Number | Date | Country | Kind |
---|---|---|---|
2002-011902 | Jan 2002 | JP |
Number | Name | Date | Kind |
---|---|---|---|
6067421 | Kitazawa et al. | May 2000 | A |
6134057 | Ueyama et al. | Oct 2000 | A |
Number | Date | Country |
---|---|---|
2001075162 | Mar 2001 | JP |
Entry |
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“2000 Micro-Machine Technique Research and Development (Power Generation Equipment High Performance Maintenance Technique Development) Commission Research Result Reports”. |