1. Field of the Invention
The field of the invention relates to microelectromechanical systems (MEMS).
2. Description of the Related Technology
Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
The system, method, and devices of the invention each have several aspects, no single one of which is solely responsible for its desirable attributes. Without limiting the scope of this invention, its more prominent features will now be discussed briefly. After considering this discussion, and particularly after reading the section entitled “Detailed Description of Certain Embodiments” one will understand how the features of this invention provide advantages over other display devices.
In one embodiment, a display is provided, the display comprising: a light-modulating array comprising a plurality of light-modulating elements including first and second optical surfaces, the second optical surface movable with respect to the first optical surface; and a plurality of elements configured to limit a field-of-view of the display.
In another embodiment, a display is provided, the display comprising: a light-modulating array comprising a plurality of light-modulating elements including first and second optical surfaces, the second optical surface movable with respect to the first optical surface; and a diffuser element forward of the array configured to diffuse light such that light incident on the diffuser element is directed to the light-modulating elements more collimated than the incident light.
In another embodiment, a method of manufacturing a display is provided, the method comprising: forming a light-modulating array comprising a plurality of light-modulating elements including first and second optical surfaces, the second optical surface movable with respect to the first optical surface; and forming a plurality of elements configured to limit a field-of-view of the display.
In another embodiment, a method of manufacturing a display is provided, the method comprising: forming a light-modulating array comprising a plurality of light-modulating elements including first and second optical surfaces, the second optical surface movable with respect to the first optical surface; and forming a diffuser element forward of the array configured to receive light incident at a wide range of angles and direct the light into at a narrower range of angles onto the light-modulating elements.
In another embodiment, a display is provided, the display comprising: a light-modulating array comprising a plurality of light-modulating elements including first and second optical surfaces, the second optical surface movable with respect to the first optical surface; and means for limiting the field-of-view of the light-modulating elements.
FIGS. 14B1 and 14B2 show different configurations for delivering light from a light source to the interferometric modulators device.
Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that reduce the field-of-view of the display. These structures may comprise, for example, baffles or non-imaging optical elements such as compound parabolic collectors. The baffles may comprise a plurality of vertically aligned surfaces arranged, e.g., in a grid. In certain preferred embodiments these baffles are opaque or reflective. These vertical surfaces, therefore, can substantially block light from exiting the interferometric display device in a substantially non-perpendicular direction. These vertical surfaces may, however, permit light directed in a substantially vertical direction to exit the display. The non-imaging optical elements, e.g., compound parabolic collectors, redirect light from large incident angles into more normal angles towards the display. As a result, the light reflected by the display to the user is also at a more normal angle.
One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in
The depicted portion of the pixel array in
The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise of several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. In some embodiments, the layers are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device.
With no applied voltage, the cavity 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in
In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The cross section of the array illustrated in
In typical applications, a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines. The asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row. A pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes. The row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention.
In the
The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 44, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes as are well known to those of skill in the art, including injection molding, and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including but not limited to plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.
The display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device, as is well known to those of skill in the art. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.
The components of one embodiment of exemplary display device 40 are schematically illustrated in
The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one ore more devices over a network. In one embodiment the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna known to those of skill in the art for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.
In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.
Processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.
In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. Conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. Conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.
The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware, embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.
Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.
In one embodiment, the driver controller 29, array driver 22, and display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display). In one embodiment, a driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).
The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40.
Power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, power supply 50 is a renewable energy source, a capacitor, or a solar cell, including a plastic solar cell, and solar-cell paint. In another embodiment, power supply 50 is configured to receive power from a wall outlet.
In some implementations control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some cases control programmability resides in the array driver 22. Those of skill in the art will recognize that the above-described optimization may be implemented in any number of hardware and/or software components and in various configurations.
The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example,
In embodiments such as those shown in
As described above, a picture element (pixel) from a direct-view display may comprise elements such as the one shown in
Various embodiments, include improvements that can be made to an interferometric modulator device using various optical films. The optical films include films that come on rolls or in sheets. The film is attached to or near the interferometric modulator, and positioned so that light reflected from the interferometric modulator passes through the film as it propagates to a viewer. The optical films can also include coatings that are spread, sputtered or otherwise deposited on a surface of the interferometric modulator so that light reflected from the interferometric modulator passes through the film as it propagates to a viewer.
