Claims
- 1. A method of forming a optoelectronic neural waveguide structure including a p-i-n diode structure, comprising the steps of:
- forming an n-doped buffer layer on a substrate;
- forming a bottom cladding layer on said n-doped buffer layer;
- forming a waveguide core on said bottom cladding layer on a side opposite to said n-doped buffer layer, said waveguide core being formed of undoped material;
- forming an upper cladding layer on said waveguide core on a side opposite to said bottom cladding layer;
- forming a p-doped cap layer on said upper cladding layer;
- forming an electrical contact layer on said cap layer;
- forming a plurality of electrically isolated elements by making a plurality of cuts in said combined cap and electrical layers; and wherein
- said p-doped cap layer is formed into a rib waveguide structure in a Y-junction configuration in which each of said isolated elements forms a part of said Y-junction;
- and further including the step of forming said bottom cladding layer from an n-doped and an undoped region in which said n-doped region abuts said waveguide core whereby a neural network device is formed such that the relative intensities of light energy passing through said waveguide core can be controlled by applying electrical energy to said electrically isolated elements.
- 2. The method of claim 1, further including the step of forming said top cladding layer from a p-doped and an undoped region in which said undoped region abuts said waveguide core.
- 3. The method of claim 2, further including the step of forming said waveguide core from a superlattice material.
- 4. The method of claim 3, wherein said superlattice material is formed from alternate layers of GaAs and Al.sub.0.4 Ga.sub.0.6 As.
- 5. The method of claim 1, wherein said n-doped region is formed from n-doped Al.sub.0.4 Ga.sub.0.6 As and said undoped region is formed from undoped Al.sub.0.4 Ga.sub.0.6 As.
- 6. The method of claim 2, wherein said p-doped region is formed from p-doped Al.sub.0.4 Ga.sub.0.6 As and said undoped region is formed from undoped Al.sub.0.4 Ga.sub.0.6 As.
- 7. The method of claim 2, wherein said substrate is formed from n.sup.+ -doped GaAs.
- 8. An optoelectronic neural waveguide architecture, including at least one optoelectronic neural waveguide structure suitable for connection to other suc structures, said at least one optoelectronic neural waveguide structure including a p-i-n diode structure, comprising:
- an n-doped buffer layer formed on a substrate material;
- a bottom cladding layer formed on said n-doped buffer layer;
- a waveguide core formed on said bottom cladding layer on a side opposite to said n-doped buffer layer, said waveguide core being formed from undoped material;
- an upper cladding layer formed on said waveguide core on a side opposite to said bottom cladding layer;
- a p-doped cap layer formed abutting to said upper cladding layer;
- an electrical contact layer formed on said p-doped cap layer;
- means for electrically isolating said electrical contact and cap layers to form a plurality of electrically isolated such elements of combined electrical and cap layers; and wherein said p-doped cap layer is formed into a rib waveguide structure in a Y-junction configuration in which each of said isolated elements forms a part of said Y-junction; and wherein said bottom cladding layer is formed from an n-doped and an undoped region in which said n-doped region abuts said waveguide core;
- whereby at least one neural network device is formed such that the relative intensities of light energy passing through the waveguide core of said at least one neural network device can be controlled by applying electrical energy to said electrically isolated elements.
- 9. The waveguide architecture of claim 8, wherein said top cladding layer is formed from a p-doped and an undoped region in which said undoped region abuts said waveguide core.
- 10. The waveguide architecture of claim 9, wherein said core is formed from a superlattice material.
- 11. The waveguide architecture of claim 10, wherein said superlattice material is formed from alternate layers of GaAs and Al.sub.0.4 Ga.sub.0.6 As.
- 12. The waveguide architecture of claim 8, wherein said n-doped region is formed from n-doped Al.sub.0.4 Ga.sub.0.6 As and said undoped region is formed from undoped Al.sub.0.4 Ga.sub.0.6 As.
- 13. The waveguide architecture of claim 8, wherein said p-doped region is formed from p-doped Al.sub.0.4 Ga.sub.0.6 As and said undoped region is formed from undoped Al.sub.0.4 Ga.sub.0.6.
- 14. The waveguide architecture of claim 9, wherein said substrate is formed from n.sup.+ -doped GaAs.
RIGHTS OF THE GOVERNMENT
The invention described herein may be manufactured, used and licensed by or for the U.S. Government for governmental purposes without the payment to me of any royalty thereon.
US Referenced Citations (13)