The present invention relates to optical systems and, in particular, it concerns an optical system including a light-guide optical element (LOE) for achieving optical aperture expansion.
Many near-eye display systems include a transparent light-guide optical element (LOE) or “waveguide” placed before the eye of the user, which conveys an image within the LOE by internal reflection and then couples out the image by a suitable output coupling mechanism towards the eye of the user. The output coupling mechanism may be based on embedded partial reflectors or “facets”, or may employ a diffractive pattern. The description below will refer primarily to a facet-based coupling-out arrangement, but it should be appreciated that various features of the invention are also applicable to diffractive arrangements.
The present invention is an optical system.
According to the teachings of an embodiment of the present invention there is provided, an optical system for directing image illumination injected at a coupling-in region to an eye-motion box for viewing by an eye of a user, the optical system comprising a light-guide optical element (LOE) formed from transparent material, the LOE comprising: (a) a first region containing a first set of planar, mutually-parallel, partially-reflecting surfaces having a first orientation; (b) a second region containing a second set of planar, mutually-parallel, partially-reflecting surfaces having a second orientation non-parallel to the first orientation; (c) a set of mutually-parallel major external surfaces, the major external surfaces extending across the first and second regions such that both the first set of partially-reflecting surfaces and the second set of partially-reflecting surfaces are located between the major external surfaces, wherein the second set of partially-reflecting surfaces are at an oblique angle to the major external surfaces so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the first region into the second region is coupled out of the LOE towards the eye-motion box, and wherein the first set of partially-reflecting surfaces are oriented so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the coupling-in region is deflected towards the second region, wherein each of the partially-reflecting surfaces of the first set of partially-reflecting surfaces comprises a partially-reflecting coating at an interface plane between two plates forming part of the LOE, and wherein the partially-reflecting coating is located over a first part of the interface plane, and at least one of the partially-reflecting surfaces has a second part of the interface plane bonded so as to form an optical continuum between the two plates.
According to a further feature of an embodiment of the present invention, an envelope of ray paths from the coupling-in region propagating within the LOE, deflected by one of the first set of partially-reflecting surfaces and coupled out by one of the second set of partially-reflecting surfaces in a direction reaching the eye-motion box defines an imaging area of the one of the first set of partially-reflecting surfaces, and wherein an area of the one of the first set of partially-reflecting surfaces lying outside the envelope defines a non-imaging area of the one of the first set of partially-reflecting surfaces, wherein a majority of the non-imaging area is bonded so as to form an optical continuum between the two plates.
According to a further feature of an embodiment of the present invention, the first set of partially-reflecting surfaces have a non-uniform spacing such that a spacing between adjacent partially-reflecting surfaces proximal to the coupling-in region is smaller than a spacing between adjacent partially-reflecting surfaces further from the coupling-in region.
According to a further feature of an embodiment of the present invention, the optical system further comprising an image projector for projecting a collimated image having an angular field of view about an optical axis, the image projector being optically coupled to the LOE so as to introduce the collimated image into the LOE at the coupling-in region as a propagating image propagating within the LOE by internal reflection at the major external surfaces, the propagating image being partially reflected by the first set of partially-reflecting surfaces to generate a deflected propagating image propagating within the LOE by internal reflection at the major external surfaces, the deflected propagating image being partially reflected by the second set of partially-reflecting surfaces to generate a coupled-out image directed outwards from one of the major external surfaces towards the eye-motion box, the optical axis of the coupled-out image being inclined relative to a normal to the major external surface with a non-zero component of inclination along an in-plane extensional direction of the second set of partially-reflecting surfaces.
According to a further feature of an embodiment of the present invention, configured for projecting the image to the eye-motion box with principal axes including an X axis corresponding to a first horizontal or vertical axis of the projected image, and a Y axis corresponding to the other axis of the projected image, and wherein the second set of partially-reflecting surfaces have an extensional direction parallel to the major external surfaces, the extensional direction having an angular offset relative to X axis.
According to a further feature of an embodiment of the present invention, configured for projecting the image to the eye-motion box with principal axes including an X axis corresponding to a first horizontal or vertical axis of the projected image, and a Y axis corresponding to the other axis of the projected image, the optical system further comprising an image projector for projecting a collimated image having an angular field of view about an optical axis, the image projector being optically coupled to the LOE so as to introduce the collimated image into the LOE at the coupling-in region as a propagating image propagating within the LOE by internal reflection at the major external surfaces, an in-plane component of the optical axis of the propagating image being inclined relative to the X axis towards a boundary of the second region.
According to a further feature of an embodiment of the present invention, an in-plane component of one extremity of the field of view of the propagating image is substantially parallel to the X axis.
According to a further feature of an embodiment of the present invention, configured for projecting the image to the eye-motion box with principal axes including an X axis corresponding to a first horizontal or vertical axis of the projected image, and a Y axis corresponding to the other axis of the projected image, the optical system further comprising an image projector for projecting a collimated image having an angular field of view about an optical axis, the image projector being optically coupled to the LOE so as to introduce the collimated image into the LOE at the coupling-in region as a propagating image propagating within the LOE by internal reflection at the major external surfaces, the propagating image being partially reflected by the first set of partially-reflecting surfaces to generate a deflected propagating image propagating within the LOE by internal reflection at the major external surfaces, an in-plane component of the optical axis of the deflected propagating image being inclined relative to the Y axis.
