The present embodiment will be explained below.
An opening is prepared on the front frame FF. This opening is slightly larger than the effective display area AR, in which organic electroluminescence elements are formed, on the first substrate SUB1 so that a lower electrode of the organic electroluminescence element is visible through the second substrate SUB2. (The functional layer OLBF is transparent and therefore invisible). Although the front frame FF is made of stainless steel and ferrous alloys, plastics are acceptable.
Like the front frame FF, the back frame BF is also made of stainless steel and ferrous alloys, and plastics are also acceptable. The front frame FF and the back frame BF are fit together using snap fits to maintain a fixed amount of space. The first substrate SUB1, the second substrate SUB2, and an optical film OF are stored in the maintained space.
The third substrate SUB3 is fixed to the back side of the second substrate SUB2, and a terminal on the opposite side of the flexible substrate is connected to a terminal of the third substrate SUB3. Furthermore, the third substrate SUB3 includes an OLED power supply circuit which functions as a power supply for driving the organic electroluminescence element, an LTPS power supply circuit which drives a thin-film transistor made of low-temperature polysilicon, and a timing control circuit which outputs a grayscale signal and a timing signal. These signals are supplied to the first substrate SUB1 through the flexible substrate FPC1.
The optical film OF shown in
As shown in
As mentioned above, the vertical drive circuit VDRV, which is mounted by the COG mount technique, receives signals Sig, such as a picture signal, power, timing signal, etc., through the pad PAD; and supplies grayscale data to a pixel PXL (mentioned later in
Common voltage (hereinafter referred to as VCOM) to be supplied to the upper electrode CD of an organic electroluminescence element mentioned later is applied to the cathode bus line CBL. Then, the cathode bus line is formed vertically on both sides of the vertical drive circuit VDRV from the pad PAD, and then horizontally between the vertical drive circuit VDRV and the effective display area AR, making connection of both sides. Furthermore, the cathode bus line CBL is formed between the horizontal drive circuit HDRV and the effective display area AR and between the triangular wave generation circuit SGEN and the effective display area AR, i.e., vertically in the external area in the row direction of the effective display area AR, and further formed horizontally below the effective display area AR (along the side facing the vertical drive circuit VDRV), making connection of both sides. However, this section is omitted in
The first current supply bus line CSBL1 is formed vertically on both sides of the vertical drive circuit VDRV from pad PAD, and then horizontally between the cathode bus line CBL and the effective display areas AR, making connection of both sides. The first current supply bus line CSBL1 is formed vertically in
The second current supply bus line CSBL2 is formed on both sides of the vertical drive circuit VDRV from the pad PAD, further formed vertically on the outer side of the horizontal drive circuit HDRV and the triangular wave generation circuit SGEN, and further formed horizontally to the bottom of the effective display area AR, making connection of both sides.
The horizontal drive circuit HDRV is a circuit generally referred to as gate driver, which is the LTPS built in the substrate with the present embodiment. Furthermore, in the case of the present embodiment, three scanning lines per pixel PXL extend horizontally (in the row direction) from the horizontal drive circuit HDRV.
The triangular wave generation circuit, a circuit required for a pixel PXL circuit previously developed by the present applicant, supplies one triangular wave per frame.
For the above-mentioned drive circuit and triangular wave generation circuit, the circuits and drive waveforms described particularly in FIG. 23 to FIG. 25 in patent application No. 2006-51346 previously applied by the present applicant are used. Since detailed explanations are given in the application allowing cross-reference, the present specification will not explain the details.
The layer structure of the first substrate SUB1 is shown in
The undercoat layer UC formed on the glass substrate SUB is a laminated film of SiO and SiN. This laminated film, which is an antidiffusion film which prevents diffusion of Na from glass to the polysilicon layer FG, is formed by means of the low pressure chemical vapor development method (the LPCVD method).
Then, an amorphous silicon layer a-Si with 50-nm film thickness is formed on the glass substrate SUB by use of the low pressure chemical vapor development method (LPCVD method). Then, by performing laser annealing of the entire film surface with excimer laser, a-Si is crystallized to form the polysilicon layer FG made of polycrystal silicon p-Si.
