The present disclosure relates to an organic device and a method for manufacturing the same.
An organic electroluminescence element (hereinafter, also referred to as an “organic EL element”, an “organic light emitting element”, or an “organic device”) is an element that emits light when an organic compound layer that includes an anode, a cathode, and a light emitting layer disposed between the anode and the cathode is energized.
Today, the organic device is significantly advanced, and higher performance (increases in definition, brightness, and color purity) and high reliability of the organic device are demanded.
An organic device in which a first sealing layer and a second sealing layer are laminated on an upper electrode is described in Japanese Patent Laid-Open No. 2018-73760.
For the organic device described in Japanese Patent Laid-Open No. 2018-73760, first etching is performed after the first sealing layer has been deposited. After that, the second sealing layer is deposited, and second etching is performed. At this time, etching is performed such that a position of the second etching and a position having been subjected to the first etching overlap each other. As a result, a surface of an external connection electrode of the organic device described in Japanese Patent Laid-Open No. 2018-73760 is likely to be damaged by the etching. Consequently, in some cases the external connection electrode may corrode.
The present disclosure is made in view of the above and provides an organic device in which corrosion of the external connection electrode is reduced.
The organic device according to the present disclosure includes a pixel region which is disposed above a first main surface of a substrate and in which a plurality of pixels are disposed, a peripheral region which is disposed outside the pixel region above the first main surface, an external connection electrode which is disposed in the peripheral region above the first main surface, a first sealing film disposed above the external connection electrode, and a second sealing film which is disposed above the external connection electrode and a material of which is different from a material of the first sealing film. The second sealing film is disposed above the first sealing film. In the peripheral region, the organic device is provided with, in the first sealing film, an opening which exposes the external connection electrode and, between the opening and the pixel region, a first groove in which the second sealing film is disposed.
Further features of the present disclosure will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.
The following embodiments do not limit the disclosure relating to the scope of the claims. Although a plurality of features are described in the embodiments, not all of the plurality of features are necessarily required. In addition, the plurality of features may be arbitrarily combined with each other. Furthermore, in the accompanying drawings, the same or similar elements are denoted by the same reference numerals, and thereby redundant description thereof is omitted.
Furthermore, herein, a capability of reducing corrosion of an external connection electrode may be described as to have “a high reliability”.
An organic device 100 according to a first embodiment is described with reference to
The pixel region may be disposed on the first main surface. The peripheral region may be disposed on the first main surface. The external connection electrode 40 may be disposed on the first main surface. The first sealing film 20 may be disposed the external connection electrode. The second sealing film 30 may be disposed on the external connection electrode 40. The second sealing film 30 may be disposed on the first sealing film 20.
In the peripheral region, the organic device 100 has an opening 51 that exposes the external connection electrode 40 and the first groove 52 which is disposed between the opening 51 and the pixel region and in which the second sealing film 30 is disposed. The opening 51 is also referred to as a pad opening. The first groove 52 can be formed so as to expose the external connection electrode 40 or the substrate 10 disposed in the peripheral region. Particularly, the first groove 52 can be formed so as to expose the external connection electrode 40.
The reason for this is that, when the first groove 52 is formed so as to expose the external connection electrode 40, penetration of moisture can be further reduced.
In the organic device 100 according to the present disclosure, it can be said that, in plan view of the first main surface, the opening 51, the first sealing film 20, the second sealing film 30, and the first sealing film 20 are provided in this order in a direction parallel to the first main surface.
The substrate 10 may be a semiconductor substrate such as a silicon substrate, a glass substrate, or a resin substrate. The substrate 10 includes an interlayer insulating layer and a planarization layer on the substrate 10. A transistor may be disposed in the interlayer insulating layer or the planarization layer. When the substrate 10 is formed by a sealing film, the substrate 10 can be formed of silicon oxide (SiO) or silicon nitride (SiN). Particularly, the substrate 10 can be formed of SiO. The reason for this is that, compared to SiN, SiO is easily processed.
The first sealing film 20 or the second sealing film 30 is not limited as long as the materials of the first sealing film 20 and the second sealing film 30 are different from each other and the first sealing film 20 and the second sealing film 30 can reduce penetration of moisture into the organic device 100. However, the moisture permeability of the second sealing film 30 can be lower than the moisture permeability of the first sealing film 20. Specifically, the first sealing film 20 can be a film that contains SiO, and the second sealing film 30 can be a film that contains SiN. When the organic device 100 has the above-described configuration, penetration of moisture into the organic device 100 can be further reduced. Thus, the organic device 100 has a higher reliability.
