Claims
- 1. A method of fabricating a three-dimensional optical waveguide, comprising:
- a. forming a single crystal semiconductor substrate;
- b. forming an insulator layer on said substrate;
- c. forming a single crystal semiconductor layer upon the insulator layer; said insulator layer having an index of refraction lower than that of said semiconductor layer, said semiconductor layer being formed to a thickness sufficient to provide confinement of light in the lower vertical direction by the boundary between the insulator layer and the semiconductor layer above and in the upper vertical direction by the boundary between the semiconductor layer and an insulator; and,
- d. removing portions of said semiconductor layer to leave a three-dimensional waveguide region of single crystal semiconductor between the insulator layer on the bottom and the semiconductor layer on the top and creating an effective larger index of refraction on two sides of said three-dimensional waveguide region to thereby provide confinement of said light in said region in the lateral direction.
- 2. A method of claim 1 wherein said insulator layer comprises an amorphous oxide and said insulator in (c) is air.
- 3. A method of claim 2 wherein said single crystal semiconductor layer comprises gallium arsenide.
- 4. A method of claim 3 wherein said oxide insulator comprises silicon dioxide.
- 5. A method of claim 1, 2, 3 or 4 wherein said single crystal semiconductor layer is formed by lateral epitaxial overgrowth through openings in said insulator layer.
GOVERNMENT SUPPORT
Work described herein was supported by the United States Air Force.
US Referenced Citations (4)