substantially constant over the wavelength range of the useful radiation, for example, equal to the average of the refraction index over the wavelength range of the radiation captured by the image sensor.
In the following description, unless specified otherwise, a layer or a film is called opaque to a radiation when the transmittance of the radiation through the layer or the film is smaller than 10%. In the following description, a layer or a film is called transparent to a radiation when the transmittance of the radiation through the layer or the film is greater than 10%. According to an embodiment, for a same optical system, all the elements of the optical system which are opaque to a radiation have a transmittance which is smaller than half, preferably smaller than one fifth, more preferably smaller than one tenth, of the lowest transmittance of the elements of the optical system transparent to said radiation. In the rest of the disclosure, there is called “useful radiation” the electromagnetic radiation crossing the optical system in operation. In the following description, there is called “micrometer-range optical element” an optical element formed on a surface of a support having a maximum dimension, measured parallel to said surface, greater than 1 μm and smaller than 1 mm.
Embodiments of optical systems will now be described for optical systems comprising an array of micrometer-range optical elements in the case where each micrometer-range optical element corresponds to a micrometer-range lens, or microlens, formed of two diopters. It should however be clear that these embodiments may also be implemented with other types of micrometer-range optical elements, where each micrometer-range optical element may for example correspond to a micrometer-range Fresnel lens, to a micrometer-range index gradient lens, or to a micrometer-range diffraction grating.
In the rest of the description, there is called visible light an electromagnetic radiation having a wavelength in the range from 400 nm to 700 nm, and, in this range, red light an electromagnetic radiation having a wavelength in the range from 600 nm to 700 nm. There is called infrared radiation an electromagnetic radiation having a wavelength in the range from 700 nm to 1 mm. In infrared radiation, one can particularly distinguish near infrared radiation having a wavelength in the range from 700 nm to 1.7 μm.
Image acquisition system 11, illustrated in
Processing unit 15 preferably comprises means for processing the signals delivered by device 11, not shown in
Device 13 and processing unit 15 are preferably coupled by a link 17. Device 13 and processing unit 15 are for example integrated in a same circuit.
The image acquisition device 19 shown in
In the present disclosure, the embodiments of the devices of
Image sensor 21 comprises an array of photon sensors 25, also called photodetectors. Photodetectors 25 are preferably arranged in array form. Photodetectors 25 may be covered with a protective coating, not shown. Photodetectors 25 preferably all have the same structure and the same properties/characteristics. In other words, all photodetectors 25 are substantially identical, to within manufacturing differences. Image sensor 21 further comprises conductive tracks and switching elements, particularly transistors, not shown, allowing the selection of photodetectors 25.
Photodetectors 25 are preferably made of organic materials. Photodetectors 25 are for example organic photodiodes (OPDs) integrated on a CMOS (Complementary Metal Oxide Semiconductor) substrate or a substrate with thin film transistors (TFTs). The substrate is for example made of silicon, preferably, of single-crystal silicon. The channel, source, and drain regions of the TFT transistors are for example made of amorphous silicon (a-Si), of indium gallium zinc oxide (IGZO), or of low temperature polycrystalline silicon (LIPS).
The photodiodes 25 of image sensor 21 comprise, for example, a mixture of organic semiconductor polymers, for example poly(3-hexylthiophene) or poly(3-hexylthiophene-2,5-diyl), known as P3HT, mixed with [6,6]-phenyl-C61-butyric acid methyl ester (N-type semiconductor), known as PCBM.
The photodiodes 25 of image sensor 21 for example comprise small molecules, that is, molecules having molar masses smaller than 500 g/mol, preferably, smaller than 200 g/mol.
Photodiodes 25 may be non-organic photodiodes, for example, formed based on amorphous silicon or on crystalline silicon. As an example, photodiodes 25 comprise quantum dots.
According to an embodiment, each photodetector 25 is adapted to detecting visible radiation and/or infrared radiation.
Angular filter 23 comprises:
According to an embodiment, the array 27 of microlenses 29 is formed on top of and in contact with a substrate or support 30, substrate 30 then being interposed between microlenses 29 and array 31.
