The present invention generally relates to optical polarization beam combiners/splitters and more particularly to packaged fiber-optic polarization beam combiners/splitters that utilize a thin film wire-grid polarizer.
Optical polarization beam combiners/splitters are used in many optical communications applications including those that require amplification of optical signals, preferred distribution of the polarization states, a combination of both, or separation of beam polarizations.
a and 1b illustrate an example of a prior art optical polarization beam combiner/splitter (“PBC/S”) device that utilizes a polarization beam splitter cube 7. In the optical polarization beam splitter of
In the optical polarization beam combiner of
A second prior art optical PBC/S device is illustrated in
In the optical polarization beam combiner of
But, the device of
By providing polarization-maintaining optical fibers for the second and third optical fibers 22 and 23, the prior art device of
Another prior art optical PBC/S device utilizes prisms in a combination with a dielectric thin film. Such designs tend to be bulky, resulting in higher insertion loss. Another drawback for this type of device is the need for a matching index coating for the dielectric film. This is often implemented with an organic compound, which limits the overall power that the device can handle.
Yet another prior art optical polarization beam combiner is a fused fiber wave guide. Fused fiber wave guides offer overall lowest insertion loss, but in most designs the two channels have different insertion losses and it is not easy to match them. Another distinct drawback for the fused fiber wave guide polarization beam combiner is the very narrow wavelength range of operation. Typically the range is a few nanometers and increasing the device bandwidth will result in increased insertion loss.
Thus, there is a need for an optical PBC/S device that is compact, has relatively wide wavelength range of operation, is capable of handling high power beams, and is capable of handling more than one set of input/output beams with one set of collimating optical elements.
The present invention provides a compact optical PBC/S device employing a subwavelength wire grid polarizing element that can be packaged into a highly integrated optical module. More particularly, a compact optical PBC/S device employing a thin film wire-grid polarizer is provided.
In an embodiment where the optical device is a beam combiner, the optical PBC/S device comprises a first optical beam carrier, such as an optical fiber, that carries a first polarized incident beam, a second optical beam carrier that carries a second polarized incident beam polarized in an orthogonal orientation to the first polarized incident beam, and a third optical beam carrier that carries the device's depolarized output beam which is the composite of the first and the second polarized incident beams. As generally known in the art, the first and second optical beam carriers must be able to maintain the polarization of the incident beams to ensure that one of the incident beams has S polarization state and the other incident beam as P polarization state. Polarization-maintaining optical fibers are examples of such optical beam carriers. The third optical beam carrier can be a standard optical fiber since it carries the composite depolarized output beam.
Two collimating/focusing lenses, each lenses having an inwardly-facing surface, an outwardly-facing surface, and an optical axis are oriented coaxially so that their optical axes align collinearly, defining the device's optical axis, and their inwardly-facing surfaces face each other. These two collimating/focusing lenses are positioned between the first and second optical beam carriers and the optical beam carriers are oriented so that the beams exiting or entering the beam carriers propagate parallel to the optical axis of the optical PBC/S device. For example, where the optical beam carriers are optical fibers, the optical fibers are configured so that their optical axes are parallel to the optical axis of the optical PBC/S device. The third optical beam carrier for carrying the composite output beam is positioned on the same side of the two collimating/focusing lenses as the first optical beam carrier and also oriented so that the beam exiting or entering the beam carrier propagate parallel to the optical axis of the optical PBC/S device.
Between the two collimating/focusing lenses is a thin film wire-grid polarizer that provides the beam combining/splitting functions. When the two polarized incident beams are collimated through the collimating/focusing lenses and encounters the thin film wire-grid polarizer, for a certain orientation of the wire grids with respect to the incoming polarizations, the S polarized incident beam will be reflected by the polarizer and the P polarized incident beam will transmit through the polarizer. The reflected S polarized beam and the transmitted P polarized beam combine into a composite depolarized output beam and exits through the third optical beam carrier. If the thin film wire-grid polarizer's orientation is rotated by 90 degrees, the P polarized light will be reflected and the S polarized light will be transmitted instead.