There is also provided according to the teachings of an embodiment of the present invention, an optical system for projecting an image injected at a coupling-in region for viewing at an eye-motion box by an eye of a user, the image being viewed with principal axes including an X axis corresponding to a horizontal or vertical axis of the projected image, and a Y axis corresponding to an axis of the projected image perpendicular to the X axis, the optical system comprising a light-guide optical element (LOE) formed from transparent material, the LOE comprising: (a) a first region containing a first set of planar, mutually-parallel, partially-reflecting surfaces having a first orientation; (b) a second region containing a second set of planar, mutually-parallel, partially-reflecting surfaces having a second orientation non-parallel to the first orientation; (c) a set of mutually-parallel major external surfaces, the major external surfaces extending across the first and second regions such that both the first set of partially-reflecting surfaces and the second set of partially-reflecting surfaces are located between the major external surfaces, wherein the second set of partially-reflecting surfaces are at an oblique angle to the major external surfaces so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the first region into the second region is coupled out of the LOE towards the eye-motion box, and wherein the first set of partially-reflecting surfaces are oriented so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the coupling-in region is deflected towards the second region, and wherein the second set of partially-reflecting surfaces have an extensional direction parallel to the major external surfaces, the extensional direction having an angular offset relative to X axis.
There is also provided according to the teachings of an embodiment of the present invention, an optical system for projecting an image injected at a coupling-in region for viewing at an eye-motion box by an eye of a user, the image being viewed with principal axes including an X axis corresponding to a horizontal or vertical axis of the projected image, and a Y axis corresponding to an axis of the projected image perpendicular to the X axis, the optical system comprising a light-guide optical element (LOE) formed from transparent material, the LOE comprising: (a) a first region containing a first set of planar, mutually-parallel, partially-reflecting surfaces having a first orientation; (b) a second region containing a second set of planar, mutually-parallel, partially-reflecting surfaces having a second orientation non-parallel to the first orientation; (c) a set of mutually-parallel major external surfaces, the major external surfaces extending across the first and second regions such that both the first set of partially-reflecting surfaces and the second set of partially-reflecting surfaces are located between the major external surfaces, wherein the second set of partially-reflecting surfaces are at an oblique angle to the major external surfaces so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the first region into the second region is coupled out of the LOE towards the eye-motion box, and wherein the first set of partially-reflecting surfaces are oriented so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the coupling-in region is deflected towards the second region, the optical system further comprising an image projector for projecting a collimated image having an angular field of view about an optical axis, the image projector being optically coupled to the LOE so as to introduce the collimated image into the LOE at the coupling-in region as a propagating image propagating within the LOE by internal reflection at the major external surfaces, an in-plane component of the optical axis of the propagating image being inclined relative to the X axis towards a boundary of the second region.
According to a further feature of an embodiment of the present invention, an in-plane component of one extremity of the field of view of the propagating image is substantially parallel to the X axis.
There is also provided according to the teachings of an embodiment of the present invention, an optical system for projecting an image injected at a coupling-in region for viewing at an eye-motion box by an eye of a user, the image being viewed with principal axes including an X axis corresponding to a horizontal or vertical axis of the projected image, and a Y axis corresponding to an axis of the projected image perpendicular to the X axis, the optical system comprising a light-guide optical element (LOE) formed from transparent material, the LOE comprising: (a) a first region containing a first set of planar, mutually-parallel, partially-reflecting surfaces having a first orientation; (b) a second region containing a second set of planar, mutually-parallel, partially-reflecting surfaces having a second orientation non-parallel to the first orientation; (c) a set of mutually-parallel major external surfaces, the major external surfaces extending across the first and second regions such that both the first set of partially-reflecting surfaces and the second set of partially-reflecting surfaces are located between the major external surfaces, wherein the second set of partially-reflecting surfaces are at an oblique angle to the major external surfaces so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the first region into the second region is coupled out of the LOE towards the eye-motion box, and wherein the first set of partially-reflecting surfaces are oriented so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the coupling-in region is deflected towards the second region, the optical system further comprising an image projector for projecting a collimated image having an angular field of view about an optical axis, the image projector being optically coupled to the LOE so as to introduce the collimated image into the LOE at the coupling-in region as a propagating image propagating within the LOE by internal reflection at the major external surfaces, the propagating image being partially reflected by the first set of partially-reflecting surfaces to generate a deflected propagating image propagating within the LOE by internal reflection at the major external surfaces, an in-plane component of the optical axis of the deflected propagating image being inclined relative to the Y axis.
According to a further feature of an embodiment of the present invention, the eye-motion box is delimited by at least one straight line parallel to the X axis.
According to a further feature of an embodiment of the present invention, the projected image is a rectangular image having edges parallel to the X axis and the Y axis.
According to a further feature of an embodiment of the present invention, there is also provided a support arrangement configured for supporting the LOE relative to the head of the user with one of the major external surfaces in facing relation to the eye of the user and in an orientation relative to the eye of the user such that the X axis is oriented horizontally.
According to a further feature of an embodiment of the present invention, the first region and the second region are separated by a boundary that extends parallel to the X axis.
There is also provided according to the teachings of an embodiment of the present invention, an optical system for directing image illumination injected at a coupling-in region to an eye-motion box for viewing by an eye of a user, the optical system comprising a light-guide optical element (LOE) formed from transparent material, the LOE comprising: (a) a first region containing a first set of planar, mutually-parallel, partially-reflecting surfaces having a first orientation; (b) a second region containing a second set of planar, mutually-parallel, partially-reflecting surfaces having a second orientation non-parallel to the first orientation; (c) a set of mutually-parallel major external surfaces, the major external surfaces extending across the first and second regions such that both the first set of partially-reflecting surfaces and the second set of partially-reflecting surfaces are located between the major external surfaces, wherein the second set of partially-reflecting surfaces are at an oblique angle to the major external surfaces so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the first region into the second region is coupled out of the LOE towards the eye-motion box, and wherein the first set of partially-reflecting surfaces are oriented so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the coupling-in region is deflected towards the second region, and wherein the first set of partially-reflecting surfaces have a non-uniform spacing such that a spacing between adjacent partially-reflecting surfaces proximal to the coupling-in region is smaller than a spacing between adjacent partially-reflecting surfaces further from the coupling-in region.