Substrate 30 may be made of a transparent polymer which does not absorb, at least, the considered wavelengths, here in the visible and/or infrared range. This polymer may in particular be poly(ethylene terephthalate) (PET), poly(methyl methacrylate) (PMMA), cyclic olefin polymer (COP), polyimide (PI), polycarbonate (PC). The thickness of substrate 30 may vary between 1 μm and 100 μm, preferably between 10 μm and 100 μm. Substrate 30 may correspond to a colored filter, to a polarizer, to a half-wave plate or to a quarter-wave plate.
Lenses 29 may be made of silica, of PMMA, of positive resist, of PET, of poly(ethylene naphthalate) (PEN), of COP, of polydimethylsiloxane (PDMS)/silicone, of epoxy resin, or of acrylate resin. Microlenses 29 may be formed by creeping of resist blocks. Microlenses 29 may further be formed by molding on a layer of PET, of PEN, of COP, of PDMS/silicone, of epoxy resin, or of acrylate resin. Microlenses 29 are converging lenses, each having a focal distance f in the range from 1 μm to 100 μm, preferably from 1 μm to 70 μm. According to an embodiment, all the microlenses 29 are substantially identical.
According to the present embodiment, microlenses 29 and substrate 30 are preferably made of materials which are transparent or partially transparent, that is, transparent in a portion of the spectrum considered for the targeted field, for example, imaging, over the wavelength range corresponding to the wavelengths used during the exposure of an object to be imaged.
The planar surfaces of microlenses 29 face openings 33.
Call “h” the thickness of walls 35. Walls 35 are, for example, opaque to the radiation detected by photodetectors 25, for example absorbing and/or reflective with respect to the radiation detected by photodetectors 25. As an example, walls 35 absorb and/or reflect in the visible range and/or near infrared and/or infrared. Walls 35 are, for example, opaque to wavelengths in the range from 400 nm to 600 nm, used for imaging (for example, biometry and fingerprint imaging).
In the present description, there is called upper surface of layer 31 the surface of layer 31 located at the interface between layer 31 and substrate 30. There is further called lower surface of layer 31 the surface of layer 31 located opposite to the upper surface.
In
According to an embodiment, openings 33 are arranged in rows and in columns. Openings 33 may have all substantially the same dimensions. Call “w1” the width of openings 33 at the interface with the substrate or microlenses 29 and “w2” the width of openings 33 at the interface with layer 37. Call “p” the repetition pitch of openings 33, that is, the distance, along the X axis or the Z axis, between the centers of two successive openings 33 of a row or of a column.
Each opening 33 is preferably associated with a single microlens 29. The optical axes of microlenses 29 are preferably aligned with the centers of the openings 33 of array 31. The diameter of microlenses 29 is preferably greater than the maximum width (measured perpendicularly to the optical axes) of openings 33.
Pitch p may be in the range from 5 μm to 100 μm, for example, equal to approximately 15 μm. Height h may be in the range from 1 μm to 1 mm, preferably be in the range from 12 μm to 20 μm. Width w1 may, preferably, be in the range from 5 μm to 100 μm, for example be equal to approximately 10 μm. Width w2 may preferably be in the range from 1 μm to 100 μm, for example be equal to approximately 2 μm.
According to the embodiment illustrated in
The structure associating the array 27 of microlenses 29 and array 31 is adapted to filtering the incident radiation according to the incidence of the radiation relative to the optical axes of the microlenses 29 or array 27 which, in
Openings 33 are for example filled with air, with partial vacuum, or with a material at least partially transparent in the visible and infrared ranges. The filling material of openings 33 forms, preferably, a layer 37 at the lower surface of array 31 to cover walls 35 and planarize said lower surface of array 31.
Microlenses 29 are preferably covered with a planarization layer 39. Layer 39 is made of a material at least partially transparent in the visible and infrared ranges. As an example, layer 39 has a refraction index smaller than the refraction index of the material forming microlenses 29.