In a typical application of this optical beam combiner embodiment, two incident beams of S and P polarizations are received into the device by the first and second optical beam carriers. If the S and P polarized incident beams are received by the first and second optical beam carriers respectively, the thin film wire-grid polarizer is appropriately oriented so that the S polarized incident beam is reflected by the thin film wire-grid polarizer and directed towards the third optical beam carrier. The P polarized incident beam, on the other hand, is transmitted through the thin film wire-grid polarizer and also directed towards the third optical beam carrier so that the transmitted beam combines with the reflected S polarized beam to form a composite output beam.
In another embodiment of the optical beam combiner of the present invention, the optical PBC/S device is provided with a fourth optical beam carrier positioned on the same side of the two collimating/focusing lenses as the second optical beam carrier. The fourth optical beam carrier is positioned at a location that is the mirror image of the third optical beam carrier with respect to the plane defined by the thin film wire-grid polarizer. In this embodiment, the combined depolarized output beam can be directed to either the third optical beam carrier or the fourth optical beam carrier, as desired, by changing the orientation of the thin film wire-grid polarizer between two positions to control which of the two S and P polarized incident beams are reflected and transmitted. According to the generally known principles of optics involved with wire-grid polarizers, the two positions of the thin film wire-grid polarizer involved here differ by 90 degrees rotation of the thin film wire-grid polarizer about the optical axis of the optical PBC/S device. Furthermore, the composite depolarized output beam can be controllably apportioned between the third and the fourth optical beam carriers by positioning the thin film wire-grid polarizer between the two positions discussed above.
In addition, the optical PBC/S device of the present invention can be used as a polarization beam splitter rather than a beam combiner by reversing the propagation direction of the light beams. In this application, an incident beam of arbitrary polarization is inputted into the third optical beam carrier and is decomposed into two beams of orthogonal polarization by the thin film wire-grid polarizer. The two output beams are then guided through the first and second optical beam carriers.
The use of a thin film wire-grid polarizer, a very thin optical element, enables the overall optical device to be compact and simpler than the prior art optical PBC/S devices. This simplified design will provide reduced insertion loss through the device, smaller footprint, simpler assembly, improved manufacturing yields, and thus reduced overall optical packaging cost.
Furthermore, the optical PBC/S device of the present invention also provides better optical performance over the prior art optical PBC/S because of the superior performance characteristics of thin film wire-grid polarizers. Thin film wire-grid polarizers provide among other benefits, a broader wavelength range of operation and broader range of incidence angles.
The thin film wire-grid polarizer is typically formed as a discrete device by fabricating thin film wire grid structures on an optically transparent substrate material, such as SiO2. But if desired, the thin film wire grid structures can be fabricated directly on the inwardly-facing surface of one of the collimating/focusing lenses, further integrating the optical PBC/S device. The thin film wire grid structures on the polarizer may preferably have nano-scale dimensions and thus allow very finely spaced subwavelength wire grids for use in high frequency applications such as combining or splitting beams in infrared, visible, or UV light range.
For a better understanding of the invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings in which like elements are numbered similarly and in which:
a and 1b illustrate an example of a prior art optical PBC/S device;
a and 2b illustrate a second example of a prior art optical PBC/S device;
a-11c illustrate an embodiment of the present invention where the thin film wire-grid polarizer is rotatably actuated;
The drawings are only schematic and are not to scale.
The following detailed description of the present invention is for illustrative purposes and should not be construed to limit the invention to these examples.
Graded index lenses can be used for the collimating/focusing lenses 110 and 120. The collimating/focusing lenses 110 and 120 are provided in a coaxial configuration so that their optical axes align to define the optical PBC/S device's optical axis 115. In this configuration, the graded index lenses' inwardly-facing surfaces 113 and 123 face each other and their outwardly-facing surfaces 112 and 122 face away from each other. On the outwardly-facing surface 112 side of the graded index lens 110 are two optical fibers oriented parallel to the device's optical axis 115: a first input fiber 170 and an output fiber 190. On the outwardly-facing surface 122 side of the collimating/focusing lens 120 is a second input fiber 180. For the optical PBC/S device 100 to be used as a beam combiner, the first and second input fibers 170 and 180 must be polarization-maintaining fibers.
