Orifice array for high density ink jet printhead

Information

  • Patent Grant
  • 6188416
  • Patent Number
    6,188,416
  • Date Filed
    Thursday, February 13, 1997
    27 years ago
  • Date Issued
    Tuesday, February 13, 2001
    23 years ago
Abstract
An ink jet printhead assembly for ink jet printing apparatus and a method for the manufacture thereof. The piezoelectrically operable ink jet printhead assembly has two arrays of driving channels aligned with a single orifice array in which each orifice connects through a fluid channel to a single driving channel.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates generally to an ink jet printhead assembly for ink jet printing apparatus and a method for the manufacture thereof. More particularly, the present invention relates to a piezoelectrically operable ink jet printhead assembly having two arrays of driving channels aligned with a single orifice array in which each orifice connects through a fluid channel to a single driving channel.




2. Description of the Prior Art




Ink jet printing systems use the ejection of tiny droplets of ink to produce an image. The devices produce highly reproducible and controllable droplets. Most commercially available ink jet printing systems may be classified as “continuous jet” or “drop-on-demand” systems. In continuous jet systems, droplets are continuously ejected from the printhead and either directed to or away from the paper or other substrate depending on the desired image to be produced. In drop-on-demand systems, droplets are ejected from the printhead in response to a specific command related to the image to be produced.




Drop-on-demand printing systems are based upon the production of droplets by thermal or electromechanically induced pressure waves. In one type of electromechanical printing system, a volumetric change in the fluid to be printed is induced by the application of a voltage pulse to a piezoelectric material which is directly or indirectly coupled to the fluid. This volumetric change causes pressure/velocity transients to occur in the fluid which are directed to produce a droplet that issues from an orifice in the printhead. According to such drop-on-demand printing systems voltage is applied only when a droplet is desired.




The use of piezoelectric materials in ink jet printers is well known. Most commonly, piezoelectric material is used in a piezoelectric transducer by which electric energy is converted into mechanical energy by applying an electric field across the material, thereby causing the piezoelectric material to deform. This ability to deform piezoelectric material has often been utilized in order to force the ejection of ink from the ink-carrying passages or channels of ink jet printers. Illustrative patents showing the use of piezoelectric materials in ink jet printers include U.S. Pat. Nos. 3,857,049, 4,584,590, 4,825,227, 4,536,097, 4,879,568, 4,887,100, 5,227,813, 5,235,352, 5,334,415, 5,345,256, 5,365,645, 5,373,314, 5,400,064, 5,402,162, 5,406,319, 5,414,916, 5,426,455, 5,430,470, 5,433,809, 5,435,060, 5,436,648 and 5,444,467.




In a representative configuration of a piezoelectrically actuated ink jet printhead, the ink jet printhead has, within its body portion, a single internal array of horizontally spaced, parallel ink receiving channels. The internal channels are covered at their front ends by a plate member through which a spaced series of small ink discharge orifices are formed. Each channel opens outwardly through a different one of the spaced orifices.




A spaced series of internal piezoelectric wall portions of the printhead body (typically formed from a piezoceramic material such as lead zirconate titanate “PZT”) separate and laterally bound the channels along their lengths. To eject an ink droplet through a selected one of the discharge orifices, the two printhead sidewall portions that laterally bound the channel associated with the selected orifice are piezoelectrically deflected out of and then into the channel and then returned to their normal undeflected positions. The inward driven deflection of the opposite channel wall portions increases the pressure of the ink within the channel sufficiently to force a small quantity of ink, in droplet form, outwardly through the discharge orifice.




It can readily be seen that it would be highly desirable to provide an ink jet printhead, of the general type described above, in which the discharge orifice density (i.e., the number of ink discharge orifices per inch) is doubled without correspondingly doubling the size the printhead or the total number of components needed to fabricate the printhead. It is accordingly an object of the present invention to provide such an ink jet printhead.




SUMMARY OF THE INVENTION




The present invention is directed to a high discharge orifice density ink jet printhead having a plate member with a single orifice array. Preferably, the orifices are oriented in a single line and centered on the plate member. Each orifice in the plate member connects through a fluid channel to a single driving channel in the ink jet printhead.




In a preferred embodiment of the present invention, the ink jet printhead comprises a printhead body subassembly comprising a first piezoelectrically deflectable block structure having first and second opposite sides and a front end, first and second layers of a metallic material respectively disposed on the first and second block structure sides, and first and second sheets of a piezoelectrically deflectable material respectively secured to front end portions of the outer sides of the first and second metallic layers. The first block structure is preferably a unitary block structure.