There is also provided according to the teachings of an embodiment of the present invention, an optical system for directing image illumination injected at a coupling-in region to an eye-motion box for viewing by an eye of a user, the optical system comprising a light-guide optical element (LOE) formed from transparent material, the LOE comprising: (a) a first region containing a first set of planar, mutually-parallel, partially-reflecting surfaces having a first orientation; (b) a second region containing a second set of planar, mutually-parallel, partially-reflecting surfaces having a second orientation non-parallel to the first orientation; (c) a set of mutually-parallel major external surfaces, the major external surfaces extending across the first and second regions such that both the first set of partially-reflecting surfaces and the second set of partially-reflecting surfaces are located between the major external surfaces, wherein the second set of partially-reflecting surfaces are at an oblique angle to the major external surfaces so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the first region into the second region is coupled out of the LOE towards the eye-motion box, and wherein the first set of partially-reflecting surfaces are oriented so that a part of image illumination propagating within the LOE by internal reflection at the major external surfaces from the coupling-in region is deflected towards the second region, the optical system further comprising an image projector for projecting a collimated image having an angular field of view about an optical axis, the image projector being optically coupled to the LOE so as to introduce the collimated image into the LOE at the coupling-in region as a propagating image propagating within the LOE by internal reflection at the major external surfaces, the propagating image being partially reflected by the first set of partially-reflecting surfaces to generate a deflected propagating image propagating within the LOE by internal reflection at the major external surfaces, the deflected propagating image being partially reflected by the second set of partially-reflecting surfaces to generate a coupled-out image directed outwards from one of the major external surfaces towards the eye-motion box, the optical axis of the coupled-out image being inclined relative to a normal to the major external surface with a non-zero component of inclination along an in-plane extensional direction of the second set of partially-reflecting surfaces.
The invention is herein described, by way of example only, with reference to the accompanying drawings, wherein:
Certain embodiments of the present invention provide an optical system including a light-guide optical element (LOE) for achieving optical aperture expansion for the purpose of a head-up display, and most preferably a near-eye display, which may be a virtual reality display, or more preferably an augmented reality display.
An exemplary implementation of a device in the form of a near-eye display, generally designated 10, employing an LOE 12 according to the teachings of an embodiment of the present invention, is illustrated schematically in
In a first set of preferred but non-limiting examples of the present invention, the aforementioned set of facets are orthogonal to the major external surfaces of the substrate. In this case, both the injected image and its conjugate undergoing internal reflection as it propagates within region 16 are deflected and become conjugate images propagating in a deflected direction. In an alternative set of preferred but non-limiting examples, the first set of partially-reflecting surfaces are obliquely angled relative to the major external surfaces of the LOE. In the latter case, either the injected image or its conjugate forms the desired deflected image propagating within the LOE, while the other reflection may be minimized, for example, by employing angularly-selective coatings on the facets which render them relatively transparent to the range of incident angles presented by the image whose reflection is not needed.
The first set of partially-reflecting surfaces deflect the image illumination from a first direction of propagation trapped by total internal reflection (TIR) within the substrate to a second direction of propagation, also trapped by TIR within the substrate.
The deflected image illumination then passes into a second substrate region 18, which may be implemented as an adjacent distinct substrate or as a continuation of a single substrate, in which a coupling-out arrangement (either a further set of partially reflective facets or a diffractive optical element) progressively couples out a proportion of the image illumination towards the eye of an observer located within a region defined as the eye-motion box (EMB), thereby achieving a second dimension of optical aperture expansion. The overall device may be implemented separately for each eye, and is preferably supported relative to the head of a user with the each LOE 12 facing a corresponding eye of the user. In one particularly preferred option as illustrated here, a support arrangement is implemented as an eye glasses frame with sides 20 for supporting the device relative to ears of the user. Other forms of support arrangement may also be used, including but not limited to, head bands, visors or devices suspended from helmets.
Reference is made herein in the drawings and claims to an X axis which extends horizontally (
In very approximate terms, the first LOE, or first region 16 of LOE 12, may be considered to achieve aperture expansion in the X direction while the second LOE, or second region 18 of LOE 12, achieves aperture expansion in the Y direction. The details of the spread of angular directions in which different parts of the field of view propagate will be addressed more precisely below. It should be noted that the orientation as illustrated in
The POD employed with the devices of the present invention is preferably configured to generate a collimated image, i.e., in which the light of each image pixel is a parallel beam, collimated to infinity, with an angular direction corresponding to the pixel position. The image illumination thus spans a range of angles corresponding to an angular field of view in two dimensions.
Image projector 14 includes at least one light source, typically deployed to illuminate a spatial light modulator, such as an LCOS chip. The spatial light modulator modulates the projected intensity of each pixel of the image, thereby generating an image. Alternatively, the image projector may include a scanning arrangement, typically implemented using a fast-scanning mirror, which scans illumination from a laser light source across an image plane of the projector while the intensity of the beam is varied synchronously with the motion on a pixel-by-pixel basis, thereby projecting a desired intensity for each pixel. In both cases, collimating optics are provided to generate an output projected image which is collimated to infinity. Some or all of the above components are typically arranged on surfaces of one or more polarizing beam-splitter (PBS) cube or other prism arrangement, as is well known in the art.
