Patent Application
20210400244
The present invention relates to an optical scanning type video projection device, and more particularly to, for example, a disposing structure in which a light source module device and an optical scanning mirror device are disposed and which decreases the height of the optical scanning type video projection device.
Various optical beam projection devices are known as devices that scan with a light beam, such as a laser beam, in two directions orthogonal to each other. A two-dimensional optical scanning type video projection device constituted of a light source module device and an optical scanning mirror device is based on a system where the light source module device multiplexes three primary colors, i.e., red, blue, green, of laser light rays into one laser beam using a lens and a mirror, however a problem is that downsizing of the optical beam projection device is difficult (see Patent Literature 1 and Patent Literature 2 for example).
On the other hand, in a case of a two-dimensional optical scanning type video projection device constituted of a three primary color light source module device, in which a semiconductor laser and an optical waveguide type multiplexer are combined; and an optical scanning mirror device, downsizing and power reduction of the device are possible, and this two-dimensional optical scanning type video projection device is applied to a laser beam scanning type color image projection device (see Patent Literature 3 for example).
In a case of the two-dimensional optical scanning type video projection device (optical engine) constituted of: the three primary color light source module device, in which the semiconductor laser and the optical waveguide type multiplexer are combined; and the two-dimensional optical scanning mirror drive, the dimensions of the two-dimensional optical scanning type video projection device need to be minimized for commercial application. In this case, the width and length of the two-dimensional optical scanning type video projection device need to be small, but in the case of applying this device to a spectacle display, in particular, not only the width and length but also the height of the video projection device need to be decreased.
For example, in the case of Non Patent Literature 1, the light beam emitted from the three primary color light source module device, in which the semiconductor laser and the optical waveguide type multiplexer are combined, is applied to a scanning mirror of the two-dimensional optical scanning mirror device to reflect the light beam, therefore the two-dimensional optical scanning mirror device need to be installed in a tilted state, as illustrated in
It is an object of the present invention to decrease the height of the optical scanning type video projection device by improving the disposition of the light source module device and the optical scanning mirror device in the optical scanning type video projection device.
According to one embodiment, an optical scanning type video projection device includes: a first substrate on which an optical waveguide type multiplexer having a plurality of optical waveguides and an optical multiplexing unit is provided; a second substrate on which an optical scanning mirror device having a movable mirror is provided; and an optical member configured to guide a light beam emitted from the optical waveguide type multiplexer to the movable mirror in a direction that is different from an emitting direction of the light beam, wherein the first substrate and the second substrate are disposed in parallel with each other.
As one aspect of the optical scanning type video projection device, the height of the optical scanning type video projection device can be decreased by improving the disposition of the light source module device and the optical scanning mirror device in the optical scanning type projection device.
A two-dimensional optical scanning type video projection device of an embodiment of the present invention will be described with reference to
In the two-dimensional optical scanning mirror device 20, a movable outer frame member 23 is provided inside a non-movable outer frame member 24 via a hinge, and the movable mirror 22 is provided inside the movable outer frame member 23 via a hinge. In this case, it is preferable that a main surface of the movable mirror 22 is in parallel with a main surface of the two-dimensional optical scanning mirror device substrate 21 in a non-operation state, thereby the height of the two-dimensional optical scanning type video projection device can be decreased. The driving principle of the two-dimensional optical scanning mirror device 20 here is piezoelectric driving based on the piezoelectric effect, but an electrostatic driving type or electromagnetic driving type driving device may be used.
This two-dimensional optical scanning type video projection device normally includes a common mounting substrate 30, on which the light source module device substrate 11 and the two-dimensional optical scanning mirror device substrate 21 are mounted. The mounting surface of the mounting substrate 30 is flat as a whole, and for the optical components 25, a first reflection mirror (252) and a second reflection mirror (253), which guides an output multiplexed light beam 40 reflected by the first reflection mirror (252) to the movable mirror 22, may be disposed on the mounting substrate 30. In this case, the second reflection mirror (253) may be disposed on a ceiling surface of a cover member, that is, at a position facing the mounting surface of the mounting substrate 30.
One of the first reflection mirror (252) and the second reflection mirror (253) may be a light condensing reflection mirror. In a case where the first reflection mirror (252) is a non-light condensing reflection mirror, a condensing lens (251) may be disposed between the optical waveguide type multiplexer 12 and the first reflection mirror (252). Further, for the optical component 25, a prism member (256), which has a plurality of reflection surfaces to reflect the output multiplexed light beam 40, may be used.