Then, the polysilicon layer FG is patternized through dry etching to form a channel (active layer) area for transistors. Then, the first insulation layer GI was formed with a SiO2 film with 100-nm film thickness by use of the plasma-enhanced chemical vapor development method (PECVD method). This first insulation layer GI functions as a gate insulating film.
Then, as the first electrode layer SG, a TiW film with 50-nm film thickness is produced by means of the sputtering method and then patterning performed. This patterning forms the gate electrode of the thin film transistor, wiring horizontally extending from the above-mentioned horizontal drive circuit HDRV and triangular wave generation circuit SGEN, and other wiring. This wiring may be MoW wiring.
Then, n-ion is injected into the patternized polysilicon layer from above the gate insulating film by means of the ion-injection method. n-ion is not injected into an area having the gate electrode thereabove, which becomes an active layer.
Then, heat-activation treatment is performed on of the first substrate SUB1 under inactive N2 atmosphere to allow doping to be performed effectively. On the above-mentioned layer, a silicon nitride (SiNx) film is formed as a second insulation layer ILI1. The film thickness is 200 nm.
Then, a contact hole is formed in the first insulation layer GI and the second insulation layer ILI1 above both ends of the active layer. On the above-mentioned layer, the second electrode layer SD made of Al with 500-nm film thickness is formed by means of the sputtering method. Through patterning with a photo-lithography process, the vertical drive circuit VDRV, wiring vertically extending such as the current supply line CSL, the cathode bus line CBL, and a source-drain electrode of the thin film transistor, etc. are formed. Furthermore, connection is made with the first electrode layer SG and the polysilicon layer FG through the contact hole.
Then, a SiNx film is formed as a third insulation layer ILI2. The film thickness is 500 nm. A contact hole is prepared on the source electrode of the thin film transistor. On the above-mentioned layer, the third electrode layer AD is formed by means of the sputtering method, in which ITO is laminated on Al with 150-nm thickness. Furthermore, a lower electrode AD1 of the organic electroluminescence element and the relay electrode (pad) AD2 of a cathode contact CH on the cathode bus line CBL are formed through patterning of the third electrode layer by use of the photo-lithography method.
For these drive circuit and the triangular wave generation circuit, circuits described particularly in FIG. 12 to FIG. 22 in patent application No. 2006-51346 previously applied by the present applicant are used. Since detailed explanations are given in the application allowing cross-reference, the present specification will not explain the details.
Then, by use of the spin coat method, a positive photosensitivity protection film is formed as a fourth insulation layer BANK and then bake treatment is performed. The fourth insulation layer BANK with a 1-μm film thickness covered the lower electrode by 3 μm, as well as the surroundings of the cathode contact CH. The fourth insulation layer BANK is a layer referred to as a bank.
Then, 4,4-bis[N-(1-naphthyl)-N-phenylamino]biphenyl film (hereinafter abbreviated as A-NPD film) with 50-nm film thickness is formed by means of the vacuum evaporation method. Shadow masking is used for pattern formation. The evaporation area is 1.2 times each side of the lower electrode. The A-NPD film functions as a hole transportation layer HTL. On the above-mentioned layer, a common evaporation film of tris(8-quinolinol) aluminum (hereinafter referred to as Alq) and quinacridone (hereinafter referred to as Qc) with 20-nm film thickness was formed by means of two-dimensional simultaneous vacuum evaporation method. Evaporation is performed by controlling the evaporation speed to 40:1. The Alq+Qc common evaporation film functions as a luminescence layer EML. Shadow masking is used for pattern formation.
On the above-mentioned layer, an Alq film with 10-nm film thickness is formed by means of the vacuum evaporation method. The Alq film functions as an electron transportation layer ETL. Shadow masking is used for pattern formation. Then, as an electron injection layer EIL, a Li-doped Alq film is formed by 10 nm by means of the two-dimensional simultaneous vacuum evaporation method. The molar proportion of Alq and Li is 1:1. Shadow masking is used for pattern formation. The buffer layer BF is formed through EB evaporation of vanadium oxide. The film thickness is 15 nm. Shadow masking is used for pattern formation. The composition of the vanadium oxide after evaporation is such that the ratio of vanadium to oxygen is 1:2.2 and the permeability is 95%. The buffer layer may be made of ZnO, SnO2, WO3, MoO3, or V2O5. These layers are formed mainly of an oxide containing a smaller amount of oxygen decomposed and generated during film formation than that included in the material of the upper electrode CD.