The films are generally disposed on an external surface of the interferometric modulator so that desirable optical characteristics can be achieved without changing the interferometric modulator itself. “External” as used herein refers to a placement of the film outside of the fabricated interferometric modulator, e.g., on the outer surface of the substrate of an interferometric modulator, such that the external film can be applied after fabricating the interferometric modulator display. The external film may be disposed on or near the surface of the interferometric modulator which first receives incident light, which is referred to herein as the outer surface of the interferometric modulator. This outer surface is also the surface that is positioned proximal to a person viewing the interferometric modulator. The external film may be on the layers that form the interferometric modulator or may be formed on one or more layers formed on the interferometric modulator. Although various embodiments are generally described herein as being external to the interferometric modulator display, these types of films can also be fabricated inside the interferometric modulator in other embodiments, and/or characteristics of the external films described can be incorporated into the interferometric modulator, e.g., during fabrication of the interferometric modulator, to achieve a similar effect.
As illustrated in
The external film 110 can be fabricated in a variety of ways, including for example, using fabrication techniques where the external film 110 is poured, spun, deposited on or laminated to the display. In some embodiments, the external film 110 is a single film layer, while in other embodiments the external film 110 includes more than one film layer. If the external film 110 comprises more than one film layer, each film layer can have different properties that affect one or more characteristics of light reflecting from the spatial light modulator 105 and propagating through the external film 110. Each layer of a multi-layer external film 110 can be fabricated by the same film fabrication technique or a different film fabrication technique, for example, any single layer can, for example, be poured, spun, deposited on or laminated to an adjacent layer. Other orientations and configurations are also possible.
Referring to
In other embodiments, the external film may be disposed above the monochrome or black and white interferometric modulator. As illustrated by
In certain embodiments, the external film can diffuse light reflecting from the interferometric modulator display. The light reflecting from the interferometric modulator display may be at least partially diffuse so that the display has an appearance similar to paper (e.g., the display appears diffusely reflecting).
Referring to
Diffuse film 305 can be fabricated from a number of materials, and can include one or more layers of diffuse material. The diffuser 305 may include material with surface variation (e.g. corrugations and roughness) or variation in material. This variation can refract or scatter light in different embodiments. A wide variety of diffusers 305 are possible and not limited to those recited herein.
In some embodiments, the external diffuse film 305 includes a material that changes the spectral characteristics of the reflected light 403 and a material that changes the diffuse or specular characteristics of the reflected light. Such material can be included in a single layer of the external film 305, 405 (
As mentioned above, some type of diffuser is useful on interferometric modulator displays where it is desired that the display 300, 400 has the appearance of paper rather than the appearance of a mirror. Of course, in some embodiments it can be desirable for the appearance of the display 300, 400 or a portion of the display to be highly reflective or “mirror-like,” and in these embodiments the display may have a diffuse film 305, 405 covering all or only a portion of the interferometric display device 305, 405. In some embodiments, an optically transmissive layer is “frosted” in order to achieve the desired diffusion. For example, the outer surface of the display 105 (
In some embodiments, it can be advantageous to include a light source (referred to herein as a “front light”) to provide additional light to the interferometric modulator, e.g., for viewing the interferometric modulator in dark or low ambient lighting conditions. Referring to
Referring to
Referring now to
Referring now to
The baffle structures 603 may be constructed in accordance with embodiments depicted in
The baffle structures 603 may also be constructed in accordance with other embodiments such as described with reference to
As depicted in
In certain embodiments, the baffle structures 603 shown in
In some embodiments, an interferometric modulator can incorporate a user input device that can also change a characteristic of light reflected from the interferometric modulator. For example, the display 700 in
In other embodiments depicted in FIGS. 14B1 and 14B2, the display 800 with a touchscreen 705 may also include a contoured light guide. For example, in FIG. 14B1, the inner portion 720 of the touchscreen 705 may comprise a plate or layer 760a with a contoured, e.g., grooved, surface 765. This contoured surface 765 may include a plurality of slanted portions. This surface 765 may have, for example, a sawtooth shape. A transmissive material 760b may then be placed in the contours or grooves of the surface 765 to form a substantially planer surface 760c above the plate/layer 760a. The light source 740 directs light 719 into the plate or layer 760a, where the light 719 is optically guided. The light propagating in the plate 760a reflects off the slanted portion of the surface 765 and travels towards the spatial light modulator 105. In the embodiments using the light guiding plate or layer 760a, or any other suitable light guide, a diffuser material may be incorporated into the display 800 above or below the plate 760a. For example, the diffusing material may be within the outer portion 715 of the touchscreen 705 or on the outer surface 754 of the spatial light modulator 105.