If the incident beam is of polarization perpendicular to the wire grids direction and the wire grids are sufficiently thin to not allow the incoming electromagnetic field of the incident beam to excite the electron oscillations, the incident beam will be transmitted through the wire grids without any alteration. For this polarization the wire grid acts like a dielectric. Therefore, the transmission optical axis 155 for the wire-grid structure 153 is perpendicular to the direction of the wire grids.
For purposes of illustration, first and second polarized incident beams 162, 164 and a composite depolarized output beam 166 are depicted as collimated single beams. In this embodiment, the optical transmission axis 155 of the thin film wire-grid structure 153 is oriented in such a way as to reflect the first polarized incident beam 162 from the first input fiber 170. In other words, the slow axis of the first input fiber 170, designated as S in
Because the thin film wire-grid structure 153 is provided on one side of the substrate material 158, the wire-grid structure is not truly symmetrically positioned between the two collimating/focusing lenses 110 and 120. But, because the thin film wire-grid polarizers can be fabricated on very thin, typically less than 0.5 mm thick, any aberration that may be introduced by the substrate material 158 can be significantly minimized.
As with any metal grid polarizer, it is generally known in the art that a thin film wire grid's ability to reflect or transmit a beam of a given wavelength is dependent on the wire grid's dimensions and the choice of materials for the substrate. One can optimize the transmittance and reflectance of a wire grid polarizer by selecting appropriate grid dimensions and the materials for a given application.
Subwavelength thin film wire-grid polarizers that will optimally operate in infrared to UV range should have nano-scale structures, i.e. structures having nanometer dimensions. For example, for an optimal operation in the infrared light range, the thin film wire grid's period is preferably between 150 nm-250 nm with a fill ratio for the metal grating between 20-40%. For an optimal operation in the visible light range, the thin film wire grid's period is preferably on the order of 150 nm or less with a fill ratio of 50% or less. An example of a such wire grid polarizer optimized for visible light application is described in U.S. Pat. No. 6,288,840.
Fabrication of subwavelength thin film wire-grid polarizers per se is generally known and need not be discussed in detail here. The material selection for the metal grid as well as the substrate material for the metal grid is also an important consideration. Appropriate material should be selected to minimize the absorption at the particular wavelength of operation. For example, in the UV range, most optical materials absorb a lot of light so one may need to fabricate the thin film wire grid structures on a low UV absorbing material such as fused silica. But it will be appreciated by one of ordinary skill in the art that by taking the above factors into consideration a thin film wire-grid polarizer can be optimized for operation in the infrared to the UV range.
The second polarized incident beam 164 from the second polarization-maintaining optical fiber 180 is collimated through the collimating/focusing lens 120 and exits at the inwardly-facing surface 123 of the collimating/focusing lens 120. The second polarized incident beam 164 then propagates through the collimating/focusing lens 120 and the thin film wire-grid polarizer 150 and couple with the reflected first polarized incident beam 162 to form the composite depolarized output beam 166. But as discussed above in reference to
As discussed in reference to
The incident angles θ1 and θ2 are determined by the exit angles of the incident beams 162 and 164 at the inwardly-facing surfaces 113 and 123 of the collimating/focusing lenses 110 and 120, respectively. Because the collimating/focusing lenses 110 and 120 are graded index lenses, the exit angles are determined by the offset distances 172 and 182 of the input fibers 170 and 180 from the optical axis 115 of the collimating/focusing lenses 110 and 120, respectively. The greater the offset distance, the greater the exit angle will be and the incident angles θ1 and θ2 will be increased accordingly. Hence, for a proper alignment between the input fiber 170 and the output fiber 190, if the offset distance 172 is set high for the input fiber 170, the offset distance 192 for the output fiber 190 must be correspondingly set to the same high value since the resulting incident angle θ1 of the incident beam 162 and the reflected angle θ3 of the reflected output beam 166 will be large. Then the symmetry in the arrangement requires that the offset distance 182, of the second input fiber 180, also should be set to match the offset distance 172 also so that the incident angle θ2 of the second incident beam 164 will be appropriately adjusted for a proper coupling of the two incident beams 162 and 164 at the thin film wire-grid polarizer 150.
