Optical Inspection of Optical Specimens Supported by a Work Holder

Abstract

An optical inspection system includes an optical inspection device and an interface. The optical inspection device houses optical imaging components that acquire microscope visual images and acquire interference fringe images of a plurality of optical specimens along an optical path. The optical path is located along an optical axis of the optical inspection device. The interface is coupled to the optical inspection device and is configured to removably engage a polishing work holder that supports the plurality of optical specimens. The interface allows an optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device to be aligned.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram of an optical inspection system coupled to a polishing work holder under one embodiment.

FIG. 2 is a schematic block diagram of an optical inspection system coupled to a polishing work holder under one embodiment.

FIG. 3 is top perspective view of an optical inspection system engaged with a polishing work holder under one embodiment.

FIG. 4 illustrates a top exploded perspective view of the optical inspection system of FIG. 3 and the polishing work holder of FIG. 3.

FIG. 5 is a bottom exploded perspective view of a portion of the optical inspection system illustrated in FIG. 3 and the polishing work holder illustrated in FIG. 3.

FIG. 6 is sectional view of the optical inspection system and the polishing work holder of FIG. 3.

Claims

1. An optical inspection system comprising an optical inspection device that houses optical imaging components that acquire microscope visual images and acquire interference fringe images of a plurality of optical specimens along an optical path, wherein the optical path is located along an optical axis of the optical inspection device; andan interface coupled to the optical inspection device and configured to removably engage a polishing work holder that supports a plurality of optical specimens, wherein the interface allows an optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device to be aligned.

2. The optical inspection system of claim 1, wherein the work holder comprises a work holder central axis.

3. The optical inspection system of claim 2, wherein the interface is adapted to rotate the optical inspection device about the work holder central axis to align each optical specimen axis of each of the plurality of optical specimens with the optical axis

4. The optical inspection system of claim 2, wherein the interface is adapted to rotate the work holder about the work holder central axis to align each optical specimen axis of each of the plurality of optical specimens with the optical axis.

5. The optical inspection system of claim 4, wherein the interface comprises an interface plate having a top surface and a bottom surface.

6. The optical inspection system of claim 5, wherein the interface plate is magnetically coupled to the main body of the optical inspection device.

7. The optical inspection system of claim 5, wherein the interface comprises kinematic tooling balls attached to the bottom surface of the interface plate that magnetically couple with corresponding kinematic seats located on a main body of the optical inspection device.

8. The optical inspection system of claim 5, wherein the interface comprises a hub feature protruding from the top surface of the interface plate and configured to removably engage the work holder, wherein the work holder is rotatable about the central hub feature.

9. The optical inspection system of claim 7, wherein the interface comprises a plurality of spherical surfaces attached to the top surface of the interface plate for engaging with the work holder, the plurality of spherical surfaces support the polishing work holder such that a plane defined by a bottom surface of the work holder when coupled to the optical inspection device is parallel with a plane formed by the kinematic tooling balls of the interface.

10. The optical inspection system of claim 8, wherein the interface comprises a rotatable knob attached to the bottom surface of the interface plate, the rotatable knob configured to translate the hub feature in a direction perpendicular from the optical axis such that a location of the work holder central axis moves with respect to the optical axis.

11. An optical inspection system comprising: an optical inspection device having a main body that houses optical imaging components that acquire microscope visual images and acquire interference fringe images of a plurality of optical specimens along an optical path, wherein the optical path is located along an optical axis of the optical inspection device; andan interface coupled to the main body of the optical inspection device that is configured to removably engage a polishing work holder, wherein the interface is adapted to rotate the work holder about a work holder central axis to align an optical specimen axis of each of the plurality of optical specimens with the optical axis.

12. The optical inspection system of claim 11, wherein the interface comprises an interface plate having a top surface and a bottom surface.

13. The optical inspection system of claim 12, wherein the interface comprises kinematic tooling balls attached to the bottom surface of the interface plate that magnetically couple with corresponding kinematic seats located on the main body of the optical inspection device.

14. The optical inspection system of claim 12, wherein the interface comprises a hub feature protruding from the top surface of the interface plate and configured to removably engage the work holder, wherein the work holder is rotatable about the central hub feature.

15. The optical inspection system of claim 13, wherein the interface comprises a plurality of spherical surfaces attached to the top surface of the interface plate for engaging with the work holder, the plurality of spherical surfaces support the work holder such that a plane defined by a bottom surface of the work holder when coupled to the optical inspection device is parallel with a plane formed by the kinematic tooling balls of the interface.

16. The optical inspection system of claim 14, wherein the interface comprises a rotatable knob attached to the bottom surface of the interface plate, the rotatable knob configured to translate the hub feature in a direction perpendicular from the optical axis such that a location of the work holder central axis moves with respect to the optical axis.

17. The optical inspection system of claim 11, wherein the work holder is coupleable to a polishing device remotely located from the optical inspection system such that endface surfaces of the plurality of optical specimens can be polished between inspections using the optical input device.

18. A method of inspecting a plurality of optical specimens, the method comprising: providing an optical inspection device having a main body that houses imaging components that acquire microscope visual images and acquire interference fringe images of the plurality of optical specimens along an optical path, wherein the optical path is located along an optical axis of the optical inspection device;engaging a polishing work holder with an interface coupled to a main body of the optical inspection device, the polishing work holder including a central work holder axis and configured to support the plurality of optical specimens; andaligning an optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device using the interface.

19. The method of claim 18, wherein aligning each optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device comprises rotating the polishing work holder about the central work holder axis.

20. The method of claim 18, wherein aligning each optical specimen axis of each of the plurality of optical specimens and the optical axis of the optical inspection device comprises rotating the optical inspection device about the central work holder axis.