In an alternative embodiment depicted in FIG. 14B2, the plate or layer 760a may be placed between the touchscreen 705 and the spatial light modulator 105. In this embodiment, the transmissive material 760b (FIG. 14B1) is not placed on the surface 765 of the plate 760a. Rather, air or vacuum occupies a cavity 760c between the plate/layer 760a and the touchscreen 705.
In another embodiment illustrated in
Referring to
Generally, without the film 1105, light incident on the areas of the first space 1110 or the second space 1111 may not reach one of the active reflector areas 1121, 1122, 1123. To increase the reflectance of the interferometric modulator 1100, light incident on the inactive areas between the active reflector areas (e.g., first space 1110 and second space 1111) can be redirected to one of the active reflector areas 1121, 1122, 1123. As the location of the inactive areas and the active reflector areas is known, the external film 1105 can be configured to redirect the light incident 1115 on the film 1105 in the inactive areas 1110, 1111 back into the active reflector area 1121, 1122, 1123 (e.g., the optical cavity) as shown by arrow 1120. In some embodiments, the film 1105 includes reflectors to re-direct the light. In some embodiments, the film 1105 is configured with a customized index of refraction in the areas of the spaces 1110, 1111 to re-direct the light. In other embodiments, the film 1105 can contain scattering elements in the areas of the spaces 1110, 1111 so that at least a portion of the light is scattered into and falls onto an active reflector area (e.g., the optical cavity).
In an alternative embodiment depicted in
Referring to
Referring now to
In one embodiment, the optical film 1305 comprises a holographic diffuser. The holographic diffuser comprises diffractive features arranged to-manipulate the light, for example, to produce a heightened intensity distribution over a narrow range of angles. In another embodiment, the optical film 1305 includes a plurality of non-imaging optical elements, e.g., a plurality of compound parabolic collectors such as described above and a thin layer of diffusing material on an upper surface 1340 of the optical film 1305. In another embodiment, the optical film 1305 includes other collimating elements with a film of diffusing material on the outer surface 1340.
Referring to
The foregoing description details certain embodiments of the invention. It will be appreciated, however, that no matter how detailed the foregoing appears in text, the invention can be practiced in many ways. As is also stated above, it should be noted that the use of particular terminology when describing certain features or aspects of the invention should not be taken to imply that the terminology is being re-defined herein to be restricted to including any specific characteristics of the features or aspects of the invention with which that terminology is associated.
This application is a divisional of U.S. patent application Ser. No. 11/156,335, titled “Optical Films for Controlling Angular Characteristics of Displays,” filed Jun. 17, 2005, which claims priority under 35 U.S.C. §119(e) to U.S. Provisional Application No. 60/613,535, titled “External Optical Film for Interferometric Modulator System,” filed Sep. 27, 2004, all of which are hereby expressly incorporated by reference in their entireties.