Then, the fourth electrode layer SUP is formed with Al with 100-nm film thickness by means of the sputtering method. The auxiliary electrode is formed through patterning. This layout will be mentioned later. Furthermore, the fourth electrode layer SUP may be made of Cu or alloys of Al and Cu, instead of Al. The resistance of the fourth electrode layer SUP is lower than that of the fifth electrode layer CD. When the sheet resistance is measured from the fifth electrode sandwiching the auxiliary electrode having been subjected to patterning, the fourth electrode layer may be formed in such a way that the sheet resistance between two points which sandwich the auxiliary electrode is lower than that between two points which do not sandwich the auxiliary electrode.
Then, an In—Zn—O film (hereinafter abbreviated as IZO film) with 100-nm film thickness is formed as a fourth electrode layer SUP by means of the sputtering method. The IZO film, which functions as an upper electrode CD 125, is a non-crystal oxide film. A target satisfying In/(In+Zn)=0.83 is used. Film formation conditions include Ar:O2 mixture gas as atmosphere, a degree of vacuum of 1 Pa, and a sputtering output of 0.2 W/cm2. The upper electrode CD made of an In—ZnO film functions as a cathode with a permeability of 80%.
Then, a SiOxNy film with 50-nm film thickness is formed by means of the sputtering method. The SiOxNy film functions as a protection layer. This protection film is omitted in the Figures. It is desirable that the hole injection layer HIL mentioned here be made of a material having an appropriate ionization potential in order to lower injection obstructions of the lower electrode AD that is an anode, and the hole transportation layer HIL. Specifically, the material for the hole injection layer HIL may be but is not limited to metal phthalocyanine, starburst amine compound, polyaniline, and polythiophene. Furthermore, it is desirable that hole donative dopant materials have been doped in the hole injection layer. Specifically, desirable hole donative dopant materials include 2,3,5,6-tetrafluoro tetracyano quinodi methane (F4TCNQ), chlorination iron, and dicyano dichloro quinine, but not limited thereto and it would be possible that a plurality of these materials are used together.
The hole transportation layer HTL mentioned here has a role to transport holes and then inject them into the luminescence layer. Therefore, it is desirable that the layer HTL be provided with high hole mobility, chemical stability, and high glass transfer temperature. Preferably, materials for the hole transportation layer HTL include N,N′-bis(3-methylphenyl)-N,N′-diphenyl-[1,1′-biphenyl]-4,4′diamine (TPD); 4,4′-bis[N-(1-naphthyl)-N-phenylamino]biphenyl (α-NPD); 4,4′,4″-tri(N-carbazolyl)triphenylamine (TCTA); and 1,3,5-tris[N-(4-diphenylaminophenyl)phenylamino]benzene (p-DPA-TDAB), but not limited thereto and it would be possible that a plurality of these materials are used together.
The luminescence layer EML mentioned here refers to a layer in which injected holes recombine with electrons to produce luminescence with a wavelength specific to the material. There are two different cases of luminescence: one is luminescence of a host material itself forming a luminescence layer and the other is luminescence of a minute amount of a dopant material added to the host. Preferably, materials for the host include distyrylarylene derivative (DPVBi), silole derivative (2PSP) having the benzene ring as a frame, oxodiazole derivative (EM2) having the triphenylamine structure at both ends, perynone derivative (P1) having the phenanthrene group, oligothiophene derivative (BMA-3T) having the triphenylamine structure at both ends, perylene derivative (tBu-PTC), tris(8-quinolinol) aluminum, polybara-phenylene vinylene derivative, polythiophene derivative, polybara-phenylene derivative, polysilane derivative, and polyacetylene derivative, but not limited thereto and it would be possible that a plurality of these materials are used together.
