Number | Name | Date | Kind |
---|---|---|---|
4243297 | Elion | Jan 1981 | A |
4365863 | Broussaud | Dec 1982 | A |
4421381 | Ueda et al. | Dec 1983 | A |
4598585 | Boxenhorn | Jul 1986 | A |
4611886 | Cline et al. | Sep 1986 | A |
4654663 | Alsenz et al. | Mar 1987 | A |
4848999 | Taylor | Jul 1989 | A |
4892388 | Taylor | Jan 1990 | A |
4900119 | Hill et al. | Feb 1990 | A |
4922756 | Henrion | May 1990 | A |
4923273 | Taylor | May 1990 | A |
4941724 | Couden et al. | Jul 1990 | A |
5016072 | Greiff | May 1991 | A |
5083857 | Hornbeck | Jan 1992 | A |
5097354 | Goto | Mar 1992 | A |
5172262 | Hornbeck | Dec 1992 | A |
5203208 | Bernstein | Apr 1993 | A |
5204922 | Weir et al. | Apr 1993 | A |
5226321 | Varnham et al. | Jul 1993 | A |
5450512 | Asakura | Sep 1995 | A |
5488862 | Neukermans et al. | Feb 1996 | A |
5524153 | Laor | Jun 1996 | A |
5536988 | Zhang et al. | Jul 1996 | A |
5555330 | Pan et al. | Sep 1996 | A |
5568575 | Sato | Oct 1996 | A |
5629790 | Neukermans et al. | May 1997 | A |
5642447 | Pan et al. | Jun 1997 | A |
5642448 | Pan et al. | Jun 1997 | A |
5652814 | Pan et al. | Jul 1997 | A |
5673139 | Johnson | Sep 1997 | A |
5889904 | Pan et al. | Mar 1999 | A |
5900983 | Ford et al. | May 1999 | A |
5920417 | Johnson | Jul 1999 | A |
5960133 | Tomlinson | Sep 1999 | A |
5982554 | Goldstein et al. | Nov 1999 | A |
6000280 | Miller et al. | Dec 1999 | A |
6023542 | Pan et al. | Feb 2000 | A |
6049412 | Bergmann et al. | Apr 2000 | A |
6055998 | Bader | May 2000 | A |
6097858 | Laor | Aug 2000 | A |
6097859 | Solgaard et al. | Aug 2000 | A |
6097860 | Laor | Aug 2000 | A |
6101299 | Laor | Aug 2000 | A |
6198858 | Pan et al. | Mar 2001 | B1 |
6201622 | Lobbett et al. | Mar 2001 | B1 |
6208784 | Glen et al. | Mar 2001 | B1 |
6226425 | Chang-Hasnain et al. | May 2001 | B1 |
6236481 | Laor | May 2001 | B1 |
6240222 | Bergmann | May 2001 | B1 |
6249626 | Bergmann | Jun 2001 | B1 |
6253001 | Hoen | Jun 2001 | B1 |
6278812 | Lin et al. | Aug 2001 | B1 |
6289145 | Solgaard et al. | Sep 2001 | B1 |
6314115 | Delfyett et al. | Nov 2001 | B1 |
Number | Date | Country |
---|---|---|
1 120677 | Aug 2001 | EP |
2 175 705 | Dec 1986 | GB |
60-107017 | Jun 1985 | JP |
5-107485 | Apr 1993 | JP |
6-180428 | Jun 1994 | JP |
Entry |
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Robert E. Mihailovich, Z. L. Zhang, K. A. Shaw, and Noel C. MacDonald, “Single-Crystal Silicon Torsional Resonators.” School of Electrical Engineering, Cornell University, Ithaca, NY 14853, pp. 184-188, IEEE (Feb. 1993). |
Lin L. Y. et al., “Micro-electro-mechanical systems (MEMS) for WDM optical-crossconnect networks” Military Communications Conference Proceedings, 1999. Milcom 1999. IEEE Atlantic City, NJ, USA Oct. 31—Nov. 3, 1999, Pisxataway, NJ, USA, IEEEE, US, Oct. 31, 1999, pp. 954-957, XP01036982, ISBN: 0-7803-5538-5. |
PCT Search Report, International Application No. PCT/US 01/40800, May 24, 2001, 4 pages. |