Number | Name | Date | Kind |
---|---|---|---|
2518647 | Teeple et al. | Aug 1950 | A |
3813265 | Marks | May 1974 | A |
4832459 | Harper | May 1989 | A |
4850682 | Gerritsen | Jul 1989 | A |
4863224 | Afian | Sep 1989 | A |
4918577 | Furudate | Apr 1990 | A |
4961617 | Shahidi | Oct 1990 | A |
4974942 | Gross | Dec 1990 | A |
5151585 | Siebert | Sep 1992 | A |
5289300 | Yamazaki | Feb 1994 | A |
5398125 | Willett | Mar 1995 | A |
5448659 | Tsutsui et al. | Sep 1995 | A |
5452385 | Izumi | Sep 1995 | A |
5459610 | Bloom et al. | Oct 1995 | A |
5467417 | Nakamura | Nov 1995 | A |
5481385 | Zimmerman et al. | Jan 1996 | A |
5515184 | Caulfield | May 1996 | A |
5517347 | Sampsell | May 1996 | A |
5594830 | Winston | Jan 1997 | A |
5604607 | Mirzaoff | Feb 1997 | A |
5633739 | Matsuyama | May 1997 | A |
5638084 | Kalt | Jun 1997 | A |
5650865 | Smith | Jul 1997 | A |
5659410 | Koike | Aug 1997 | A |
5703667 | Ochiai | Dec 1997 | A |
5735590 | Kashima | Apr 1998 | A |
5754260 | Ooi | May 1998 | A |
5771124 | Kintz | Jun 1998 | A |
5771321 | Stern | Jun 1998 | A |
5782993 | Ponewash | Jul 1998 | A |
5783614 | Chen | Jul 1998 | A |
5805117 | Mazurek | Sep 1998 | A |
5810464 | Ishikawa | Sep 1998 | A |
5815229 | Shapiro | Sep 1998 | A |
5835255 | Miles | Nov 1998 | A |
5835256 | Huibers | Nov 1998 | A |
5854872 | Tai | Dec 1998 | A |
5892598 | Asakawa et al. | Apr 1999 | A |
5913594 | Iimura | Jun 1999 | A |
5914804 | Goossen | Jun 1999 | A |
5933183 | Enomoto | Aug 1999 | A |
5982540 | Koike | Nov 1999 | A |
5986796 | Miles | Nov 1999 | A |
5991073 | Woodgate et al. | Nov 1999 | A |
5999239 | Larson | Dec 1999 | A |
6002829 | Winston et al. | Dec 1999 | A |
6014192 | Lehureau | Jan 2000 | A |
6040937 | Miles | Mar 2000 | A |
6048071 | Sawayama | Apr 2000 | A |
6049317 | Thompson et al. | Apr 2000 | A |
6055090 | Miles | Apr 2000 | A |
6072620 | Shiono | Jun 2000 | A |
6073034 | Jacobsen | Jun 2000 | A |
6091469 | Naito | Jul 2000 | A |
6195196 | Kimura | Feb 2001 | B1 |
6196691 | Ochiai | Mar 2001 | B1 |
6211976 | Popovich | Apr 2001 | B1 |
6232937 | Jacobsen | May 2001 | B1 |
6243149 | Swanson et al. | Jun 2001 | B1 |
6259082 | Fujimoto et al. | Jul 2001 | B1 |
6282010 | Sulzbach | Aug 2001 | B1 |
6323987 | Rinaudo | Nov 2001 | B1 |
6356378 | Huibers | Mar 2002 | B1 |
6377535 | Chen et al. | Apr 2002 | B1 |
6381022 | Zavracky | Apr 2002 | B1 |
6412969 | Torihara | Jul 2002 | B1 |
6483613 | Woodgate et al. | Nov 2002 | B1 |
6493475 | Lin | Dec 2002 | B1 |
6522794 | Bischel | Feb 2003 | B1 |
6538813 | Magno et al. | Mar 2003 | B1 |
6574033 | Chui | Jun 2003 | B1 |
6577429 | Kurtz et al. | Jun 2003 | B1 |
6598987 | Parikka | Jul 2003 | B1 |
6636322 | Terashita | Oct 2003 | B1 |
6642913 | Kimura | Nov 2003 | B1 |
6646772 | Popovich et al. | Nov 2003 | B1 |