For the mounting substrate 30, a step type substrate, which has a step between the mounting surface of the light source module device substrate 11 and the mounting surface of the two-dimensional optical scanning mirror device substrate 21, may be used, and in this case, the mounting surface of the two-dimensional optical scanning mirror device substrate 21 may be the lower step side. Here for the optical members 25, a condensing lens 251 and a non-light condensing reflection mirror (257) may be used, or a light condensing reflection mirror (258) may be used.
The two-dimensional optical scanning mirror device 20 may be disposed on the ceiling surface of the covering member, that is, at a position facing the mounting surface of the mounting substrate 30. In this case, for the optical members 25, the condensing lens 251 and the non-light condensing reflection mirror 252 may be used, or a light condensing reflection mirror 255 may be used. Further, a reflection mirror 26 that reflects the reflected light from the movable mirror 22 may be disposed on the mounting substrate 30, or in the case of not disposing the reflection mirror 26, a window (35), which the reflected light from the movable mirror 22 transmits through, may be disposed on the mounting substrate 30.
A cover member 31, that covers the light source module device 10 and the two-dimensional optical scanning mirror device 20, is disposed on the two-dimensional optical scanning type video projection device. This cover member 31 may be divided into a first cover member (311) that covers the light source module device 10, and a second cover member (312) that covers the two-dimensional optical scanning mirror device 20.
The light source elements 15 in this case are typically a blue semiconductor laser 151, a green semiconductor laser 152, and a red semiconductor laser 153, but may be a light-emitting diode (LED) or a light source connected via an optical fiber or a spherical lensed optical fiber, and in the case of using an optical fiber or a spherical lensed optical fiber, a liquid laser or a solid-state laser may be used for the light source thereof.
For the light source module device substrate 11 and the two-dimensional optical scanning mirror device substrate 21, an Si substrate, a glass substrate, a sapphire substrate, a plastic substrate, or the like may be used. In the case of forming the optical waveguide patterns 141 to 143, an optical waveguide forming layer 13, which is a lower clad layer, may be formed on the light source module device substrate 11, a material to be a core layer is disposed thereon, and this core layer is etched. An upper core layer may be formed thereon. For a material of the optical waveguide forming layer 13, the core layer and the upper clad layer, An SiO2 glass material may be used, but other materials, such as transparent plastic (e.g. acrylic resin) and other transparent materials, may be used. In the case where light source elements each having wavelength other than RGB are used for the light source elements 15, such a semiconductor material as Si an GaN may be used for the core layer and the clad layer. The structure of the optical multiplexing portion is arbitrary, but here the optical multiplexing unit disclosed in Patent Literature 1 is used.
By the above configuration, the height of the two-dimensional optical scanning type video projection device can be decreased, thereby when the video projection device is stored in the portion of the temple of the spectacle frame of the spectacle type display, the thickness of the temple can be decreased, that is, the two-dimensional optical scanning type video projection device can be stored inconspicuously.
When the two-dimensional optical scanning type video projection device is packaged, wire bonding need to be used to connect the wires for the light source module device 10 and the two-dimensional optical scanning mirror device 20, which are components thereof, with pads. In this embodiment of the present invention, the light source module device substrate 11, on which the optical waveguide type multiplexer 12 is disposed, and the two-dimensional optical scanning mirror device substrate 21, on which the two-dimensional optical scanning mirror device 20 including the movable mirror 22 is disposed, are disposed in parallel with each other, therefore the wire bonding need not be performed separately, but can be performed simultaneously using a wire bonding device, and as a result, wiring is easy and fabrication cost can be reduced.
A two-dimensional optical scanning type video projection device of embodiment 1 of the present invention will be described with reference to
Here the chip size of the light source module device 10 is 6 mm (length)×4 mm (width)×1 mm (height). Specifically, a 15 μm thick SiO2 film, to be the optical waveguide forming layer 13, is formed by flame hydrolysis on the light source module device substrate 11 formed of a 1 mm thick Si substrate. Then on the SiO2 film, a 2 μm thick SiO2—GeO2 layer (refractive index difference Δn=0.5%, defined by Δn=(n1−n2)/n1. n1: refractive index of core and n2: refractive index of clad) is formed by flame hydrolysis. Then on this layer, the optical waveguide patterns 141 to 143, of which waveguide width is 2 μm, are formed by an optical exposure method using a contact mark. Thereby the optical multiplexer is formed.