The second sealing film 30 is disposed in the first groove 52 to reduce penetration of moisture into the organic device 100. At this time, in the first groove 52, the second sealing film 30 can be disposed so as to be in contact with the substrate 10 or the external connection electrode 40, particularly, the second sealing film 30 can be disposed so as to be in contact with the external connection electrode 40, and, more particularly, the second sealing film 30 can be disposed so as to fill the first groove 52. When the organic device 100 has the above-described configuration, penetration of moisture into the organic device 100 can be further reduced.
Although a method for depositing the first sealing film 20 or the second sealing film 30 is not particularly limited, the first sealing film 20 and the second sealing film 30 can be deposited by a chemical vapor deposition (CVD), and particularly, can be deposited by especially a plasma CVD method.
Specifically, the external connection electrode 40 is a pad electrode or the like and includes a barrier metal 41, an Al alloy 42, and an antireflection film 43. The barrier metal 41 and the antireflection film 43 may be formed of titanium nitride (TiN). The Al alloy 42 may be Al containing Cu. Specifically, the Al alloy 42 may contain 0.2 to 1% of Cu by weight in Al. The external connection electrode 40 is connected to a flexible cable by using an anisotropic conductive film (ACF) or the like. A wiring electrode of the external connection electrode 40 may be exposed at an external connection electrode surface.
Hereinafter, a method for manufacturing the organic device 100 according to the first embodiment is described with reference to
Next, as exemplified in
When the first groove 52 is formed so as to expose the substrate 10, the substrate 10 can be formed of SiN. Etching of the first sealing film 20 is, for example, plasma etching (reactive ion etching (RIE)) using a fluorine-related gas. Specifically, the fluorine-related gas may be C4F8 or CF4. When the first groove 52 is formed so as to expose the external connection electrode 40, the antireflection film 43 may be etched at the same time. As illustrated in
Next, as exemplified in
An alumina (Al2O3) film may be included between the first sealing film 20 and the second sealing film 30. The alumina film is formed by using, for example, an atomic layer deposition (ALD) method. When the second sealing film 30 is disposed in the first groove 52, penetration of moisture into the organic device 100 can be reduced.
At last, as illustrated in
By performing the above-described method for manufacturing, the organic device 100 having the configuration illustrated in
Hereinafter, with reference to
As a result, the likelihood of corrosion of the external connection electrode 40 increases.
In contrast, in the organic device 100 according to the present disclosure, etching is performed at different positions out of a surface of the external connection electrode 40. In other words, the opening 51 and the first groove 52 are not redundantly formed at the same position. Thus, for the organic device 100 according to the present disclosure, damage to the surface of the external connection electrode 40 due to etching can be reduced while sealing performance against moisture is maintained. As a result, an organic device in which the external connection electrode 40 is unlikely to corrode and which has a high reliability can be obtained.
The organic device 100 according to a second embodiment is described with reference to
In the organic device 100 according to the present embodiment, it can be said that, in plan view of the first main surface, the opening 51, the first sealing film 20, the second sealing film 30, the first sealing film 20, the second sealing film 30, and the first sealing film 20 are provided in this order in the direction parallel to the first main surface.
The organic device 100 having the configuration exemplified in
The organic device 100 according to a third embodiment is described with reference to
In particular, when the organic device 100 has the above-described configuration, the substrate 10 can be formed of SiN. The moisture permeability of SiN is lower than that of SiO. Thus, even when moisture penetrates from the first sealing film 20 facing the opening 51, penetration of the moisture into the pixel region can be further reduced.
The organic device 100 according to a fourth embodiment is described with reference to
The battery 1008 is not necessarily provided unless the display apparatus 1000 is a portable device or may be provided at another position even when the display apparatus 1000 is a portable device.
The display apparatus 1000 according to the present embodiment may include red, green, and blue color filters. The red, green, and blue color filters may be disposed in a delta arrangement.
The display apparatus 1000 according to the present embodiment may be used in a display section of an image capturing apparatus including an image capturing element that receives light. The image capturing apparatus may further include an optical section including a lens, and the image capturing element may receive light having passed through the optical section. The optical section may include a single lens or a plurality of lenses. The image capturing apparatus may include a display section that displays information obtained by the image capturing element. The display section may be exposed to the outside of the image capturing apparatus or disposed in a finder. The image capturing apparatus may be a digital camera or a digital video camera.
The image capturing apparatus 1100 includes an optical section (not illustrated). When the optical section includes a plurality of lenses, light having passed through the optical section forms an image on an image capturing element housed in the housing 1104. The focus of the plurality of lenses can be adjusted by adjusting the relative positions of the plurality of lenses. This operation may be manually performed or automatically performed. The image capturing apparatus may also be referred to as a photoelectric conversion apparatus.