Optical coupling of image projector 14 to LOE 12 may be achieved by any suitable optical coupling, such as for example via a coupling prism with an obliquely angled input surface, or via a reflective coupling arrangement, via a side edge and/or one of the major external surface of the LOE. Details of the coupling-in configuration are not critical to the invention, and are shown here schematically as a non-limiting example of a wedge prism 15 applied to one of the major external surfaces of the LOE.
It will be appreciated that the near-eye display 10 includes various additional components, typically including a controller 22 for actuating the image projector 14, typically employing electrical power from a small onboard battery (not shown) or some other suitable power source. It will be appreciated that controller 22 includes all necessary electronic components such as at least one processor or processing circuitry to drive the image projector, all as is known in the art.
Turning now to
The optical properties of the LOE may be understood by tracing the image illumination paths backwards. The second set of partially-reflecting surfaces 19 are at an oblique angle to the major external surfaces 24 so that a part of image illumination propagating within the LOE 12 by internal reflection at the major external surfaces from the first region 16 into the second region 18 is coupled out of the LOE towards an eye-motion box 26. The first set of partially-reflecting surfaces 17 are oriented so that a part of image illumination propagating within the LOE 12 by internal reflection at the major external surfaces from the coupling-in region (coupling prism 15) is deflected towards the second region 18.
One dimension of the angular spread of the projected image from image projector 14 is represented in
The near-eye display is designed to provide a full field-of-view of the projected image to an eye of the user that is located at some position within the permitted range of positions designated by an “eye-motion box” (EMB) 26 (that is, a shape, typically represented as a rectangle, spaced away from the plane of the LOE from which the pupil of the eye will view the projected image). In order to reach the eye-motion box, light must be coupled-out from the second region 18 by the second set of partially-reflecting surfaces 19 towards the EMB 26. In order to provide the full image field-of-view, each point in the EMB must receive the entire angular range of the image from the LOE. Tracing back the field-of-view from the EMB indicates a larger rectangle 28 from which relevant illumination is coupled-out of the LOE towards the EMB.
It will be apparent that, by additionally tracing correspond ray paths for all fields (directions or pixels) of the image reaching all regions of the EMB, it is possible to map out an envelope of all ray paths from the coupling-in region propagating within the LOE, deflected by one of the first set of partially-reflecting surfaces and coupled out by one of the second set of partially-reflecting surfaces in a direction reaching the eye-motion box, and this envelope defines an “imaging area” of each facet 17 which is needed for deflecting part of the image illumination which contributes to the image reaching the EMB, while the remainder of the facet 17 lying outside the envelope is a “non-imaging area” which does not contribute to the required image. A simplified outline of this envelope corresponding to the “imaging areas” of all of the facets 17 is shown in heavy lines in
According to one particularly preferred set of implementations of the present invention, facets 17 are implemented as “partial facets” such that the partially-reflecting properties are only present within a subregion of the cross-sectional area of region 16 which includes the “imaging area” of each facet plane, and preferably excludes at least the majority of the “non-imaging area” for some or all of the facets. Such an implementation is illustrated schematically in
Where first region 16 is formed from a stack of coated plates which are then cut at an appropriate angle (as described for example in PCT Patent Publication No. WO2007054928A1, and as known in the art), the selective spatial deployment of the partially-reflecting surfaces can advantageously be achieved be forming a stack of plates with a partially-reflecting coating located over a first part of the interface plane between two plates, while a second part of the interface plane is bonded (typically with index-matched adhesive and without coatings) so as to form an optical continuum between the two plates. Selective application of the partially-reflecting coatings is typically achieved by applying a suitable masking layer prior to the coating process, and removing the masking layer at the end of the coating process.
According to an alternative production technique, a stack of full area-coated plates may be formed and then cut to the shape required for the volume containing facets (e.g., corresponding to the regions with facets as shown in
The optical axis is not actually parallel to the X axis but rather lies in the X-Z plane, with a Z-component into the page chosen such that the entire range of angles in the depth dimension of the FOV undergo total internal reflection at the major substrate surfaces. For simplicity of presentation, the graphic representations herein, and the description thereof, will relate only to the in-plane (X-Y) component of the light ray propagation directions, referred to herein as the “in-plane component” or the “component parallel to the major external surfaces of the LOE.”
It will be noted that the uppermost ray direction of the field of view corresponds to the left side of the field of view reaching the observer's eye, while the lowest ray direction corresponds to the right side of the field of view. It will also be noted that some reflections of the left side of the field of view are reflected from facets near the right side of the LOE in a direction that will not reach the EMB, and will therefore be lost. Similarly, some rays from the right side of the field of view are reflected from facets near the left of the LOE and are deflected in a direction which will not reach the EMB, and will therefore be lost. Certain aspects of the present invention take advantage of these observations to reduce the dimensions (and hence volume and weight) of the first LOE (or LOE region).