Then on the optical waveguide patterns 141 to 143, a 20 μm thick SiO2 film (not illustrated), which is an upper clad layer, is formed by flame hydrolysis as a cover layer which covers the entire optical waveguide patterns 141 to 143. For the optical waveguide pattern 141 for blue and the optical waveguide pattern 143 for red, light incident portions thereof need to be bent at a right angle, therefore a 30 μm deep trench is formed in each bending portion by Ga-based etching using a converged ion beam method, so that the guided light is totally reflected by the side wall of the trench. Then, leaving only the region of the optical multiplexer, the entire SiO2 film on the other portion is removed by etching, so that the light source module device substrate 11 is exposed. Thereby the optical waveguide type multiplexer 12 is formed.
The blue semiconductor laser 151, the green semiconductor laser 152, and the red semiconductor laser 153 are disposed at the edges of the optical waveguide patterns 141 to 143 of the optical waveguide type multiplexer 12. Thereby the light source module device 10 is formed. At this time, the light source module device substrate 11 formed of the Si substrate is etched to a predetermined depth, so as to match the positions of the laser-emitting ends of the blue semiconductor laser 151, a green semiconductor laser 152, and a red semiconductor laser 153 and the positions of the optical waveguide patterns 141 to 143.
On the other hand, the two-dimensional optical scanning mirror device 20, of which dimensions are 7 mm (length)×5 mm (width)×0.7 mm (height), is formed by performing a MEMS processing on an Si wafer. This two-dimensional optical scanning mirror device 20 is constituted of the movable mirror 22, the movable outer frame member 23, and the non-movable outer frame member 24. The size of the movable mirror 22 is 1 mm φ, and an aluminum (Al) film is formed on the surface. The reflectance of the movable mirror 22 is 90% or more for all of red, green and blue.
A piezoelectric material film, such as PZT, is formed on the surface of the non-movable outer frame member 24, and pads (381 to 384) for piezoelectric driving are formed. By applying a drive voltage, of which high-speed (horizontal) axis drive frequency is 35 KHz, low-speed (vertical) axis drive frequency is 60 Hz and maximum drive voltage is ±15V, to the pads (381 to 384) for piezoelectric driving, the movable mirror 22 is rotated in the horizontal direction and the vertical direction at the same time. At this time, the high-speed (horizontal) axis swing angle (mirror deflection angle) is ±15°, for example, and the low-speed (vertical) axis swing angle (mirror deflection angle) is ±15°, for example.
The embodiment 1 of the present invention includes: the condensing lens 251 that converges an emission multiplexed light beam 40 which is emitted from the optical waveguide type multiplexer 12; the non-light condensing reflection mirror 252 which bends the emission multiplexed light beam 40 upward at least once; and the non-light condensing reflection mirror 253 that reflects the emission multiplexed light beam 40, which was bended up by the non-light condensing reflection mirror 252 toward the movable mirror 22.
Here for the condensing lens 251, a combination lens of a convex lens and a concave lens is used for example, and the thickness thereof is 0.7 mm and the focal distance is 1.35 mm, for example. For the non-light condensing reflection mirror 252, a quartz glass on which surface an Al film is formed is used, and the angle of the reflection surface of the non-light condensing reflection mirror 252 from the mounting surface of the mounting substrate 30 is 8°, for example, and the size of the reflection surface is 5 mm (length)×3 mm (width). For the non-light condensing reflection mirror 253, a quartz glass on which surface an Al film is formed is used, and the angle of the reflection surface of the non-light condensing reflection mirror 253 from the mounting surface of the mounting substrate 30 is 24°, for example, and the size of the reflection surface is 1.2 mm (length)×1.2 mm (width).