6650455 | Miles | Nov 2003 | B2 |
6669350 | Yamashita | Dec 2003 | B2 |
6674562 | Miles | Jan 2004 | B1 |
6693690 | Umemoto | Feb 2004 | B2 |
6709123 | Flohr | Mar 2004 | B2 |
6738194 | Ramirez | May 2004 | B1 |
6742921 | Umemoto | Jun 2004 | B2 |
6760135 | Payne et al. | Jul 2004 | B1 |
6773126 | Hatjasalo | Aug 2004 | B1 |
6774962 | Yoon | Aug 2004 | B2 |
6784948 | Kawashima et al. | Aug 2004 | B2 |
6794119 | Miles | Sep 2004 | B2 |
6798469 | Kimura | Sep 2004 | B2 |
6822745 | De Groot et al. | Nov 2004 | B2 |
6826000 | Lee et al. | Nov 2004 | B2 |
6841787 | Almogy | Jan 2005 | B2 |
6852396 | Mineo | Feb 2005 | B1 |
6879354 | Sawayama | Apr 2005 | B1 |
6883934 | Kawakami | Apr 2005 | B2 |
6885377 | Lim | Apr 2005 | B2 |
6917469 | Momose | Jul 2005 | B2 |
6940653 | Favalora et al. | Sep 2005 | B2 |
6967779 | Fadel et al. | Nov 2005 | B2 |
6970031 | Martin | Nov 2005 | B1 |
6998196 | Rich et al. | Feb 2006 | B2 |
6999235 | Nakamura | Feb 2006 | B2 |
7002726 | Patel | Feb 2006 | B2 |
7009754 | Huibers | Mar 2006 | B2 |
7012659 | Smith et al. | Mar 2006 | B2 |
7018088 | Yu | Mar 2006 | B2 |
7019734 | Cross et al. | Mar 2006 | B2 |
7030949 | Kashima | Apr 2006 | B2 |
7038752 | Lin | May 2006 | B2 |
7046409 | Kihara | May 2006 | B2 |
7056001 | Chuang | Jun 2006 | B2 |
7064875 | Kawano | Jun 2006 | B2 |
7072093 | Piehl et al. | Jul 2006 | B2 |
7099058 | Takemori et al. | Aug 2006 | B2 |
7110158 | Miles | Sep 2006 | B2 |
7113339 | Taguchi et al. | Sep 2006 | B2 |
7123216 | Miles | Oct 2006 | B1 |
7138984 | Miles | Nov 2006 | B1 |
7142347 | Islam | Nov 2006 | B2 |
7156546 | Higashiyama | Jan 2007 | B2 |
7161730 | Floyd | Jan 2007 | B2 |
7218429 | Batchko | May 2007 | B2 |
7221418 | Lee | May 2007 | B2 |
7223010 | Min | May 2007 | B2 |
7262916 | Kao | Aug 2007 | B2 |
7324248 | Brotherton-Ratcliffe et al. | Jan 2008 | B2 |
7336329 | Yoon | Feb 2008 | B2 |
7342705 | Chui et al. | Mar 2008 | B2 |
7342709 | Lin | Mar 2008 | B2 |
7352501 | Chopra et al. | Apr 2008 | B2 |
7359011 | Hamada | Apr 2008 | B2 |
7360899 | McGuire et al. | Apr 2008 | B2 |
7369294 | Gally | May 2008 | B2 |
7376308 | Cheben et al. | May 2008 | B2 |
7377678 | Huang | May 2008 | B2 |
7380970 | Hwang | Jun 2008 | B2 |
7388181 | Han et al. | Jun 2008 | B2 |
7417735 | Cummings | Aug 2008 | B2 |
7417784 | Sasagawa | Aug 2008 | B2 |
7450295 | Tung | Nov 2008 | B2 |
7456805 | Ouderkirk et al. | Nov 2008 | B2 |
7498621 | Seitz | Mar 2009 | B2 |
7508571 | Gally | Mar 2009 | B2 |
7561323 | Gally | Jul 2009 | B2 |
7564612 | Chui | Jul 2009 | B2 |
7603001 | Wang | Oct 2009 | B2 |
7630123 | Kothari | Dec 2009 | B2 |
7706050 | Sampsell | Apr 2010 | B2 |
7710636 | Chui | May 2010 | B2 |
7777954 | Gruhike | Aug 2010 | B2 |
7807488 | Gally | Oct 2010 | B2 |
7813026 | Sampsell | Oct 2010 | B2 |