Then, specifically, desirable dopant materials include quinacridone, coumarin 6, nilered, rubrene, 4-(dicyanomethylene)-2-methyl-6-(paradimethylaminostyryl)-4H-pyran (DCM), and dicarbazole derivative, but not limited thereto and it would be possible that a plurality of these materials are used together.
The electron transportation layer ETL mentioned here has a role to transport electrons and then inject them into the luminescence layer. Therefore, it is desirable that the layer ETL be provided with a high electron mobility. Specifically, desirable materials include tris(8-quinolinol)aluminum, oxadiazole derivative, silole derivative, and zinc benzothiazole complex, but not limited thereto, and it would be possible that a plurality of these materials are used together.
The electron injection layer EIL mentioned here, an organic compound with electron donative dopant materials doped therein, is used to improve the electron injection efficiency from the cathode to the electron transportation layer ETL. Specifically, desirable electron donative dopant materials include lithium, magnesium, calcium, strontium, barium, magnesium, aluminum, alkaline metal compounds, alkaline-earth metal compounds, rare earth metal compounds, organic metal complex containing alkaline metal ion, organic metal complex containing alkaline-earth metals ion, and organic metal complex containing rare earth metal ion, but not limited thereto, and it would be possible that a plurality of these materials are used together. Specifically, desirable host materials for the electron injection layer EIL include tris(8-quinolinol) aluminum, oxadiazole derivative, silole derivative, and zinc benzodiazole complex, but not limited thereto, and it would be possible that a plurality of these materials are used together.
With the above-mentioned configuration, a structure not including the electron injection layer EIL or the hole injection layer HIL is also possible. Furthermore, a structure not including the electron transportation layer ETL or the hole transportation layer HTL is also possible. More specifically, there are three possible cases of the buffer layer: in contact with the organic luminescence layer EML, in contact with the electron transportation layer ETL, and in contact with the electron injection layer EIL.
It is desirable that the anode material used for the lower electrode AD1 be a conductive film having a large work function which improves the efficiency of hole injection. Specifically, possible materials include metals, such as molybdenum, nickel, chromium, etc.; alloys using these metals; and inorganic materials, such as polysilicon, amorphous silicon, tin oxides, indium oxide, indium tin oxide (ITO), etc., but not limited thereto.
If an In2O3-SnO2-containing conductive film is produced at a substrate temperature of about 200 degrees by means of the sputtering method, polycrystal state is attained. In the polycrystal state, the etching speed in the crystal grain differs from that on the crystal grain boundary surface and therefore the amorphous state is desirable when using the film for the lower electrode AD1.
Furthermore, a configuration using the lower electrode AD1 as a cathode and the upper electrode CD as an anode is possible. In this case, the lower electrode AD1, the electron injection layer EIL, the electron transportation layer ETL, the luminescence layer EML, the hole transportation layer HTL, the hole injection layer HIL, and the upper electrode CD are laminated in this order. With the above-mentioned configuration, a structure not including the electron injection layer EIL or not including the hole injection layer HIL is also possible. Furthermore, a structure not including the electron transportation layer ETL or the hole transportation layer HTL is also possible. More specifically, there are three possible cases of the buffer layer: in contact with the organic luminescence layer EML, in contact with the hole transportation layer HTL, and in contact with the hole injection layer EIL.
When the lower electrode AD1 is used as a cathode, it is desirable that the cathode material be a conductive film having a small work function which improves the efficiency of electron injection. Specifically, possible materials include aluminum, aluminum-neodymium alloys, magnesium-silver alloys, aluminum-lithium alloys, aluminum-calcium alloys, aluminum-magnesium alloys, metal calcium, cerium compounds, etc., but not limited thereto.
When the upper electrode CD is used as an anode, possible anode materials include oxides composed mainly of indium oxide. An In2O3-SnO2-containing transparent conductive film and a Sn2O3-ZnO-containing transparent conductive film are particularly desirable. Possible manufacturing methods of a transparent conductive film include the sputtering method, the facing target sputtering method, the EB evaporation method, and the ion plating method.