Specifically,
It will be noted that the use of partial facets as described above with reference to
Specifically,
In the example of
Specifically, in the arrangement of
In some cases, and as particularly emphasized by the steeper angles illustrated at the right side of the field of view in
As described above with reference to
Thus, by deploying the image projector 14 with an in-plane component of the optical axis of the propagating image inclined relative to the X axis towards a boundary of the second region 18, and most preferably, ensuring that an in-plane component of one extremity of the field of view of the propagating image is substantially parallel to the X axis, it is possible to achieve further compactness of the overall configuration compared to that of
In addition to the inclination of the optical axis direction of the image projector described in
Referring first to
Turning to
To achieve this correction, image projector 14 and the first set of partially-reflecting surfaces 17 are oriented so that the propagating image coupled in to the LOE from image projector 14 is deflected by facets 17 to generate a deflected propagating image propagating with an in-plane component of the optical axis inclined relative to the Y axis. A result of this offset, after coupling out by facets 19, is that the optical axis of the coupled-out image is deflected in a horizontal plane, i.e., is inclined relative to a normal to the major external surface with a non-zero component of inclination along an in-plane extensional direction of the second set of partially-reflecting surfaces, as illustrated in
Although these adjustments have been presented as independent adjustments, it should be noted that the various parameters of projector optical axis inclination, first LOE region facet angle and second LOE region facet angle are interrelated, and a variation of one of these parameters will typically require corresponding adjustments in the other parameters in order to ensure transmission of the entire field of view, and that these adjustments may result in a rotation of the injected image about its central axis, which may be corrected directly by rotation of the projector and/or coupling arrangement as illustrated schematically in
As mentioned above in the context of
Throughout the above description, reference has been made to the X axis and the Y axis as shown, where the X axis is either horizontal or vertical, and corresponds to the first dimension of the optical aperture expansion, and the Y axis is the other major axis corresponding to the second dimension of expansion. In this context, X and Y can be defined relative to the orientation of the device when mounted on the head of a user, in an orientation which is typically defined by a support arrangement, such as the aforementioned glasses frame of
It will be appreciated that the above descriptions are intended only to serve as examples, and that many other embodiments are possible within the scope of the present invention as defined in the appended claims.
Filing Document | Filing Date | Country | Kind |
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PCT/IB2019/057572 | 9/9/2019 | WO |
Publishing Document | Publishing Date | Country | Kind |
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WO2020/049542 | 3/12/2020 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
2748659 | Geffcken et al. | Jun 1956 | A |
2795069 | Hardesty | Jun 1957 | A |
2886911 | Hardesty | May 1959 | A |
3491245 | Hardesty | Jan 1970 | A |
3626394 | Nelson et al. | Dec 1971 | A |
3667621 | Barlow | Jun 1972 | A |
3677621 | Smith | Jul 1972 | A |
3737212 | Antonson et al. | Jun 1973 | A |
3802763 | Cook et al. | Apr 1974 | A |
3829197 | Thelen | Aug 1974 | A |
3857109 | Pilloff | Dec 1974 | A |
3873209 | Schinke et al. | Mar 1975 | A |
3940204 | Withrington | Feb 1976 | A |
4084883 | Eastman et al. | Apr 1978 | A |
4191446 | Arditty et al. | Mar 1980 | A |
4309070 | St Leger Searle | Jan 1982 | A |
4331387 | Wentz | May 1982 | A |
4516828 | Steele | May 1985 | A |
4613216 | Herbec et al. | Sep 1986 | A |
4711512 | Upatnieks | Dec 1987 | A |
4715684 | Gagnon | Dec 1987 | A |
4775217 | Ellis | Oct 1988 | A |
4798448 | Van Raalte | Jan 1989 | A |
4805988 | Dones | Feb 1989 | A |
4932743 | Isobe et al. | Jun 1990 | A |
4978952 | Irwin | Dec 1990 | A |
5033828 | Haruta | Jul 1991 | A |
5076664 | Migozzi | Dec 1991 | A |