Methods of capturing an image by using the photoelectric conversion apparatus may include a method in which the difference from a previous image is detected, a method in which an image is cut out from a usually recorded image, and the like instead of sequentially capturing images.
The lighting apparatus is, for example, an indoor lighting apparatus. The lighting apparatus may emit light of any of white, neutral white, and other colors from blue to red. The lighting apparatus may include a light control circuit that controls the light of any of those colors. The lighting apparatus may include a power supply circuit. The power supply circuit may be a circuit that converts an alternating voltage into a direct voltage. White has a color temperature of 4200 K, and neutral white has a color temperature of 5000 K. The lighting apparatus may include a color filter.
Furthermore, the lighting apparatus according to the present embodiment may include a heat dissipation section. The heat dissipation section dissipates heat in the apparatus to the outside of the apparatus and includes metal or ceramic having a high thermal conductivity.
The taillight 1501 may include the organic device according to the present disclosure. The taillight 1501 may include a protective member that protects a light source. Although the material of the protective member is not limited as long as the protective member has a certain degree of strength and is transparent, the protective member can be formed of polycarbonate or the like. A furandicarboxylic acid derivative, an acrylonitrile derivative, or the like may be mixed into polycarbonate.
The moving object according to the present embodiment may be an automobile, a vessel, an aircraft, a drone, or the like. The moving object may include a body and a light fitting provided in the body. The light fitting may stay lit up to notify the position of the body.
The electronic device or the display apparatus can be applied to a system that can be worn as a wearable device such as, for example, smart glasses, a head mount display, or smart contact lenses. The electronic device may include an image capturing apparatus that can perform photoelectric conversion on visible light and a display apparatus that can emit visible light.
The glasses 1600 further include a control apparatus 1603. The control apparatus 1603 functions as a power supply that supplies power to the image capturing apparatuses 1602 and the display sections. Furthermore, the control apparatus 1603 controls operations of the image capturing apparatuses 1602 and the display sections. Optical systems for concentrating light to the image capturing apparatuses 1602 and the display sections are formed in the lenses 1601.
Referring to
From the captured images of the eyeballs obtained by capturing the infrared light, the control apparatuses 1612 detect the lines of sight of the user to the displayed image. Any known technique can be applied to the line-of-sight detection using captured images of the eyeballs. For example, the line-of-sight detection method based on a Purkinje image due to reflection of light radiated to the corneas can be used.
More specifically, a line-of-sight detection process based on the pupil center corneal reflection method is performed. When a line-of-sight vector representing the direction of the eyeball (rotational angle) is calculated based on the Purkinje image and a pupil image included in the captured image of the eyeball by using the pupil center corneal reflection method, the line of sight of the user is detected.
A display apparatus according to an embodiment of the present disclosure may include an image capturing apparatus including a light receiving element and control a display image of the display apparatus based on line-of-sight information of a user from the image capturing apparatus.
Specifically, the display apparatus determines a first sight region gazed by the user and a second sight region other than the first sight region based on the line-of-sight information. The first sight region and the second sight region may be determined by a control apparatus of the display apparatus. Alternatively, the display apparatus may receive the first sight region and the second sight region determined by an external control apparatus. In a display region of the display apparatus, a display resolution of the first sight region may be controlled to be higher than a display resolution of the second sight region. That is, the resolution of the second sight region may be set to be lower than the resolution of the first sight region.
In determining the first sight region and a display region of high priority, artificial intelligence (AI) may be used. The AI may be a model configured to use, as training data, an image of the eyeball and the direction actually gazed by the eyeball of the image so as to estimate the angle of the line of sight and the distance to an object ahead of the line of sight from an image of the eyeball. The AI may be included in the display apparatus, the image capturing apparatus, or the external apparatus. When the AI is included in the external apparatus, the AI can be applied to smart glasses that further include image capturing apparatuses that capture external images. The smart glasses may display captured external information in real time.
From the above description, the organic device according to the present disclosure can maintain sealing performance against moisture and reduce damage to the external connection electrode due to the etching. Accordingly, the organic device in which corrosion of the external connection electrode is reduced can be provided. Furthermore, of course, the present disclosure is not limited to the above-described embodiments, and the above-described embodiments can be changed or combined with each other as appropriate without departing from the gist of the present disclosure.
According to the present disclosure, the organic device in which corrosion of the external connection electrode is reduced can be provided.
While the present disclosure has been described with reference to exemplary embodiments, it is to be understood that the disclosure is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
This application claims the benefit of Japanese Patent Application No. 2022-174678, filed Oct. 31, 2022, which is hereby incorporated by reference herein in its entirety.
Number | Date | Country | Kind |
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2022-174678 | Oct 2022 | JP | national |