Claims
- 1. An optical member inspection apparatus, comprising:an inspection system comprising a light source, means for diffusing light emitted from said light source, said diffusing means comprising a central portion and a peripheral portion, a diffusion transmittance of said peripheral portion being higher than that of said central portion, and means for picking-up an image of an optical member to be inspected, said image pick-up means being positioned to receive light emitted from said light source and transmitted through said diffusing means and said optical member; means for judging whether or not said optical member has a defect, in accordance with image signals output from said image pick-up means; and means for moving at least said diffusing means in a direction perpendicular to an optical axis of said image pick-up means.
- 2. The optical member inspection apparatus in accordance with claim 1, further comprising a lighting unit including said light source and said diffusing means, wherein said moving means moves said lighting unit in said direction perpendicular to said optical axis of said image pick-up means.
- 3. The optical member inspection apparatus in accordance with claim 1, wherein said diffusing means is a plane plate member extending perpendicular to said optical axis of said image pick-up means.
- 4. The optical member inspection apparatus in accordance with claim 3, wherein said peripheral portion and said central portion each have a shape similar to a plan shape of said optical member.
- 5. A method for inspecting an optical member comprising the steps of:(a) providing an optical member inspection apparatus comprising an inspection optical system comprising a light source, means for diffusing light emitted from said light source, said diffusing means comprising a central portion and a peripheral portion, a diffusion transmittance of said peripheral portion being higher than that of said central portion, and means for picking-up an image of an optical member to be inspected, said image pick-up means being positioned to receive light emitted from said light source and transmitted through said diffusing means and said optical member; means for judging whether or not said optical member has a defect, in accordance with image signals output from said image pick-up means; and means for moving at least said diffusing means in a direction perpendicular to an optical axis of said image pick-up means; (b) positioning said diffusing means such that light transmitted through said optical member and picked-up by said image pick-up means corresponds to light transmitted through said central portion of said diffusing means; (c) inputting an image of said optical member from said image pick-up means; and (d) judging whether or not said optical member is defective in accordance with said input image.
Priority Claims (14)
Number |
Date |
Country |
Kind |
7-164825 |
Jun 1995 |
JP |
|
7-164826 |
Jun 1995 |
JP |
|
7-164827 |
Jun 1995 |
JP |
|
7-172911 |
Jun 1995 |
JP |
|
7-175518 |
Jun 1995 |
JP |
|
7-175519 |
Jun 1995 |
JP |
|
7-184795 |
Jun 1995 |
JP |
|
7-189844 |
Jul 1995 |
JP |
|
7-189853 |
Jul 1995 |
JP |
|
7-208398 |
Jul 1995 |
JP |
|
7-208399 |
Jul 1995 |
JP |
|
7-208400 |
Jul 1995 |
JP |
|
7-221120 |
Aug 1995 |
JP |
|
8-101834 |
Apr 1996 |
JP |
|
Parent Case Info
This Application is a Divisional of Ser. No. 08/658,549 filed Jun. 5, 1996, U.S. Pat. No. 6,148,097.
US Referenced Citations (9)
Non-Patent Literature Citations (4)
Entry |
Japanese Unexamined Patent Publication No. 5-342356. |
Japanese Unexamined Patent Publication No. 6-139341. |
Japanese Unexamined Patent Publication No. 6-348824. |
Japanese Unexamined Patent Publication No. 5-85168. |