7845841 | Sampsell | Dec 2010 | B2 |
7864395 | Chui | Jan 2011 | B2 |
7880954 | Sampsell | Feb 2011 | B2 |
20010003504 | Ishihara | Jun 2001 | A1 |
20010019380 | Ishihara | Sep 2001 | A1 |
20010019479 | Nakabayashi | Sep 2001 | A1 |
20010030861 | Oda | Oct 2001 | A1 |
20010049061 | Nakagaki | Dec 2001 | A1 |
20020024711 | Miles | Feb 2002 | A1 |
20020034071 | Mabuchi | Mar 2002 | A1 |
20020054258 | Kondo | May 2002 | A1 |
20020075245 | Kawashima | Jun 2002 | A1 |
20020075555 | Miles | Jun 2002 | A1 |
20020080465 | Han | Jun 2002 | A1 |
20020105699 | Miracky | Aug 2002 | A1 |
20020126364 | Miles | Sep 2002 | A1 |
20020135560 | Akaoka | Sep 2002 | A1 |
20020149584 | Simpson | Oct 2002 | A1 |
20020154256 | Gotoh | Oct 2002 | A1 |
20020172039 | Inditsky | Nov 2002 | A1 |
20030016930 | Inditsky | Jan 2003 | A1 |
20030067760 | Jagt | Apr 2003 | A1 |
20030081154 | Coleman | May 2003 | A1 |
20030083429 | Smith | May 2003 | A1 |
20030103177 | Maeda | Jun 2003 | A1 |
20030107692 | Sekiguchi | Jun 2003 | A1 |
20030151821 | Favalora | Aug 2003 | A1 |
20030160919 | Suzuki | Aug 2003 | A1 |
20030161040 | Ishii | Aug 2003 | A1 |
20030184690 | Ogiwara | Oct 2003 | A1 |
20030193630 | Chiou | Oct 2003 | A1 |
20030210363 | Yasukawa | Nov 2003 | A1 |
20030222857 | Abileah | Dec 2003 | A1 |
20030231483 | Higashiyama | Dec 2003 | A1 |
20040027339 | Schulz | Feb 2004 | A1 |
20040032401 | Nakazawa | Feb 2004 | A1 |
20040032659 | Drinkwater | Feb 2004 | A1 |
20040115339 | Ito | Jun 2004 | A1 |
20040125048 | Fukuda | Jul 2004 | A1 |
20040125281 | Lin | Jul 2004 | A1 |
20040174583 | Chen et al. | Sep 2004 | A1 |
20040188150 | Richard et al. | Sep 2004 | A1 |
20040207995 | Park | Oct 2004 | A1 |
20040217264 | Wood | Nov 2004 | A1 |
20040233357 | Fujimori | Nov 2004 | A1 |
20040246743 | Lee | Dec 2004 | A1 |
20050002082 | Miles | Jan 2005 | A1 |
20050010568 | Nagatomo | Jan 2005 | A1 |
20050069254 | Schultheis | Mar 2005 | A1 |
20050101059 | Yang | May 2005 | A1 |
20050120553 | Brown | Jun 2005 | A1 |
20050133761 | Thielemans | Jun 2005 | A1 |
20050141065 | Masamoto | Jun 2005 | A1 |
20050146897 | Mimura | Jul 2005 | A1 |
20050206802 | Creemers | Sep 2005 | A1 |
20050231977 | Hayakawa | Oct 2005 | A1 |
20050259939 | Rinko | Nov 2005 | A1 |
20050286113 | Miles | Dec 2005 | A1 |
20060001942 | Chui | Jan 2006 | A1 |
20060002141 | Ouderkirk | Jan 2006 | A1 |
20060012733 | Jin | Jan 2006 | A1 |
20060051048 | Gardiner | Mar 2006 | A1 |
20060062016 | Dejima | Mar 2006 | A1 |
20060066541 | Gally | Mar 2006 | A1 |
20060066586 | Gally | Mar 2006 | A1 |
20060066935 | Cummings et al. | Mar 2006 | A1 |
20060067600 | Gally et al. | Mar 2006 | A1 |
20060077124 | Gally et al. | Apr 2006 | A1 |
20060077514 | Sampsell | Apr 2006 | A1 |
20060109682 | Ko et al. | May 2006 | A1 |