The cover member 31 having a window 32 to cover the light source module device 10 and the two-dimensional optical scanning mirror device 20 is disposed on the two-dimensional optical scanning type video projection device. This cover member 31 is normally formed of a light-shielding metal member, such as Al, of which thickness is 0.5 mm, but may be formed of an insulating member instead. The emission multiplexed light beam 40 reflected by the non-light condensing reflection mirror 253 emits through the window 32 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
As illustrated in
Since the light source module device 10 and the two-dimensional optical scanning mirror device 20 have already been disposed in parallel on the common mounting substrate 30, the wire bonding at this time can be performed virtually under the same bonding conditions, without changing the direction of bonding, for example. As a result, wires are formed easily and fabrication cost can be reduced.
As illustrated in
In
As described above, according to embodiment 1 of the present invention, the first substrate 11 of the light source module device 10 and the two-dimensional optical scanning mirror device substrate 21 of the two-dimensional optical scanning mirror device 20 are disposed in parallel on the common mounting substrate 30, hence wire bonding is performed easily. Further, when the two-dimensional optical scanning type video projection device is packaged with the cover member 31, the thickness of an internal space between the surface of the mounting substrate 30 and the ceiling surface of the cover member 31 is extremely thin, about 3 mm, that is, a thin packaging of which height is very low can be implemented.
A two-dimensional optical scanning type video projection device of embodiment 2 of the present invention will be described with reference to
As illustrated in
In
As described above, according to embodiment 2 of the present invention, the non-light condensing reflection mirror, which is disposed on the ceiling of the cover member 31, is divided into the non-light condensing reflection mirrors 253-1 and 253-2, hence the thickness of the internal space between the surface of the mounting substrate 30 and the ceiling surface of the cover member 31 can be about 2 mm, that is, a thinner packaging of which height is even lower can be implemented.
A two-dimensional optical scanning type video projection device of embodiment 3 of the present invention will be described with reference to
As illustrated in
In embodiment 3 of the present invention, the non-light condensing reflection mirror 252 is disposed to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12, upward, and the light condensing reflection mirror 254 is disposed to reflect the emission multiplexed light beam 40, which is bended upward by the non-light condensing reflection mirror 252, toward the movable mirror 22 in the converging state. The reflected emission multiplexed light beam 40 emits through the window 32 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
According to embodiment 3 of the present invention, the light condensing reflection mirror 254 is used, hence the condensing lens (251) is not needed, and the length of the two-dimensional optical scanning type video projection device can be decreased. The other functional effects are the same as embodiment 1 described above.
A two-dimensional optical scanning type video projection device of embodiment 4 of the present invention will be described with reference to
As illustrated in
In embodiment 4 of the present invention, a light condensing reflection mirror 255 is disposed to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12, upward, and the emission multiplexed light beam 40 is bended up toward the non-light condensing reflection mirror 253 in the condensed state by the light condensing reflection mirror 255, and is reflected toward the movable mirror 22 by the non-light condensing reflection mirror 253. The reflected emission multiplexed light beam 40 emits through the window 32 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
According to embodiment 4 of the present invention, the light condensing reflection mirror 255 is used, hence the condensing lens (251) is not needed, and the length of the two-dimensional optical scanning type video projection device can be decreased. The other functional effects are the same as embodiment 1 described above.
A two-dimensional optical scanning type video projection device of embodiment 5 of the present invention will be described with reference to
As illustrated in
In embodiment 5 of the present invention, the prism 256 having two reflection surfaces is disposed via the light condensing lens 251, to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12, upward.
As illustrated in
In
A two-dimensional optical scanning type video projection device of embodiment 6 of the present invention will be described with reference to
According to embodiment 6 of the present invention, the emission multiplexed light beam 40 emitted from the optical waveguide type multiplexer 12 enters the non-light condensing reflection mirror 257 in a state of being condensed by the condensing lens 251, is reflected by the non-light condensing reflection mirror 257, and the reflected emission multiplexed light beam 40 enters the movable mirror 22. The entered emission multiplexed light beam 40 emits through the window 33 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
According to embodiment 6 of the present invention, the mounting substrate 30 having the step is used, hence the non-light condensing reflection mirrors 252 and 253, the light condensing reflection mirrors 254 and 255, and the like are not needed. Since there is no need to consider the disposition of these composing elements, assembly of the two-dimensional optical scanning type video projection device is easy.
A two-dimensional optical scanning type video projection device of embodiment 7 of the present invention will be described with reference to
In embodiment 7 of the present invention, the light source module device cover member 311 having the window 341 to cover the light source module device 10 and the condensing lens 251 is disposed, and the two-dimensional optical scanning mirror device cover member 312, having the window 342 to cover the two-dimensional optical scanning mirror device 20 and the non-light condensing reflection mirror 257, is disposed.