When the upper electrode CD is formed, a part of an oxide, a composition material of the upper electrode CD, is decomposed and then the generated oxygen radical oxidizes the organic film resulting in luminescence voltage rise. As a result of close study, it is possible to reduce the luminescence voltage rise by organic film oxidization during formation of the upper electrode CD by preparing a buffer layer between the organic film and the upper electrode CD, the buffer layer formed mainly of a conductive oxide having an oxygen-binding force stronger than that of the upper electrode CD.
When using an upper electrode CD formed mainly of indium oxide, for example, possible materials of the buffer layer BF formed mainly of a conductive oxide having an oxygen-binding force larger than that of the upper electrode CD include vanadium oxide, molybdenum oxide, tungsten oxide, tantalum oxide, titanium oxide, niobium oxide, and chromium oxide. On the other hand, a material composed of germanium oxide, copper oxide, ruthenium oxide, etc. has an oxygen-binding force smaller than that of indium oxide, and generates more oxygen radical during buffer layer film formation than during upper electrode CD film formation. Therefore, it is not possible to suppress the luminescence voltage rise.
Furthermore, if the buffer layer BF is explained in other words, it can be referred to as a layer between the organic layer OLE and the upper electrode CD, which is formed mainly of an oxide having a Gibbs energy generated near the melting point lower than that of the composition material of the upper electrode CD. By use of a material, having a lower Gibbs energy generated near the melting point than the main raw material of the upper electrode CD, for the buffer layer, it is possible to reduce the amount of oxygen radical decomposed and generated before and in early stage of film formation, resulting in reduced oxidization of the organic layer.
Still in other words, the buffer layer BF can also be referred to as a layer between the organic layer and the upper electrode CD, which is formed mainly of an oxide having a lower Gibbs energy generated near the melting point than −300 kJ/mol. Voltage rise can be suppressed to 1V or less by using a material having a generated Gibbs energy lower than −300 kJ/mol for the buffer layer BF.
Furthermore, the buffer layer BF is made of a material composed mainly of an oxide having a resistivity of 1×107 Ωcm or less, and a preferable film thickness is 5 nm to 50 nm. When a material having a resistivity of 1×107 Ωcm or more is used for the buffer layer, large voltage drop of 0.1V or more occurs in the buffer layer during high-luminance luminescence, canceling effects of oxidization prevention. Furthermore, organic film oxidization can be suppressed by making a film with a thickness of 5 nm or more; however, it becomes impossible to ignore the efficiency reduction caused by reduced permeability if the film thickness becomes 50 nm or more. For this reason, the above-mentioned configuration is employed.
Furthermore, when the upper electrode CD is used as an anode, it is preferable that the buffer layer be formed mainly of vanadium oxide. It is possible to suppress the voltage rise to almost 0V using the upper electrode CD as an anode and vanadium oxide for the buffer layer. A desirable composition of the vanadium oxide is such that the ratio of oxygen to vanadium is 2 to 5. Furthermore, when the upper electrode CD is used as an anode and vanadium oxide used for the buffer layer, the vanadium oxide is also provided with the function of the hole transportation layer. Therefore, it becomes possible to supply holes directly to the luminescence layer EML without the hole transportation layer HTL and the hole injection layer HIL.
Furthermore, the protection layer is formed on the upper electrode CD aiming at preventing H2O and O2 in the atmosphere from getting into the upper electrode CD or the organic layer thereunder. Possible materials for the protection layer include inorganic materials, such as SiO2, SiNx, SiOxN, etc., and organic materials, such as polypropylene, polyethylene terephthalate, polyoxymethylene, polyvinyl chloride, polyvinylidene fluoride, cyanoethyl pulran, polymethyl methacrylate, polysulfone, polycarbonate, polyimide, etc., but is not limited thereto.
A plurality of vertical wires including a grayscale signal line DATA extend from the vertical drive circuit VDRV arranged above the effective display area AR. This vertical wiring is formed in the second electrode layer SD. From the first and second current supply bus lines CSBL1 and CSBL2 extending on all four sides of the effective display area AR, the current supply lines CSL which are formed at electrodes of the second electrode layer vertically extend. From the horizontal drive circuit HDRV, three wires for each pixel PXL row extend in order to supply three different signals. This wiring is formed in the first electrode layer SG.