20060126142 | Choi | Jun 2006 | A1 |
20060132383 | Gally | Jun 2006 | A1 |
20060181903 | Okuwaki | Aug 2006 | A1 |
20060209012 | Hagood, IV | Sep 2006 | A1 |
20060209385 | Liu | Sep 2006 | A1 |
20060215958 | Yeo | Sep 2006 | A1 |
20060227532 | Ko | Oct 2006 | A1 |
20060250676 | Hagood et al. | Nov 2006 | A1 |
20060262562 | Fukasawa | Nov 2006 | A1 |
20060274400 | Miles | Dec 2006 | A1 |
20060279558 | Van Delden et al. | Dec 2006 | A1 |
20060291769 | Spoonhower et al. | Dec 2006 | A1 |
20070036492 | Lee | Feb 2007 | A1 |
20070064294 | Hoshino et al. | Mar 2007 | A1 |
20070097694 | Faase | May 2007 | A1 |
20070133935 | Fine | Jun 2007 | A1 |
20070171330 | Hung | Jul 2007 | A1 |
20070201234 | Ottermann | Aug 2007 | A1 |
20070229936 | Miles | Oct 2007 | A1 |
20070236774 | Gousev | Oct 2007 | A1 |
20070279727 | Gandhi | Dec 2007 | A1 |
20070279935 | Gardiner | Dec 2007 | A1 |
20070291362 | Hill et al. | Dec 2007 | A1 |
20080030650 | Kitagawa | Feb 2008 | A1 |
20080112039 | Chui | May 2008 | A1 |
20080137175 | Lin | Jun 2008 | A1 |
20080151347 | Chui | Jun 2008 | A1 |
20090086301 | Gally | Apr 2009 | A1 |
20090097100 | Gally | Apr 2009 | A1 |
20090126792 | Gruhlke | May 2009 | A1 |
20090147332 | Bita et al. | Jun 2009 | A1 |
20090190373 | Bita et al. | Jul 2009 | A1 |
20090196068 | Wang | Aug 2009 | A1 |
20090199893 | Bita | Aug 2009 | A1 |
20090199900 | Bita | Aug 2009 | A1 |
20090201565 | Bita et al. | Aug 2009 | A1 |
20090201571 | Gally | Aug 2009 | A1 |
20090225396 | Sampsell | Sep 2009 | A1 |
20090231877 | Mienko | Sep 2009 | A1 |
20090251752 | Gruhlke | Oct 2009 | A1 |
20090257108 | Gruhlke | Oct 2009 | A1 |
20090296194 | Gally | Dec 2009 | A1 |
20090303417 | Mizushima et al. | Dec 2009 | A1 |
20090310208 | Wang | Dec 2009 | A1 |
20090323144 | Gruhlke | Dec 2009 | A1 |
20100026727 | Bita et al. | Feb 2010 | A1 |
20100033988 | Chiu | Feb 2010 | A1 |
20100052880 | Laitinen et al. | Mar 2010 | A1 |
20100141557 | Gruhlke | Jun 2010 | A1 |
20100149624 | Kothari | Jun 2010 | A1 |
20100165443 | Chui | Jul 2010 | A1 |
20100172012 | Sampsell | Jul 2010 | A1 |
20100188367 | Nagafuji et al. | Jul 2010 | A1 |
20100214642 | Miles | Aug 2010 | A1 |
20100278480 | Vasylyev | Nov 2010 | A1 |
Number | Date | Country |
---|---|---|
1272922 | Nov 2000 | CN |
1286424 | Mar 2001 | CN |
1517743 | Aug 2004 | CN |
1639596 | Jul 2005 | CN |
1643439 | Jul 2005 | CN |
1795403 | Jun 2006 | CN |
34 02 746 | Aug 1985 | DE |
3402746 | Aug 1985 | DE |
196 22 748 | Dec 1997 | DE |
102 28 946 | Jan 2004 | DE |
0 278 038 | Aug 1988 | EP |
0 822 441 | Feb 1998 | EP |
0 855 745 | Jul 1998 | EP |
0 879 991 | Nov 1998 | EP |
0 907 050 | Apr 1999 | EP |
0 957 392 | Nov 1999 | EP |
1 014 161 | Jun 2000 | EP |
1 081 633 | Mar 2001 | EP |
1 089 115 | Apr 2001 | EP |
1 093 105 | Apr 2001 | EP |