The first block structure includes a first and second spaced series of elongated, parallel exterior surface grooves disposed on the first and second sides of the first block structure, respectively. The grooves laterally extend into the first and second sides of the first block structure, through the piezoelectric sheets and the associated metallic layers, and have open outer sides and front ends.




Second and third piezoelectric blocks are respectively secured to the outer sides of the first and second piezoelectric sheets, cover the outer sides of the grooves, and form with the grooves first and second series of driving channels disposed within the body of the printhead and are laterally bounded along their lengths, on opposite sides thereof, by first and second series of piezoelectrically deflectable side wall segments of the subassembly.




A cover or plate member is secured to the front end of the printhead body, over the front ends of the first and second series of driving channels, and has an array of ink discharge orifices formed therein and operatively communicated with the front ends of the first and second series of driving channels. The plate member preferably comprises a nonwetting coating on the outside surface thereof.




The rear ends of the driving channels are sealed and an ink supply is in fluid communication with the first and second series of driving channels. The segments of the metallic layers remaining after the grooves are formed therethrough are used as electrical leads through which driving signals may be transmitted to the channel side wall sections to piezoelectrically deflect selected opposing parts thereof in a manner to discharge ink from the channel which they laterally bound through the discharge orifice associated with such channel.




According to a preferred embodiment of the present invention, the first and second series of grooves, and thus the first and second series of driving channels are laterally displaced so that the number of orifices per inch in the plate member is twice the number of driving channels per inch in the printhead body.




According to another preferred embodiment of the present invention, a method is provided for forming a cover or plate member for an ink jet printhead having an array of ink discharge orifices formed therein.











BRIEF DESCRIPTION OF THE DRAWINGS




Other advantages and features of the invention will become more apparent with reference to the following detailed description of presently preferred embodiments thereof in connection with the accompanying drawings, wherein like reference numerals have been applied to like elements, in which:





FIG. 1

is a perspective view of a schematically illustrated ink jet printhead according to the present invention;





FIG. 2A

is an enlarged partial cross-sectional view of a first embodiment of the ink jet printhead of

FIG. 1

taken along line


2





2


;





FIG. 2B

is an enlarged partial cross-sectional view of a second embodiment of the ink jet printhead of

FIG. 1

taken along line


2





2


;





FIG. 2C

is an enlarged partial cross-sectional view of a third embodiment of the ink jet printhead of

FIG. 1

taken along line


2





2


;





FIG. 3

is a side elevational view of a component of the ink jet printhead of

FIG. 1

;





FIG. 4A

is a side-elevational view of a component of the ink jet printhead of

FIG. 1

;





FIG. 4B

is a cross-sectional view of the component of the ink jet printhead taken along line


4


B—


4


B of

FIG. 4A

;





FIG. 4C

is a cross-sectional view of the component of the ink jet printhead taken along line


4


C—


4


C of

FIG. 4A

;





FIG. 5

which consists of

FIGS. 5A-5F

shows the ablation sequence for forming a component of the ink jet printhead of FIG.


1


.











DESCRIPTION OF THE PREFERRED EMBODIMENT




Referring now to the drawings wherein thicknesses and other dimensions have been exaggerated in the various figures as deemed necessary for explanatory purposes and wherein like reference numbers designate the same or similar elements throughout the several views, an ink jet printhead


10


according to the present invention is shown in FIG.


1


. The ink jet printhead


10


may be used in connection with the devices disclosed and claimed in U.S. Pat. Nos. 5,227,813, 5,235,352, 5,334,415, 5,345,256, 5,365,645, 5,373,314, 5,400,064, 5,402,162, 5,406,319, 5,414,916, 5,426,455, 5,430,470, 5,433,809, 5,435,060, 5,436,648 and 5,444,467, the entire disclosures of which are hereby incorporated herein by reference. As shown in

FIG. 1

, the ink jet printhead


10


includes a body portion


12


having a top side


14


, a bottom side


16


, and a front end


18


. The body portion


12


may be formed from materials well known to those of ordinary skill in the art such as piezoceramic material including an active poled piezoelectric material, such as lead zirconate titanate (PZT), polarized in the direction indicated by the arrows


20


in

FIGS. 2A

,


2


B and


2


C.