According to embodiment 7 of the present invention, the mounting substrate 30 having the step is used, and the cover member 31 is divided into the light source module device cover member 311 and the two-dimensional optical scanning mirror device cover member 312, hence the cover member 31 can be manufactured easily. The other functional effects are the same as embodiment 6.
A two-dimensional optical scanning type video projection device of embodiment 8 of the present invention will be described with reference to
In embodiment 8 of the present invention, the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12, enters the light condensing reflection mirror 258, and is reflected by the non-light condensing reflection mirror 258 in the condensed state, and this reflected emission multiplexed light beam 40 enters the movable mirror 22. The entered emission multiplexed light beam 40 emits through the window 33 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
According to embodiment 8 of the present invention, the non-light condensing reflection mirror 258 is used, hence the light-condensing lens is not needed, and the length of the two-dimensional optical scanning type video projection device can be decreased. The other functional effects are the same as embodiment 5.
A two-dimensional optical scanning type video projection device of embodiment 9 of the present invention will be described with reference to
As illustrated in
In embodiment 9 of the present invention, the non-light condensing reflection mirror 252 is disposed to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12 and is converged by the condensing lens 251, upward, and the emission multiplexed light beam 40, which was bended upward by the non-light condensing reflection mirror 252, is emitted toward the movable mirror 22. The emission multiplexed light beam 40 is reflected by the reflection mirror 26 disposed on the mounting substrate 30 after two-dimensionally scanned by the movable mirror 22, then emits through the window 32, and projects video onto a screen or a retina.
According to embodiment 9 of the present invention, the position of the two-dimensional optical scanning mirror device substrate 21 can be shifted toward the optical waveguide type multiplexer 12 side without overlapping with the optical waveguide type multiplexer 12, hence the overall length (“length”) of the two-dimensional optical scanning type video projection device can be decreased. The other functional effects are the same as embodiment 1 described above.
A two-dimensional optical scanning type video projection device of embodiment 10 of the present invention will be described with reference to
As illustrated in
In embodiment 10 of the present invention, the non-light condensing reflection mirror 252 is disposed to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12 and is converged by the condensing lens 251, upward, and the emission multiplexed light beam 40 which was bended upward by the non-light condensing reflection mirror 252 is emitted toward the movable mirror 22. The emission multiplexed light beam 40 emits through the window 35 provided in the mounting substrate 30 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
According to embodiment 10 of the present invention, the window 35 is provided at a position in the mounting substrate 30 where the reflection mirror 26 is disposed in embodiment 8, hence the length of the two-dimensional optical scanning type video projection device can be further decreased. The other functional effects are the same as embodiment 1 described above.
A two-dimensional optical scanning type video projection device of embodiment 11 of the present invention will be described with reference to FIG. 17, where the non-light condensing reflection mirror 252 of embodiment 9 is replaced with the light condensing reflection mirror 254, so that the condensing lens 251 is not needed. Here the shape and disposition of each reflection mirror are schematically illustrated, and for the actual shape, refer to embodiment 1 described above.
As illustrated in
In embodiment 11 of the present invention, the light condensing reflection mirror 254 is disposed to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12, upward, and the emission multiplexed light beam 40 is emitted toward the movable mirror 22 by the light condensing reflection mirror 254. The emission multiplexed light beam 40 is reflected by the reflection mirror 26 disposed on the mounting substrate 30 after two-dimensionally scanned by the movable mirror 22, then emits through the window 32, and projects video onto a screen or a retina.
According to embodiment 11 of the present invention, the non-light condensing reflection mirror 252 of embodiment 9 is replaced with the light condensing reflection mirror 254, so that the condensing lens 251 is not needed, hence the length of the two-dimensional optical scanning type video projection device can be decreased. The other functional effects are the same as embodiment 1 and embodiment 9 described above.