Persons of ordinary skill in the art will appreciate that by switching the input/output roles of the optical fibers 170, 180, and 190, and reversing the propagation directions of the beams involved, the same configuration of optical PBC/S device 100 functions as a beam splitter.
Unlike the bulk optical elements, such as beam splitter cubes and Wollaston prisms, utilized in some prior art optical PBC/S devices, a thin film wire-grid polarizer typically can accommodate a wider range of incidence angles θ1 and θ2. In turn, the input and output fibers can be positioned with relatively large offset distances 172, 182, and 192. In a thin film wire-grid polarizer that was fabricated with dimensions optimized for infrared application, the applicants were able to measure no significant degradation in performance of the polarizer for incidence angles up to about 20 degrees. One benefit of this aspect of the present invention is that more than one set of input and output fibers can be accommodated with only one set of optical elements, thus allowing multiplexing of optical signals with one set of optical elements.
Another advantage realized by the optical PBC/S device of the present invention is illustrated by the optical PBC/S device 500 of
By providing the fourth optical fiber 593, additional functionality can be realized for the PBC/S device 500. In this illustration, the optical PBC/S device 500 is set up as a basic beam combiner where two orthogonally polarized incident beams, 562 and 564 (S and P polarizations, respectively) are received through the input optical fibers 570 and 580, respectively. The thin film wire-grid polarizer 550 is oriented in its first position, in which, it will reflect the S polarized incident beam 562 and transmit the P polarized incident beam 564. Thus, as illustrated in
According to the present invention, by rotating the thin film wire-grid polarizer 550 about the optical axis 515 of the optical PBC/S device 500 from the basic beam combiner configuration, a part or all of the composite depolarized output beam can be redirected to the fourth optical fiber 593.
Furthermore, in this embodiment, the output beam can be selectively apportioned between the output fibers 590 and 593 by positioning the thin film wire-grid polarizer 550 between the two positions discussed above. Unlike other types of polarizers, metal wire-grid polarizers, such as the thin film wire-grid polarizers discussed here, will partially reflect and transmit the remainder of a polarized incident beam when the wire grid's optical transmission axis is oriented somewhere between 0 and 90 degrees with respect to the polarization state of the incident beam. In other words, the thin film wire-grid polarizer's optical transmission axis is between the first and the second positions, discussed above, that define the optimal reflection and transmission of S and P polarization states.
As the angle δ changes between 0 and 90 degrees the proportion of the transmitted versus the reflected components of a given polarized incident beam changes continuously. When the rotation angle δ of the thin film wire-grid polarizer 550 about the optical axis 515 of the optical PBC/S device 500 is between 0 and 90 degrees, the optical transmission axis of the wire grid polarizer 550 is no longer aligned to any of the polarization states of the two incident beams. This offsets the optical transmission axis of the wire grid polarizer 550 from the optimal condition for reflecting the S polarized incident beam from the fiber 570 and transmitting the P polarized incident beam from the fiber 580. The result is that each incident beam is partially reflected and partially transmitted by the thin film wire-grid polarizer 550 and coupled to the output fibers 590 and 593.