5096520 | Faris | Mar 1992 | A |
5157526 | Kondo et al. | Oct 1992 | A |
5231642 | Scifres et al. | Jul 1993 | A |
5301067 | Bleier et al. | Apr 1994 | A |
5353134 | Michel et al. | Oct 1994 | A |
5367399 | Kramer | Nov 1994 | A |
5369415 | Richard et al. | Nov 1994 | A |
5453877 | Gerbe et al. | Sep 1995 | A |
5543877 | Takashi et al. | Aug 1996 | A |
5555329 | Kuper et al. | Sep 1996 | A |
5619601 | Akashi et al. | Apr 1997 | A |
5650873 | Gal et al. | Jul 1997 | A |
5680209 | Maechler | Oct 1997 | A |
5708449 | Heacock et al. | Jan 1998 | A |
5724163 | David | Mar 1998 | A |
5751480 | Kitagishi | May 1998 | A |
5764412 | Suzuki et al. | Jun 1998 | A |
5829854 | Jones | Nov 1998 | A |
5883684 | Millikan et al. | Mar 1999 | A |
5896232 | Budd et al. | Apr 1999 | A |
5919601 | Nguyen et al. | Jul 1999 | A |
5966223 | Yaakov et al. | Oct 1999 | A |
5982536 | Swan | Nov 1999 | A |
6021239 | Minami et al. | Feb 2000 | A |
6023372 | Spitzer et al. | Feb 2000 | A |
6052500 | Takano et al. | Apr 2000 | A |
6091548 | Chen | Jul 2000 | A |
6144347 | Mizoguchi et al. | Nov 2000 | A |
6185015 | Silviu et al. | Feb 2001 | B1 |
6222676 | Togino et al. | Apr 2001 | B1 |
6322256 | Inada et al. | Nov 2001 | B1 |
6324330 | Stites | Nov 2001 | B1 |
6349001 | Spitzer | Feb 2002 | B1 |
6362861 | Hertz et al. | Mar 2002 | B1 |
6384982 | Spitzer | May 2002 | B1 |
6388814 | Tanaka | May 2002 | B2 |
6404550 | Yajima | Jun 2002 | B1 |
6404947 | Matsuda | Jun 2002 | B1 |
6490104 | Gleckman et al. | Dec 2002 | B1 |
6509982 | Steiner | Jan 2003 | B2 |
6519400 | Biscardi et al. | Feb 2003 | B2 |
6542307 | Gleckman | Apr 2003 | B2 |
6556282 | Jamieson et al. | Apr 2003 | B2 |
6577411 | David | Jun 2003 | B1 |
6580529 | Amitai | Jun 2003 | B1 |
6671100 | McRuer | Dec 2003 | B1 |
6690513 | Hulse et al. | Feb 2004 | B2 |
6710902 | Takeyama | Mar 2004 | B2 |
6762801 | Weiss et al. | Jul 2004 | B2 |
6775432 | Basu | Aug 2004 | B2 |
6791760 | Janeczko et al. | Sep 2004 | B2 |
6798579 | Robinson et al. | Sep 2004 | B2 |
6829095 | Amitai | Dec 2004 | B2 |
6847488 | Travis | Jan 2005 | B2 |
6880931 | Moliton et al. | Apr 2005 | B2 |
6942925 | Lazarev et al. | Sep 2005 | B1 |
7016113 | Choi et al. | Mar 2006 | B2 |
7021777 | Amitai | Apr 2006 | B2 |
7088664 | Kim et al. | Aug 2006 | B2 |
7175304 | Wadia et al. | Feb 2007 | B2 |
7205960 | David | Apr 2007 | B2 |
7355795 | Yamazaki et al. | Apr 2008 | B1 |
7391573 | Amitai | Jun 2008 | B2 |
7418170 | Mukawa et al. | Aug 2008 | B2 |
7430355 | Heikenfeld et al. | Sep 2008 | B2 |
7448170 | Milovan et al. | Nov 2008 | B2 |
7724443 | Amitai | May 2010 | B2 |
7751122 | Amitai | Jul 2010 | B2 |
7778508 | Hirayama | Aug 2010 | B2 |
7839575 | DeJong et al. | Nov 2010 | B2 |
7949214 | Dejong | May 2011 | B2 |
7995275 | Maeda et al. | Aug 2011 | B2 |
8035872 | Ouchi | Oct 2011 | B2 |
8548290 | Travers | Oct 2013 | B2 |
8655178 | Capron et al. | Feb 2014 | B2 |
8666208 | Amirparviz et al. | Mar 2014 | B1 |
8736963 | Robbins et al. | May 2014 | B2 |
8743464 | Amirparviz | Jun 2014 | B1 |
8913865 | Bennett | Dec 2014 | B1 |
9213178 | Giri et al. | Dec 2015 | B1 |
9568738 | Mansharof et al. | Feb 2017 | B2 |
9791703 | Vallius | Oct 2017 | B1 |
9805633 | Zheng | Oct 2017 | B2 |
9933684 | Brown et al. | Apr 2018 | B2 |
10133070 | Danziger | Nov 2018 | B2 |
10444481 | Takahashi | Oct 2019 | B2 |
10678055 | Edwin et al. | Jun 2020 | B2 |
10962787 | Lou | Mar 2021 | B1 |
11256100 | Schultz et al. | Feb 2022 | B2 |
20020015233 | Park | Feb 2002 | A1 |
20020097762 | Yoshimura et al. | Jul 2002 | A1 |
20020191297 | Gleckman et al. | Dec 2002 | A1 |
20030007157 | Hulse et al. | Jan 2003 | A1 |
20030020006 | Janeczko et al. | Jan 2003 | A1 |
20030063042 | Friesem et al. | Apr 2003 | A1 |
20030090439 | Spitzer et al. | May 2003 | A1 |
20030165017 | Amitai et al. | Sep 2003 | A1 |
20030197938 | Schmidt et al. | Oct 2003 | A1 |
20030218718 | Moliton et al. | Nov 2003 | A1 |
20040032660 | Amitai | Feb 2004 | A1 |
20040033528 | Amitai | Feb 2004 | A1 |
20040085649 | Repetto et al. | May 2004 | A1 |
20040137189 | Tellini et al. | Jul 2004 | A1 |
20040176488 | Mukherjee et al. | Sep 2004 | A1 |
20040233534 | Nakanishi et al. | Nov 2004 | A1 |
20050012842 | Miyagawa et al. | Jan 2005 | A1 |
20050018308 | Cassarly et al. | Jan 2005 | A1 |
20050078388 | Amitai | Apr 2005 | A1 |
20050083592 | Amitai | Apr 2005 | A1 |
20050084210 | Cha | Apr 2005 | A1 |