A two-dimensional optical scanning type video projection device of embodiment 12 of the present invention will be described with reference to
As illustrated in
In embodiment 12 of the present invention, the light condensing reflection mirror 254 is disposed to bend the emission multiplexed light beam 40, which is emitted from the optical waveguide type multiplexer 12, upward, and the emission multiplexed light beam 40, which was bended upward by the light condensing reflection mirror 254, is emitted toward the movable mirror 22. The emission multiplexed light beam 40 emits through the window 35 disposed in the mounting substrate 30 after two-dimensionally scanned by the movable mirror 22, and projects video onto a screen or a retina.
According to embodiment 12 of the present invention, the window 35 is provided at a position in the mounting substrate 30 where the reflection mirror 26 is provided in embodiment 10, hence the length of the two-dimensional optical scanning type video projection device can be further decreased. The other functional effects are the same as embodiment 1 and embodiment 9 described above.
A two-dimensional optical scanning type video projection device of embodiment 13 of the present invention will be described with reference to
Just like
Here the incident surface 259-1 is a plane for the output light to enter the prism 259, or is a concave-curved surface, which has a surface perpendicular to each incident ray constituting the light beam at the incident position of this ray. If the incident surface 259-1 is a concave-curved surface that has a surface perpendicular to each incident ray at the incident position, the refractive angle does not differ depending on the wavelength of the incident light, hence the condensing characteristics do not depend on the wavelength.
The non-light condensing reflection surface 259-2 is a flat reflection surface to bend the radiated light toward the upper surface. It is preferable that the angle of the reflection surface is configured so that all of the incident rays constituting the light beam are totally reflected, but total reflection is not always necessary, and the incident light may be reflected by a reflection metal film, or the like, that is formed on the surface of the prism 259.
The light condensing reflection surface 259-3 is a light condensing reflection curved surface to condense the output light that is emitted in a spread out state from the optical waveguide type multiplexer 12, and preferably is an elliptical surface, but may be a surface that can condense the light, such as a curved surface approximated by a polynomial expression. This light condensing reflection curved surface as well preferably has an angle of the reflected surface by which total reflection is performed, but total reflection is not always needed, and the incident light may be reflected by a reflection metal film or the like that is formed on the surface of the prism 259.
The emission surface 259-4 is a plane for the light beam to emit from the prism, or a concave or convex curved surface, which has a surface perpendicular to each emitting ray at the emitting position of this ray. The other surfaces of the prism 259 may be any type of surface, but is normally a plane. The material of the prism 259 is SiO2 glass, but may be any material which light transmits through, such as a transparent resin. In embodiment 13, there is one light condensing reflection surface, but two or more light condensing reflection surfaces may be used, and a number of reflection surfaces, including the non-light condensing reflection surfaces, may be further increased.
A two-dimensional optical scanning type video projection device of embodiment 14 of the present invention will be described with reference to
In embodiment 14 of the present invention, a number of the non-light condensing reflection surfaces is increased by one, totaling three, whereby the light is reflected, hence the total size of the video projection device can be decreased. The configuration of each surface and material of the prism 2510 are the same as embodiment 13 described above. The prism 2510 may be fixed to the mounting substrate using an appropriate fixing member, or may be fixed to the cover member. In embodiment 14 too, two or more light condensing reflection surfaces may be used, and a number of the reflection surfaces, including the non-light condensing reflection surfaces, may be increased.
A two-dimensional optical scanning type video projection device of embodiment 15 of the present invention will be described with reference to
In embodiment 15 of the present invention, the prism 2511 is divided, hence the prism 2511 is easily manufactured. The prism 2511 may be fixed to the mounting substrate using an appropriate fixing member, or may be fixed to the cover member. In embodiment 15 too, two or more light condensing reflection surfaces may be used, and a number of reflection surfaces, including the non-light condensing reflection surfaces, may be increased,
A two-dimensional optical scanning type video projection device of embodiment 16 of the present invention will be described with reference to
In embodiment 16 of the present invention too, the prism 2512 may be divided in the same manner as embodiment 15. The prism 2512 may be fixed to the mounting substrate using an appropriate fixing member, or may be fixed to the cover member. In embodiment 16 too, two or more light condensing reflection surfaces may be used, and a number of reflection surfaces, including the non-light condensing reflection surfaces, may be further increased.