1 122 586 | Aug 2001 | EP |
1 199 512 | Apr 2002 | EP |
1 279 892 | Jan 2003 | EP |
1 329 664 | Jul 2003 | EP |
1 347 315 | Sep 2003 | EP |
1 413 543 | Apr 2004 | EP |
1 437 610 | Jul 2004 | EP |
1 544 537 | Jun 2005 | EP |
1 577 701 | Sep 2005 | EP |
1 640 337 | Mar 2006 | EP |
1 734 401 | Dec 2006 | EP |
2 260 203 | Apr 1993 | GB |
2 278 222 | Nov 1994 | GB |
62-009317 | Jan 1987 | JP |
04 081816 | Mar 1992 | JP |
05 281479 | Oct 1993 | JP |
07-509327 | Oct 1995 | JP |
09 022012 | Jan 1997 | JP |
09-507920 | Aug 1997 | JP |
09 307140 | Nov 1997 | JP |
10 202948 | Aug 1998 | JP |
11 002712 | Jan 1999 | JP |
11 160687 | Jun 1999 | JP |
11 174234 | Jul 1999 | JP |
11 211999 | Aug 1999 | JP |
11 232919 | Aug 1999 | JP |
2000 075293 | Mar 2000 | JP |
2000 193933 | Jul 2000 | JP |
2000 514568 | Oct 2000 | JP |
2000 305074 | Nov 2000 | JP |
2001 305312 | Oct 2001 | JP |
2001305312 | Oct 2001 | JP |
2001 343514 | Dec 2001 | JP |
2002 090549 | Mar 2002 | JP |
2002 174780 | Jun 2002 | JP |
2002 245835 | Aug 2002 | JP |
2002-297044 | Oct 2002 | JP |
2003 007114 | Jan 2003 | JP |
2003 057652 | Feb 2003 | JP |
2003 066451 | Mar 2003 | JP |
2003-149642 | May 2003 | JP |
2003-149643 | May 2003 | JP |
2003 173713 | Jun 2003 | JP |
2003 177336 | Jun 2003 | JP |
2004-012918 | Jan 2004 | JP |
2004-062099 | Feb 2004 | JP |
2004-111278 | Apr 2004 | JP |
2004-510185 | Apr 2004 | JP |
2004-206049 | Jul 2004 | JP |
2005-316178 | Nov 2005 | JP |
2006-065360 | Mar 2006 | JP |
2006 107993 | Apr 2006 | JP |
2007-218540 | Aug 2007 | JP |
2002 010322 | Feb 2002 | KR |
WO 9406871 | Mar 1994 | WO |
WO 9501584 | Jan 1995 | WO |
WO 9514256 | May 1995 | WO |
WO 9701240 | Jan 1997 | WO |
WO 9716756 | May 1997 | WO |
WO 9717628 | May 1997 | WO |
WO 9746908 | Dec 1997 | WO |
WO 9832047 | Jul 1998 | WO |
WO 9835182 | Aug 1998 | WO |
WO 9904296 | Jan 1999 | WO |
WO 9963394 | Dec 1999 | WO |
WO 9967680 | Dec 1999 | WO |
WO 0157434 | Aug 2001 | WO |
WO 0181994 | Nov 2001 | WO |
WO 0206858 | Jan 2002 | WO |
WO 02071132 | Sep 2002 | WO |
WO 03032058 | Apr 2003 | WO |
WO 03038509 | May 2003 | WO |
WO 03062912 | Jul 2003 | WO |
WO 03075207 | Sep 2003 | WO |
WO 2004006003 | Jan 2004 | WO |
WO 2004027514 | Apr 2004 | WO |
WO 2004036270 | Apr 2004 | WO |
WO 2004088372 | Oct 2004 | WO |
WO 2004114418 | Dec 2004 | WO |
WO 2005011012 | Feb 2005 | WO |
WO 2005088367 | Sep 2005 | WO |
WO 2006036451 | Apr 2006 | WO |
WO 2006036496 | Apr 2006 | WO |
WO 2007094558 | Aug 2007 | WO |
WO 2008045207 | Apr 2008 | WO |
WO 2008045311 | Apr 2008 | WO |
Number | Date | Country | |
---|---|---|---|
20090097100 A1 | Apr 2009 | US |
Number | Date | Country | |
---|---|---|---|
60613535 | Sep 2004 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11156335 | Jun 2005 | US |
Child | 12339614 | US |