20050174641 | Greenberg | Aug 2005 | A1 |
20050174658 | Long et al. | Aug 2005 | A1 |
20050180687 | Amitai | Aug 2005 | A1 |
20050265044 | Chen et al. | Dec 2005 | A1 |
20060126182 | Levola | Jun 2006 | A1 |
20060132914 | Weiss et al. | Jun 2006 | A1 |
20060268421 | Shimizu et al. | Nov 2006 | A1 |
20070035707 | Margulis | Feb 2007 | A1 |
20070070859 | Hirayama | Mar 2007 | A1 |
20070091445 | Amitai | Apr 2007 | A1 |
20070097513 | Amitai | May 2007 | A1 |
20070155277 | Amitai | Jul 2007 | A1 |
20080025667 | Amitai | Jan 2008 | A1 |
20080094586 | Hirayama | Apr 2008 | A1 |
20080106775 | Amitai | May 2008 | A1 |
20080151379 | Amitai | Jun 2008 | A1 |
20080186604 | Amitai | Aug 2008 | A1 |
20080198471 | Amitai | Aug 2008 | A1 |
20080259429 | Kamm et al. | Oct 2008 | A1 |
20080278812 | Amitai | Nov 2008 | A1 |
20080285140 | Amitai | Nov 2008 | A1 |
20090052046 | Amitai | Feb 2009 | A1 |
20090052047 | Amitai | Feb 2009 | A1 |
20090097127 | Amitai | Apr 2009 | A1 |
20090122414 | Amitai | May 2009 | A1 |
20090153437 | Aharoni | Jun 2009 | A1 |
20090190222 | Simmonds et al. | Jul 2009 | A1 |
20100171680 | Lapidot et al. | Jul 2010 | A1 |
20100202128 | Saccomanno | Aug 2010 | A1 |
20100278480 | Vasylyev et al. | Nov 2010 | A1 |
20100291489 | Moskovits et al. | Nov 2010 | A1 |
20120039576 | Dangel et al. | Feb 2012 | A1 |
20120147361 | Mochizuki et al. | Jun 2012 | A1 |
20120179369 | Lapidot et al. | Jun 2012 | A1 |
20130229717 | Amitai | Sep 2013 | A1 |
20130276960 | Amitai | Oct 2013 | A1 |
20130279017 | Amitai | Oct 2013 | A1 |
20130321432 | Burns et al. | Dec 2013 | A1 |
20130334504 | Thompson et al. | Dec 2013 | A1 |
20140003762 | Macnamara | Jan 2014 | A1 |
20140043688 | Schrader et al. | Feb 2014 | A1 |
20140118813 | Amitai et al. | May 2014 | A1 |
20140118836 | Amitai et al. | May 2014 | A1 |
20140118837 | Amitai et al. | May 2014 | A1 |
20140126051 | Amitai et al. | May 2014 | A1 |
20140126052 | Amitai et al. | May 2014 | A1 |
20140126056 | Amitai et al. | May 2014 | A1 |
20140126057 | Amitai et al. | May 2014 | A1 |
20140126175 | Amitai et al. | May 2014 | A1 |
20140185142 | Gupta et al. | Jul 2014 | A1 |
20140226215 | Komatsu et al. | Aug 2014 | A1 |
20150016777 | Abovitz et al. | Jan 2015 | A1 |
20150081313 | Boross et al. | Mar 2015 | A1 |
20150138451 | Amitai | May 2015 | A1 |
20150138646 | Tatsugi | May 2015 | A1 |
20150160529 | Popovich et al. | Jun 2015 | A1 |
20150198805 | Mansharof et al. | Jul 2015 | A1 |
20150205140 | Mansharof et al. | Jul 2015 | A1 |
20150205141 | Mansharof et al. | Jul 2015 | A1 |
20150219834 | Nichol et al. | Aug 2015 | A1 |
20150277127 | Amitai | Oct 2015 | A1 |
20150338655 | Sawada et al. | Nov 2015 | A1 |
20150293360 | Amitai | Dec 2015 | A1 |
20160116743 | Amitai | Apr 2016 | A1 |
20160170212 | Amitai | Jun 2016 | A1 |
20160170213 | Amitai | Jun 2016 | A1 |
20160170214 | Amitai | Jun 2016 | A1 |
20160187656 | Amitai | Jun 2016 | A1 |
20160234485 | Robbins et al. | Aug 2016 | A1 |
20160022388 | Dobschal et al. | Sep 2016 | A1 |
20160341964 | Amitai | Nov 2016 | A1 |
20160349518 | Amitai et al. | Dec 2016 | A1 |
20170045743 | Dobschal et al. | Feb 2017 | A1 |
20170045744 | Amitai | Feb 2017 | A1 |
20170052376 | Amitai | Feb 2017 | A1 |
20170052377 | Amitai | Feb 2017 | A1 |
20170075119 | Schultz et al. | Mar 2017 | A1 |
20170242249 | Wall | Aug 2017 | A1 |
20170336636 | Amitai et al. | Nov 2017 | A1 |
20170343822 | Border et al. | Nov 2017 | A1 |
20170357095 | Amitai | Dec 2017 | A1 |
20170363799 | Ofir et al. | Dec 2017 | A1 |
20170371160 | Schultz | Dec 2017 | A1 |
20180039082 | Amitai | Feb 2018 | A1 |
20180067315 | Amitai et al. | Mar 2018 | A1 |
20180157057 | Gelberg et al. | Jun 2018 | A1 |
20180210202 | Danziger | Jul 2018 | A1 |
20180246335 | Cheng et al. | Aug 2018 | A1 |
20180267295 | Dalrymple et al. | Sep 2018 | A1 |
20180267317 | Amitai | Sep 2018 | A1 |
20180275384 | Danziger et al. | Sep 2018 | A1 |
20180284443 | Matsuki et al. | Oct 2018 | A1 |
20180284448 | Matsuki | Oct 2018 | A1 |
20180292592 | Danziger | Oct 2018 | A1 |
20180292599 | Ofir et al. | Oct 2018 | A1 |
20180373039 | Amitai | Dec 2018 | A1 |
20190011710 | Amitai | Jan 2019 | A1 |
20190056600 | Danziger et al. | Feb 2019 | A1 |
20190064518 | Danziger | Feb 2019 | A1 |
20190155035 | Amitai | May 2019 | A1 |
20190170327 | Eisenfeld et al. | Jun 2019 | A1 |
20190187482 | Lanman | Jun 2019 | A1 |
20190208187 | Danziger | Jul 2019 | A1 |
