Number | Date | Country | Kind |
---|---|---|---|
8-297218 | Oct 1996 | JPX | |
9-198373 | Jul 1997 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4715718 | Evans | Dec 1987 | |
4756619 | Gerlinger et al. | Jul 1988 | |
4919535 | Hohberg et al. | Apr 1990 | |
5030841 | Wampfler | Jul 1991 |
Number | Date | Country |
---|---|---|
209 860 | Jan 1987 | EPX |
234 579 | Sep 1987 | EPX |
284 090 | Sep 1988 | EPX |
299 314 | Jan 1989 | EPX |
406 968 | Jan 1991 | EPX |
3413838 | Oct 1984 | DEX |
A-63-16247 | Jan 1963 | JPX |
Entry |
---|
"Apparatus And Method For Film Thickness And Optical Constant Determination," Ibm Technical Disclosure Bulletin, vol. 31, No. 8 Jan. 1989, pp. 363-368. |