Optical semiconductor element and optical semiconductor device

Abstract

An optical semiconductor device includes an optical semiconductor element, a metal pattern and at least one thermal conductive material. The optical semiconductor element has a first optical waveguide region and a second optical waveguide region. The second optical waveguide region is optically coupled to the first optical waveguide region and has a heater for changing a refractive index of the second optical waveguide region. The metal pattern is provided on an area to be thermally coupled to a temperature control device. The thermal conductive material couples the metal pattern with an upper face of the first optical waveguide region of the optical semiconductor element. The thermal conductive material is electrically separated from the first optical waveguide region.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the present invention will be described in detail with reference to the following drawings, wherein:

FIG. 1A and FIG. 1B illustrate a laser module in accordance with a first embodiment of the present invention;

FIG. 2 illustrates an overall structure of a laser module in accordance with a second embodiment of the present invention;

FIG. 3 illustrates an overall structure of a laser module in accordance with a third embodiment of the present invention;

FIG. 4 illustrates an overall structure of a laser module in accordance with a fourth embodiment of the present invention;

FIG. 5 illustrates an overall structure of a laser module in accordance with a fifth embodiment of the present invention;

FIG. 6 illustrates an overall structure of a laser module in accordance with a sixth embodiment of the present invention;

FIG. 7 illustrates an overall structure of a laser module in accordance with a seventh embodiment of the present invention; and

FIG. 8 illustrates an example where the present invention is applied to another optical semiconductor element.

Claims

1. An optical semiconductor device comprising: an optical semiconductor element that has a first optical waveguide region and a second optical waveguide region,the second optical waveguide region being optically coupled to the first optical waveguide region and having a heater for changing a refractive index of the second optical waveguide region;a metal pattern that is provided on an area to be thermally coupled to a temperature control device; andat least one thermal conductive material that couples the metal pattern with an upper face of the first optical waveguide region of the optical semiconductor element,the thermal conductive material being electrically separated from the first optical waveguide region.

2. The optical semiconductor device as claimed in claim 1, wherein at least one of the thermal conductive materials is coupled to an area at the second optical waveguide region side with respect to a center of the first optical waveguide region.

3. The optical semiconductor device as claimed in claim 1, further comprising a second metal pattern that is provided on the area to be thermally coupled to the temperature control device and to be electrically coupled to outside, wherein the second metal pattern is electrically coupled to the area through the thermal conductive material,the area being on an upper face of the first optical waveguide region and being electrically coupled to the first optical waveguide region.

4. The optical semiconductor device as claimed in claim 1, wherein the first optical waveguide region is a gain region or a modulator region.

5. An optical semiconductor device comprising: an optical semiconductor element that has a first optical waveguide region and a second optical waveguide region,the second optical waveguide region being optically coupled to the first optical waveguide region and having a heater for changing a refractive index of the second optical waveguide region;a metal pattern that is provided on an area to be thermally coupled to a temperature control device; andat least one thermal conductive material that couples the metal pattern with an upper face of the first optical waveguide region of the optical semiconductor element,the thermal conductive material being electrically coupled to the first optical waveguide region.

6. The optical semiconductor device as claimed in claim 5, wherein at least one of the thermal conductive materials is coupled to an area at the second optical waveguide layer side with respect to a center of the first optical waveguide layer.

7. The optical semiconductor device as claimed in claim 5, wherein the first optical waveguide region is a gain region or a modulator region.

8. An optical semiconductor device comprising: an optical semiconductor element that has a first optical-waveguide region and a second optical waveguide region,the second optical waveguide region being optically coupled to the first optical waveguide region and having a heater for changing a refractive index of the second optical waveguide region;a metal pattern that is provided on an area to be thermally coupled to a temperature control device; anda plurality of thermal conductive material that couples the metal pattern with an upper face of the first optical waveguide region of the optical semiconductor element,the thermal conductive material being electrically coupled to the first optical waveguide region.

9. The optical semiconductor device as claimed in claim 8, wherein at least one of the thermal conductive materials is coupled to an area at the second optical waveguide layer side with respect to a center of the first optical waveguide layer.

10. The optical semiconductor device as claimed in claim 8, wherein the first optical waveguide region is a gain region or a modulator region.

11. The optical semiconductor device as claimed in claim 8, wherein the first optical waveguide region and the second optical waveguide region have a plurality of segments that have a first region and a second region, the first region having a diffractive grating,the second region being combined to the first region and being a space region.

12. An optical semiconductor device comprising: an optical semiconductor element that has a first optical waveguide region and a second optical waveguide region,the second optical waveguide region being optically coupled to the first optical waveguide region and having a heater for changing a refractive index of the second optical waveguide region;a metal pattern that is provided on an area to be thermally coupled to a temperature control device; andat least one thermal conductive material that couples the metal pattern with an upper face of the first optical waveguide region of the optical semiconductor element,the thermal conductive material being at the second optical waveguide region side with respect to a center of the first optical waveguide region.

13. The optical semiconductor element as claimed in claim 12, wherein the first optical waveguide region is a gain region or a modulator.

14. An optical semiconductor element comprising: a first optical waveguide region;a second optical waveguide region that is optically coupled to the first optical waveguide region and has a heater for changing a refractive index of the second optical waveguide region; anda metal pattern that is provided on an upper face of the first optical waveguide region and has a length larger than half of that of the first optical waveguide region in an optical axis direction of the first optical waveguide region.

15. The optical semiconductor element as claimed in claim 14, wherein the metal pattern is divided into a plurality of patterns.

16. The optical semiconductor element as claimed in claim 14, wherein the metal pattern is electrically coupled to the first optical waveguide region.

17. An optical semiconductor element comprising: a first optical waveguide region;a second optical waveguide region that is optically coupled to the first optical waveguide region and has a heater for changing a refractive index of the second optical waveguide region; anda metal pattern that is provided on an upper face of the first optical waveguide region at the second optical waveguide region side with respect to a center of the first optical waveguide region.

18. The optical semiconductor element as claimed in claim 17, wherein the metal pattern is divided into a plurality of patterns.

19. The optical semiconductor element as claimed in claim 17, wherein the metal pattern is electrically coupled to the first optical waveguide region.