In order to achieve the most efficient optical coupling from input fibers 570 and 580 to the two output fibers 590 and 593 simultaneously, the thin film wire-grid polarizer's wire-grid structures ideally must be positioned symmetrically with respect to the two collimating/focusing lenses 510 and 520 and the gap spacing between the two collimating/focusing lenses must be kept to a minimum. As previously discussed in reference to
The graph of
Another practical implication of this partial reflectance/transmittance effect is that, by keeping the rotation angle δ of the thin film wire-grid polarizer 550 small, the fourth optical fiber 593 can be used as a tapping port to tap a small fraction of the output beam of the beam combiner to monitor the power level. When the rotation angle δ is small, while a majority of the S polarized incident beam from the fiber 570 is reflected, a small fraction of the S polarized incident beam is transmitted through the thin film wire-grid polarizer 550 and focused into the fourth optical fiber 593. Similarly, while the majority of the P polarized incident beam from the fiber 580 is transmitted, the same small fraction of the P polarized incident beam is reflected by the thin film wire-grid polarizer 550 and also focused into the fourth optical fiber 593. Thus, the output beam focused into the fourth optical fiber 593 is also a composite beam composed of the same proportion of S and P polarized component beams as the main output beam observed at the output fiber 590 and the power level of the combined output beam observed at the fourth optical fiber 593 is proportional to the power level of the main output beam according to the graph illustrated in FIG. 12. Thus, the fourth optical fiber 593 can be used to tap a small fraction of the combined output beam to monitor its power level. The tapped output beam can be diverted to an optical detector for this purpose. Although tapping the output beams is commonly practiced with prior art optical beam combiners to monitor power level of the output beam, the prior art optical beam combiners require additional beam splitting hardware to tap the output beam. Thus, the optical PBC/S device of the present invention significantly improves integration of packaged optical PBC/S optical device by eliminating the additional hardware to tap the output beam.
Persons of ordinary skill in the art would appreciate that the thin film wire-grid polarizer 550 in the optical PBC/S device 500 can be permanently configured to provide a tapping port that taps a fixed fraction of the main combined output beam or, alternatively, configured with a rotating actuation mechanism. By attaching the thin film wire-grid polarizer 550 to a rotating actuation mechanism, the power level of the output beams at either of the output fibers 590 and 593 can be tuned to a desired level. This ability to provide variable output power avoids the need to use an additional variable optical attenuator where control of the combined beam output power is desired.
As illustrated in the graph of
In another application of the optical PBC/S device of the present invention, the optical PBC/S device, in conjunction with a Fiber Bragg grating, can be used to simultaneously lock two pump lasers. Using the optical PBC/S device 500 of the present invention, orthogonally polarized beams from two pump lasers are combined into a depolarized beam. In this application, the optical PBC/S device 500 is configured to tap a small fraction of the output beam through the fourth optical fiber 593 and coupled to a Fiber Bragg grating. The Fiber Bragg grating will then reflect a narrow band of the spectrum back into the optical PBC/S device which is routed back to the two pump lasers by the optical PBC/S device. This optical feedback serves to lock the two pump lasers' wavelength to the central wavelength of the Fiber Bragg grating.
Another advantage of providing the fourth optical fiber 593 is realized when the optical PBC/S device 500, of
As illustrated in
Because the offset distance 672 is smaller than the offset distance 692, if the thin film wire-grid polarizer 650 were positioned orthogonally, the exit angle of the incident beam 662 at the inwardly-facing surface 613 of the collimating/focusing lens 610 will be too shallow and the reflected output beam 666 will not focus into the output fiber 690. But, by adjusting the tilt angle α of the thin film wire-grid polarizer 650, the incident beam 662 can be reflected back into the collimating/focusing lens 610 at a proper angle and focused into the output fiber 690. This aspect of the invention provides the flexibility to use the optical PBC/S device in an application that may not allow symmetrical placement of the optical fibers.
It is generally known in the art that in optical PBC/S devices, the optical fibers can be secured in ferrules in predetermined configuration for easier handling of the optical fibers. By securing the optical fibers in ferrules, properly aligning the fibers with respect to the optical axis of the PBC/S device is simplified. The various embodiments of the PCB/S device according to the present invention discussed herein also can be readily configured with such ferrule-mounted optical fibers as input/output optical beam carriers. Each ferrule can be configured to hold at least one pair of optical fibers where one of the optical fibers is a polarization-maintaining fiber and the other optical fiber is a standard optical fiber. That will allow at least one polarization-maintaining fibers on each end of the PBC/S device that can be used as input/output optical beam carriers depending on whether the PBC/S device is used as a beam combiner or a splitter. The polarization-maintaining fibers can be secured in their respective ferrules in predetermined orientation for ease of use, so that their optical axes are orthogonal to each other when mounted onto the PBC/S device.
