The present invention relates to an optics component used in maskless lithograph technique, more particularly, to an optics component with double-layered micro-lens array capable of supplanting or reducing directly the use of optical imaging mirror groups and enhancing the solution capability of maskless lithograph technique as well as reducing exposure energy loss.
Maskless lithograph technique taking DMD (Digital Mirror Device) as its core can be divided in two categories: (1) Image forming, and (2) Light point array scanning.
Among them, the maskless lithograph technique using light point array scanning mainly projects an image from a UV source to a first imaging group through DMD, utilizes the first imaging mirror group to project a digital optical image formed by the source and DMD to a spatial filter with micro-lens array, and then employs a second imaging mirror group to image again the digital optical image through the spatial filter with micro-lens array onto a substrate surface spin-coated with a PR layer for UV exposure of PR.
However, during the second imaging mirror group images the digital optical image through the spatial filter with micro-lens array onto a substrate surface spin-coated with a PR layer, some UV light energy will be diffused and the quality of the second imaging mirror group may affect the imaging quality, even causing deformation and distortion in imaging.
In light of various drawbacks of above maskless lithograph technique using light point array scanning, the inventor of this case urgently conceives and improves for innovation, and after several years of studying earnestly, finally develops the optics component with double-layered micro-lens array of the present document successfully.
To solve above traditional technical problem, one purpose of the present invention is to provide an optics component with double-layered micro-lens array capable of effectively improving utilization of light energy. To solve above traditional technical problem, one purpose of the present invention is to provide an optics component with double-layered micro-lens array capable of effectively improving the solution ability of maskless lithography System.
To achieve above purpose, the optics component with double-layered micro-lens array of the present invention mainly comprises a substrate, a first optical micro-lens array and a second optical micro-lens array; the substrate is a glass and quartz material and has a blocking layer deposited by an evaporator on the surface of one side, and an adhesive layer deposited similarly by the evaporator is between the substrate and the blocking layer; both the blocking layer and the adhesive layer have a pinhole structure in an array arrangement, the first optical micro-lens array being provided on the surface of one side of the substrate and the second optical micro-lens array being provided on the surface of another side of the substrate opposing to the first optical micro-lens array.
Wherein the first optical micro-lens array includes a plurality of first aspheric micro-lenses corresponding to the pinholes respectively.
Wherein the second optical micro-lens array includes a plurality of second aspheric micro-lenses corresponding to the pinholes respectively.
The above first optical micro-lens array is provided on one face of the substrate having the adhesive layer and the blocking layer, or the second optical micro-lens array is provided on one face of the substrate having the adhesive layer and the blocking layer.
With reference to the detailed description and figures related to the present invention, the technical contents and purpose as well effects of the present invention can be further understood; the related figures are:
1 optics component with double-layered micro-lens array
11 substrate
111 pinhole structure
112 adhesive layer
113 blocking layer
12 first optical micro-lens array
121 first aspheric micro-lens
13 second optical micro-lens array
131 second aspheric micro-lens
2 UV source
3 reflecting mirror
4 DMD wafer
Specific embodiment case will be described in the following to illustrate the implementation of this case, which doesn't limit the scope of the present invention. Reference now will be made to
Wherein in the process of fabricating the first optical micro-lens array 12 and second optical micro-lens array 13 by Excimer Laser Bi-convex Tract Fabrication Technique, a laser beam is emitted continuously along two axial directions perpendicular to each other by the laser through mask pattern, each emission having a 32 ns cycle, and when the laser fluence is 100 mJ/cm2, the process depth is 0.065 μm, the laser repetition frequency being 5 Hz, while the interval distance of each laser emission being 2 μm and the moving speed of the substrate is 10 μm/s. In order to align the micro-lens array with the optical axis of the pinhole array properly during the process, a CCD camera is added to help alignment. Whether the pinhole array is on the process axis and is in the center can be directly observed from the CCD. After completion, observing the intensity and alignment of each spot on X, Y axis from below the 10× objective lens of optical microscope. And observing its intensity and process accuracy with the 20× objective lens of optical microscope.
Finally, utilizing the optical microscope to complete the size of spot on LED and MLSFA final focusing plane, and adjusting LED intensity and object lens to find that the focusing plane is at 210 μm; the spot peak value of 4×3 array under 20× object lens is 1.95 W/cm2; single spot energy distribution through lenses on the focusing plane is shown in the X-X̂, Y-Ŷ axis profile of
With reference to
The above-mentioned detailed description aims to specifically illustrate one practicable embodiment of the present invention, but the embodiment are not for limiting the patent scope of the present invention and all equivalent embodiments or modifications made without departing from the spirit of the present invention shall be contained within the patent scope of the present invention. Many changes and modifications in the above described embodiment of the invention can, of course, be carried out without departing from the scope thereof. Accordingly, to promote the progress in science and the useful arts, the invention is disclosed and is intended to be limited only by the scope of the appended claims.
Number | Date | Country | Kind |
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105127612 | Aug 2016 | TW | national |