Claims
- 1. An optical member inspection apparatus, comprising:an image receiver, which picks-up an image of an optical member to be inspected to output said image of said optical member; a setting device which sets a plurality of areas to be inspected in said image of said optical member, wherein one of said plurality of areas is an outermost area including a boundary line defining a designed effective aperture of said optical member; an adjusting device which sets a criterion for judgement for each of said plurality of areas, said criteria being different from one another, wherein a criterion set for said outermost area is alleviative as compared other said criteria; and a processor which judges whether or not each of said plurality of areas is defective in accordance with a corresponding criterion from said criteria set by said adjusting device.
- 2. The optical member inspection apparatus in accordance with claim 1, wherein said plurality of areas to be inspected are set depending on a distance from an optical axis of said optical member.
- 3. A method of inspecting an optical member to judge whether or not said optical member is defective, wherein a plurality of areas to be inspected are set in an image of said optical member picked-up by an image receiver and further wherein a criterion for judgement is set for each of said plurality of areas, said criterion for each area being different from one another, said method comprising:a process for setting an outermost area as one of said plurality of areas, said outermost area including a boundary line defining a designed effective aperture of said optical member; and a process to inspect said optical member for said outermost area with a predetermined criterion, said predetermined criterion being alleviative as compared with any other said criterion.
Priority Claims (14)
Number |
Date |
Country |
Kind |
7-164825 |
Jun 1995 |
JP |
|
7-164826 |
Jun 1995 |
JP |
|
7-164827 |
Jun 1995 |
JP |
|
7-172911 |
Jun 1995 |
JP |
|
7-175518 |
Jun 1995 |
JP |
|
7-175519 |
Jun 1995 |
JP |
|
7-184795 |
Jun 1995 |
JP |
|
7-189844 |
Jul 1995 |
JP |
|
7-189853 |
Jul 1995 |
JP |
|
7-208398 |
Jul 1995 |
JP |
|
7-208399 |
Jul 1995 |
JP |
|
7-208400 |
Jul 1995 |
JP |
|
7-221120 |
Aug 1995 |
JP |
|
8-101834 |
Apr 1996 |
JP |
|
Parent Case Info
This application is a division of Ser. No. 08/658,549 filed Jun. 5, 1996, now U.S. Pat. No. 6,148,097.
US Referenced Citations (7)
Non-Patent Literature Citations (4)
Entry |
Japanese Unexamined Patent Publication No. 5-342356. |
Japanese Unexamined Patent Publication No. 6-139341. |
Japanese Unexamined Patent Publication No. 6-348824. |
Japanese Unexamined Patent Publication No. 5-85168. |