A two-dimensional optical scanning type video projection device of embodiment 17 of the present invention will be described with reference to
In embodiment 17 of the present invention, the light beam that enters the light condensing reflection surface 2513-3 is closer to the vertical incidence compared with the embodiment 15 described above, hence even if the position of the light condensing reflection surface 2513-3 deviates, the position of the light beam does not deviate very much. Further, even if positional deviation occurs when the prism is installed, the position of the light beam does not deviate very much, and beam shape does not change very much as well. The curved surface of the light condensing reflection surface 2513-3 in this case is preferably an elliptical surface, but may be any curved surface if light can be condensed, such as a curved surface approximated by a polynomial expression.
The prism 2513 may be fixed to the mounting substrate using an appropriate fixing member or may be fixed to the cover member. In embodiment 17 too, two or more light condensing reflection surfaces may be used, and a number of reflection surfaces, including the non-light condensing reflection surfaces, may be further increased. In embodiment 17 of the present invention too, the prism 2513 may be divided in the same manner as embodiment 15.
A two-dimensional optical scanning type video projection device of embodiment 18 of the present invention will be described with reference to
The light beam after two-dimensionally scanned emits through the window 32, and the light beam in a state where the movable mirror 22 does not deflect, as illustrated, that is, in a state where the angle of the movable mirror 22 is 0°, becomes parallel with the upper mounting portion 301 and the lower mounting portion 302. Here even if the parallel output beams are not exactly parallel, the configuration of the triangular prism 2514 can be used. The reflection light beam can be acquired most efficiently if parallelism is ±10°, but is acceptable if within an approximate ±45°. If one or two reflection surfaces of the triangular prism 2514 are light condensing surfaces, then the condensing lens 251 is not needed.
In
For the scanning direction of the light beam which is emitted in parallel with the substrate after reflection by the movable mirror 22, the direction parallel with the page surface in
A two-dimensional optical scanning type video projection device of embodiment 19 of the present invention will be described with reference to
In
A two-dimensional optical scanning type video projection device of embodiment 20 of the present invention will be described with reference to
In
A two-dimensional optical scanning type video projection device of embodiment 21 of the present invention will be described with reference to
In
A two-dimensional optical scanning type video projection device of embodiment 22 of the present invention will be described with reference to
In
A two-dimensional optical scanning type video projection device of embodiment 23 of the present invention will be described with reference to
In this case, the output multiplexed beam 40 from the optical waveguide type multiplexer 12 is reflected downward by the semi-transparent mirror 2519, is then reflected upward by the movable mirror 22, and after passing through the semi-transparent mirror 2519, the output multiplexed beam 40 emits as the reflected light beam 41 in the direction vertical to the lower mounting portion 302. The mirror used here is the semi-transparent mirror 2519, hence a part of the light beam does not travel in the vertical direction as the reflected light beam 41, and becomes the light beam returning to the optical waveguide type multiplexer 12 and the light beam travelling in parallel with the upper mounting portion 301 and the lower mounting portion 302, which are light beams that cannot be used. This means that the intensity of the reflected light beam 41 decreases, but no problems occur unless the application demands strong light. Even in the case where the vertically outputted beam here is not an accurate vertical beam, this configuration including the semi-transparent mirror 2519 can be used. The perpendicularity is preferably ±10°, since the reflected light beam 41 is acquired most efficiently, but may be within an approximate ±45°.
In
A two-dimensional optical scanning type video projection device of embodiment 24 of the present invention will be described with reference to
In this case too, a part of the light beam does not travel in the vertical direction as the reflected light beam 41, and becomes the light beam returning to the optical waveguide type multiplexer 12 and the light beam travelling in parallel with the upper mounting portion 301 and the lower mounting portion 302, which are light beams that cannot be used. This means that the intensity of the reflected light beam 41 decreases, but no problems occur unless the application demands strong light. Even in the case where the vertical output beam here is not an accurate vertical beam, this configuration including the prism type beam splitter 2520 can be used. The perpendicularity is preferably ±10° since the reflected light beam 41 is acquired most efficiently, but may be within an approximate ±45°.
In
| Number | Date | Country | Kind |
|---|---|---|---|
| 2020-027609 | Feb 2020 | JP | national |
This application is a continuation application of International Application Number PCT/JP2020/049253 filed on Dec. 28, 2020, now pending, herein incorporated by reference. Further, this application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 2020-027609, filed on Feb. 20, 2020, entire contents of which are incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| Parent | PCT/JP2020/049253 | Dec 2020 | US |
| Child | 17464118 | US |