Compared to prior art optical PBC/S devices that utilize bulk optical elements, the optical PBC/S device of the present invention provides, among other benefits, polarization functionality in a compact format because the thin film wire-grid polarizers can be readily fabricated to have a thickness in sub-millimeter range rather than millimeter dimensions of the bulk optical elements. Furthermore, utilizing such recently developed techniques such as nanoimprinting lithography, thin film wire grid structures of submicron dimensions can be fabricated cost efficiently compared to alternative lithographic methods. Fabrication of such submicron scale wire grid structures is described in ZHAONING YU, PARU DESHPANDE, WEI WU, JIAN WANG, AND STEPHEN Y. CHOU, Reflective Polarizer Based on a Stacked Double-Layer Subwavelength Metal Grating Structure Fabricated Using Nanoimprint Lithography, APPL. PHYS. LETT. Vol. 77, No. 7, 927 (Aug. 14, 2000).
Applying the nanoimprinting lithography, thin film wire-grid polarizers on substrates of thickness in the range of about 200-1000 μm is readily achieved. Thus, the optical PBC/S device of the invention requires much smaller separation between the two collimating/focusing lenses compared to prior art devices utilizing bulk optical elements whose dimensions are in millimeters. For a thin film wire-grid polarizer that is 500 μm thick the gap between the collimating/focusing lenses can be kept as small as 500 μm. The result is that, according to the present invention, a very compact optical PBC/S device that is significantly smaller than the prior art packaged optical PBC/S devices can be provided.
Furthermore, a performance advantage may also be realized. A smaller gap between the collimating/focusing lenses lowers the device's insertion loss caused by the diffraction between the collimating/focusing lenses. In that regard, as shown in
Many modifications and variations are possible in view of the above teachings. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as is suited to the particular use contemplated. It is intended that the scope of the invention be defined by the appended claims and their equivalents.
Number | Name | Date | Kind |
---|---|---|---|
4615034 | von Gunten et al. | Sep 1986 | A |
4638669 | Chou | Jan 1987 | A |
4650289 | Kuwahara | Mar 1987 | A |
4732444 | Papuchon et al. | Mar 1988 | A |
4763972 | Papuchon et al. | Aug 1988 | A |
4778234 | Papuchon et al. | Oct 1988 | A |
4998793 | Henry et al. | Mar 1991 | A |
5077816 | Glomb et al. | Dec 1991 | A |
5088105 | Scifres et al. | Feb 1992 | A |
5091981 | Cunningham | Feb 1992 | A |
5283845 | Ip | Feb 1994 | A |
5299212 | Koch et al. | Mar 1994 | A |
5461246 | Chou | Oct 1995 | A |
5467415 | Presby | Nov 1995 | A |
RE35337 | Patel et al. | Sep 1996 | E |
5617234 | Koga et al. | Apr 1997 | A |
5654818 | Yao | Aug 1997 | A |
5691989 | Rakuljic et al. | Nov 1997 | A |
5706301 | Lagerstrom | Jan 1998 | A |
5719976 | Henry et al. | Feb 1998 | A |
