Claims
- 1. A method of manufacturing an optoelectronic semiconductor device with a waveguide, whereby a first layer of a material comprising silicon oxide is provided on a silicon substrate, a groove is formed in the first layer, and a second layer of a radiation-guiding material is provided over the first layer so that the waveguide is formed at the area of the groove, characterized in that the groove is formed through local oxidation of the silicon, which oxidation is locally inhibited by a mask of a material which is substantially impermeable to oxygen.
- 2. A method as claimed in claim 1, characterized in that a second groove is formed in the first layer during the local oxidation, a wider mask being used for forming the second groove than for forming the first groove.
- 3. A method as claimed in claim 1, characterized in that a second groove is formed in the first layer during the local oxidation, which second groove intersects the first groove at an angle.
- 4. A method as claimed in claim 1, 2 or 3, characterized in that a thin, thermal oxide is provided on the silicon substrate, over which a strip-shaped mask of silicon nitride is provided, upon which a local, thermal oxidation is carried out whereby the first layer and the groove are formed, after which the mask is removed and the second layer is provided.
Priority Claims (1)
Number |
Date |
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91202606 |
Jan 1991 |
EPX |
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Parent Case Info
This is a division of application Ser. No. 08/161,043, filed Dec. 1, 1993, now U.S. Pat. No. 5,360,982, which is a continuation of Ser. No. 07/957,299 filed Oct. 6, 1992, now abandoned.
US Referenced Citations (9)
Foreign Referenced Citations (3)
Number |
Date |
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2203305 |
Feb 1990 |
JPX |
0310540 |
Dec 1990 |
JPX |
0010205 |
Jul 1991 |
JPX |
Non-Patent Literature Citations (2)
Entry |
Mann et al., "Fabrication and Characterization of Processable Polydiacetylene Waveguides", SPIE, vol. 971, Nonlinear Optical Properties of Organic Materials, 1988, pp. 245-251. |
Balliet et al., "Method of Aligning Optical Fibers with LSI Chips Containing Optical Light-Emitting Source and/or Receivers", IBM Technical Disclosure Bulletin, vol. 25, No. 4, Sep. 1982, pp. 2188-2189. |
Divisions (1)
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Number |
Date |
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Parent |
161043 |
Dec 1993 |
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Continuations (1)
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Number |
Date |
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957299 |
Oct 1992 |
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