Number | Date | Country | Kind |
---|---|---|---|
61-82810 | Apr 1986 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3742952 | Vossberg | Apr 1973 | |
3969573 | Bouwhuis et al. | Jul 1976 | |
4037929 | Bricot et al. | Jul 1977 | |
4053232 | Dill et al. | Oct 1977 | |
4272651 | Yoshida et al. | Jun 1981 | |
4409631 | Matsumoto | Oct 1983 | |
4546463 | Opheij et al. | Oct 1985 | |
4551733 | Cornet et al. | Nov 1985 | |
4558440 | Tomita | Dec 1985 | |
4561032 | Matsumoto et al. | Dec 1985 | |
4633457 | Yamamoto | Dec 1986 | |
4672593 | Ojima et al. | Jun 1987 | |
4682311 | Matsubayashi et al. | Jul 1987 |
Number | Date | Country |
---|---|---|
57-74701 | Nov 1982 | JPX |
8200393 | Feb 1982 | NLX |
Entry |
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"Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry": vol. 67A, No. 4, Jul.-Aug. 1963, Journal of Research of the National Bureau of Standards A. Physics and Chemistry. |