5726805 | Kaushik et al. | Mar 1998 | A |
5772905 | Chou | Jun 1998 | A |
5777793 | Little et al. | Jul 1998 | A |
5793784 | Wagshul et al. | Aug 1998 | A |
5820769 | Chou | Oct 1998 | A |
5848080 | Dahm | Dec 1998 | A |
5852688 | Brinkman et al. | Dec 1998 | A |
5870421 | Dahm | Feb 1999 | A |
5956216 | Chou | Sep 1999 | A |
5966483 | Chowdhury | Oct 1999 | A |
5973316 | Ebbesen et al. | Oct 1999 | A |
5973784 | Szwaykowski et al. | Oct 1999 | A |
6023542 | Pan et al. | Feb 2000 | A |
6035089 | Grann et al. | Mar 2000 | A |
6037644 | Daghighian et al. | Mar 2000 | A |
6040936 | Kim et al. | Mar 2000 | A |
6052238 | Ebbesen et al. | Apr 2000 | A |
6064506 | Koors | May 2000 | A |
6069380 | Chou et al. | May 2000 | A |
6075915 | Koops et al. | Jun 2000 | A |
6101300 | Fan et al. | Aug 2000 | A |
6108131 | Hansen et al. | Aug 2000 | A |
6122103 | Perkins et al. | Sep 2000 | A |
6122301 | Tei et al. | Sep 2000 | A |
6125220 | Copner et al. | Sep 2000 | A |
6130969 | Villeneuve et al. | Oct 2000 | A |
6137939 | Lesesky et al. | Oct 2000 | A |
6154318 | Austin et al. | Nov 2000 | A |
6154479 | Yoshikawa et al. | Nov 2000 | A |
6169825 | Morey et al. | Jan 2001 | B1 |
6175667 | Wang et al. | Jan 2001 | B1 |
6191890 | Baets et al. | Feb 2001 | B1 |
6198557 | Dultz et al. | Mar 2001 | B1 |
6198860 | Johnson et al. | Mar 2001 | B1 |
6208463 | Hansen et al. | Mar 2001 | B1 |
6215928 | Friesem et al. | Apr 2001 | B1 |
6233375 | Lang et al. | May 2001 | B1 |
6233380 | Ferrieu | May 2001 | B1 |
6235141 | Feldman et al. | May 2001 | B1 |
6240109 | Shieh | May 2001 | B1 |
6251297 | Komuro et al. | Jun 2001 | B1 |
6252709 | Sato | Jun 2001 | B1 |
6253009 | Lestra et al. | Jun 2001 | B1 |
6260388 | Borrelli et al. | Jul 2001 | B1 |
6262002 | Carey | Jul 2001 | B1 |
6263002 | Hsu et al. | Jul 2001 | B1 |
6275291 | Abraham et al. | Aug 2001 | B1 |
6285810 | Fincato et al. | Sep 2001 | B1 |
6288840 | Perkins et al. | Sep 2001 | B1 |
6292604 | Cheng | Sep 2001 | B1 |
6309580 | Chou | Oct 2001 | B1 |
6317554 | Kosaka et al. | Nov 2001 | B1 |
6324192 | Tayebati | Nov 2001 | B1 |
6331913 | Huang et al. | Dec 2001 | B1 |
6339603 | Flanders et al. | Jan 2002 | B1 |
6349103 | Chung et al. | Feb 2002 | B1 |
6353623 | Munks et al. | Mar 2002 | B1 |
6359915 | Koch et al. | Mar 2002 | B1 |
6370177 | Genei et al. | Apr 2002 | B1 |
6371662 | Leard et al. | Apr 2002 | B1 |
6374016 | Albert et al. | Apr 2002 | B2 |
6400860 | Chandrasekhar et al. | Jun 2002 | B1 |
6410416 | Dodabalapur et al. | Jun 2002 | B1 |
6411749 | Teng et al. | Jun 2002 | B2 |
6482742 | Chou | Nov 2002 | B1 |
6518189 | Chou | Feb 2003 | B1 |
6618104 | Date et al. | Sep 2003 | B1 |
6661952 | Simpson et al. | Dec 2003 | B2 |
6692797 | Owen et al. | Feb 2004 | B1 |
6713238 | Chou et al. | Mar 2004 | B1 |
20030007105 | Magarill et al. | Jan 2003 | A1 |
20030063832 | Hellman et al. | Apr 2003 | A1 |
Number | Date | Country | |
---|---|---|---|
20030223670 A1 | Dec 2003 | US |