As shown in

FIG. 2A

, thin layers


22


and


24


of a metallic material are disposed on the top side


14


and bottom side


16


, respectively, of the body portion


12


, and relatively thin sheets


26


and


28


of PZT are respectively disposed on the outer side surfaces of front portions of the metallic layers


22


and


24


. The PZT sheets


26


and


28


are poled in the direction indicated by arrows


30


and


32


in FIG.


2


A.




Also, as shown in

FIG. 2A

, top and bottom blocks


34


and


36


of PZT are disposed on the outer sides of the PZT sheets


26


and


28


, respectively. Blocks


34


and


36


are laterally aligned with body portion


12


sandwiched therebetween, have front ends


38


and


40


, respectively, which are aligned with the front end of the body portion


12


, are poled in the direction indicated by arrows


39


and


41


in

FIG. 2A

, and have rear ends


42


and


44


, respectively, that are aligned with one another and stop short of the rear end of the body portion


12


. Accordingly, as best illustrated in

FIG. 1

, a portion


12




a


of the body portion


12


extends rearwardly beyond the top and bottom blocks


34


and


36


.




As shown in

FIG. 2B

, thin layers


22


and


24


of a metallic material are disposed on the top side


14


and bottom side


16


, respectively, of the body portion


12


. A relatively thin sheet


26


of PZT having thin layers


70


,


72


of a metallic material is mounted on the outer side surface of the metallic layer


22


. A first layer of a conductive adhesive


74


, for example, an epoxy material, is provided to conductively attach the metallic layer


70


attached to the sheet of PZT


26


and the metallic layer


22


attached to the top side


14


of the body portion


12


. A relatively thin sheet


28


of PZT having thin layers


76


,


78


of a metallic material is mounted on the outer side surface of the metallic layer


24


. A second layer of a conductive adhesive


80


, for example, an epoxy material, is provided to conductively attach the metallic layer


76


attached to the sheet of PZT


28


and the metallic layer


24


attached to the bottom side


16


of the body portion


12


. In each of the embodiments shown in

FIGS. 2A and 2B

the PZT sheets


26


and


28


are poled in the direction indicated by arrows


30


and


32


.




Also, as shown in

FIG. 2A

, top and bottom blocks


34


and


36


of PZT are disposed on the outer sides of the PZT sheets


26


and


28


, respectively.




As shown in

FIG. 2B

, top block


34


of PZT having a thin layer


82


of a metallic material is mounted on the outer side surface of the metallic layer


72


. A third layer of a conductive adhesive


84


, is provided to conductively attach the metallic layer


82


attached to the top block


34


of PZT and the metallic layer


72


attached to the sheet


26


of PZT. Also, as shown in

FIG. 2B

, bottom block


36


of PZT having a thin layer


86


of a metallic material is mounted on the outer side surface of the metallic layer


78


. A fourth layer of a conductive adhesive


88


, is provided to conductively attach the metallic layer


86


attached to the bottom block


36


of PZT and the metallic layer


78


attached to the sheet


28


of PZT.




As shown in

FIG. 2C

, the body portion


12


is formed of a first body section


90


and a second body section


92


. A fifth layer of an adhesive


94


, for example, an epoxy material, is provided on the first body section


90


or the second body section


92


. The fifth layer of an adhesive


94


enables the first body section


90


to be secured to the second body section


92


.




In each of the embodiments shown in

FIGS. 2A

,


2


B and


2


C, blocks


34


and


36


are laterally aligned with body portion


12


sandwiched therebetween, have front ends


38


and


40


, respectively, which are aligned with the front end of the body portion


12


, are poled in the direction indicated by arrows


39


and


41


, and have rear ends


42


and


44


, respectively, that are aligned with one another and stop short of the rear end of the body portion


12


. Accordingly, as best illustrated in

FIG. 1

, a portion


12




a


of the body portion


12


extends rearwardly beyond the top and bottom blocks


34


and


36


.