According to the embodiment illustrated in
Layer 41 is adapted to filtering the incident radiation according to the incidence of the radiation relative to the Y axis. Layer 41 is adapted to only letting through rays having an incidence smaller than the first maximum incidence. In other words, layer 41 is adapted to only letting through rays, arriving onto the upper surface of layer 41, having an incidence smaller than the first maximum incidence. The first maximum incidence is preferably greater than 15°. The first maximum incidence is preferably smaller than 60°, preferably smaller than or equal to 30°.
The structure comprises the array 27 of microlenses 29 and the array 31 of openings 33 theoretically enables to block all the rays having an incidence greater than the second maximum incidence. However, in practice, it can be observed that certain rays having incidences greater than the first maximum incidence however succeed in crossing first array 31. These are rays having incidences greater than the first maximum incidence which reach a microlens 29 and pass through the underlying opening 33 of a neighboring microlens 29. This phenomenon is called optical crosstalk or parasitic coupling and may cause a decrease in the resolution of photodetectors 25 or in the contrast of the obtained image. Layer 41 aims at blocking rays having incidences greater than the second maximum incidence and which might cause optical crosstalk.
According to the embodiment illustrated in
According to the embodiment illustrated in
As an example, the refraction index of sub-layer 411 is greater by 0.15, preferably 0.2, than the refraction index of sub-layer 413. Still as an example, the refraction index of sub-layer 413 is greater by 0.15, preferably 0.2, than the refraction index of sub-layer 415. Still as an example, the refraction index of sub-layer 415 is greater by 0.15, preferably 0.2, than the refraction index of sub-layer 417.
According to a variant, not shown, the previously-described function of filtering by layer 41 with a multilayer structure may be obtained by the association of a single layer covering layer 39. This single layer then has a refraction index greater by at least 0.15, preferably by at least 0.2, than the refraction index of layer 39.
Sub-layers 411, 413, 415, and 417 are preferably made of different materials. Sub-layers 411, 413, 415, and 417 may for example be made of same chemical compounds in different proportions, have refractions indexes decreasing from layer 411 to layer 417 to deviate the rays.
As an example, layer 41 is formed of a plurality of sub-layers alternatively formed based on silicon nitride (Si3N4) and on air or on a polymer such as polyethylene terephthalate (PET). Layer 41 for example has a thickness in the range from 10 nm to 10 μm, preferably from 50 nm to 1 μm.
Layer 41 is preferably transparent to the wavelengths of the considered application.
According to the embodiment illustrated in
In
Rays 45 and 47 are shown in layer 41 by dotted lines which only show the direction resulting from these rays as they come out of layer 41. In reality, rays 45 and 47 are refracted at each change of sub-layers of layer 41, as shown for rays 49.
According to the embodiment illustrated in
According to the embodiment illustrated in
According to the embodiment illustrated in
According to the embodiment illustrated in
At the output of angular filter 23, image sensor 21 then only captures rays 43 and 45.
In the embodiment of
More particularly,
The graph illustrated in
In practice, the association of the array of microlenses 29 and of array 31, respectively, array 41, does not enable to fully block rays having an incidence greater than the second maximum incidence, respectively the first maximum incidence. It is then spoken of a blocking value, that is, the second maximum incidence value, respectively the first maximum incidence value, as being the half width at half maximum of the transmittance, or the half width at half maximum of curve 70, respectively curve 71. In other words, rays having an incidence equal to this value are blocked at 50%, rays having an incidence greater than this value are mostly non-blocked, and rays having an incidence smaller than this value are mostly blocked by the association of the array of microlenses and of first array 31, respectively by second array 41.
With the previously-indicated dimensions, the half width at half maximum of curve 70 or the half width at half maximum of the transmittance of the assembly formed by the array 27 of microlenses 29 and array 31 (HWHM: Half Width Half Maximum) is equal to approximately 3.5° and the half width at half maximum of curve 71 or half width at half maximum of the transmittance of layer 41 is equal to approximately 20°.
First curve 70 comprises two second peaks, called secondary peaks, for incidences of approximately 25° and −25°. The transmittance, of rays having an incidence equal to approximately 25°, is approximately equal to 0.05. These secondary peaks correspond to the passage, through the array of microlenses 29 and array 31, of rays having incidences in the range from approximately 20° to approximately 40°, captured by a photodetector 25 next to the photodetector 25 underlying the microlens 29 or the opening 33 crossed by the ray.