The current supply bus line CSBL, which is formed in the second electrode layer SD, is detoured in the first electrode layer SG only at a portion where the bus line intersects with the vertical drive circuit VDRV. The current supply line CSL is formed along the vertical drive circuit VDRV and formed in the second electrode layer SD.
The cathode bus line CBL runs on both sides of the vertical drive circuit VDRV and then is led outside the effective display area AR, i.e., above (direction from the effective display area AR to the vertical drive circuit VDRV in the case of
When forming the cathode bus line CBL in the second electrode layer SD, the cathode bus line CBL is detoured in the first electrode layer SG and the third electrode layer at a portion where the bus line intersects with other wiring in the same layer. Furthermore, when forming this cathode bus line CBL in the third electrode layer, the cathode bus line CBL is detoured in the second electrode layer SD and the third electrode layer at a portion where the bus line intersects with other wiring in the same layer.
Since the first auxiliary electrodes SUP1 and the second auxiliary electrodes SUP2 make it possible to suppress voltage drop produced in the arrangement directions thereof, it is possible to suppress luminance unevenness in each individual direction. A third auxiliary electrode SUP3 around the effective display area AR is formed from a first formation area line CDC1, in the form of a picture frame, i.e., from the outside of the effective display area AR to a second formation area CDC2 on the banks of the outermost pixels PXL. The common voltage VCOM is supplied to the third auxiliary electrode SUP3 by the first to fourth cathode contacts CH1 to CH4 arranged outside each pixel PXL. Since voltage drop produced in the horizontal and vertical directions can be suppressed by preparing the third auxiliary electrode SUP3, it is possible to suppress luminance unevenness in the horizontal and vertical directions. Furthermore, since the cathode contacts CH are arranged horizontally and vertically with respect to the third auxiliary electrodes SUP3 extending horizontally and vertically, suppression of voltage drop is also possible. The upper electrode CD, common to each pixel PXL, extends to the second formation area line CDC2 exceeding the first formation area line CDC1. Since the auxiliary electrodes SUP1, SUP2, and SUP3 suppress voltage drop, metal materials with low resistance are used. For example, Al having a low resistance can easily be formed at low cost. Furthermore, Zn has an advantage of being resistant to corrosion.
Cross-sectional structures of the first substrate SUB1 taken along the C-D, E-F, G-H, and I-J lines of
On the pixel area PXL formed are: the third insulation layer ILI2 on a thin film transistor with the gate electrode formed in the first electrode layer SG and the source drain electrode formed in the second electrode layer SD; the lower electrode AD1 connected to the source drain electrode of the thin film transistor; a bank BANK delimiting the lower electrodes AD1; the functional layer OLBF including the organic layer EML and the buffer layer formed on the lower electrode AD1; the first auxiliary electrode SUP1; the second auxiliary electrode (SUP2); the upper electrode CD common to all pixels PXL; and a part of the third auxiliary electrode SUP3. The bank having an opening above the lower electrode AD covers the surrounding of the lower electrode AD and the third insulation layer ILI2 and extends beyond the contact hole CH in the cathode contact area.
In the cathode contact area CDC, the functional layer OLBF extending from the pixel area PXL, the third auxiliary electrode SUP3 layer, and the upper electrode CD layer are formed on the third insulating film. At the contact hole CH, a relay electrode AD2 of the same layer as the lower electrode AD1, i.e., the third electrode layer is formed. At the contact hole CH, therefore, the cathode bus line CBL formed in the second electrode layer SD, the relay electrode AD2 formed in third electrode layers AD formed on the contact pad PAD of the cathode bus line CBL, the fourth electrode layer SUP constituting the third auxiliary electrode SUP3 formed on the relay electrode AD2, and the fifth electrode layer CD constituting the upper electrode CD are laminated.
Example cross-sectional structures of the first substrate SUB1 taken along the C-D and E-F lines of
The block diagram of the first substrate SUB1 having a dummy pixel DPXL is present is shown in
An example cross-sectional structure of the first substrate SUB1 taken along the G-H line of
Number | Date | Country | Kind |
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2006-110141 | Apr 2006 | JP | national |