Prior to the attachment of the top and bottom blocks


34


and


36


to the PZT sheets


26


and


28


or the metallic layers


72


and


78


, spaced series of grooves


50


and


52


are respectively formed in the top and bottom sides of the body portion


12


, through the metallic layers


22


and


24


and the PZT sheets


26


and


28


thereon, or through the metallic layers


22


and


24


, the adhesive layers


74


and


80


, through the metallic layers


70


and


76


and the PZT sheets


26


and


28


thereon, by means well known to those of ordinary skill in the art including precision dicing sawing such as disclosed in U.S. Pat. No. 5,414,916, the entire disclosure of which is hereby incorporated herein by reference. Grooves


50


and


52


are laterally displaced so that the walls of the body portion


12


and the PZT sheet


26


separating the grooves


50


are vertically aligned with the grooves


52


, and the walls of the body portion


12


and the PZT sheet


28


separating the grooves


52


are vertically aligned with the grooves


50


. Both sets of grooves


50


and


52


longitudinally extend from the front end of the body portion


12


to its rear end. After the formation of the grooves


50


and


52


, elongated segments


22




a


of the top metal layer


22


are interdigitated with the grooves


50


, and elongated segments


24




a


of the bottom metal layer


24


are interdigitated with the grooves


52


. The metal layer segments


22




a


and


24




a


are used as electrical leads through which control signals are transmitted by means of controller


29


in

FIG. 1

to cause the operative piezoelectric deflection of internal portions of the printhead body. Similar electrical connection is made to metal layer segments


22




a


and


24




a


.




After the top and bottom PZT blocks


34


and


36


are secured to the PZT sheets


26


and


28


they respectively cover the open sides of front portions of the grooves


50


and


52


to thereby form, within the printhead


10


a top series of interior driving channels


50


and a bottom series of interior driving channels


52


. The driving channels


50


and


52


are sealed at the rear portions of the top and bottom PZT blocks


34


and


36


, respectively.




Along their lengths the driving channels


50


are laterally bounded by opposing pairs of interior side walls


54


(see

FIGS. 2A

,


2


B and


2


C) each having in a vertically intermediate portion thereof a segment of the metallic layer


22


or segments of the metallic layer


22


, the adhesive layer


74


and the metallic layer


70


. In a similar manner, along their lengths the driving channels


52


are laterally bounded by opposing pairs of interior side walls


56


each having in a vertically intermediate portion thereof a segment of the metallic layer


24


or segments of the metallic layer


24


, the adhesive layer


80


and the metallic layer


76


.




A horizontally elongated orifice plate member


58


(see

FIG. 1

) is secured to the front ends


18


,


38


and


40


of the body portion


12


and the top and bottom blocks


34


and


36


, and has a single horizontally extending array A


1


of small diameter orifices


60


formed therethrough. Each of the orifices is in fluid communication with a different one of the driving channels


50


and


52


. Ink manifolds (not shown) are interiorly formed within rear end portions of the top and bottom PZT blocks


34


and


36


and are supplied with ink from a suitable source thereof (not shown) via exterior ink supply conduits


62


and


64


. The orifices


60


, preferably, are tapered and may be formed according to methods well known to those of ordinary skill in the art, such as those disclosed in U.S. Pat. No. 5,208,980, the entire disclosure of which is hereby incorporated herein by reference. As shown in

FIG. 3

, the orifices


60


disposed in the horizontally elongated orifice plate member


58


(see

FIG. 1

) are generally cylindrical. Also, each orifice


60


is in fluid communication with a fluid channel


66


(shown in dotted lines) disposed on the obverse of the plate member


58


. Each fluid channel


66


in turn is in fluid communication with one of the driving channels


50


and


52


, thereby providing fluid ejection nozzles for the ink jet printhead


10


.




The plate member


58


may be formed of any suitable material and may include one or more of the following commercially available materials: a polyimide material, polyethylene terephthalate, polybutylene terephthalate, polyesters, polyamides, cellulosic polymers, vinyl polymers, acrylic polymers, fluorinated polyethylenes, polyolefins, polyether ketones, polyoxazoles, polythiazoles, metallic films, metallized films, plates and glasses as are well known to those of ordinary skill in the art.




As shown in

FIGS. 4A and 4B

, the plate member


58


may be formed by applying a layer of adhesive


68


, for example, an epoxy material, to a block of material suitable for forming the plate member


58


.




A layer of backing material (not shown) is superposed on the adhesive layer


68


to protect the adhesive layer


68


during formation of the orifices


60


and fluid channels


66


.




The orifices


60


and fluid reservoirs


66


may be formed in the plate member


58


, adhesive


68


and backing material composite structure by removing portions of each of the backing material, adhesive


68


and plate member


58


according to any suitable technique well known to those of ordinary skill in the art such as by excimer laser ablation as disclosed in U.S. Pat. No. 5,208,980, the entire disclosure of which is incorporated herein by reference. According to the excimer laser ablation process, the laser energy is focused on the composite structure through a sequence of masks.