Second curve 71 is characteristic of a bandpass filter letting through rays having incidences between −20° and 20°.
Mathematically, the values of curve 73 correspond to a multiplication of the value of curve 70 and of the value of curve 71 for a same given incidence. Third curve 73 has, as compared with curve 70, no secondary peaks. The transmittance of the rays beyond 20° then tends towards 0.
More particularly,
The inventors have indeed observed that an interference filter also behaves as an angular filter due to its angular tolerance. In other words, the cut-off wavelength range depends on the incidence. Indeed, an interference filter blocks, for each incidence, a different wavelength range.
For example, a ray 53 having a wavelength λ1 is blocked (reflected and/or absorbed) if its incidence is greater than an angle θ1 while a ray 55 having a wavelength λ2 is blocked (reflected and/or absorbed) if its incidence is greater than an angle θ2 different from angle θ1.
According to an embodiment, layer 41 is formed by the stacking of a plurality of layers having different refraction indexes. As an example, layer 41 comprises an alternation of first layers of a first material having a first refraction index and of second layers of a second material having a second refraction index different from the first refraction index. As an example, layer 41 comprises an alternation of layers made of magnesium fluoride and of layers made of alumina or an alternation of layers made of tantalum pentoxide and of layers made of silicon dioxide. As a variant, layer 41 comprises an alternation of layers made of one or a plurality of materials from the list: magnesium fluorine, tantalum pentoxide, silicon dioxide, trititanium pentoxide, hafnium dioxide. Layer 41 may further comprise an alternation of layers made of gold, of silver, of chromium, of nickel, or of aluminum, or of one or a plurality of their derivatives.
As a variant, the layer 41 illustrated in
In the embodiment of
More particularly,
Layer 41 corresponds to the gathering of a plurality of optical fibers placed next to each other and arranged substantially parallel to the Y axis.
According to the embodiment illustrated in
As an example, as shown in
The angular selection of the optical fibers is due to the difference in refraction index between the core 61 and the sheath 63 of the fibers. The optical fibers have a digital aperture which thus depends on the refraction indexes of core 61 and of sheath 62. The digital aperture of the fibers is calculated by the following formula:
ON=√{square root over (index of core 612−index of sheath 632)} [Math 1]
The maximum incidence particularly depends on the characteristics of the optical fibers, on the thickness of layer 41.
As an example, each optical fiber has a substantially cylindrical shape with a circular base. The outer diameter of an optical fiber is for example in the range from 6 μm to 25 μm.
According to the embodiment illustrated in
In the embodiment of
More particularly,
Layer 41 preferably corresponds to a structured layer such as a photonic crystal, that is, it is a layer made of a first material having a first refraction index crossed by pillars 67 extending along the Y axis and arranged in an array, pillars 67 being made of a second material having a second refraction index different from the first refraction index, the first and second materials being transparent to the incident radiation.
Pillars 67 have, in
The properties of the photonic crystal, particularly the dimensions of pillars 67 and the arrangement of pillars 76 in an array, are selected so that the combination of layer 41 and of the structure associating the array 27 of microlenses and the array 31 of openings 33 enables to completely block incident rays having an incidence greater than the first maximum incidence. The total blocking of incident rays having an incidence greater than the first maximum incidence enables to decrease, or even to suppress, the optical crosstalk.
In the embodiment of
Various embodiments and variants have been described. Those skilled in the art will understand that certain features of these various embodiments and variants may be combined, and other variants will occur to those skilled in the art. The described embodiments are for example not limited to the examples of dimensions and of materials mentioned hereabove.
Finally, the practical implementation of the described embodiments and variations is within the abilities of those skilled in the art based on the functional indications given hereabove.
Number | Date | Country | Kind |
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20/13151 | Dec 2020 | FR | national |
Filing Document | Filing Date | Country | Kind |
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PCT/EP2021/082404 | 11/22/2021 | WO |