20190212487 | Danziger et al. | Jul 2019 | A1 |
20190227215 | Danziger et al. | Jul 2019 | A1 |
20190278086 | Ofir | Sep 2019 | A1 |
20190285900 | Amitai | Sep 2019 | A1 |
20190293838 | Haba | Sep 2019 | A1 |
20190293856 | Danziger | Sep 2019 | A1 |
20190339530 | Amitai | Nov 2019 | A1 |
20190346609 | Eisenfeld | Nov 2019 | A1 |
20190361240 | Gelberg | Nov 2019 | A1 |
20190361241 | Amitai | Nov 2019 | A1 |
20190377187 | Rubin et al. | Dec 2019 | A1 |
20190391408 | Mansharof | Dec 2019 | A1 |
20200033572 | Danziger et al. | Jan 2020 | A1 |
20200041713 | Danziger | Feb 2020 | A1 |
20200089001 | Amitai et al. | Mar 2020 | A1 |
20200110211 | Danziger et al. | Apr 2020 | A1 |
20200120329 | Danziger | Apr 2020 | A1 |
20200133008 | Amitai | Apr 2020 | A1 |
20200150330 | Danziger et al. | May 2020 | A1 |
20200183159 | Danziger | Jun 2020 | A1 |
20200183170 | Amitai et al. | Jun 2020 | A1 |
20200200963 | Eisenfeld et al. | Jun 2020 | A1 |
20200209667 | Sharlin et al. | Jul 2020 | A1 |
20200241308 | Danziger et al. | Jul 2020 | A1 |
20200249481 | Danziger et al. | Aug 2020 | A1 |
20200278554 | Schultz et al. | Sep 2020 | A1 |
20200278557 | Greenstein et al. | Sep 2020 | A1 |
20200285060 | Amitai | Sep 2020 | A1 |
20200292417 | Lobachinsky et al. | Sep 2020 | A1 |
20200292744 | Danziger | Sep 2020 | A1 |
20200292819 | Danziger et al. | Sep 2020 | A1 |
20200310024 | Danziger et al. | Oct 2020 | A1 |
20200326545 | Amitai et al. | Oct 2020 | A1 |
20200371311 | Lobachinsky et al. | Nov 2020 | A1 |
20210003849 | Amitai et al. | Jan 2021 | A1 |
20210018755 | Amitai | Jan 2021 | A1 |
20210033773 | Danziger et al. | Feb 2021 | A1 |
20210033862 | Danziger et al. | Feb 2021 | A1 |
20210033872 | Rubin et al. | Feb 2021 | A1 |
20210055218 | Aldaag et al. | Feb 2021 | A1 |
20210055466 | Eisenfeld | Feb 2021 | A1 |
20210055561 | Danziger et al. | Feb 2021 | A1 |
20210063733 | Ronen | Mar 2021 | A1 |
20210072553 | Danziger et al. | Mar 2021 | A1 |
20210099691 | Danziger | Apr 2021 | A1 |
20210109351 | Danziger et al. | Apr 2021 | A1 |
20210116367 | Gelberg et al. | Apr 2021 | A1 |
20210141141 | Danziger et al. | May 2021 | A1 |
20210157150 | Amitai | May 2021 | A1 |
20210165231 | Gelberg et al. | Jun 2021 | A1 |
20210239898 | Danziger et al. | Aug 2021 | A1 |
20210247608 | Eisenfeld et al. | Aug 2021 | A1 |
20210271006 | Ronen et al. | Sep 2021 | A1 |
20220003914 | Danziger et al. | Jan 2022 | A1 |
20220004001 | Danziger et al. | Jan 2022 | A1 |
20220004014 | Ronen et al. | Jan 2022 | A1 |
20220019018 | Gilo et al. | Jan 2022 | A1 |
20220030205 | Danziger | Jan 2022 | A1 |
20220043269 | Maziel | Feb 2022 | A1 |
20220043272 | Amitai | Feb 2022 | A1 |
20220057643 | Eisenfeld et al. | Feb 2022 | A1 |
20220075194 | Ronen et al. | Mar 2022 | A1 |
Number | Date | Country |
---|---|---|
101542346 | Sep 2009 | CN |
107238928 | Oct 2017 | CN |
206649211 | Nov 2017 | CN |
1422172 | Nov 1970 | DE |
19725262 | Dec 1998 | DE |
102013106392 | Dec 2014 | DE |
0380035 | Aug 1990 | EP |
0399865 | Nov 1990 | EP |
0543718 | May 1993 | EP |
0566004 | Oct 1993 | EP |
1180711 | Feb 2002 | EP |
1326102 | Jul 2003 | EP |
1385023 | Jan 2004 | EP |
0770818 | Apr 2007 | EP |
2530510 | Dec 2012 | EP |
2496905 | Jun 1982 | FR |
2638242 | Apr 1990 | FR |
2721872 | Jan 1996 | FR |
2220081 | Dec 1989 | GB |
2272980 | Jun 1994 | GB |
2278222 | Nov 1994 | GB |
2278888 | Dec 1994 | GB |
H02182447 | Jul 1990 | JP |
2002539498 | Nov 2002 | JP |
2003140081 | May 2003 | JP |
2004527801 | Sep 2004 | JP |
2005084522 | Mar 2005 | JP |
2008053517 | Mar 2008 | JP |
2016033867 | Mar 2016 | JP |
2012058404 | Mar 2021 | JP |
0004407 | Jan 2000 | WO |
0063738 | Oct 2000 | WO |
0195025 | Dec 2001 | WO |
2005093493 | Oct 2005 | WO |
2006098097 | Sep 2006 | WO |
2007054928 | May 2007 | WO |
2009074638 | Jun 2009 | WO |
2011130720 | Oct 2011 | WO |
2013065656 | May 2013 | WO |
2015081313 | Jun 2015 | WO |
2017106873 | Jun 2017 | WO |
2021-055278 | Mar 2021 | WO |
Entry |
---|
Da-Yong et al., “A Continuous Membrane Micro Deformable Mirror Based on Anodic Bonding of SOI to Glass Water”, Microsystem Technologies, Micro and Nanosystems Information Storage and Processing Systems, vol. 16, No. 10, May 20, 2010 pp. 1765-1769. |
Number | Date | Country | |
---|---|---|---|
20210247608 A1 | Aug 2021 | US |
Number | Date | Country | |
---|---|---|---|
62728803 | Sep 2018 | US | |
62823701 | Mar 2019 | US |