FIG. 4A

shows the plate member


58


and adhesive


68


structure after formation of the fluid channels


66


and orifices


60


.

FIG. 4B

shows a cross-section of the fluid channels


66


and orifices


60


extending within the plate member


58


.





FIG. 5

shows the ablation sequence for forming the orifices


60


and fluid reservoirs


66


in the plate member


58


, adhesive


68


and backing material


98


composite structure


100


shown in FIG.


5


A. First, a mask


102


having openings


104


as shown in

FIG. 5B

, is superposed on the backing material


98


of the composite structure


100


. Excimer laser energy is focused on the composite structure


100


through the openings


104


in the mask


102


to remove portions of the backing layer


98


, adhesive


68


and plate member


58


to result in the structure shown in FIG.


5


C. Next, a mask


106


having orifices


108


as shown in

FIG. 5D

, is superposed on the backing material


98


of the composite structure


100


. Excimer laser energy is focused on the composite structure


100


through the orifices


108


to remove portions of the plate member


58


to form the orifices


60


in the plate member


58


and result in the structure shown in FIG.


5


E.




To mount the plate member


58


to the respective leading edges of the body portion


12


, the thin metallic layers


22


and


24


, the PZT sheets


26


and


28


and the top and bottom blocks


34


and


36


, as well as the metallic layers


70


,


72


,


76


,


78


,


82


and


86


and the adhesive layers


74


,


80


,


84


and


88


(as appropriate) the remaining portions of the backing material layer


98


may be removed to expose the layer of adhesive


68


as shown in FIG.


5


F. The exposed portions of the layer of adhesive


68


are then aligned with and superposed on the front end


18


of the body portion


12


, the front ends of the thin metallic layers


22


and


24


, the front end of the PZT sheets


26


and


28


and the front ends


38


and


40


of the top and bottom blocks


34


and


36


, as well as the metallic layers


70


,


72


,


76


,


78


,


82


and


86


and the adhesive layers


74


,


80


,


84


and


88


(as appropriate).





FIG. 4C

shows an alternate embodiment of the plate member


58


which also includes a nonwetting coating


59


on the surface of the plate member


58


opposite the front ends


18


,


38


and


40


of the body portion


12


and the top and bottom blocks


34


and


36


. The nonwetting coating


59


may be formed of any suitable material and preferably may include commercially available modified polytetrafluoroethylene (Teflon®). Those of ordinary skill in the art will recognize that the nonwetting coating


59


may be selected from many other suitable nonwetting coating materials that are well known to those of ordinary skill in the art.




The ablation sequence discussed above with respect to

FIG. 5

may also be used to form the cover plate


58


including the nonwetting coating


59


except that the composite structure


100


also includes the nonwetting coating


59


and the ablation step shown in

FIG. 5D

involves focusing excimer laser energy on the composite structure


100


through the orifices


108


in the mask


106


to remove portions of the plate member


58


and the nonwetting coating


59


to form the orifices


60


in the plate member


58


.




During operation of the printhead


10


ink disposed within the driving channels


50


and


52


may be discharged through selected ones of the associated orifices


60


by transmitting electrical driving signals through the segments of the metallic layers


22


and


24


, as well as the segments of the metallic layers


22


and


24


, the adhesive layers


74


and


80


and the metallic layers


70


and


76


(as appropriate) to piezoelectrically deflect the interior side walls of the channels communicating with the selected orifices to cause the forward discharge of ink outwardly through the selected orifices.




For example, if it is desired to discharge ink in droplet form from an orifice


60


associated with the top channel


50




a


shown in

FIG. 2A

, appropriate electrical driving signals are transmitted through the pair of metallic lead segments


22




a


within the opposing interior side walls


54


that laterally bound the channel


50




a


. These driving signals are first used to piezoelectrically deflect the bounding pair of side walls


54


outwardly away from the selected channel


50




a


, and then reversed to piezoelectrically deflect the bounding pair of side walls


54


into the selected channel


50




a


to increase the ink pressure therein and responsively force a droplet of ink outwardly through the associated orifice


60


. In a similar manner, electrical driving signals may be transmitted through associated pairs of the bottom metallic lead segments


24




a


to force ink, in droplet form, outwardly from a selected bottom channel


52


through its associated orifice


60


.




Those of ordinary skill in the art will recognize that while the body portion


12


is shown in

FIGS. 1

,


2


A and


2


B as being formed from a unitary block of PZT material with grooves cut in the top and bottom of the block, the body portion


12


can also be formed by bonding together two blocks of PZT material each having grooves cut in one side thereof in which the grooves are misaligned such as is shown in FIG.


2


C.




Those of ordinary skill in the art will recognize that compared to a conventionally configured ink jet printhead assembly having only a single driving channel array in its main piezoelectric block portion, the ink jet printhead


10


of the present invention advantageously provides a substantially higher discharge orifice density due to the fact that two laterally misaligned channel arrays are formed on opposite sides of the main printhead body portion defined by the main piezoelectric block


13


, the metallic layers


22


and


24


, and the opposite side sheets of piezoelectric material


26


and


28


. The provision of these dual channel series in this manner substantially reduces the overall size of the printhead to create this substantially increased orifice density. The lateral displacement of the driving channels makes the printhead easier to make and use since alignment tolerances between the first and second series of driving channels


50


and


52


are reduced which consequently reduces print errors.




While the present invention has been described with reference to a presently preferred embodiment, it will be appreciated by those of ordinary skill in the art that various modifications, changes, alternatives and variations may be made therein without departing from the spirit and scope thereof as defined in the appended claims.



Claims
  • 1. An ink jet printhead comprising:a body section formed from a piezoelectric material having a first side and a second side, an actuating means disposed on said first side and second side, a first piezoelectric sheet disposed on said actuating means on said first side and a second piezoelectric sheet disposed on said actuating means on said second side wherein the first piezoelectric sheet is positioned at a top side and the second piezoelectric sheet is positioned at a bottom side of said body section; the first piezoelectric sheet of the body section comprises a series of laterally spaced generally parallel driving channels extending into said body section; the second piezoelectric sheet of said body section comprises a series of generally parallel driving channels extending into said body section, said bottom series of driving channels being laterally displaced with respect to said top series of driving channels; a plate member mounted on said body section, said plate member having a plurality of laterally spaced orifices extending therethrough; a plurality of fluid channels defined between said plate member and said body section, each fluid channel being in fluid communication with a corresponding one of said orifices and a corresponding one of said driving channels; and means for selectively generating an electric field and applying a pressure pulse to selected ones of said driving channels, whereby fluid in the fluid channel corresponding to the selected driving channel is ejected through the orifice in fluid communication with said fluid channel.
  • 2. An ink jet printhead according to claim 1, wherein said body section comprises a first and second block of piezoelectric material and said first block of piezoelectric material is adhesively bonded to said second block of piezoelectric material.
  • 3. An ink jet printhead according to claim 1, wherein each said driving channel extending into said body section on said first side is separated from an adjacent driving channel by an interior side wall;wherein each said driving channel extending into said body section on said second side is separated from an adjacent driving channel by an interior side wall; wherein each said driving channel on said first side of said body section is vertically aligned with an interior side wall on said second side of said body section; and wherein each said driving channel on said second side of said body section is vertically aligned with an interior side wall on said first side of said body section.
  • 4. An ink jet printhead according to claim 3, wherein said orifices in said cover are horizontally aligned.
  • 5. An ink jet printhead according to claim 1, wherein said cover comprises a nonwetting coating disposed on a surface of said cover opposite said body section.
US Referenced Citations (24)
Number Name Date Kind
3857049 Zoltan Dec 1974
4343013 Bader et al. Aug 1982
4536097 Nilsson Aug 1985
4584590 Fischbeck et al. Apr 1986
4825227 Fischbeck et al. Apr 1989
4879568 Bartky et al. Nov 1989
4887100 Michaelis et al. Dec 1989
5227813 Pies et al. Jul 1993
5235352 Pies et al. Aug 1993
5334415 Hayes et al. Aug 1994
5345256 Stortz Sep 1994
5365645 Walker et al. Nov 1994
5373314 Everett et al. Dec 1994
5400064 Pies et al. Mar 1995
5402162 Fusting et al. Mar 1995
5406319 Hayes et al. Apr 1995
5414916 Hayes May 1995
5426455 Williamson et al. Jun 1995
5433809 Pies et al. Jul 1995
5435060 Hayes et al. Jul 1995
5436648 Stortz et al. Jul 1995
5444467 Stortz Aug 1995
5686946 Mizutani Nov 1997
5703631 Hayes et al. Dec 1997